JP7286855B2 - ダブルスペーサ液浸リソグラフィトリプルパターニングのフロー及び方法 - Google Patents
ダブルスペーサ液浸リソグラフィトリプルパターニングのフロー及び方法 Download PDFInfo
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Description
Claims (20)
- 半導体構造であって、
シリコン基板上の1つ以上の非平面垂直導電構造と、
前記1つ以上の非平面垂直導電構造の一部に設けられたゲート金属と、
第1セルの機能を提供するためのコンタクト及び対応する相互接続層と、
p型又はn型アクティブ領域上の第1の複数の金属0層であって、各々が、p型又はn型アクティブ領域上の対応するコンタクトを介して、トランジスタのソース領域、ドレイン領域又はゲート領域の何れかに接続されている、第1の複数の金属0層と、を備える、
半導体構造。 - 他のp型又はn型アクティブ領域上の第2の複数の金属0層であって、各々が、前記他のp型又はn型アクティブ領域上の対応するコンタクトを介して、トランジスタのソース領域、ドレイン領域又はゲート領域の何れかに接続されている、第2の複数の金属0層をさらに備える、
請求項1の半導体構造。 - 前記第1の複数の金属0層と前記第2の複数の金属0層との間のスペースに存在する第3の複数の金属0層であって、各々が追加の信号ルーティングに使用される、第3の複数の金属0層をさらに備える、
請求項2の半導体構造。 - 信号ルーティングに使用される各層は、水平方向及び垂直方向のうち何れかにルーティングされており、
金属0層と平行な方向の信号ルーティングに使用される最も高い金属層は、金属0層である、
請求項2の半導体構造。 - 電源及び接地接続は、エンドツーエンドレールではなくコンタクトを使用する、
請求項1の半導体構造。 - 前記p型又はn型アクティブ領域上の前記第1の複数の金属0層の各々は、層間に所定のピッチを有する、
請求項1の半導体構造。 - 前記第1の複数の金属0層及び前記第2の複数の金属0層の各々において、金属0層の最小数は3である、
請求項2の半導体構造。 - 前記第1の複数の金属0層の幅及びピッチの各々の分解能は、液浸リソグラフィ技術によって設定されている、
請求項1の半導体構造。 - 半導体デバイスの製造方法であって、
シリコン基板上に1つ以上の非平面垂直導電構造を形成することと、
1つ以上の非平面垂直導電構造の一部にゲート金属を堆積させることと、
第1セルの機能を提供するためのコンタクト及び対応する相互接続層を配置することと、を含み、
前記相互接続層は、
p型又はn型アクティブ領域上の第1の複数の金属0層であって、各々が、p型又はn型アクティブ領域上の対応するコンタクトを介して、トランジスタのソース領域、ドレイン領域又はゲート領域の何れかに接続されている、第1の複数の金属0層を備える、
半導体デバイスの製造方法。 - 他のp型又はn型アクティブ領域上の第2の複数の金属0層であって、各々が、前記他のp型又はn型アクティブ領域上の対応するコンタクトを介して、トランジスタのソース領域、ドレイン領域又はゲート領域の何れかに接続されている、第2の複数の金属0層を形成することをさらに含む、
請求項9の半導体デバイスの製造方法。 - 前記第1の複数の金属0層と前記第2の複数の金属0層との間のスペースに存在する第3の複数の金属0層であって、各々が追加の信号ルーティングに使用される、第3の複数の金属0層を形成することをさらに含む、
請求項10の半導体デバイスの製造方法。 - 水平方向及び垂直方向のうち何れかの信号ルーティング使用される各層のルートを形成することをさらに含み、
金属0層と平行な方向の信号ルーティングに使用される最も高い金属層は、金属0層である、
請求項10の半導体デバイスの製造方法。 - エンドツーエンドレールではなくコンタクトを使用して電源及び接地接続を形成することをさらに含む、
請求項9の半導体デバイスの製造方法。 - 前記p型又はn型アクティブ領域上に、層間に所定のピッチを有する第1の複数の金属0層を形成することをさらに含む、
請求項9の半導体デバイスの製造方法。 - 前記第1の複数の金属0層及び前記第2の複数の金属0層の各々において、少なくとも3つの金属0層を形成することをさらに含む、
請求項10の半導体デバイスの製造方法。 - 前記第1の複数の金属0層の幅及びピッチの各々の分解能は、液浸リソグラフィ技術によって設定されている、
請求項9の半導体デバイスの製造方法。 - 半導体デバイスの製造方法であって、
標準セルのシリコン基板上に1つ以上の非平面ゲート構造を形成することと、
前記1つ以上の非平面ゲート構造の上部に第1酸化物層を絶縁層として堆積させることと、
前記第1酸化物層にエッチングパターンを形成することと、
p型又はn型アクティブ領域上の第1の複数の金属0層を少なくとも備える金属0を前記エッチングパターンに堆積させることと、を含む、
半導体デバイスの製造方法。 - 前記標準セルにおいて、エンドツーエンドレールではなくコンタクトを使用して電源及び接地接続を形成することをさらに含む、
請求項17の半導体デバイスの製造方法。 - ダブルスペーサ液浸リソグラフィ技術を用いて前記第1酸化物層にエッチングパターンを形成することによって、前記p型又はn型アクティブ領域上の前記第1の複数の金属0層間に少なくとも所定のピッチを設定することをさらに含む、
請求項17の半導体デバイスの製造方法。 - エッチングパターンの前記所定のピッチを設定する幅を有するダブルスペーサにスペーサ窒化物を使用することをさらに含む、
請求項19の半導体デバイスの製造方法。
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
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US201762492692P | 2017-05-01 | 2017-05-01 | |
US62/492,692 | 2017-05-01 | ||
US15/608,749 | 2017-05-30 | ||
US15/608,749 US10304728B2 (en) | 2017-05-01 | 2017-05-30 | Double spacer immersion lithography triple patterning flow and method |
JP2019559728A JP7157081B2 (ja) | 2017-05-01 | 2018-04-27 | ダブルスペーサ液浸リソグラフィトリプルパターニングのフロー及び方法 |
PCT/US2018/029702 WO2018204168A1 (en) | 2017-05-01 | 2018-04-27 | Double spacer immersion lithography triple patterning flow and method |
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JP2019559728A Division JP7157081B2 (ja) | 2017-05-01 | 2018-04-27 | ダブルスペーサ液浸リソグラフィトリプルパターニングのフロー及び方法 |
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