CN113512701B - 一种cigs柔性太阳能电池片硒源的线性源装置 - Google Patents

一种cigs柔性太阳能电池片硒源的线性源装置 Download PDF

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CN113512701B
CN113512701B CN202110727129.2A CN202110727129A CN113512701B CN 113512701 B CN113512701 B CN 113512701B CN 202110727129 A CN202110727129 A CN 202110727129A CN 113512701 B CN113512701 B CN 113512701B
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罗明新
张卫彪
任宇航
任宇珂
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Zhejiang Shangyue New Energy Development Co ltd
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Abstract

本发明涉及一种CIGS柔性太阳能电池硒源的线性源装置，解决以下镀膜不均匀问题：传统CIGS共蒸法的硒源为点状硒源，硒源到基底属于点状蒸发到基底表面，在点状喷口形成高斯分布，存在横向镀膜不均匀的现象。本装置包括圆柱壳状的线性硒源容器，线性硒源容器的侧面沿圆柱法线方向开设有一条直线型的硒蒸汽喷口，线性硒源容器连接有盒状硒源，盒状硒源内部装有待蒸发的硒金属，盒状硒源设有进料口和点状喷口，盒状硒源在硒金属上方设置加热源。本发明圆柱壳状的线性硒源容器，形成硒蒸汽线性源，减少硒蒸汽输出后的横向扩散，降低盒状硒源供气波动对硒蒸汽输出的影响，提高硒蒸汽的稳定性；同时可以在线性硒源容器进行二次加热，增强硒源二次激发活性。

