JP7329905B2 - 太陽電池装置の不整合を処理する方法と、これによって形成される装置 - Google Patents
太陽電池装置の不整合を処理する方法と、これによって形成される装置 Download PDFInfo
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- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H—ELECTRICITY
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- H01L31/02—Details
- H01L31/02002—Arrangements for conducting electric current to or from the device in operations
- H01L31/02005—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier
- H01L31/02008—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules
- H01L31/02013—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules comprising output lead wires elements
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- H01L31/02—Details
- H01L31/0224—Electrodes
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Description
内部に形成された太陽電池の動作領域を有する半導体基板の表面において、少なくとも1つの不整合を検出することと、少なくとも1つの不整合の場所に基づいて堆積パターンを決定することと、堆積パターンに従って基板上に材料を選択的に堆積させることと
を含む方法。
Claims (13)
- 太陽電池装置(8)を処理する方法であって、
内部に形成された太陽電池の動作領域を有する半導体基板(10)の表面において、少なくとも1つの不整合(14、16)を検出すること(プロセス30)と、
前記少なくとも1つの不整合(14、16)の場所に基づいて堆積パターンを決定すること(プロセス32)であって、
前記太陽電池装置(8)のための初期の配線案を提供することと、
前記初期の配線案の第1の部分を実行した結果、導電線(24)が前記不整合(16)と重なると判定することと、
前記少なくとも1つの不整合(16)を回避する変更された配線案を決定することと
を含む、堆積パターンを決定することと、
前記堆積パターンに従って前記基板上に材料を選択的に堆積させること(プロセス34)と
を含み、前記材料を選択的に堆積させることは、前記不整合を回避する前記導電線(24)を堆積させることを含み、前記導電線(24)は、不整合に近接するがその上に位置しないように位置づけされる、方法。 - 前記材料を選択的に堆積させることは、
前記少なくとも1つの不整合(14、16)を回避するように構成された前記導電線(24)を選択的に堆積させることを含み、前記導電線により、前記太陽電池装置(8)上の表面配線(12)の一部が形成される、請求項1に記載の方法。 - 前記導電線(24)は、アルミニウム、金、銀、銅及びニッケルから選択された一または複数の金属を含む、請求項2に記載の方法。
- 前記材料を選択的に堆積させることは、パターン形成されたマスク(50)を選択的に堆積させることを含む、請求項1から3のいずれか一項に記載の方法。
- 前記パターン形成されたマスク(50)によって保護されていない前記基板(10)のエリア上に前記導電線(24)を堆積させることを更に含み、前記導電線は、電気めっきによって選択的に堆積される、請求項4に記載の方法。
- 前記パターン形成されたマスク(50)によって保護されていない前記基板(10)のエリア上に前記導電線(24)を堆積させることを更に含み、前記導電線(24)は、金属インク堆積プロセスによって選択的に堆積され、前記パターン形成されたマスクにより、前記導電線の寸法が制御される、請求項4に記載の方法。
- 前記パターン形成されたマスク(50)が前記少なくとも1つの不整合(14、16)をカバーする、請求項4から6のいずれか一項に記載の方法。
- 前記パターン形成されたマスク(50)の上に金属層(52)を堆積させることと、次に前記金属層をパターン形成するために、前記半導体基板(10)から前記パターン形成されたマスクを除去することを更に含む、請求項7に記載の方法。
- 前記半導体基板(10)の上にフォトレジスト層(60)を堆積させることを更に含み、前記材料を選択的に堆積させることは、パターン形成された放射線マスク(62)を前記フォトレジスト層の上に選択的に堆積させることを含む、請求項1から8のいずれか一項に記載の方法。
- 前記フォトレジスト層(60)と前記パターン形成された放射線マスク(62)とを放射線にさらすことと、フォトレジストパターン(60a、60b)を形成するために前記フォトレジスト層(60)を現像することとを更に含む、請求項9に記載の方法。
- 前記材料を選択的に堆積させることは、前記少なくとも1つの不整合(14、16)の上に絶縁層(70)を選択的に堆積させることを含む、請求項1から10のいずれか一項に記載の方法。
- 前記絶縁層(70)は、電気絶縁性ポリマー及び酸化物セラミックから選択された少なくとも1つの材料を含む、請求項11に記載の方法。
- 前記少なくとも1つの不整合(14、16)を検出することと、前記基板(10)上に前記材料を選択的に堆積させることとはいずれも、単一の装置を使用して行われる、請求項1から12のいずれか一項に記載の方法。
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JP2013084751A (ja) | 2011-10-07 | 2013-05-09 | Sharp Corp | 光起電力素子の欠陥修復方法および欠陥修復装置 |
JP2015505167A (ja) | 2011-12-21 | 2015-02-16 | サンパワー コーポレイション | ハイブリッドポリシリコンヘテロ接合裏面コンタクト電池 |
JP2016520259A (ja) | 2013-05-24 | 2016-07-11 | ザ・ボーイング・カンパニーThe Boeing Company | 反転型のウェハに結合されたソーラーセルにおけるシャント処理 |
JP2015050295A (ja) | 2013-08-30 | 2015-03-16 | 大日本印刷株式会社 | 太陽電池モジュール用の集電シートの製造方法 |
WO2017002927A1 (ja) | 2015-06-30 | 2017-01-05 | 株式会社カネカ | 太陽電池および太陽電池モジュール |
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EP3382892B1 (en) | 2022-06-15 |
US11742442B2 (en) | 2023-08-29 |
US20180286992A1 (en) | 2018-10-04 |
JP2018198307A (ja) | 2018-12-13 |
RU2762129C2 (ru) | 2021-12-15 |
CN108695407B (zh) | 2023-04-25 |
US20220140159A1 (en) | 2022-05-05 |
EP4071834A1 (en) | 2022-10-12 |
CN108695407A (zh) | 2018-10-23 |
US11233162B2 (en) | 2022-01-25 |
RU2018110629A3 (ja) | 2021-07-05 |
US20230352605A1 (en) | 2023-11-02 |
RU2018110629A (ru) | 2019-09-26 |
EP3382892A2 (en) | 2018-10-03 |
EP3382892A3 (en) | 2018-12-26 |
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