JP7199758B2 - バルク音響波共振器及びその製造方法並びにフィルタ、無線周波数通信システム - Google Patents
バルク音響波共振器及びその製造方法並びにフィルタ、無線周波数通信システム Download PDFInfo
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- JP7199758B2 JP7199758B2 JP2021525820A JP2021525820A JP7199758B2 JP 7199758 B2 JP7199758 B2 JP 7199758B2 JP 2021525820 A JP2021525820 A JP 2021525820A JP 2021525820 A JP2021525820 A JP 2021525820A JP 7199758 B2 JP7199758 B2 JP 7199758B2
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- piezoelectric
- resonance
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910272274.9A CN111786648A (zh) | 2019-04-04 | 2019-04-04 | 体声波谐振器及其制造方法和滤波器、射频通信系统 |
| CN201910272274.9 | 2019-04-04 | ||
| PCT/CN2019/105089 WO2020199506A1 (zh) | 2019-04-04 | 2019-09-10 | 体声波谐振器及其制造方法和滤波器、射频通信系统 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022507320A JP2022507320A (ja) | 2022-01-18 |
| JP7199758B2 true JP7199758B2 (ja) | 2023-01-06 |
Family
ID=72664457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021525820A Active JP7199758B2 (ja) | 2019-04-04 | 2019-09-10 | バルク音響波共振器及びその製造方法並びにフィルタ、無線周波数通信システム |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7199758B2 (zh) |
| CN (1) | CN111786648A (zh) |
| WO (1) | WO2020199506A1 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114124022A (zh) * | 2021-11-30 | 2022-03-01 | 中国科学院上海微系统与信息技术研究所 | 一种增强散热的悬空谐振器及制备方法 |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007006501A (ja) | 2005-06-23 | 2007-01-11 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | 交互配列の縁部構造を利用した音響共振器の性能向上 |
| JP2007295310A (ja) | 2006-04-25 | 2007-11-08 | Matsushita Electric Works Ltd | Ｂａｗ共振器 |
| WO2010095640A1 (ja) | 2009-02-20 | 2010-08-26 | 宇部興産株式会社 | 薄膜圧電共振器およびそれを用いた薄膜圧電フィルタ |
| JP2013138425A (ja) | 2011-12-27 | 2013-07-11 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | ブリッジを備えるソリッドマウントバルク音響波共振器構造 |
| JP2016194630A (ja) | 2015-04-01 | 2016-11-17 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法、および電子機器 |
| JP2017147719A (ja) | 2016-02-17 | 2017-08-24 | サムソン エレクトロ−メカニックス カンパニーリミテッド． | 音響共振器及びその製造方法 |
| US20180152168A1 (en) | 2016-11-30 | 2018-05-31 | Samsung Electro-Mechanics Co., Ltd. | Bulk acoustic wave resonator |
| US20180205360A1 (en) | 2017-01-17 | 2018-07-19 | Samsung Electro-Mechanics Co., Ltd. | Bulk acoustic wave resonator |
| JP2018537672A (ja) | 2015-11-20 | 2018-12-20 | コーボ ユーエス，インコーポレイティド | せん断モード応答を高めるために活性領域の機械的締め付けを少なくした音響共振器 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4719623B2 (ja) * | 2006-05-31 | 2011-07-06 | 太陽誘電株式会社 | フィルタ |
| JP5319491B2 (ja) * | 2009-10-22 | 2013-10-16 | 太陽誘電株式会社 | 圧電薄膜共振子 |
| CN102223142B (zh) * | 2011-08-13 | 2019-09-10 | 张�浩 | 声波谐振器 |
| KR101922878B1 (ko) * | 2016-07-14 | 2018-11-29 | 삼성전기 주식회사 | 탄성파 공진기 장치 |
| DE102017117870B3 (de) * | 2017-08-07 | 2018-12-27 | RF360 Europe GmbH | BAW-Resonator mit reduzierten Störmoden und erhöhtem Gütefaktor |
-
2019
- 2019-04-04 CN CN201910272274.9A patent/CN111786648A/zh active Pending
- 2019-09-10 JP JP2021525820A patent/JP7199758B2/ja active Active
- 2019-09-10 WO PCT/CN2019/105089 patent/WO2020199506A1/zh active Application Filing
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007006501A (ja) | 2005-06-23 | 2007-01-11 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | 交互配列の縁部構造を利用した音響共振器の性能向上 |
| JP2007295310A (ja) | 2006-04-25 | 2007-11-08 | Matsushita Electric Works Ltd | Ｂａｗ共振器 |
| WO2010095640A1 (ja) | 2009-02-20 | 2010-08-26 | 宇部興産株式会社 | 薄膜圧電共振器およびそれを用いた薄膜圧電フィルタ |
| JP2013138425A (ja) | 2011-12-27 | 2013-07-11 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | ブリッジを備えるソリッドマウントバルク音響波共振器構造 |
| JP2016194630A (ja) | 2015-04-01 | 2016-11-17 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法、および電子機器 |
| JP2018537672A (ja) | 2015-11-20 | 2018-12-20 | コーボ ユーエス，インコーポレイティド | せん断モード応答を高めるために活性領域の機械的締め付けを少なくした音響共振器 |
| JP2017147719A (ja) | 2016-02-17 | 2017-08-24 | サムソン エレクトロ−メカニックス カンパニーリミテッド． | 音響共振器及びその製造方法 |
| US20180152168A1 (en) | 2016-11-30 | 2018-05-31 | Samsung Electro-Mechanics Co., Ltd. | Bulk acoustic wave resonator |
| US20180205360A1 (en) | 2017-01-17 | 2018-07-19 | Samsung Electro-Mechanics Co., Ltd. | Bulk acoustic wave resonator |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020199506A1 (zh) | 2020-10-08 |
| JP2022507320A (ja) | 2022-01-18 |
| CN111786648A (zh) | 2020-10-16 |
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