JP7391792B2 - テンプレート、テンプレートの製造方法および半導体装置の製造方法 - Google Patents
テンプレート、テンプレートの製造方法および半導体装置の製造方法 Download PDFInfo
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- JP7391792B2 JP7391792B2 JP2020136343A JP2020136343A JP7391792B2 JP 7391792 B2 JP7391792 B2 JP 7391792B2 JP 2020136343 A JP2020136343 A JP 2020136343A JP 2020136343 A JP2020136343 A JP 2020136343A JP 7391792 B2 JP7391792 B2 JP 7391792B2
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- Prior art keywords
- film
- template
- metal film
- silicon
- manufacturing
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000004065 semiconductor Substances 0.000 title claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 61
- 239000002184 metal Substances 0.000 claims description 61
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 32
- 229910052710 silicon Inorganic materials 0.000 claims description 32
- 239000010703 silicon Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 16
- 239000012535 impurity Substances 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052785 arsenic Inorganic materials 0.000 claims description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 239000011574 phosphorus Substances 0.000 claims description 2
- 229910052723 transition metal Inorganic materials 0.000 claims description 2
- 150000003624 transition metals Chemical class 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 13
- 238000010894 electron beam technology Methods 0.000 description 12
- 230000001681 protective effect Effects 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 238000001127 nanoimprint lithography Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Description
Claims (12)
- 主面を有する基材と、
前記主面の上に設けられ、第1の面を有するメサ構造と、
凹凸パターンを有し、前記基材と異なる材料を含み、前記メサ構造の前記第1の面の上に設けられたシリコン膜と、
を備えたテンプレート。 - 前記シリコン膜は単結晶または多結晶のシリコンを含む請求項1に記載のテンプレート。
- 前記シリコン膜は、不純物を含む請求項1に記載のテンプレート。
- 前記不純物の濃度は1.0×1019atoms/cm3以上である請求項3に記載のテンプレート。
- 前記不純物は、ボロン、ヒ素、リン、窒素のうち1つを少なくとも含む請求項3に記載のテンプレート。
- 前記凹凸パターンの凹部の一部の底面に、金属膜をさらに有する請求項1に記載のテンプレート。
- 前記金属膜の上に、窒化物または酸化物を含む膜を備える請求項6に記載のテンプレート。
- 前記金属膜は、遷移金属を少なくとも1つ含む請求項6に記載のテンプレート。
- 主面を有する基材と、前記主面の上に設けられ、第1の面を有するメサ構造とを有する材料テンプレートの前記第1の面に、前記基材と異なる材料を含むシリコン膜を形成し、
前記シリコン膜の上に金属膜を形成し、
前記金属膜をパターニングし、
前記金属膜をマスクに前記シリコン膜の上にシリコンを形成するテンプレートの製造方法。 - 前記シリコンの形成はエピタキシャル成長によって行われる請求項9に記載のテンプレートの製造方法。
- 前記金属膜の上に、窒化物または酸化物を含む膜を備える請求項9に記載のテンプレートの製造方法。
- 半導体基板に光で硬化する第1の材料膜を塗布する工程と、
凹凸パターンを有する請求項1から5に記載のテンプレートの前記凹凸パターンを前記第1の材料膜に接触させる工程と、
前記第1の材料膜を硬化させる工程と、
前記第1の材料膜から前記テンプレートを剥離させる工程と、
を備えることを特徴とする半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020136343A JP7391792B2 (ja) | 2020-08-12 | 2020-08-12 | テンプレート、テンプレートの製造方法および半導体装置の製造方法 |
US17/399,854 US20220050392A1 (en) | 2020-08-12 | 2021-08-11 | Template, method for fabricating template, and method for fabricating semiconductor device |
Applications Claiming Priority (1)
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---|---|---|---|
JP2020136343A JP7391792B2 (ja) | 2020-08-12 | 2020-08-12 | テンプレート、テンプレートの製造方法および半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022032501A JP2022032501A (ja) | 2022-02-25 |
JP7391792B2 true JP7391792B2 (ja) | 2023-12-05 |
Family
ID=80222846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020136343A Active JP7391792B2 (ja) | 2020-08-12 | 2020-08-12 | テンプレート、テンプレートの製造方法および半導体装置の製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20220050392A1 (ja) |
JP (1) | JP7391792B2 (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007273665A (ja) | 2006-03-31 | 2007-10-18 | Dainippon Printing Co Ltd | モールド及びモールドの作製方法 |
JP2007320246A (ja) | 2006-06-02 | 2007-12-13 | Dainippon Printing Co Ltd | モールド及びモールドの作製方法 |
JP2013168604A (ja) | 2012-02-17 | 2013-08-29 | Fujifilm Corp | ナノインプリント用モールドの製造方法 |
JP2015146412A (ja) | 2014-02-04 | 2015-08-13 | 株式会社東芝 | インプリント用テンプレート及びその製造方法 |
JP2020017591A (ja) | 2018-07-24 | 2020-01-30 | 大日本印刷株式会社 | インプリントモールド用基板、マスターモールド及びそれらを用いたインプリントモールドの製造方法、並びにマスターモールドの製造方法 |
JP2020035924A (ja) | 2018-08-30 | 2020-03-05 | キオクシア株式会社 | 原版 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020142170A1 (en) * | 1999-07-28 | 2002-10-03 | Sumitomo Metal Industries, Ltd. | Silicon single crystal, silicon wafer, and epitaxial wafer |
JP5504054B2 (ja) * | 2010-05-27 | 2014-05-28 | 株式会社東芝 | インプリントマスク、その製造方法、及び半導体装置の製造方法 |
TWI484536B (zh) * | 2011-06-30 | 2015-05-11 | Toshiba Kk | 模板基板及其製造方法 |
-
2020
- 2020-08-12 JP JP2020136343A patent/JP7391792B2/ja active Active
-
2021
- 2021-08-11 US US17/399,854 patent/US20220050392A1/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007273665A (ja) | 2006-03-31 | 2007-10-18 | Dainippon Printing Co Ltd | モールド及びモールドの作製方法 |
JP2007320246A (ja) | 2006-06-02 | 2007-12-13 | Dainippon Printing Co Ltd | モールド及びモールドの作製方法 |
JP2013168604A (ja) | 2012-02-17 | 2013-08-29 | Fujifilm Corp | ナノインプリント用モールドの製造方法 |
JP2015146412A (ja) | 2014-02-04 | 2015-08-13 | 株式会社東芝 | インプリント用テンプレート及びその製造方法 |
JP2020017591A (ja) | 2018-07-24 | 2020-01-30 | 大日本印刷株式会社 | インプリントモールド用基板、マスターモールド及びそれらを用いたインプリントモールドの製造方法、並びにマスターモールドの製造方法 |
JP2020035924A (ja) | 2018-08-30 | 2020-03-05 | キオクシア株式会社 | 原版 |
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JP2022032501A (ja) | 2022-02-25 |
US20220050392A1 (en) | 2022-02-17 |
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