JP7305779B2 - 基板液処理装置及び基板液処理方法 - Google Patents
基板液処理装置及び基板液処理方法 Download PDFInfo
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- JP7305779B2 JP7305779B2 JP2021551244A JP2021551244A JP7305779B2 JP 7305779 B2 JP7305779 B2 JP 7305779B2 JP 2021551244 A JP2021551244 A JP 2021551244A JP 2021551244 A JP2021551244 A JP 2021551244A JP 7305779 B2 JP7305779 B2 JP 7305779B2
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- Chemical & Material Sciences (AREA)
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- Chemically Coating (AREA)
- Inorganic Chemistry (AREA)
Description
図3は、無電解めっき処理のメカニズムを説明するためのグラフであり、横軸は時間Xを示し、縦軸はめっき膜厚Yを示す。
図4は、第1実施形態に係る反応促進部10の構造例を説明する概略図である。未使用の無電解めっき液のめっき反応を促進させる反応促進部10は、活性化部15及び反応加熱部17を含む。
上述の第1実施形態と同一又は類似の要素には同一の符号を付し、その詳細な説明は省略する。
上述の第1実施形態及び第2実施形態と同一又は類似の要素には同一の符号を付し、その詳細な説明は省略する。
上述の第1実施形態~第3実施形態と同一又は類似の要素には同一の符号を付し、その詳細な説明は省略する。
上述の第1実施形態~第4実施形態と同一又は類似の要素には同一の符号を付し、その詳細な説明は省略する。
上述の技術は、無電解めっき処理全般に適用可能である。特に、インキュベーション時間が長くなる傾向がある場合に、上述の技術は有用である。したがって、基板Wの処理面(特に、めっき金属を堆積させたい箇所)において触媒部材(例えばシード層等)が用いられていない場合に、上述の技術は特に有用である。例えば、ダマシン法に基づいてビアホールにめっき金属を堆積させる場合(特にビアホールの側面がシード層により形成されていない場合)、上述の技術を用いることによって、処理時間を短縮することができる。
Claims (11)
- 基板を保持する基板保持部と、
未使用の無電解めっき液のめっき反応を促進させる反応促進部であって、前記無電解めっき液をめっき反応に関して活性化させる活性化部と、前記無電解めっき液を加熱する反応加熱部と、を含む反応促進部と、
前記基板保持部により保持されている前記基板に前記無電解めっき液を付与するめっき液付与部と、を備え、
前記活性化部は、前記無電解めっき液を加熱する活性加熱部を有し、
前記活性化部は、前記活性加熱部により加熱された前記無電解めっき液の温度を下げる温度低下部を有する、基板液処理装置。 - 基板を保持する基板保持部と、
未使用の無電解めっき液のめっき反応を促進させる反応促進部であって、前記無電解めっき液をめっき反応に関して活性化させる活性化部と、前記無電解めっき液を加熱する反応加熱部と、を含む反応促進部と、
前記基板保持部により保持されている前記基板に前記無電解めっき液を付与するめっき液付与部と、を備え、
前記活性化部は、触媒部材を前記無電解めっき液に接触させることによって前記無電解めっき液をめっき反応に関して活性化させる触媒接触部を有する基板液処理装置。 - 前記触媒部材はメッシュ形状を有する請求項2に記載の基板液処理装置。
- 前記反応加熱部は、前記活性化部によって活性化された前記無電解めっき液を加熱する請求項1~3のいずれか一項に記載の基板液処理装置。
- 前記活性化部は、前記反応加熱部によって加熱された前記無電解めっき液をめっき反応に関して活性化させる請求項1~3のいずれか一項に記載の基板液処理装置。
- 前記めっき液付与部は、前記活性化部によって活性化された前記無電解めっき液を前記基板に付与する請求項1~5のいずれか一項に記載の基板液処理装置。
- 前記活性化部によって活性化させられた前記無電解めっき液を貯留する貯留部を備え、
前記反応加熱部は、前記貯留部から送られてくる前記無電解めっき液を加熱する請求項1~4及び6のいずれか一項に記載の基板液処理装置。 - 前記活性化部は、前記貯留部において前記無電解めっき液を活性化させる請求項7に記載の基板液処理装置。
- 前記反応加熱部は、前記めっき液付与部に接続されている流路を流れる前記無電解めっき液を加熱する請求項1~8のいずれか一項に記載の基板液処理装置。
- 未使用の無電解めっき液のめっき反応を促進させる工程であって、前記無電解めっき液をめっき反応に関して活性化させるステップと、前記無電解めっき液を加熱するステップと、を有する工程と、
基板に前記無電解めっき液を付与する工程と、を含み、
前記無電解めっき液をめっき反応に関して活性化させるステップは、
前記無電解めっき液を加熱するステップと、
加熱された前記無電解めっき液の温度を下げるステップと、
を含む、基板液処理方法。 - 未使用の無電解めっき液のめっき反応を促進させる工程であって、前記無電解めっき液をめっき反応に関して活性化させるステップと、前記無電解めっき液を加熱するステップと、を有する工程と、
基板に前記無電解めっき液を付与する工程と、を含み、
前記無電解めっき液をめっき反応に関して活性化させるステップは、触媒部材を前記無電解めっき液に接触させるステップを含む、基板液処理方法。
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JP2003129251A (ja) | 2001-10-17 | 2003-05-08 | Ebara Corp | めっき装置 |
JP2005060792A (ja) | 2003-08-18 | 2005-03-10 | Tokyo Electron Ltd | 無電解メッキ装置および無電解メッキ方法 |
JP2007525595A (ja) | 2004-02-04 | 2007-09-06 | サーフェクト テクノロジーズ インク. | メッキ装置及び方法 |
JP2011001633A (ja) | 2010-08-09 | 2011-01-06 | Tokyo Electron Ltd | 半導体製造方法 |
JP2013010996A (ja) | 2011-06-29 | 2013-01-17 | Tokyo Electron Ltd | めっき処理方法、めっき処理装置および記憶媒体 |
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JP2005060792A (ja) | 2003-08-18 | 2005-03-10 | Tokyo Electron Ltd | 無電解メッキ装置および無電解メッキ方法 |
JP2007525595A (ja) | 2004-02-04 | 2007-09-06 | サーフェクト テクノロジーズ インク. | メッキ装置及び方法 |
JP2011001633A (ja) | 2010-08-09 | 2011-01-06 | Tokyo Electron Ltd | 半導体製造方法 |
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