JP7357191B2 - 製造装置における特性の低干渉でのリアルタイム感知 - Google Patents
製造装置における特性の低干渉でのリアルタイム感知 Download PDFInfo
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- G01N21/84—Systems specially adapted for particular applications
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
- H01J2237/3341—Reactive etching
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Description
本出願は、「REDUCED INTERFERENCE,REAL-TIME SENSING OF PROPERTIES IN MANUFACTURING EQUIPMENT」と題する2018年6月18日に出願された米国仮特許出願第62/686,104号明細書の利益を主張するものであり、この米国仮特許出願はその全体が参照により本明細書に組み込まれる。
f0=f×(1+θα(T-T0)) (1)
τ=L/V=L/(λ f) (2)
ここで、L=L0×(1+α1 (1)(T-T0))、及びλ=λ0×(1+α1 (1)(T-T0))であり、α1 (1)は、一次熱膨張係数である。ΔL/L=Δλ/λ≒α1 (1)(T-T0)と仮定すると、以下を実証できる。
Δτ/τ=-(Δf/f) (4)
Claims (18)
- 製造プロセス中に特性をリアルタイム感知するための装置であって、
処理チャンバ内に取り付けられるように構成されたセンサであって、前記処理チャンバは、処理環境を少なくとも部分的に取り囲み包囲する構造を有し、前記センサは、前記処理チャンバの特定の領域に割り当てられて、前記処理チャンバの前記割り当てられた領域の物理的又は化学的特性を監視する、センサと、
高周波問い合わせシーケンスを使用して、無線で前記センサに問い合わせるように構成された構成要素を有するリーダーシステムであって、前記高周波問い合わせシーケンスは、(1)指定された周波数帯域に関連付けられた要求パルス信号を前記センサに送信すること、及び(2)前記処理チャンバの前記割り当てられた領域における前記物理的又は化学的特性の変動のリアルタイム監視を提供する前記センサから一意に識別可能なセンサ応答信号を受信することを含む、リーダーシステムと、を備え、
前記処理チャンバの前記構造により干渉応答信号が生成され、前記干渉応答信号は、前記要求パルス信号の前記送信の直後に前記リーダーシステムによって受信され、
前記センサは、前記構造からの前記干渉応答信号の持続時間を超える遅延時間だけ、前記センサ応答信号を遅延させるように設計されている、装置。 - 当該装置は、半導体製造システム、又は非半導体製造システムに使用される、請求項1に記載の装置。
- 当該装置は、半導体デバイス、フォトニックデバイス、発光デバイス、光吸収デバイス、又は光検出デバイスの製造を容易にする、請求項1に記載の装置。
- 当該装置は、金属、半金属、非金属、ポリマー、セラミック、又はガラス若しくはガラス状のワークピースの製造を容易にする、請求項1に記載の装置。
- 前記遅延時間は0.5ミリ秒(m秒)を超える、請求項1に記載の装置。
- 前記遅延時間は1m秒を超える、請求項1に記載の装置。
- 前記遅延時間は1m秒~1.5m秒の範囲にある、請求項1に記載の装置。
- 前記処理環境内に配置されるワークピースを更に備え、第1の複数のセンサが前記ワークピース上に取り付けられている、請求項1に記載の装置。
- グループ化され、複数の、一意に定義された周波数帯域に割り当てられた複数のセンサを更に備え、前記複数のセンサのグループが、指定された前記周波数帯域に割り当てられた第1の複数のセンサを含む、請求項1に記載の装置。
- 各センサは、表面弾性波(SAW)遅延線デバイスを含み、基板が、LiNbO3、LiTaO3、又はLa3Ga5SiO14を含む、請求項1に記載の装置。
- 前記物理的又は化学的特性は、温度又は温度差を含む、請求項1に記載の装置。
- 各センサは、表面波を励起してその後に検出するための櫛形トランスデューサと、表面波を回折させ前記櫛形トランスデューサに向けて反射させて戻す1つ以上の反射器グループとを含み、前記1つ以上の反射器グループは、波伝搬経路に沿って前記櫛形トランスデューサから所定の距離だけ離隔されている、請求項1に記載の装置。
- 前記櫛形トランスデューサは、各センサと前記リーダーシステムとの間で信号を送信及び受信するための少なくとも1つのアンテナに結合されている、請求項12に記載の装置。
- 各センサの前記1つ以上の反射器は、2つ以上の別個のエコーインパルス応答の列を呈する時間領域において、インパルス応答信号を生成するように構成されている、請求項12に記載の装置。
- 前記1つ以上の反射器グループは、前記櫛形トランスデューサと同じ側に置かれている、請求項12に記載の装置。
- 第1の周波数帯域のスペクトル範囲が100MHz未満である、請求項1に記載の装置。
- 前記処理環境は気相プラズマ環境を含む、請求項1に記載の装置。
- 当該装置は、エッチングシステム、堆積システム、めっきシステム、洗浄システム、アッシングシステム、熱処理システム、リソグラフィコーティングシステム、又は研磨システムに使用される、請求項1に記載の装置。
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US201862686104P | 2018-06-18 | 2018-06-18 | |
US62/686,104 | 2018-06-18 | ||
PCT/US2019/035193 WO2019245729A1 (en) | 2018-06-18 | 2019-06-03 | Reduced interference, real-time sensing of properties in manufacturing equipment |
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JP7357191B2 true JP7357191B2 (ja) | 2023-10-06 |
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Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110998820B (zh) | 2017-08-17 | 2023-10-20 | 东京毅力科创株式会社 | 用于实时感测工业制造设备中的属性的装置和方法 |
US11476145B2 (en) | 2018-11-20 | 2022-10-18 | Applied Materials, Inc. | Automatic ESC bias compensation when using pulsed DC bias |
