JP7373391B2 - シンチレータ、計測装置、質量分析装置および電子顕微鏡 - Google Patents

シンチレータ、計測装置、質量分析装置および電子顕微鏡 Download PDF

Info

Publication number
JP7373391B2
JP7373391B2 JP2019233378A JP2019233378A JP7373391B2 JP 7373391 B2 JP7373391 B2 JP 7373391B2 JP 2019233378 A JP2019233378 A JP 2019233378A JP 2019233378 A JP2019233378 A JP 2019233378A JP 7373391 B2 JP7373391 B2 JP 7373391B2
Authority
JP
Japan
Prior art keywords
scintillator
quantum well
layer
well structure
light emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019233378A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021103612A (ja
JP2021103612A5 (https=
Inventor
伸 今村
敏明 楠
恵理 高橋
好文 關口
隆之 神田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Priority to JP2019233378A priority Critical patent/JP7373391B2/ja
Priority to CN202080085111.0A priority patent/CN114787959B/zh
Priority to PCT/JP2020/043186 priority patent/WO2021131436A1/ja
Priority to US17/787,617 priority patent/US12072454B2/en
Priority to EP20905041.8A priority patent/EP4053245B1/en
Publication of JP2021103612A publication Critical patent/JP2021103612A/ja
Publication of JP2021103612A5 publication Critical patent/JP2021103612A5/ja
Application granted granted Critical
Publication of JP7373391B2 publication Critical patent/JP7373391B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent materials, e.g. electroluminescent or chemiluminescent
    • C09K11/08—Luminescent materials, e.g. electroluminescent or chemiluminescent containing inorganic luminescent materials
    • C09K11/62—Luminescent materials, e.g. electroluminescent or chemiluminescent containing inorganic luminescent materials containing gallium, indium or thallium
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/1606—Measuring radiation intensity with other specified detectors not provided for in the other subgroups of G01T1/16
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Luminescent Compositions (AREA)
  • Electron Tubes For Measurement (AREA)
JP2019233378A 2019-12-24 2019-12-24 シンチレータ、計測装置、質量分析装置および電子顕微鏡 Active JP7373391B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2019233378A JP7373391B2 (ja) 2019-12-24 2019-12-24 シンチレータ、計測装置、質量分析装置および電子顕微鏡
CN202080085111.0A CN114787959B (zh) 2019-12-24 2020-11-19 闪烁器、测量装置、质量分析装置以及电子显微镜
PCT/JP2020/043186 WO2021131436A1 (ja) 2019-12-24 2020-11-19 シンチレータ、計測装置、質量分析装置および電子顕微鏡
US17/787,617 US12072454B2 (en) 2019-12-24 2020-11-19 Scintillator, measuring device, mass spectrometer, and electron microscope
EP20905041.8A EP4053245B1 (en) 2019-12-24 2020-11-19 SCINTILLATOR, MEASURING DEVICE, MASS SPECTROMETER AND ELECTRON MICROSCOPE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019233378A JP7373391B2 (ja) 2019-12-24 2019-12-24 シンチレータ、計測装置、質量分析装置および電子顕微鏡

Publications (3)

Publication Number Publication Date
JP2021103612A JP2021103612A (ja) 2021-07-15
JP2021103612A5 JP2021103612A5 (https=) 2022-08-09
JP7373391B2 true JP7373391B2 (ja) 2023-11-02

Family

ID=76575377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019233378A Active JP7373391B2 (ja) 2019-12-24 2019-12-24 シンチレータ、計測装置、質量分析装置および電子顕微鏡

Country Status (5)

Country Link
US (1) US12072454B2 (https=)
EP (1) EP4053245B1 (https=)
JP (1) JP7373391B2 (https=)
CN (1) CN114787959B (https=)
WO (1) WO2021131436A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7218437B2 (ja) * 2019-07-10 2023-02-06 株式会社日立ハイテク 荷電粒子線装置用シンチレータおよび荷電粒子線装置
JP7557589B1 (ja) * 2023-09-13 2024-09-27 浜松ホトニクス株式会社 発光体、荷電粒子検出器、電子顕微鏡及び質量分析装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005298603A (ja) 2004-04-08 2005-10-27 Hamamatsu Photonics Kk 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
JP2017135039A (ja) 2016-01-29 2017-08-03 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置
JP2017157732A (ja) 2016-03-03 2017-09-07 日本碍子株式会社 単位発光体、発光体、発光体の製造方法、および、発光体粉末の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100550158B1 (ko) * 2000-09-21 2006-02-08 샤프 가부시키가이샤 질화물 반도체 발광소자 및 그것을 포함한 광학장치
WO2006043656A1 (ja) * 2004-10-21 2006-04-27 Hoya Corporation 微粒子堆積装置及び微粒子堆積方法
JP5844545B2 (ja) * 2010-05-31 2016-01-20 富士フイルム株式会社 放射線撮影装置
US9929310B2 (en) * 2013-03-14 2018-03-27 Applied Materials, Inc. Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices
WO2016048000A2 (ko) * 2014-09-22 2016-03-31 전남대학교산학협력단 광 발생 장치
WO2017175051A1 (en) * 2016-04-04 2017-10-12 Glo Ab Through backplane laser irradiation for die transfer
JP6666626B2 (ja) * 2017-01-31 2020-03-18 株式会社日立ハイテク 荷電粒子検出器及び荷電粒子線装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005298603A (ja) 2004-04-08 2005-10-27 Hamamatsu Photonics Kk 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
JP2017135039A (ja) 2016-01-29 2017-08-03 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置
JP2017157732A (ja) 2016-03-03 2017-09-07 日本碍子株式会社 単位発光体、発光体、発光体の製造方法、および、発光体粉末の製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Masataka HIGASHIWAKI et al.，"Crystal Growth and Device Application of Gallium Oxide (Ga2O3)"，Hyomen Kagaku，2014年，Vol. 35, No. 2，p.102-107，DOI: 10.1380/jsssj.35.102

Also Published As

Publication number Publication date
CN114787959B (zh) 2025-09-02
JP2021103612A (ja) 2021-07-15
US12072454B2 (en) 2024-08-27
WO2021131436A1 (ja) 2021-07-01
CN114787959A (zh) 2022-07-22
US20220413169A1 (en) 2022-12-29
EP4053245A1 (en) 2022-09-07
EP4053245B1 (en) 2025-12-31
EP4053245A4 (en) 2023-11-15

Similar Documents

Publication Publication Date Title
JP4365255B2 (ja) 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
IL284458A (en) Source of electrons
US11062892B2 (en) Charged particle detector including a light-emitting section having lamination structure, charged particle beam device, and mass spectrometer
JP7373391B2 (ja) シンチレータ、計測装置、質量分析装置および電子顕微鏡
JP6666626B2 (ja) 荷電粒子検出器及び荷電粒子線装置
JP7218437B2 (ja) 荷電粒子線装置用シンチレータおよび荷電粒子線装置
JP2015230195A (ja) 荷電粒子線装置
JP5739763B2 (ja) 光導電素子及び撮像デバイス
JP7326613B2 (ja) シンチレータ及び荷電粒子線装置
JP5111276B2 (ja) 撮像デバイス
JP5503387B2 (ja) 光導電素子及び撮像デバイス

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220801

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220801

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230530

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230726

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231003

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20231023

R150 Certificate of patent or registration of utility model

Ref document number: 7373391

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150