JP7318218B2 - 軟磁性粉末、圧粉磁心、磁性素子および電子機器 - Google Patents
軟磁性粉末、圧粉磁心、磁性素子および電子機器 Download PDFInfo
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- JP7318218B2 JP7318218B2 JP2019014648A JP2019014648A JP7318218B2 JP 7318218 B2 JP7318218 B2 JP 7318218B2 JP 2019014648 A JP2019014648 A JP 2019014648A JP 2019014648 A JP2019014648 A JP 2019014648A JP 7318218 B2 JP7318218 B2 JP 7318218B2
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- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
- B22F2009/0824—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid with a specific atomising fluid
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Description
FexCua(Nb1-zZnz)b(Si1-yBy)100-x-a-b
[ただし、a、bおよびxは、それぞれ単位が原子%である数であって、
0.3≦a≦2.0、
2.0≦b≦4.0、および、
73.0≦x≦79.5、
を満たす数である。
また、yは、f(x)≦y<0.99を満たす数であって、f(x)=(4×10-34)x17.56である。
さらに、zは、0.33≦z≦1.0を満たす数である。]
で表される組成を有し、
粒径1.0nm以上30.0nm以下の結晶組織を30体積%以上含有する。
実施形態に係る軟磁性粉末は、軟磁性を示す金属粉末である。かかる軟磁性粉末は、軟磁性を利用したいかなる用途にも適用可能であるが、例えば、結合材を介して粒子同士が結着されるとともに所定の形状に成形されることで、圧粉磁心を製造するのに用いられる。
Fe(鉄)は、実施形態に係る軟磁性粉末の基本的な磁気特性や機械的特性に大きな影響を与える。
また、X線回折装置としては、例えば株式会社リガク製のRINT2500V/PCが用いられる。
次に、圧粉磁心および磁性素子の各実施形態について説明する。
<第1実施形態>
まず、磁性素子の第1実施形態を適用したチョークコイルについて説明する。
なお、結合材や有機溶媒は、必要に応じて添加されればよく、省略されてもよい。
まず、実施形態に係る軟磁性粉末と、結合材と、各種添加剤と、有機溶媒とを混合し、混合物を得る。
この場合の成形方法としては、特に限定されないが、例えば、プレス成形、押出成形、射出成形等の方法が挙げられる。なお、この成形体の形状寸法は、以後の成形体を加熱した際の収縮分を見込んで決定される。また、プレス成形の場合の成形圧力は、1t/cm2(98MPa)以上10t/cm2(981MPa)以下程度とされる。
次に、磁性素子の第2実施形態を適用したチョークコイルについて説明する。
次いで、前記第1実施形態と同様に、この成形体に熱処理を施す。これにより、結合材を硬化させ、圧粉磁心21およびチョークコイル20(実施形態に係る磁性素子)が得られる。
次に、軟磁性粉末を製造する方法について説明する。
高速回転水流アトマイズ法では、冷却用筒体の内周面に沿って冷却液を噴出供給し、冷却用筒体の内周面に沿って旋回させることにより、内周面に冷却液層を形成する。一方、軟磁性粉末の原材料を溶融し、得られた溶融金属を自然落下させつつ、これに液体または気体のジェットを吹き付ける。これにより溶融金属を飛散させ、飛散した溶融金属は冷却液層に取り込まれる。その結果、飛散して微粉化した溶融金属が急速冷却されて固化し、軟磁性粉末が得られる。
なお、ガスジェット26は、必要に応じて液体ジェットで代替することもできる。
以上のようにして本実施形態に係る軟磁性粉末を製造することができる。
次いで、実施形態に係る磁性素子を備える電子機器(実施形態に係る電子機器)について、図5~図7に基づき、詳細に説明する。
1.圧粉磁心の製造
(サンプルNo.1)