CN113169026B (zh) | 2019-01-22 | 2024-04-26 | 应用材料公司 | 用于控制脉冲电压波形的反馈回路 |
US11508554B2 (en) | 2019-01-24 | 2022-11-22 | Applied Materials, Inc. | High voltage filter assembly |
CN114424319B (zh) | 2019-08-19 | 2024-04-30 | 应用材料公司 | 用于在多个频率下控制rf参数的方法及装置 |
US11848176B2 (en) | 2020-07-31 | 2023-12-19 | Applied Materials, Inc. | Plasma processing using pulsed-voltage and radio-frequency power |
US11920994B2 (en) | 2020-10-12 | 2024-03-05 | Applied Materials, Inc. | Surface acoustic wave sensor assembly |
US11901875B2 (en) | 2020-10-12 | 2024-02-13 | Applied Materials, Inc. | Surface acoustic wave sensor assembly |
US11901157B2 (en) | 2020-11-16 | 2024-02-13 | Applied Materials, Inc. | Apparatus and methods for controlling ion energy distribution |
US11798790B2 (en) | 2020-11-16 | 2023-10-24 | Applied Materials, Inc. | Apparatus and methods for controlling ion energy distribution |
US11495470B1 (en) | 2021-04-16 | 2022-11-08 | Applied Materials, Inc. | Method of enhancing etching selectivity using a pulsed plasma |
US11791138B2 (en) | 2021-05-12 | 2023-10-17 | Applied Materials, Inc. | Automatic electrostatic chuck bias compensation during plasma processing |
US11948780B2 (en) | 2021-05-12 | 2024-04-02 | Applied Materials, Inc. | Automatic electrostatic chuck bias compensation during plasma processing |
US11967483B2 (en) | 2021-06-02 | 2024-04-23 | Applied Materials, Inc. | Plasma excitation with ion energy control |
US11984306B2 (en) | 2021-06-09 | 2024-05-14 | Applied Materials, Inc. | Plasma chamber and chamber component cleaning methods |
US11810760B2 (en) | 2021-06-16 | 2023-11-07 | Applied Materials, Inc. | Apparatus and method of ion current compensation |
US11569066B2 (en) | 2021-06-23 | 2023-01-31 | Applied Materials, Inc. | Pulsed voltage source for plasma processing applications |
US20230044262A1 (en) * | 2021-08-05 | 2023-02-09 | Applied Materials, Inc. | Microwave resonator array for plasma diagnostics |
US11476090B1 (en) | 2021-08-24 | 2022-10-18 | Applied Materials, Inc. | Voltage pulse time-domain multiplexing |
US11694876B2 (en) | 2021-12-08 | 2023-07-04 | Applied Materials, Inc. | Apparatus and method for delivering a plurality of waveform signals during plasma processing |
US11972924B2 (en) | 2022-06-08 | 2024-04-30 | Applied Materials, Inc. | Pulsed voltage source for plasma processing applications |
US20240112885A1 (en) * | 2022-09-30 | 2024-04-04 | Applied Materials, Inc. | Wireless data communication in plasma process chamber through vi sensor and rf generator |
CN115799061B (zh) * | 2023-01-09 | 2023-09-05 | 浙江大学杭州国际科创中心 | SiC晶圆切割片加工方法及SiC晶圆切割片加工装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050011611A1 (en) | 2002-07-12 | 2005-01-20 | Mahoney Leonard J. | Wafer probe for measuring plasma and surface characteristics in plasma processing environments |
US20050151544A1 (en) | 2003-08-14 | 2005-07-14 | Advanced Energy Industries, Inc. | Sensor array for measuring plasma characteristics in plasma processing environments |
US20070170170A1 (en) | 2005-12-22 | 2007-07-26 | Noboyuki Sata | Temperature measuring device, thermal processor having temperature measurement function and temperature measurement method |
