JP7214680B2 - 硬質皮膜および耐土砂摩耗性硬質皮膜被覆部材 - Google Patents
硬質皮膜および耐土砂摩耗性硬質皮膜被覆部材 Download PDFInfo
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- JP7214680B2 JP7214680B2 JP2020068591A JP2020068591A JP7214680B2 JP 7214680 B2 JP7214680 B2 JP 7214680B2 JP 2020068591 A JP2020068591 A JP 2020068591A JP 2020068591 A JP2020068591 A JP 2020068591A JP 7214680 B2 JP7214680 B2 JP 7214680B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/051—Stirrers characterised by their elements, materials or mechanical properties
- B01F27/053—Stirrers characterised by their elements, materials or mechanical properties characterised by their materials
- B01F27/0531—Stirrers characterised by their elements, materials or mechanical properties characterised by their materials with particular surface characteristics, e.g. coated or rough
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Description
厚さが6μm以上である。
硬質皮膜被覆試験片の基材寸法:25mm×75mm×8mm(厚さ)の平板形状
ディスク寸法:幅12.7mm×Φ220mm
試験力:127.5N(13kgf)
試験砂:6号珪砂、流量350g/分
ホイール回転数:200rpm
試験時間:30分間、
で測定される当該硬質皮膜被覆試験片の30分間における土砂摩耗質量減少量が、0.05g以下であると好ましい。
前記硬質皮膜は、液体または固体中に含まれる土砂成分によって摩耗を受ける前記基材の少なくとも一部の表面に形成されている。
本実施形態に係る硬質皮膜は、AlおよびCrを主成分として含む窒化物からなる。
本実施形態に係る耐土砂摩耗性硬質皮膜被覆部材について、図1を参照しながら説明する。
後の表1に示す試験片No.1~11における各硬質皮膜を、図2に示す構成を備えた成膜装置(株式会社神戸製鋼所製、AIPSS002およびAIPocket)を用いて、上述した実施形態にて説明したアークイオンプレーティング法により基材上に形成した。
作製したそれぞれの硬質皮膜被覆試験片について、ASTM G65規格に準拠した土砂摩耗試験機((株)神戸製鋼所製「アブレージョン摩耗試験機」)を用いて、以下の条件での硬質皮膜被覆試験片の30分間における土砂摩耗質量減少量(g)を測定した。さらに、10分から30分までの質量減少量から、土砂摩耗質量減少速度(g/分)を算出した。土砂摩耗質量減少量がより少なく、または土砂摩耗質量減少速度がより遅ければ、耐土砂摩耗性により優れる。測定および算出結果は、下記表1に、各試験片の硬質皮膜の成分組成、測定された皮膜の厚さおよび基材の種類、ならびに30分後における各硬質皮膜被覆試験片の皮膜の状態と共にまとめて示す。
硬質皮膜被覆試験片の基材寸法:25mm×75mm×8mm(厚さ)の平板形状
ディスク寸法:幅12.7mm×Φ220mm
試験力:127.5N(13kgf)
試験砂:6号珪砂、流量350g/分
ホイール回転数:200rpm
試験時間:30分間
上記表1に示す通り、硬質皮膜の成分組成および皮膜の厚さが本発明の条件を満たす試験片No.1~No.8は、30分間における土砂摩耗質量減少量がわずかであり、土砂摩耗質量減少速度も遅く、耐土砂摩耗性に優れていた。特に、AlおよびCrのみの窒化物の成分組成からなる試験片No.1~No.6の硬質皮膜は、試験片No.7およびNo.8の他の元素も含む成分組成の硬質皮膜と比べて、耐土砂摩耗性により優れる傾向を有していた。
2 成膜装置
10 基材
11 表面
20 硬質皮膜
34 ステージ
Claims (5)
- AlおよびCrを主成分として含む窒化物からなる耐土砂摩耗性硬質皮膜であって、
式:(AlxCr y )N(ただし、式中、x≧0.55、y>0、x>y、x+y=1である)で表される成分組成からなり、
厚さが6.7μm以上である、耐土砂摩耗性硬質皮膜。 - 当該硬質皮膜は、ASTM G65規格に準拠した土砂摩耗試験機を用いて、以下の条件、
硬質皮膜被覆試験片の基材寸法:25mm×75mm×8mm(厚さ)の平板形状
ディスク寸法:幅12.7mm×Φ220mm
試験力:127.5N(13kgf)
試験砂:6号珪砂、流量350g/分
ホイール回転数:200rpm
試験時間:30分間、
で測定される当該硬質皮膜被覆試験片の30分間における土砂摩耗質量減少量が、0.05g以下である、請求項1に記載の耐土砂摩耗性硬質皮膜。 - 前記硬質皮膜の成分組成は、(Al0.6Cr0.4)N、(Al0.65Cr0.35)N、(Al0.7Cr0.3)N、(Al0.75Cr0.25)N、または(Al0.8Cr0.2)Nである、請求項1または2に記載の耐土砂摩耗性硬質皮膜。
- 当該硬質皮膜は、物理的蒸着法により形成された皮膜である、請求項1~3のいずれか1項に記載の耐土砂摩耗性硬質皮膜。
- 基材と、請求項1~4のいずれか1項に記載の耐土砂摩耗性硬質皮膜とを含み、
前記硬質皮膜は、液体または固体中に含まれる土砂成分によって摩耗を受ける前記基材の少なくとも一部の表面に形成されている、耐土砂摩耗性硬質皮膜被覆部材。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020068591A JP7214680B2 (ja) | 2020-04-06 | 2020-04-06 | 硬質皮膜および耐土砂摩耗性硬質皮膜被覆部材 |
CA3175874A CA3175874A1 (en) | 2020-04-06 | 2021-03-12 | Hard coating film, and member coated with sand-abrasion-resistant hard coating film which includes same |
PCT/JP2021/009944 WO2021205810A1 (ja) | 2020-04-06 | 2021-03-12 | 硬質皮膜およびそれを含む耐土砂摩耗性硬質皮膜被覆部材 |
CN202180022790.1A CN115335547A (zh) | 2020-04-06 | 2021-03-12 | 硬质覆膜以及包含该硬质覆膜的耐砂土磨损性硬质覆膜覆盖部件 |
EP21785229.2A EP4108801A4 (en) | 2020-04-06 | 2021-03-12 | HARD COATING FILM AND ITEM COATED WITH SAND WEAR RESISTANT HARD COATING FILM |
