JP2018537672A - せん断モード応答を高めるために活性領域の機械的締め付けを少なくした音響共振器 - Google Patents
せん断モード応答を高めるために活性領域の機械的締め付けを少なくした音響共振器 Download PDFInfo
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- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
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- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Manufacturing & Machinery (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
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Abstract
Description
本出願は、2015年11月20日に出願した仮特許出願番号62/257,954の権利を主張し、その開示内容は参照によりその全体が本明細書に組み込まれる。
Claims (19)
- 微小電気機械システム(MEMS)共振器装置であって、
基板と;
前記基板の少なくとも一部を覆って配置された、バルク音波共振器構造体であって、前記バルク音波共振構造体は、前記基板の一面からの法線に対して大部分が非平行の配向分布を示すC軸を含む圧電材料、前記圧電材料を覆って配置されている上面電極、および前記圧電材料と前記基板の間に配置されている下面電極を含み、ここで前記圧電材料の少なくとも一部は前記上面電極と前記下面電極の間に配置されて活性領域を形成している、バルク音波共振器構造体、
を含み、
ここで前記活性領域は横方向を非活性領域によって囲まれ、前記非活性領域の少なくとも一部の圧電材料の厚さは前記活性領域の圧電材料の厚さより薄く、前記活性領域の境界に沿った前記非活性領域の少なくとも上部に圧電材料を欠いており、前記活性領域の圧電材料の横方向に対向する両縁の少なくとも上側部分に沿って少なくとも1つの非連続部分を規定し、ここで前記少なくとも1つの非連続部分は前記バルク音波共振器構造体のせん断モード操作時に最大横方向変位の方向における前記活性領域の機械的締め付けが少なくなるように構成されている、MEMS共振器装置。 - 前記上面電極と前記下面電極の間に配置されている前記圧電材料の少なくとも一部は称呼厚を含み、
前記活性領域の横方向の周囲の少なくとも一部は前記称呼厚の0%〜約50%の範囲の厚さを有する前記圧電材料の薄厚部と境界を接している、請求項1に記載のMEMS共振器装置。 - 前記活性領域は前記バルク音波共振器構造体のせん断モード操作時の前記最大横方向変位の方向に平行な長さを含み、前記長さは前記活性領域の第1の長手方向端部と第2の長手方向端部の間に延びており、
前記少なくとも1つの非連続部分は少なくとも部分的に前記第1の長手方向端部と前記第2の長手方向端部と境界を接している、請求項1に記載のMEMS共振器装置。 - 前記少なくとも1つの非連続部分は前記活性領域の周囲の少なくとも約60%を囲んでいる、請求項1に記載のMEMS共振器装置。
- 前記バルク音波共振器構造体は前記基板と前記下面電極の間に配置されている音響反射構造体を含む、請求項1に記載のMEMS共振器装置。
- 前記基板は窪みを規定し、前記窪みと前記バルク音波共振器構造体の間に支持層が配置されている、請求項1に記載のMEMS共振器装置。
- 前記活性領域は前記バルク音波共振器構造体のせん断モード操作時の前記最大横方向変位の方向に平行な長さを含み、
前記活性領域は前記長さに垂直な幅を含み、
前記長さは前記幅より長い、請求項1に記載のMEMS共振器装置。 - 前記活性領域は前記バルク音波共振器構造体のせん断モード操作時の最大横方向変位の方向に平行な長さと、前記長さに垂直な幅を含み、
前記圧電材料は、前記活性領域の長さに垂直な方向に延びていて、前記活性領域の両方の長手方向端部の中間で前記活性領域と接触している、少なくとも1つの固定部分を含む、請求項1に記載のMEMS共振器装置。 - 前記上面電極または前記下面電極の少なくとも1つの少なくとも一部が前記圧電材料の前記少なくとも1つの固定部分に沿って延びている、請求項8に記載のMEMS共振器装置。
- 前記活性領域の横方向の両縁を覆って配置されている誘電体材料をさらに含む、請求項1に記載のMEMS共振器装置。
- 前記上面電極、前記下面電極または前記活性領域の少なくとも1つの横方向の縁のうちの少なくとも1つの少なくとも一部を覆って気密層が配置されている、請求項1に記載のMEMS共振器装置。
- 請求項1〜11のいずれか1項に記載のMEMS共振器装置と、
前記活性領域の少なくとも一部を覆って配置されている少なくとも1つの機能化材料と
前記活性領域を含む流路と、
を含む流体装置。 - 前記少なくとも1つの機能化材料は特異的結合材料または非特異的結合材料の少なくとも1つを含む、請求項12の流体装置。
- 前記少なくとも1つの機能化材料と前記上面電極の間に配置されている自己組織化単層をさらに含む、請求項12の流体装置。
- 前記上面電極と前記自己組織化単層の間に配置されている界面層をさらに含む、請求項14の流体装置。
- 生物学的または化学的感知方法であって、前記方法が:
請求項12に記載の前記流体装置の前記流路に、標的種を含む流体を供給する工程であって、ここで前記供給工程は、前記標的種の少なくともいくつかが前記少なくとも1つの機能化材料に結合するように構成されている、工程と、
前記活性領域でバルク音波を誘発する工程と、
前記バルク音波共振器構造体の周波数特性、振幅特性または位相特性のうちの少なくとも1つの変化を感知し、前記少なくとも1つの機能化材料に結合する標的種の存在または量の少なくとも1つを示す工程と、
を含む方法。 - 微小電気機械システム(MEMS)共振器装置の製造方法であって、前記方法は:
基板と、前記基板の少なくとも一部を覆って配置され、前記基板の一面からの法線に対して大部分が非平行の配向分布を示すC軸を有する圧電材料と、前記基板と前記圧電材料の少なくとも一部との間に配置されている下面電極とを含む基礎構造体を形成する工程であって、ここで前記圧電材料が称呼厚を含む、工程と;
前記圧電材料の一部を除去して、前記称呼厚の0%〜約50%の範囲の厚さを有する前記圧電材料の薄厚部を規定する工程と;
前記圧電材料の一部を覆って上面電極を形成する工程であって、ここで前記称呼厚を含む前記圧電材料の少なくとも一部が前記上面電極と前記下面電極の間に配置され、バルク音波共振器構造体の活性領域を形成する工程と、
を含み、
ここで前記活性領域の横方向の周囲の少なくとも一部は前記圧電材料の薄厚部と境界を接しており、前記バルク音波共振器構造体のせん断モード操作時に最大横方向変位の方向における前記活性領域の機械的締め付けが少なくなるように構成されている少なくとも1つの非連続部分を規定する、製造方法。 - 前記上面電極、前記下面電極または前記活性領域の少なくとも1つの横方向の縁のうちの少なくとも1つの少なくとも一部を覆って気密層を堆積する工程をさらに含む、請求項17に記載の方法。
- 前記上面電極の少なくとも一部を覆って自己組織化単層を形成する工程と、前記自己組織化単層の少なくとも一部を覆って少なくとも1つの機能化材料を適用する工程とをさらに含み、ここで前記少なくとも1つの機能化材料の少なくとも一部が前記活性領域で示される、請求項17に記載の方法。
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