JP7312023B2 - 真空蒸着装置用の蒸着源 - Google Patents
真空蒸着装置用の蒸着源 Download PDFInfo
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- JP7312023B2 JP7312023B2 JP2019105712A JP2019105712A JP7312023B2 JP 7312023 B2 JP7312023 B2 JP 7312023B2 JP 2019105712 A JP2019105712 A JP 2019105712A JP 2019105712 A JP2019105712 A JP 2019105712A JP 7312023 B2 JP7312023 B2 JP 7312023B2
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- 真空チャンバ内で被蒸着物に対して蒸着するための真空蒸着装置用の蒸着源において、
真空チャンバ内に存して昇華または気化した蒸着材料を被蒸着物に向けて放出する放出開口を有する放出手段と、真空チャンバ外に存して蒸着材料を放出手段に供給する供給手段とを備え、
供給手段は、固体の蒸着材料を収容する第1収容箱と、第1収容箱内を大気圧より高い圧力に加圧する加圧手段と、蒸着材料を加熱する第1加熱手段とを有し、第1収容箱内の加圧下で加熱して蒸着材料を昇華、気化または液化させて、放出手段と供給手段とを連通する供給管を介して放出手段に供給するように構成し、
前記蒸着材料が加熱時に液相を経て気相に転移するものであり、
前記放出手段は、固体の蒸着材料を収容可能な第2収容箱と、第2収容箱に連通し、前記放出開口を有する放出箱と、蒸着材料を加熱する第2加熱手段とを備え、
第1収容箱内で液化させた蒸着材料が前記供給管を介して第2収容箱に供給されるように構成したことを特徴とする真空蒸着装置用の蒸着源。 - 前記第2収容箱内を所定圧力に調整する圧力調整弁を更に備えることを特徴とする請求項1記載の真空蒸着装置用の蒸着源。
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WO2003085157A1 (fr) | 2002-04-05 | 2003-10-16 | Matsushita Electric Industrial Co., Ltd. | Procede et dispositif pour preparer un film de resine mince |
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WO2003085157A1 (fr) | 2002-04-05 | 2003-10-16 | Matsushita Electric Industrial Co., Ltd. | Procede et dispositif pour preparer un film de resine mince |
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