Description

一种CIGS柔性太阳能电池片硒源的线性源装置
技术领域
本发明属于太阳能电池片生产领域，涉及一种CIGS太阳能电池片的生产设备，特别涉及一种CIGS柔性太阳能电池片硒源的线性源装置。
背景技术
柔性太阳能电池片是在柔性可卷绕的基底上形成太阳能光伏材料镀层。铜铟镓硒（CIGS）薄膜电池是一种质量功率比高、稳定性好的太阳能光伏材料，被普遍认为是最具发展前景的柔性太阳能电池材料。多元共蒸法是最广泛应用的CIGS镀膜方法，在真空环境下完成镀膜，利用铜、铟、镓、硒各元素共蒸，在基底表面反应形成多晶镀层。
CIGS共蒸法工艺过程中，对硒源的技术控制是关键步骤，需要精确控制硒源蒸发量和蒸汽羽流的稳定性，才能最大限度 地保证镀膜层的均匀，是质量控制的关键要点。传统的硒源设计为设置一个盒状的硒源容器，将硒源通过加热的方式蒸发并从盒装容器的喷口喷出，盒装硒源容器的喷出口通常为单点设置，为点状硒源，存在高斯分布，在从硒源容器到基底表面的过程中，需要经过扩散、与铜、铟、镓源蒸汽混合的过程，这个过程中存在硒蒸发面积的不均匀、硒源容器可持续性不佳的问题。
发明内容
本发明的目的在于解决传统CIGS共蒸法的硒源为点状硒源，从硒源到基底属于点状喷口镀膜，存在高斯分布，在硒源与其它成分扩散混合时存在硒蒸发面积不均匀的问题，为此提供了一种CIGS柔性太阳能电池片硒源的线性源装置，可以将硒源从点状源转化为线性源，提升了硒源蒸发的均匀性，同时本发明还通过线性源中转的结构设置，解决了硒源规模化、持续性生产的问题。
本发明解决其技术问题所采用的技术方案是：一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：包括圆柱壳状的线性硒源容器，线性硒源容器的侧面沿圆柱法线方向开设有一条直线型的硒蒸汽喷口，所述线性硒源容器连接有盒状硒源，盒状硒源内部装有待蒸发的硒金属，盒状硒源设有进料口和点状喷口，盒状硒源在硒金属上方设置加热源。本方案中，圆柱壳状的线性硒源容器作为硒蒸汽的一个稳压腔，盒装硒源从点状喷口输出的硒蒸汽在线性硒源容器形成一个稳定的状态后，从线性硒源容器的直线型硒蒸汽喷口处输出，形成线性源，线性源可以保证在喷口直线方向硒蒸汽的均匀稳定，减少扩散效应，保证硒蒸汽羽流具有更好的稳定性。线性硒源容器同时可以作为一个缓冲腔室，当盒状硒源加热源波动、硒原料存量减少导致的蒸汽量波动、多个盒状硒源中的其中某个或某几个在添加原料过程时，均可能会导致硒蒸汽的流量、压力产生波动，线性硒源容器可以作为缓冲腔室进行中转稳压作用，保证从直线型硒蒸汽喷口喷出的硒蒸汽稳定，也为多个盒状硒源分步添加硒原料的同时实现连续生产提供了条件。线性硒源容器的外壁还设置可提供二次加热的加热线圈，可以对线性硒源容器中硒蒸汽进行二次加热，增强硒源二次激发活性，使蒸汽压快速、高效的通过直线型硒蒸汽喷口。
作为优选，所述盒状硒源为设置在线性硒源容器外部的外置硒源，盒状硒源通过硒蒸汽输送管连接线性硒源容器，硒蒸汽输送管上依次设置有单向调压阀和流量计，硒蒸汽输送管外部还包设有防漏腔。
作为优选，所述盒状硒源并列设置多个，各盒状硒源连接同一蒸汽输送管。
作为优选，所述盒状硒源设置单个，盒状硒源内部分隔成多个独立腔室，各腔室具有独立的进料口和点状喷口，各腔室连接同一蒸汽输送管。
作为优选，所述线性硒源容器的内部设有往复式盘管，往复式盘管与蒸汽输送管相连，往复式盘管上均匀开设有气孔。
作为优选，所述线性硒源容器设置在蒸镀反应腔内部，盒状硒源设置在蒸镀反应腔的外部，蒸镀反应腔内部在线性硒源容器下方设置铜、铟、镓的金属蒸发源，蒸镀反应腔内部还设有压力计。
作为优选，所述盒状硒源为设置在线性硒源容器内部的内置硒源，盒状硒源内部分隔成多个独立腔室，各腔室具有独立的进料口和点状喷口。
作为优选，所述线性硒源容器设置在蒸镀反应腔内部，蒸镀反应腔内部在线性硒源容器下方设置铜、铟、镓的金属蒸发源，蒸镀反应腔内部还设有压力计。
作为优选，所述线性硒源容器的圆柱壁上均匀布设有加热线圈，线性硒源容器侧壁设有热电偶。
作为优选，所述线性硒源容器的直线型硒蒸汽喷口设置有内倒角。
本发明圆柱壳状的线性硒源容器，形成硒蒸汽线性源，可以对硒蒸汽进行中转稳压，线性输出，减少硒蒸汽输出后的横向扩散，降低盒状硒源供气波动对硒蒸汽输出的影响，提高硒蒸汽羽流的稳定性；同时可以在线性硒源容器进行二次加热，增强硒源二次激发活性。
附图说明
下面结合附图对本发明做进一步说明。
图1是本发明的一种外置硒源的结构示意图。
图2是本发明的外置硒源的线性硒源容器结构图。
图3是本发明的外置硒源的线性硒源容器内部结构图。
图4是本发明的一种内置硒源的线性硒源容器示意图。
图中：1、外置硒源，2、防漏腔，3、单向调压阀，4、蒸汽输送管，5、流量计，6、蒸镀反应腔，7、线性硒源容器，8、金属蒸发源，9、硒蒸汽喷口，10、加热线圈，11、热电偶，12、往复式盘管，13、气孔，14、内置硒源，15、独立腔室，16、点状喷口。
具体实施方式
下面通过具体实施例并结合附图对本发明进一步说明。
实施例1：一种CIGS柔性太阳能电池片硒源的线性源装置，如图1、2、3所示。本装置包括圆柱壳状的线性硒源容器7，线性硒源容器7为耐高温316S不锈钢或者耐高温、耐腐蚀，热传导性能良好的碳化硅、氮化硅复合材料。线性硒源容器的侧面沿圆柱法线方向开设有一条直线型的硒蒸汽喷口9，线性硒源容器的直线型硒蒸汽喷口设置有内倒角。线性硒源容器7设置在蒸镀反应腔6内部，蒸镀反应腔内部在线性硒源容器下方设置铜、铟、镓的金属蒸发源8，蒸镀反应腔内部还设有压力计。
所述线性硒源容器7连接有外置硒源1，外置硒源设置在蒸镀反应腔6的外部。外置硒源1为盒状硒源，盒状硒源设置单个，可参考图4的盒体结构，盒状硒源内部分隔成多个独立腔室15，各腔室具有独立的进料口和点状喷口16，盒状硒源在硒金属原料上方设置加热源。各腔室的点状喷口16连接同一蒸汽输送管4，蒸汽输送管4连接至线性硒源容器7，线性硒源容器7的内部设有往复式盘管12，往复式盘管与蒸汽输送管相连，往复式盘管上均匀开设有气孔13。硒蒸汽输送管4上依次设置有单向调压阀3和流量计5，硒蒸汽输送管4外部还包设有防漏腔2。外置硒源1的盒状硒源也可以不采用单个分隔成独立腔室的结构，而是设置为多个盒装硒源并列的结构。各独立腔室或者各独立的盒装硒源可以单独添加硒原料。如图3所示，线性硒源容器的圆柱壁上均匀布设有加热线圈10，线性硒源容器侧壁设有热电偶11。
外置硒源可以分段添加硒原料，而通过线性硒源容器的中转稳压调节装置，可以在外置硒源输出产生波动时，保证线性源的输出稳定。
实施例2：一种CIGS柔性太阳能电池片硒源的线性源装置，如图4所示。本装置包括圆柱壳状的线性硒源容器7，线性硒源容器7为耐高温316S不锈钢或者耐高温、耐腐蚀，热传导性能良好的碳化硅、氮化硅复合材料线性硒源容器的侧面沿圆柱法线方向开设有一条直线型的硒蒸汽喷口9，线性硒源容器的直线型硒蒸汽喷口设置有内倒角。线性硒源容器7设置在蒸镀反应腔6内部，蒸镀反应腔内部在线性硒源容器下方设置铜、铟、镓的金属蒸发源8，蒸镀反应腔内部还设有压力计。
所述线性硒源容器7的内部设有内置硒源14，内置硒源为石墨盒，盒状硒源内部分隔成多个独立腔室15，各腔室具有独立的进料口和点状喷口16，盒状硒源在硒金属原料上方设置加热源。
内置硒源免去了硒蒸气从外至内的输送过程，结构成本更低，从点源到线源的过渡更近。