[1]まず、原材料を高周波誘導炉で溶融するとともに、高速回転水流アトマイズ法により粉末化して軟磁性粉末を得た。この際、坩堝から流下させる溶融金属の流下量を0.5kg/分、坩堝の流下口の内径を1mm、ガスジェットの流速を900m/sとした。次いで、風力分級機により分級を行った。得られた軟磁性粉末の合金組成を表1に示す。なお、合金組成の特定には、SPECTRO社製固体発光分光分析装置(スパーク発光分析装置)、モデル:SPECTROLAB、タイプ:LAVMB08Aを用いた。その結果、不純物の含有率の合計は0.50原子%以下であった。また、特に、Al(アルミニウム)の含有率は、0.03原子%以下、Ti(チタン)の含有率は、0.02原子%以下であった。
・成形方法 :プレス成形
・成形体の形状:リング状
・成形体の寸法:外径14mm、内径8mm、厚さ3mm
・成形圧力 :3t/cm2(294MPa)
軟磁性粉末として表1に示すものをそれぞれ用いるようにした以外は、サンプルNo.1と同様にして圧粉磁心を得た。なお、各サンプルの平均粒径D50は、10μm以上30μm以下の範囲内に収まっていた。また、結晶化のための加熱温度は、各サンプルにおいて保磁力が最も小さくなるように、470~600℃の間で適宜設定した。
軟磁性粉末として表2に示すものをそれぞれ用いるようにした以外は、サンプルNo.1と同様にして圧粉磁心を得た。なお、各サンプルの平均粒径D50は、10μm以上30μm以下の範囲内に収まっていた。また、結晶化のための加熱温度は、各サンプルにおいて保磁力が最も小さくなるように、470~600℃の間で適宜設定した。
2.1 軟磁性粉末の結晶組織の評価
各実施例および各比較例で得られた軟磁性粉末を、集束イオンビーム(FIB)装置により、薄片に加工し、試験片を得た。
次に、観察画像から結晶組織の粒径を測定し、1.0nm以上30.0nm以下という特定の範囲に含まれる結晶組織の面積率を求めるとともに、これを所定粒径の結晶組織の含有率とみなした。
評価結果を表3、4に示す。
各実施例および各比較例で得られた軟磁性粉末について、それぞれの保磁力を以下の測定条件に基づいて測定した。
・測定装置 :振動試料型磁力計、株式会社玉川製作所製VSMシステム、TM-VSM1230-MHHL
そして、測定した保磁力を、以下の評価基準にしたがって評価した。
A:保磁力が0.5Oe未満
B:保磁力が0.5Oe以上1.0Oe未満
C:保磁力が1.0Oe以上1.33Oe未満
D:保磁力が1.33Oe以上1.67Oe未満
E:保磁力が1.67Oe以上2.0Oe未満
F:保磁力が2.0Oe以上
評価結果を表3、4に示す。
各実施例および各比較例で得られた圧粉磁心について、それぞれの透磁率を以下の測定条件に基づいて測定した。
・測定装置 :インピーダンスアナライザー、アジレント・テクノロジー株式会社製 4194A
・測定周波数 :1MHz
・巻線の巻き数:7回
・巻線の線径 :0.5mm
測定結果を表3、4に示す。
各実施例および各比較例で得られた圧粉磁心について、それぞれの鉄損を以下の測定条件に基づいて測定した。
・測定装置 :BHアナライザー、岩崎通信機株式会社製 SY-8258
・測定周波数 :1MHz
・巻線の巻き数:1次側36回、2次側36回
・巻線の線径 :0.5mm
・最大磁束密度:10mT
測定結果を表3、4に示す。
各実施例および各比較例で得られた軟磁性粉末について、それぞれの磁束密度を以下のようにして測定した。
次に、以下の式により磁束密度Bsを求めた。
算出結果を表3、4に示す。
一方、各比較例では、熱処理前の組織が結晶質であり、結晶粒径が不均一であった。
Claims (9)
- FexCua(Nb1-zZnz)b(Si1-yBy)100-x-a-b
[ただし、a、bおよびxは、それぞれ単位が原子%である数であって、
0.3≦a≦2.0、
2.0≦b≦4.0、および、
73.0≦x≦79.5、
を満たす数である。
また、yは、f(x)≦y<0.99を満たす数であって、f(x)=(4×10-34)x17.56である。
さらに、zは、0.33≦z≦1.0を満たす数である。]
で表される組成を有し、
粒径1.0nm以上30.0nm以下の結晶組織を30体積%以上含有することを特徴とする軟磁性粉末。 - 非晶質組織をさらに含有する請求項1に記載の軟磁性粉末。
- 前記結晶組織の平均粒径が2.0nm以上25.0nm以下である請求項1または2に記載の軟磁性粉末。
- Alの含有率が0.03原子%以下である請求項1ないし3のいずれか1項に記載の軟磁性粉末。
- Tiの含有率が0.02原子%以下である請求項1ないし3のいずれか1項に記載の軟磁性粉末。
- Cの含有率が0.1原子%以上1.5原子%以下である請求項1ないし5のいずれか1項に記載の軟磁性粉末。
- 請求項1ないし6のいずれか1項に記載の軟磁性粉末を含むことを特徴とする圧粉磁心。
- 請求項7に記載の圧粉磁心を備えることを特徴とする磁性素子。
- 請求項8に記載の磁性素子を備えることを特徴とする電子機器。
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