JP7194109B2 - 窒化ジルコニウム及びito系ir反射層を有する熱処理可能なコーティングされた物品 - Google Patents

窒化ジルコニウム及びito系ir反射層を有する熱処理可能なコーティングされた物品 Download PDF

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Publication number
JP7194109B2
JP7194109B2 JP2019546196A JP2019546196A JP7194109B2 JP 7194109 B2 JP7194109 B2 JP 7194109B2 JP 2019546196 A JP2019546196 A JP 2019546196A JP 2019546196 A JP2019546196 A JP 2019546196A JP 7194109 B2 JP7194109 B2 JP 7194109B2
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Prior art keywords
coated article
reflective layer
layer
nitride
ito
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Japanese (ja)
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JP2020512966A5 (enExample
JP2020512966A (ja
Inventor
ル・イーウェイ
ディン・グオウェン
クラベロ・セサル
シュウェイガート・ダニエル
ツァン・グイツェン
ジュハースト・スコット
リー・ダニエル
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Guardian Glass LLC
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Guardian Glass LLC
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001General methods for coating; Devices therefor
    • C03C17/002General methods for coating; Devices therefor for flat glass, e.g. float glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3482Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • C23C14/0652Silicon nitride
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B9/00Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
    • E06B9/24Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/208Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/281Interference filters designed for the infrared light
    • G02B5/282Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/94Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/948Layers comprising indium tin oxide [ITO]
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B9/00Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
    • E06B9/24Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
    • E06B2009/2417Light path control; means to control reflection

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Civil Engineering (AREA)
  • Architecture (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP2019546196A 2017-02-23 2018-02-22 窒化ジルコニウム及びito系ir反射層を有する熱処理可能なコーティングされた物品 Active JP7194109B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/440,175 2017-02-23
US15/440,175 US10392689B2 (en) 2017-02-23 2017-02-23 Heat treatable coated article having zirconium nitride and ITO based IR reflecting layers
PCT/US2018/019086 WO2018156675A1 (en) 2017-02-23 2018-02-22 Heat treatable coated article having zirconium nitride and ito based ir reflecting layers

Publications (3)

Publication Number Publication Date
JP2020512966A JP2020512966A (ja) 2020-04-30
JP2020512966A5 JP2020512966A5 (enExample) 2021-11-04
JP7194109B2 true JP7194109B2 (ja) 2022-12-21

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JP2019546196A Active JP7194109B2 (ja) 2017-02-23 2018-02-22 窒化ジルコニウム及びito系ir反射層を有する熱処理可能なコーティングされた物品

Country Status (12)

Country Link
US (2) US10392689B2 (enExample)
EP (1) EP3585746A1 (enExample)
JP (1) JP7194109B2 (enExample)
KR (1) KR20190128058A (enExample)
CN (1) CN110914209B (enExample)
AU (1) AU2018225650B2 (enExample)
BR (1) BR112019017470A2 (enExample)
MX (1) MX2019010054A (enExample)
MY (1) MY192934A (enExample)
PH (1) PH12019501737A1 (enExample)
RU (1) RU2761227C2 (enExample)
WO (1) WO2018156675A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11155493B2 (en) 2010-01-16 2021-10-26 Cardinal Cg Company Alloy oxide overcoat indium tin oxide coatings, coated glazings, and production methods
FR3078964B1 (fr) * 2018-03-14 2020-03-27 Eurokera S.N.C. Plaque vitroceramique pour insert de cheminee et procede de fabrication
US11028012B2 (en) * 2018-10-31 2021-06-08 Cardinal Cg Company Low solar heat gain coatings, laminated glass assemblies, and methods of producing same
WO2020132322A1 (en) 2018-12-19 2020-06-25 Aquifi, Inc. Systems and methods for joint learning of complex visual inspection tasks using computer vision

