JP7287451B2 - ノズルプレートおよびその製造方法 - Google Patents
ノズルプレートおよびその製造方法 Download PDFInfo
- Publication number
- JP7287451B2 JP7287451B2 JP2021501170A JP2021501170A JP7287451B2 JP 7287451 B2 JP7287451 B2 JP 7287451B2 JP 2021501170 A JP2021501170 A JP 2021501170A JP 2021501170 A JP2021501170 A JP 2021501170A JP 7287451 B2 JP7287451 B2 JP 7287451B2
- Authority
- JP
- Japan
- Prior art keywords
- round portion
- nozzle plate
- cross
- nozzle
- round
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 238000005530 etching Methods 0.000 claims description 75
- 239000000463 material Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 13
- 239000005871 repellent Substances 0.000 claims description 10
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 9
- 230000007423 decrease Effects 0.000 claims description 7
- 239000000976 ink Substances 0.000 description 75
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 22
- 229910052710 silicon Inorganic materials 0.000 description 22
- 239000010703 silicon Substances 0.000 description 22
- 235000012431 wafers Nutrition 0.000 description 20
- 238000004891 communication Methods 0.000 description 19
- 239000007789 gas Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 8
- 238000005192 partition Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000009623 Bosch process Methods 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/005957 WO2020170319A1 (fr) | 2019-02-19 | 2019-02-19 | Plaque de buse et son procédé de fabrication, tête à jet d'encre et appareil de formation d'images |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2020170319A1 JPWO2020170319A1 (ja) | 2021-11-11 |
| JP7287451B2 true JP7287451B2 (ja) | 2023-06-06 |
Family
ID=72143767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021501170A Active JP7287451B2 (ja) | 2019-02-19 | 2019-02-19 | ノズルプレートおよびその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7287451B2 (fr) |
| WO (1) | WO2020170319A1 (fr) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002370351A (ja) | 2001-06-15 | 2002-12-24 | Fuji Xerox Co Ltd | インクジェット記録ヘッド及びインクジェット記録装置 |
| JP2006224619A (ja) | 2005-02-21 | 2006-08-31 | Brother Ind Ltd | ノズルプレートの製造方法及びノズルプレート |
| JP2010508136A (ja) | 2006-10-25 | 2010-03-18 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 高速ジェット噴射用装置のノズル |
| JP2018083316A (ja) | 2016-11-22 | 2018-05-31 | コニカミノルタ株式会社 | ノズルプレートの製造方法およびインクジェットヘッドの製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6258286B1 (en) * | 1999-03-02 | 2001-07-10 | Eastman Kodak Company | Making ink jet nozzle plates using bore liners |
-
2019
- 2019-02-19 JP JP2021501170A patent/JP7287451B2/ja active Active
- 2019-02-19 WO PCT/JP2019/005957 patent/WO2020170319A1/fr active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002370351A (ja) | 2001-06-15 | 2002-12-24 | Fuji Xerox Co Ltd | インクジェット記録ヘッド及びインクジェット記録装置 |
| JP2006224619A (ja) | 2005-02-21 | 2006-08-31 | Brother Ind Ltd | ノズルプレートの製造方法及びノズルプレート |
| JP2010508136A (ja) | 2006-10-25 | 2010-03-18 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 高速ジェット噴射用装置のノズル |
| JP2018083316A (ja) | 2016-11-22 | 2018-05-31 | コニカミノルタ株式会社 | ノズルプレートの製造方法およびインクジェットヘッドの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2020170319A1 (ja) | 2021-11-11 |
| WO2020170319A1 (fr) | 2020-08-27 |
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