JP7201573B2 - 蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法 - Google Patents

蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法 Download PDF

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JP7201573B2
JP7201573B2 JP2019216101A JP2019216101A JP7201573B2 JP 7201573 B2 JP7201573 B2 JP 7201573B2 JP 2019216101 A JP2019216101 A JP 2019216101A JP 2019216101 A JP2019216101 A JP 2019216101A JP 7201573 B2 JP7201573 B2 JP 7201573B2
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shielding
evaporation source
source material
apertures
shielding device
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JP2020063511A (ja
JP2020063511A5 (enExample
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ホセ マヌエル ディエゲス－カンポ，
シュテファン バンゲルト，
ハーラルト ヴルスター，
アンドレアス ロップ，
ディータ ハース，
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Applied Materials Inc
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Applied Materials Inc
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JP2019216101A 2019-11-29 2019-11-29 蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法 Active JP7201573B2 (ja)

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JP2019216101A JP7201573B2 (ja) 2019-11-29 2019-11-29 蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法
JP2022148698A JP7583770B2 (ja) 2019-11-29 2022-09-20 蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法

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JP2019216101A JP7201573B2 (ja) 2019-11-29 2019-11-29 蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法

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JP2017557363A Division JP6941564B2 (ja) 2016-05-10 2016-05-10 蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法

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JP2022148698A Active JP7583770B2 (ja) 2019-11-29 2022-09-20 蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法

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CN116635566A (zh) * 2020-10-28 2023-08-22 应用材料公司 用于沉积蒸镀材料的沉积源、沉积设备及其方法
CN113512701B (zh) * 2021-06-29 2023-06-23 浙江尚越新能源开发有限公司 一种cigs柔性太阳能电池片硒源的线性源装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009228091A (ja) 2008-03-25 2009-10-08 Canon Inc 蒸着装置
JP2011032579A (ja) 2009-08-05 2011-02-17 Samsung Mobile Display Co Ltd 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648267A (en) * 1987-06-30 1989-01-12 Sharp Kk Thin film forming device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009228091A (ja) 2008-03-25 2009-10-08 Canon Inc 蒸着装置
JP2011032579A (ja) 2009-08-05 2011-02-17 Samsung Mobile Display Co Ltd 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法

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JP7583770B2 (ja) 2024-11-14
JP2023002518A (ja) 2023-01-10

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