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016513056A (ja) 2013-02-20 2016-05-12 サン−ゴバン グラス フランス 熱放射反射コーティングを有する板ガラス
JP2016079051A (ja) 2014-10-14 2016-05-16 旭硝子株式会社 積層膜付き透明基板およびその製造方法
WO2016199676A1 (ja) 2015-06-11 2016-12-15 旭硝子株式会社 膜積層体および合わせガラス

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DE3941797A1 (de) 1989-12-19 1991-06-20 Leybold Ag Belag, bestehend aus einem optisch wirkenden schichtsystem, fuer substrate, wobei das schichtsystem insbesondere eine hohe antireflexwirkung aufweist, und verfahren zur herstellung des belags
AU680786B2 (en) 1995-06-07 1997-08-07 Guardian Industries Corporation Heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same
US6188512B1 (en) 1998-11-02 2001-02-13 Southwall Technologies, Inc. Dual titanium nitride layers for solar control
FR2799005B1 (fr) 1999-09-23 2003-01-17 Saint Gobain Vitrage Vitrage muni d'un empilement de couches minces agissant sur le rayonnement solaire
US6524714B1 (en) 2001-05-03 2003-02-25 Guardian Industries Corp. Heat treatable coated articles with metal nitride layer and methods of making same
US6749941B2 (en) 2002-03-14 2004-06-15 Guardian Industries Corp. Insulating glass (IG) window unit including heat treatable coating with silicon-rich silicon nitride layer
US6994910B2 (en) 2003-01-09 2006-02-07 Guardian Industries Corp. Heat treatable coated article with niobium nitride IR reflecting layer
CA2513921C (en) 2003-02-13 2009-07-21 Guardian Industries Corp. Coated articles with nitrided layer and methods of making same
US6890659B2 (en) 2003-04-25 2005-05-10 Guardian Industries Corp. Heat treatable coated article with niobium zirconium inclusive IR reflecting layer and method of making same
FR2858816B1 (fr) * 2003-08-13 2006-11-17 Saint Gobain Substrat transparent comportant un revetement antireflet
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US9221713B2 (en) * 2011-12-21 2015-12-29 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Coated article with low-E coating having barrier layer system(s) including multiple dielectric layers, and/or methods of making the same
KR20140130694A (ko) 2012-03-05 2014-11-11 쌩-고벵 글래스 프랑스 열 복사선을 반사하는 코팅을 갖는 시트
FR3012133B1 (fr) * 2013-10-17 2021-01-01 Saint Gobain Procede d'obtention d'un substrat revetu par un empilement comprenant une couche d'oxyde transparent conducteur
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JP2016513056A (ja) 2013-02-20 2016-05-12 サン−ゴバン グラス フランス 熱放射反射コーティングを有する板ガラス
JP2016079051A (ja) 2014-10-14 2016-05-16 旭硝子株式会社 積層膜付き透明基板およびその製造方法
WO2016199676A1 (ja) 2015-06-11 2016-12-15 旭硝子株式会社 膜積層体および合わせガラス

Also Published As

Publication number Publication date
US10392689B2 (en) 2019-08-27
US20180237899A1 (en) 2018-08-23
CN110914209A (zh) 2020-03-24
AU2018225650B2 (en) 2022-11-10
BR112019017470A2 (pt) 2020-03-31
WO2018156675A1 (en) 2018-08-30
EP3585746A1 (en) 2020-01-01
CN110914209B (zh) 2022-06-24
KR20190128058A (ko) 2019-11-14
MY192934A (en) 2022-09-15
US20190360088A1 (en) 2019-11-28
RU2019129499A (ru) 2021-03-23
RU2019129499A3 (enExample) 2021-06-15
MX2019010054A (es) 2019-12-19
PH12019501737A1 (en) 2020-03-16
JP2020512966A (ja) 2020-04-30
RU2761227C2 (ru) 2021-12-06
AU2018225650A1 (en) 2019-08-15
US10526692B2 (en) 2020-01-07

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