JP7206234B2 - セラミックス製の円柱状ハニカム構造体の検査方法及び検査装置 - Google Patents

セラミックス製の円柱状ハニカム構造体の検査方法及び検査装置 Download PDF

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JP7206234B2
JP7206234B2 JP2020061297A JP2020061297A JP7206234B2 JP 7206234 B2 JP7206234 B2 JP 7206234B2 JP 2020061297 A JP2020061297 A JP 2020061297A JP 2020061297 A JP2020061297 A JP 2020061297A JP 7206234 B2 JP7206234 B2 JP 7206234B2
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honeycomb structure
columnar honeycomb
line sensor
inspection
light
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Japanese (ja)
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JP2021162348A5 (https=
JP2021162348A (ja
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貴史 寺拝
祥弘 佐藤
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NGK Insulators Ltd
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NGK Insulators Ltd
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Priority to JP2020061297A priority Critical patent/JP7206234B2/ja
Priority to US17/188,123 priority patent/US11761899B2/en
Priority to DE102021001126.0A priority patent/DE102021001126A1/de
Priority to CN202110238612.4A priority patent/CN113466128B/zh
Publication of JP2021162348A publication Critical patent/JP2021162348A/ja
Publication of JP2021162348A5 publication Critical patent/JP2021162348A5/ja
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95692Patterns showing hole parts, e.g. honeycomb filtering structures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952Inspecting the exterior surface of cylindrical bodies or wires
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/0008Industrial image inspection checking presence/absence
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00Television systems
    • H04N7/18Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • H04N7/183Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast for receiving images from a single remote source
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Textile Engineering (AREA)
  • Multimedia (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2020061297A 2020-03-30 2020-03-30 セラミックス製の円柱状ハニカム構造体の検査方法及び検査装置 Active JP7206234B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020061297A JP7206234B2 (ja) 2020-03-30 2020-03-30 セラミックス製の円柱状ハニカム構造体の検査方法及び検査装置
US17/188,123 US11761899B2 (en) 2020-03-30 2021-03-01 Inspection method and inspection system for cylindrical honeycomb structure made of ceramics
DE102021001126.0A DE102021001126A1 (de) 2020-03-30 2021-03-02 Prüfverfahren und Prüfsystem für zylindrische Wabenstruktur aus Keramik
CN202110238612.4A CN113466128B (zh) 2020-03-30 2021-03-04 陶瓷制的圆柱状蜂窝结构体的检查方法及检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020061297A JP7206234B2 (ja) 2020-03-30 2020-03-30 セラミックス製の円柱状ハニカム構造体の検査方法及び検査装置

Publications (3)

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JP2021162348A JP2021162348A (ja) 2021-10-11
JP2021162348A5 JP2021162348A5 (https=) 2021-12-16
JP7206234B2 true JP7206234B2 (ja) 2023-01-17

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JP2020061297A Active JP7206234B2 (ja) 2020-03-30 2020-03-30 セラミックス製の円柱状ハニカム構造体の検査方法及び検査装置

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US (1) US11761899B2 (https=)
JP (1) JP7206234B2 (https=)
CN (1) CN113466128B (https=)
DE (1) DE102021001126A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12078574B2 (en) * 2021-08-11 2024-09-03 Corning Incorporated Systems and methods for visual inspection and 3D measurement
KR102725142B1 (ko) * 2022-05-20 2024-11-01 주식회사 윈텍오토메이션 초경인서트 측면 코너부 검사를 위한 영상 획득시스템
JP7733042B2 (ja) * 2023-03-27 2025-09-02 日本碍子株式会社 ハニカム成形体の外周形状を検査するシステム及び方法
CN118464922B (zh) * 2024-05-10 2025-09-19 冠捷电子科技(福建)有限公司 一种基于相机前后景深的面板快速检测方法
CN118758967B (zh) * 2024-07-17 2024-12-10 江苏赛立昂复合材料有限公司 一种陶瓷内部缺陷检测装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007105825A1 (ja) 2006-03-16 2007-09-20 Ngk Insulators, Ltd. ハニカム構造体の外壁検査方法
JP2008241529A (ja) 2007-03-28 2008-10-09 Yaskawa Electric Corp 回転中心合わせ装置
JP2008275496A (ja) 2007-05-01 2008-11-13 Canon Chemicals Inc 発泡体ローラーの欠陥検出方法および装置
WO2017061318A1 (ja) 2015-10-06 2017-04-13 日本碍子株式会社 セラミックス体の表面検査方法

