JP7345663B2 - めっき装置およびめっき方法 - Google Patents
めっき装置およびめっき方法 Download PDFInfo
- Publication number
- JP7345663B2 JP7345663B2 JP2022536229A JP2022536229A JP7345663B2 JP 7345663 B2 JP7345663 B2 JP 7345663B2 JP 2022536229 A JP2022536229 A JP 2022536229A JP 2022536229 A JP2022536229 A JP 2022536229A JP 7345663 B2 JP7345663 B2 JP 7345663B2
- Authority
- JP
- Japan
- Prior art keywords
- plating
- plated
- nozzle
- electrode
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
- C25D17/12—Shape or form
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
- C25D17/14—Electrodes, e.g. composition, counter electrode for pad-plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/04—Electroplating with moving electrodes
- C25D5/06—Brush or pad plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/04—Tubes; Rings; Hollow bodies
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020120768 | 2020-07-14 | ||
| JP2020120768 | 2020-07-14 | ||
| PCT/JP2021/024554 WO2022014316A1 (ja) | 2020-07-14 | 2021-06-29 | めっき電極、めっき装置およびめっき方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022014316A1 JPWO2022014316A1 (enExample) | 2022-01-20 |
| JPWO2022014316A5 JPWO2022014316A5 (ja) | 2022-11-16 |
| JP7345663B2 true JP7345663B2 (ja) | 2023-09-15 |
Family
ID=79555413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022536229A Active JP7345663B2 (ja) | 2020-07-14 | 2021-06-29 | めっき装置およびめっき方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7345663B2 (enExample) |
| WO (1) | WO2022014316A1 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108315773A (zh) | 2018-01-25 | 2018-07-24 | 郑州大学 | 一种精密3d打印金属微模具的方法及装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4921220B1 (enExample) * | 1970-12-23 | 1974-05-30 | ||
| JPS506419B1 (enExample) * | 1970-12-25 | 1975-03-13 | ||
| JPS5224022U (enExample) * | 1975-08-07 | 1977-02-19 | ||
| JPS5628210Y2 (enExample) * | 1977-04-14 | 1981-07-04 | ||
| JPS57171689A (en) * | 1981-04-13 | 1982-10-22 | Tokio Osaki | Plating device |
| DE3312905C2 (de) * | 1983-04-11 | 1986-03-27 | Battelle-Institut E.V., 6000 Frankfurt | Vorrichtung zur galvanischen Innenbeschichtung von Hohlteilen |
| JPS61103475U (enExample) * | 1984-12-14 | 1986-07-01 | ||
| JPH0635680B2 (ja) * | 1988-11-04 | 1994-05-11 | 川崎製鉄株式会社 | 金属材表面の局部電解処理装置 |
| JP3291103B2 (ja) * | 1993-12-22 | 2002-06-10 | 住友特殊金属株式会社 | 連続表面処理装置 |
| CN107142505B (zh) * | 2015-04-29 | 2018-11-23 | 江苏理工学院 | 一种零件内孔修复用电刷镀装置 |
-
2021
- 2021-06-29 JP JP2022536229A patent/JP7345663B2/ja active Active
- 2021-06-29 WO PCT/JP2021/024554 patent/WO2022014316A1/ja not_active Ceased
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108315773A (zh) | 2018-01-25 | 2018-07-24 | 郑州大学 | 一种精密3d打印金属微模具的方法及装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2022014316A1 (enExample) | 2022-01-20 |
| WO2022014316A1 (ja) | 2022-01-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101077000B1 (ko) | 전기도금용 애노드 | |
| US11492717B2 (en) | Manufacturing apparatus of electrolytic copper foil | |
| Kui et al. | Electrochemical migration behavior and mechanism of PCB-ImAg and PCB-HASL under adsorbed thin liquid films | |
| US5087333A (en) | Method and apparatus for electroplating | |
| JP7345663B2 (ja) | めっき装置およびめっき方法 | |
| US20040235219A1 (en) | Plating apparatus, plating method, and method for manufacturing semiconductor device | |
| US9574283B2 (en) | Rinsing and drying for electrochemical processing | |
| US6962649B2 (en) | Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces | |
| US20050045474A1 (en) | Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof | |
| KR100695372B1 (ko) | 도금 방법 | |
| US11629427B2 (en) | Plating apparatus and plating method | |
| KR102204664B1 (ko) | 릴투릴 금속판재 및 가공품의 나노부동태 처리방법 및 그에 따라서 제조된 금속판재 및 가공품 | |
| CN117071015A (zh) | 一种正逆向脉冲电解银合金溶液、配制方法、电镀方法和银合金镀层 | |
| EP0114216B1 (en) | Method for selective electroplating | |
| TWI640652B (zh) | 由第一金屬製成且具有由第二金屬製成之外鞘層之線的製造方法 | |
| JP2019085606A (ja) | めっき装置及びめっき方法 | |
| KR100727270B1 (ko) | 인쇄 회로 기판 제작을 위한 도금 전극 구조 및 이를 구비한 전해 도금 장치 | |
| KR20210035897A (ko) | 금속의 전기 도금 또는 전착용 전극 | |
| CA2467037A1 (en) | Manufacturing method for semiconductor device | |
| JP2014218708A (ja) | 金属材料の水洗装置及び水洗方法 | |
| JP2019044233A (ja) | めっき処理装置、めっき処理方法、及びめっき対象物の保持具 | |
| JP2003321799A (ja) | 電気めっき装置 | |
| CN121161377A (zh) | 连接器工件的电镀方法及电镀设备 | |
| JP2021113342A (ja) | 表面処理装置及びNiめっきステンレススクリーン印刷用メッシュ | |
| CN117265607A (zh) | 盲孔金属件及其电镀方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220913 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220913 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230404 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20230529 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230703 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230808 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230905 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7345663 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |