JP7400461B2 - サセプタ - Google Patents
サセプタ Download PDFInfo
- Publication number
- JP7400461B2 JP7400461B2 JP2019237349A JP2019237349A JP7400461B2 JP 7400461 B2 JP7400461 B2 JP 7400461B2 JP 2019237349 A JP2019237349 A JP 2019237349A JP 2019237349 A JP2019237349 A JP 2019237349A JP 7400461 B2 JP7400461 B2 JP 7400461B2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- disc
- shaped wafer
- wafer
- support portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000004381 surface treatment Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 75
- 230000015572 biosynthetic process Effects 0.000 description 13
- 238000000879 optical micrograph Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000000859 sublimation Methods 0.000 description 3
- 230000008022 sublimation Effects 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
Description
(2) 前記支持部は、前記円盤状ウエハの外周部を等間隔に支持するものであり、前記凸領域は前記外周部に沿って前記サセプタに帯状に設けられていることを特徴とする。
(3) 前記凸領域の高さが1mm~3mmの範囲内であり、前記支持部の高さが0.1mm~2mmの範囲内であることを特徴とする。
(4) 前記支持部の幅が1mm~5mmの範囲内であることを特徴とする。
図1、2を用いて本実施形態のサセプタを説明する。本実施形態におけるサセプタは、半導体等の円盤状ウエハを支持するサセプタであり、例えば、サセプタの上にSiC基板を載置し、載置されたSiC基板の上に、SiCエピタキシャル膜を成膜し、SiCエピタキシャルウエハを製造する際に用いられる。
図1及び図2に示されるような直径110mmの円盤状のサセプタを成膜装置内に設置した。サセプタのウエハ載置面には、外径100mm、内径98mmの輪環状で高さ2.5mmの凸部設けた。さらに、その凸部の上に、縦横2mm、高さ0.3mmの支持部を、サセプタの中央からの角度を120度間隔として3カ所に設けた。
外形は実施例と同じであるが、サセプタのウエハ載置面に輪環状の凸部は設けられておらず、サセプタ面に直接、実施例と同じ支持部を設けた構造のサセプタを用いた。他の条件は実施例と同じにしてエピタキシャル成長によるエピタキシャル膜の成膜を行い、成膜後、SiCウエハの裏面を確認したところ、支持部との接触部における昇華量は10μmであった。図5にSiCウエハの裏面の接触部の光学顕微鏡写真を示す。
2 円盤状ウエハ
3 支持部
4 凸領域
Claims (4)
- 円盤状ウエハの表面処理に用いられるサセプタであって、
前記サセプタは前記円盤状ウエハの裏面に接触してこれを支持する少なくとも3つの支持部を有し、
前記支持部は前記サセプタの凸領域に設けられたものであり、
前記凸領域の中心軸と前記支持部の中心軸とを含む面における、前記支持部のある側の前記凸領域の断面は、前記支持部の中心軸に対して左右対称であり、
前記凸領域の面積に対する前記支持部のそれぞれの面積の合計の比率が、前記円盤状ウエハに平行な平面視で、10%以下であることを特徴とするサセプタ。 - 前記支持部は、前記円盤状ウエハの外周部を等間隔に支持するものであり、
前記凸領域は前記外周部に沿って前記サセプタに帯状に設けられていることを特徴とする請求項1に記載のサセプタ。 - 前記凸領域の高さが1mm~3mmの範囲内であり、前記支持部の高さが0.1mm~2mmの範囲内であることを特徴とする請求項1または2に記載のサセプタ。
- 前記支持部の幅が1mm~5mmの範囲内であることを特徴とする請求項1~3の何れか1項に記載のサセプタ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019237349A JP7400461B2 (ja) | 2019-12-26 | 2019-12-26 | サセプタ |
US17/110,637 US20210202294A1 (en) | 2019-12-26 | 2020-12-03 | Susceptor |
CN202011484053.7A CN113053799B (zh) | 2019-12-26 | 2020-12-16 | 基座 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019237349A JP7400461B2 (ja) | 2019-12-26 | 2019-12-26 | サセプタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021106230A JP2021106230A (ja) | 2021-07-26 |
JP7400461B2 true JP7400461B2 (ja) | 2023-12-19 |
Family
ID=76507949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019237349A Active JP7400461B2 (ja) | 2019-12-26 | 2019-12-26 | サセプタ |
Country Status (2)
Country | Link |
---|---|
US (1) | US20210202294A1 (ja) |
JP (1) | JP7400461B2 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001522142A (ja) | 1997-11-03 | 2001-11-13 | エーエスエム アメリカ インコーポレイテッド | 改良された低質量ウェハ支持システム |
JP2004235235A (ja) | 2003-01-28 | 2004-08-19 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
JP2010153467A (ja) | 2008-12-24 | 2010-07-08 | Hitachi Kokusai Electric Inc | 基板処理装置および半導体装置の製造方法 |
JP2017076652A (ja) | 2015-10-13 | 2017-04-20 | 大陽日酸株式会社 | 基板載置台及び気相成長装置 |
CN112331609A (zh) | 2020-10-26 | 2021-02-05 | 北京北方华创微电子装备有限公司 | 半导体工艺设备中的加热基座及半导体工艺设备 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7646581B2 (en) * | 2006-01-31 | 2010-01-12 | Sumitomo Osaka Cement Co., Ltd. | Electrostatic chuck |
-
2019
- 2019-12-26 JP JP2019237349A patent/JP7400461B2/ja active Active
-
2020
- 2020-12-03 US US17/110,637 patent/US20210202294A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001522142A (ja) | 1997-11-03 | 2001-11-13 | エーエスエム アメリカ インコーポレイテッド | 改良された低質量ウェハ支持システム |
JP2004235235A (ja) | 2003-01-28 | 2004-08-19 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
JP2010153467A (ja) | 2008-12-24 | 2010-07-08 | Hitachi Kokusai Electric Inc | 基板処理装置および半導体装置の製造方法 |
JP2017076652A (ja) | 2015-10-13 | 2017-04-20 | 大陽日酸株式会社 | 基板載置台及び気相成長装置 |
CN112331609A (zh) | 2020-10-26 | 2021-02-05 | 北京北方华创微电子装备有限公司 | 半导体工艺设备中的加热基座及半导体工艺设备 |
Also Published As
Publication number | Publication date |
---|---|
CN113053799A (zh) | 2021-06-29 |
JP2021106230A (ja) | 2021-07-26 |
US20210202294A1 (en) | 2021-07-01 |
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