US17/906,455 US20230145251A1 (en) | 2020-04-06 | 2021-03-12 | Hard coating film, and member coated with sand-abrasion-resistant hard coating film which includes same |
JP2022042353A JP2022100310A (ja) | 2020-04-06 | 2022-03-17 | 硬質皮膜および耐土砂摩耗性硬質皮膜被覆部材 |
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JP2020068591A JP7214680B2 (ja) | 2020-04-06 | 2020-04-06 | 硬質皮膜および耐土砂摩耗性硬質皮膜被覆部材 |
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JP2022042353A Division JP2022100310A (ja) | 2020-04-06 | 2022-03-17 | 硬質皮膜および耐土砂摩耗性硬質皮膜被覆部材 |
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JP2021165413A JP2021165413A (ja) | 2021-10-14 |
JP7214680B2 true JP7214680B2 (ja) | 2023-01-30 |
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JP2022042353A Pending JP2022100310A (ja) | 2020-04-06 | 2022-03-17 | 硬質皮膜および耐土砂摩耗性硬質皮膜被覆部材 |
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US (1) | US20230145251A1 (ja) |
EP (1) | EP4108801A4 (ja) |
JP (2) | JP7214680B2 (ja) |
CN (1) | CN115335547A (ja) |
CA (1) | CA3175874A1 (ja) |
WO (1) | WO2021205810A1 (ja) |
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KR102600101B1 (ko) * | 2022-12-22 | 2023-11-08 | 한국야금 주식회사 | 내마모성이 우수한 절삭공구용 경질피막 |
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JPH06170584A (ja) * | 1992-11-30 | 1994-06-21 | Hitachi Ltd | 高C高Si含有溶接金属粉体及びその被覆層を持つ機器部材 |
JP4634241B2 (ja) * | 2004-07-08 | 2011-02-16 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
JP4509762B2 (ja) * | 2004-12-10 | 2010-07-21 | 株式会社神戸製鋼所 | 摺動部材 |
WO2007074507A1 (ja) * | 2005-12-26 | 2007-07-05 | Ibiden Co., Ltd. | 粉末の混合方法、攪拌機、及び、ハニカム構造体の製造方法 |
JP4839974B2 (ja) * | 2006-06-16 | 2011-12-21 | 株式会社日立プラントテクノロジー | 樹脂製水中ポンプ |
EP1918421B1 (en) * | 2006-09-27 | 2017-03-15 | Hitachi Metals, Ltd. | Hard-material-coated member excellent in durability |
US8491989B2 (en) * | 2008-07-09 | 2013-07-23 | Oberlikon Trading AG, Truebbach | Coating system, coated workpiece and method for manufacturing the same |
JP5303816B2 (ja) * | 2009-10-01 | 2013-10-02 | 日立ツール株式会社 | 硬質皮膜被覆工具 |
CN101818321B (zh) * | 2010-03-31 | 2011-10-26 | 西华大学 | 活塞环表面铝铬氮复合涂层及其工艺方法 |
EP2644300B1 (en) * | 2010-11-26 | 2018-03-07 | Sumitomo Electric Hardmetal Corp. | Surface coated sintered body |
JP5035479B2 (ja) * | 2011-01-27 | 2012-09-26 | 三菱マテリアル株式会社 | 耐欠損性、耐摩耗性にすぐれた表面被覆切削工具 |
JP2012228735A (ja) * | 2011-04-25 | 2012-11-22 | Hitachi Tool Engineering Ltd | 耐摩耗性に優れる被覆工具およびその製造方法 |
JP5140200B2 (ja) * | 2011-06-17 | 2013-02-06 | 株式会社神戸製鋼所 | 硬質皮膜被覆部材 |
JP5814857B2 (ja) * | 2012-05-10 | 2015-11-17 | トーカロ株式会社 | 耐スラリー摩耗性および耐キャビテーション壊食性に優れた溶射皮膜 |
JP2020068591A (ja) | 2018-10-24 | 2020-04-30 | PV Japan株式会社 | 太陽光パネル保守装置 |
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2021
- 2021-03-12 CA CA3175874A patent/CA3175874A1/en active Pending
- 2021-03-12 CN CN202180022790.1A patent/CN115335547A/zh active Pending
- 2021-03-12 EP EP21785229.2A patent/EP4108801A4/en active Pending
- 2021-03-12 US US17/906,455 patent/US20230145251A1/en active Pending
- 2021-03-12 WO PCT/JP2021/009944 patent/WO2021205810A1/ja unknown
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WO2021205810A1 (ja) | 2021-10-14 |
EP4108801A1 (en) | 2022-12-28 |
US20230145251A1 (en) | 2023-05-11 |
JP2021165413A (ja) | 2021-10-14 |
EP4108801A4 (en) | 2023-08-02 |
JP2022100310A (ja) | 2022-07-05 |
CN115335547A (zh) | 2022-11-11 |
CA3175874A1 (en) | 2021-10-14 |
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