US20120091855A1 (en) | 2010-10-13 | 2012-04-19 | Rf Micro Devices, Inc. | Atomic layer deposition encapsulation for acoustic wave devices |
US20140001918A1 (en) | 2012-06-27 | 2014-01-02 | Samsung Electronics Co., Ltd. | Saw array sensor |
US20160376695A1 (en) | 2015-06-25 | 2016-12-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for monitoring usage of a physical vapor deposition (pvd) target with an ultrasonic transducer |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5346256B2 (ja) | 1973-09-18 | 1978-12-12 | ||
JPS5139110A (ja) | 1974-09-30 | 1976-04-01 | Sankyo Seiki Seisakusho Kk | Kaadoriidaa |
US4484098A (en) | 1983-12-19 | 1984-11-20 | United Technologies Corporation | Environmentally stable lithium niobate acoustic wave devices |
US6328802B1 (en) * | 1999-09-14 | 2001-12-11 | Lsi Logic Corporation | Method and apparatus for determining temperature of a semiconductor wafer during fabrication thereof |
DE10059673A1 (de) * | 2000-12-01 | 2002-06-06 | Bosch Gmbh Robert | Impuls-Radarverfahren sowie Impuls-Radarsensor und System |
US20040020599A1 (en) | 2000-12-27 | 2004-02-05 | Sumi Tanaka | Treating device |
JP3708031B2 (ja) | 2001-06-29 | 2005-10-19 | 株式会社日立製作所 | プラズマ処理装置および処理方法 |
US6889568B2 (en) * | 2002-01-24 | 2005-05-10 | Sensarray Corporation | Process condition sensing wafer and data analysis system |
TW200405395A (en) | 2002-05-29 | 2004-04-01 | Tokyo Electron Ltd | Method and apparatus for monitoring film deposition in a process chamber |
US8960099B2 (en) * | 2002-07-22 | 2015-02-24 | Brooks Automation, Inc | Substrate processing apparatus |
US20040127030A1 (en) * | 2002-12-31 | 2004-07-01 | Tokyo Electron Limited | Method and apparatus for monitoring a material processing system |
US6898558B2 (en) | 2002-12-31 | 2005-05-24 | Tokyo Electron Limited | Method and apparatus for monitoring a material processing system |
JP2005156314A (ja) | 2003-11-25 | 2005-06-16 | Nippon Chemicon Corp | 半導体ウェハーの温度測定方法及びその装置 |
JP2007171047A (ja) | 2005-12-22 | 2007-07-05 | Tokyo Electron Ltd | ウェハ型温度センサとこれを用いた温度測定装置、温度測定機能を有する熱処理装置および温度測定方法 |
JP5034327B2 (ja) | 2006-06-07 | 2012-09-26 | 富士通セミコンダクター株式会社 | 半導体製造装置用温度測定具、半導体製造装置の温度測定方法、及び半導体製造装置 |
US7946759B2 (en) | 2007-02-16 | 2011-05-24 | Applied Materials, Inc. | Substrate temperature measurement by infrared transmission |
CN101896947B (zh) | 2007-10-10 | 2016-05-11 | 薄膜电子有限公司 | 包括印刷集成电路的无线器件及其制作和使用方法 |
US8881373B1 (en) | 2008-03-11 | 2014-11-11 | Impinj, Inc. | Assembling a radio frequency identification (RFID) tag precursor |
JP5413767B2 (ja) | 2008-03-25 | 2014-02-12 | 東京電波株式会社 | シリコンウエハ多点温度測定装置 |
JP2009244174A (ja) | 2008-03-31 | 2009-10-22 | Tokyo Electron Ltd | ウェハ型温度計、温度測定装置、熱処理装置および温度測定方法 |
JP5098045B2 (ja) | 2008-04-28 | 2012-12-12 | 東京電波株式会社 | 圧電温度センサとシリコンウエハ温度測定冶具 |
CN102197591B (zh) | 2008-10-24 | 2014-05-14 | 精工爱普生株式会社 | 表面声波谐振器、表面声波振荡器以及表面声波模块装置 |
US8860553B2 (en) | 2008-11-10 | 2014-10-14 | Cornell University | Self-powered, piezo-surface acoustic wave apparatus and method |