Claims (10)

1.一种CIGS柔性太阳能电池片硒源的线性源装置， 采用CIGS共蒸法工艺在真空环境下完成镀膜，其特征在于：包括圆柱壳状的线性硒源容器，线性硒源容器的侧面沿圆柱法线方向开设有一条直线型的硒蒸汽喷口，所述线性硒源容器连接有盒状硒源，盒状硒源内部装有待蒸发的硒金属，盒状硒源设有进料口和点状喷口，盒状硒源在硒金属上方设置加热源；盒装硒源从点状喷口输出的硒蒸汽在线性硒源容器形成一个稳定的状态后，从线性硒源容器的直线型硒蒸汽喷口处输出，形成线性源；线性硒源容器的外壁还设置可提供二次加热的加热线圈，对线性硒源容器中硒蒸汽进行二次加热。
2.根据权利要求1所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述盒状硒源为设置在线性硒源容器外部的外置硒源，盒状硒源通过硒蒸汽输送管连接线性硒源容器，硒蒸汽输送管上依次设置有单向调压阀和流量计，硒蒸汽输送管外部还包设有防漏腔。
3.根据权利要求2所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述盒状硒源并列设置多个，各盒状硒源连接同一蒸汽输送管。
4.根据权利要求2所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述盒状硒源设置单个，盒状硒源内部分隔成多个独立腔室，各腔室具有独立的进料口和点状喷口，各腔室连接同一蒸汽输送管。
5.根据权利要求2或3或4所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述线性硒源容器的内部设有往复式盘管，往复式盘管与蒸汽输送管相连，往复式盘管上均匀开设有气孔。
6.根据权利要求2或3或4所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述线性硒源容器设置在蒸镀反应腔内部，盒状硒源设置在蒸镀反应腔的外部，蒸镀反应腔内部在线性硒源容器下方设置铜、铟、镓的金属蒸发源，蒸镀反应腔内部还设有压力计。
7.根据权利要求1所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述盒状硒源为设置在线性硒源容器内部的内置硒源，盒状硒源内部分隔成多个独立腔室，各腔室具有独立的进料口和点状喷口。
8.根据权利要求7所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述线性硒源容器设置在蒸镀反应腔内部，蒸镀反应腔内部在线性硒源容器下方设置铜、铟、镓的金属蒸发源，蒸镀反应腔内部还设有压力计。
9.根据权利要求1或2或3或4或7或8所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述线性硒源容器的圆柱壁上均匀布设有加热线圈，线性硒源容器侧壁设有热电偶。
10.根据权利要求1或2或3或4或7或8所述的一种CIGS柔性太阳能电池片硒源的线性源装置，其特征在于：所述线性硒源容器的直线型硒蒸汽喷口设置有内倒角。
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