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JPH0612253B2 (ja) * 1989-03-01 1994-02-16 日本碍子株式会社 ハニカム成形用口金の検査方法
JP3840619B2 (ja) * 1995-05-25 2006-11-01 株式会社キーエンス 変位計
JPH11281321A (ja) * 1998-03-31 1999-10-15 Copal Co Ltd 部品認識装置
US7460703B2 (en) * 2002-12-03 2008-12-02 Og Technologies, Inc. Apparatus and method for detecting surface defects on a workpiece such as a rolled/drawn metal bar
WO2009058247A1 (en) * 2007-10-31 2009-05-07 Corning Incorporated Laser scanning measurement systems and methods for surface shape measurement of hidden surfaces
US8049878B2 (en) * 2008-08-22 2011-11-01 Corning Incorporated Systems and methods for detecting defects in ceramic filter bodies
GB0901040D0 (en) * 2009-01-22 2009-03-11 Renishaw Plc Optical measuring method and system
JP2010249798A (ja) * 2009-03-23 2010-11-04 Ngk Insulators Ltd 目封止ハニカム構造体の検査装置及び目封止ハニカム構造体の検査方法
US8285027B2 (en) * 2009-11-13 2012-10-09 Corning Incorporated High-resolution large-field scanning inspection system for extruded ceramic honeycomb structures
US8537215B2 (en) * 2009-11-30 2013-09-17 Corning Incorporated Multi-camera skin inspection system for extruded ceramic honeycomb structures
CN201697882U (zh) * 2010-06-03 2011-01-05 成都精密光学工程研究中心 光学元件亚表面缺陷的检测装置
JP5963453B2 (ja) * 2011-03-15 2016-08-03 株式会社荏原製作所 検査装置
US9239296B2 (en) * 2014-03-18 2016-01-19 Corning Incorporated Skinning of ceramic honeycomb bodies
MX373614B (es) * 2014-11-25 2020-05-07 Corning Inc Métodos de inspección de material extrudido y control de retroalimentación integrados para la fabricación de cuerpos de panal.
US11255663B2 (en) * 2016-03-04 2022-02-22 May Patents Ltd. Method and apparatus for cooperative usage of multiple distance meters
CN110741464B (zh) * 2017-06-07 2021-03-19 佳能机械株式会社 缺陷检测装置、缺陷检测方法、裸片接合机、半导体制造方法、以及半导体装置制造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007105825A1 (ja) 2006-03-16 2007-09-20 Ngk Insulators, Ltd. ハニカム構造体の外壁検査方法
JP2008241529A (ja) 2007-03-28 2008-10-09 Yaskawa Electric Corp 回転中心合わせ装置
JP2008275496A (ja) 2007-05-01 2008-11-13 Canon Chemicals Inc 発泡体ローラーの欠陥検出方法および装置
WO2017061318A1 (ja) 2015-10-06 2017-04-13 日本碍子株式会社 セラミックス体の表面検査方法

Also Published As

Publication number Publication date
CN113466128B (zh) 2024-09-13
DE102021001126A1 (de) 2021-09-30
US20210302325A1 (en) 2021-09-30
US11761899B2 (en) 2023-09-19
CN113466128A (zh) 2021-10-01
JP2021162348A (ja) 2021-10-11

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