US8602706B2 (en) | 2009-08-17 | 2013-12-10 | Brooks Automation, Inc. | Substrate processing apparatus |
JP5346256B2 (ja) | 2009-09-02 | 2013-11-20 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
JP5461256B2 (ja) | 2010-03-17 | 2014-04-02 | 三井造船株式会社 | 半導体基板熱処理装置および半導体基板熱処理装置による温度計測方法 |
WO2013009961A1 (en) | 2011-07-12 | 2013-01-17 | University Of Houston | Design of ultra-fast suspended graphene nano-sensors suitable for large scale production |
JP5310813B2 (ja) | 2011-09-28 | 2013-10-09 | 株式会社デンソー | 表面弾性波センサを用いた無線遠隔センシングシステム |
US8907769B2 (en) * | 2011-10-16 | 2014-12-09 | Mnemonics Inc. | Maximally flat frequency coded (MFFC) passive wireless saw RFID tags and sensors |
CN102853934B (zh) | 2012-07-27 | 2015-04-15 | 上海赛赫信息科技有限公司 | 无线温度湿度传感器及系统和测量方法 |
US9222842B2 (en) | 2013-01-07 | 2015-12-29 | Kla-Tencor Corporation | High temperature sensor wafer for in-situ measurements in active plasma |
US9196516B2 (en) | 2013-03-14 | 2015-11-24 | Qualitau, Inc. | Wafer temperature measurement tool |
CN105117764B (zh) * | 2015-08-27 | 2018-03-06 | 中电科技德清华莹电子有限公司 | 一种高性能防碰撞声表面波延迟线型无线传感器系统 |
US10094788B2 (en) | 2015-12-21 | 2018-10-09 | Applied Materials, Inc. | Surface acoustic wave sensors in semiconductor processing equipment |
CN110998820B (zh) | 2017-08-17 | 2023-10-20 | 东京毅力科创株式会社 | 用于实时感测工业制造设备中的属性的装置和方法 |
CN108051111A (zh) * | 2018-01-17 | 2018-05-18 | 浙江大学昆山创新中心 | 真空镀膜腔内无线无源温度测量装置及测量方法 |
-
2019
- 2019-06-03 WO PCT/US2019/035193 patent/WO2019245729A1/en active Application Filing
- 2019-06-03 CN CN201980029808.3A patent/CN112088303A/zh active Pending
- 2019-06-03 JP JP2020567252A patent/JP7357191B2/ja active Active
- 2019-06-03 US US16/429,800 patent/US11646210B2/en active Active
- 2019-06-03 KR KR1020207034606A patent/KR20210011388A/ko unknown
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050011611A1 (en) | 2002-07-12 | 2005-01-20 | Mahoney Leonard J. | Wafer probe for measuring plasma and surface characteristics in plasma processing environments |
US20050151544A1 (en) | 2003-08-14 | 2005-07-14 | Advanced Energy Industries, Inc. | Sensor array for measuring plasma characteristics in plasma processing environments |
US20070170170A1 (en) | 2005-12-22 | 2007-07-26 | Noboyuki Sata | Temperature measuring device, thermal processor having temperature measurement function and temperature measurement method |
US20120091855A1 (en) | 2010-10-13 | 2012-04-19 | Rf Micro Devices, Inc. | Atomic layer deposition encapsulation for acoustic wave devices |
US20140001918A1 (en) | 2012-06-27 | 2014-01-02 | Samsung Electronics Co., Ltd. | Saw array sensor |
US20160376695A1 (en) | 2015-06-25 | 2016-12-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for monitoring usage of a physical vapor deposition (pvd) target with an ultrasonic transducer |
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TW202013495A (zh) | 2020-04-01 |
US11646210B2 (en) | 2023-05-09 |
US20190385875A1 (en) | 2019-12-19 |
JP2021527946A (ja) | 2021-10-14 |
KR20210011388A (ko) | 2021-02-01 |
TWI809119B (zh) | 2023-07-21 |
WO2019245729A1 (en) | 2019-12-26 |
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