JP7194109B2 - 窒化ジルコニウム及びito系ir反射層を有する熱処理可能なコーティングされた物品 - Google Patents
窒化ジルコニウム及びito系ir反射層を有する熱処理可能なコーティングされた物品 Download PDFInfo
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- JP7194109B2 JP7194109B2 JP2019546196A JP2019546196A JP7194109B2 JP 7194109 B2 JP7194109 B2 JP 7194109B2 JP 2019546196 A JP2019546196 A JP 2019546196A JP 2019546196 A JP2019546196 A JP 2019546196A JP 7194109 B2 JP7194109 B2 JP 7194109B2
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- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 title claims description 10
- 239000011521 glass Substances 0.000 claims description 76
- 239000000758 substrate Substances 0.000 claims description 54
- 238000000576 coating method Methods 0.000 claims description 52
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 46
- 239000011248 coating agent Substances 0.000 claims description 44
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 40
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 29
- 229910052726 zirconium Inorganic materials 0.000 claims description 29
- 150000004767 nitrides Chemical class 0.000 claims description 28
- 229910052709 silver Inorganic materials 0.000 claims description 14
- 230000005540 biological transmission Effects 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910008328 ZrNx Inorganic materials 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 18
- 238000005496 tempering Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 4
- 229910001120 nichrome Inorganic materials 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- -1 ZrN Chemical compound 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- UVGLBOPDEUYYCS-UHFFFAOYSA-N silicon zirconium Chemical compound [Si].[Zr] UVGLBOPDEUYYCS-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
- G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
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- C03C2217/948—Layers comprising indium tin oxide [ITO]
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- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
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Description
実施例
Claims (23)
- ガラス基材によって支持されたコーティングを含むコーティングされた物品であって、前記コーティングが、
前記ガラス基材上の、窒化ケイ素を含む第1の誘電体層と、
前記ガラス基材上の、ITOを含む第1の赤外線(IR)反射層であって、前記窒化ケイ素を含む第1の誘電体層が、少なくとも前記ガラス基材とITOを含む前記第1のIR反射層との間に位置する、ITOを含む前記第1のIR反射層と、
前記ガラス基材上の、少なくともITOを含む前記第1のIR反射層の上にある、窒化ケイ素を含む第2の誘電体層と、
ジルコニウムの窒化物を含む第2の層のIR反射層であって、窒化ケイ素を含む前記第2の誘電体層が、少なくともITOを含む前記第1のIR反射層と、前記ジルコニウムの窒化物を含む前記第2のIR反射層との間に位置するように、前記ガラス基材上の、少なくとも窒化ケイ素を含む前記第1の誘電体層及び前記第2の誘電体層の上にある、第2の層のIR反射層と、
前記ガラス基材上の、少なくとも前記ジルコニウムの窒化物を含む前記第2のIR反射層の上にある、窒化ケイ素を含む第3の誘電体層と、を含み、
ITOを含む前記第1のIR反射層が、300~800Åの厚さであり、かつ前記ジルコニウムの窒化物を含む前記第2のIR反射層が、130~300Åの厚さであり、
窒化ケイ素を含む前記第2の誘電体層が、200~450Åの厚さであり、
前記コーティングが、銀ベースのIR反射層を含有せず、かつ2つのIR反射層のみを含み、
前記コーティングが、0.30以下の垂直放射(En)値を有し、
前記コーティングされた物品が、約15~80%の可視透過率、15%以下のフィルム側可視反射率、0.45以下のSHGC値、-14.0~+1.6のガラス側反射a*値、及び少なくとも1.10の光対太陽利得比(LSG)を有する、コーティングされた物品。 - 窒化ケイ素を含む前記第2の誘電体層が、前記第1のIR反射層と前記第2のIR反射層との間に位置し、かつそれらと直接接触する、請求項1のいずれか一項に記載のコーティングされた物品。
- 前記ジルコニウムの窒化物を含む前記第2のIR反射層が、ZrNxを含み、式中、xが、0.8~1.2である、請求項1又は2のいずれか一項に記載のコーティングされた物品。
- 前記ジルコニウムの窒化物を含む前記第2のIR反射層が、ZrNxを含み、式中、xが、0.9~1.1である、請求項1~3のいずれか一項に記載のコーティングされた物品。
- 前記第2のIR反射層が、0~8%の酸素(原子%)を含有する、請求項1~4のいずれか一項に記載のコーティングされた物品。
- 前記第2のIR反射層が、0~5%の酸素(原子%)を含有する、請求項1~5のいずれか一項に記載のコーティングされた物品。
- 前記第2のIR反射層が、前記ジルコニウムの窒化物から本質的になる、請求項1~6のいずれか一項に記載のコーティングされた物品。
- 前記コーティングが、ジルコニウムの酸化物を含むオーバーコートを更に含む、請求項1~7のいずれか一項に記載のコーティングされた物品。
- 前記コーティングされた物品が、約20~70%の可視透過率、及び少なくとも1.17の光対太陽利得比(LSG)を有する、請求項1~8のいずれか一項に記載のコーティングされた物品。
- 前記コーティングされた物品が、少なくとも1.25の光対太陽利得比(LSG)を有する、請求項1~9のいずれか一項に記載のコーティングされた物品。
- 前記コーティングされた物品が、12%以下のフィルム側可視反射率を有する、請求項1~10のいずれか一項に記載のコーティングされた物品。
- 前記コーティングされた物品が、10%以下のフィルム側可視反射率を有する、請求項1~11のいずれか一項に記載のコーティングされた物品。
- 前記ガラス基材が、透明ガラス基材である、請求項1~12のいずれか一項に記載のコーティングされた物品。
- 前記コーティングされた物品が、-10~+1.6のガラス側反射a*値、及び-15~+15のフィルム側反射a*値を有する、請求項1~13のいずれか一項に記載のコーティングされた物品。
- 窒化ケイ素を含む前記誘電体層のうちの1つ以上が、酸素を更に含み、かつアルミニウムでドープされている、請求項1~14のいずれか一項に記載のコーティングされた物品。
- 前記コーティングされた物品が、モノリシック窓である、請求項1~15のいずれか一項に記載のコーティングされた物品。
- モノリシックに測定された前記コーティングされた物品が、0.40以下のSHGC値を有する、請求項1~16のいずれか一項に記載のコーティングされた物品。
- モノリシックに測定された前記コーティングされた物品が、0.33以下のSHGC値を有する、請求項1~17のいずれか一項に記載のコーティングされた物品。
- ITOを含む前記第1のIR反射層が、前記ジルコニウムの窒化物を含む前記第2のIR反射層よりも少なくとも100Å物理的に厚い、請求項1~18のいずれか一項に記載のコーティングされた物品。
- ITOを含む前記第1のIR反射層が、前記ジルコニウムの窒化物を含む前記第2のIR反射層よりも少なくとも300Å物理的に厚い、請求項1~19のいずれか一項に記載のコーティングされた物品。
- ガラス基材によって支持されたコーティングを含むコーティングされた物品であって、前記コーティングが、
前記ガラス基材上の、窒化ケイ素を含む第1の誘電体層と、
前記ガラス基材上の、ITOを含む第1の赤外線(IR)反射層であって、前記窒化ケイ素を含む第1の誘電体層が、少なくとも前記ガラス基材とITOを含む前記第1のIR反射層との間に位置する、ITOを含む前記第1のIR反射層と、
前記ガラス基材上の、少なくともITOを含む前記第1のIR反射層の上にある、窒化ケイ素を含む第2の誘電体層と、
ジルコニウムの窒化物を含む第2の層のIR反射層であって、窒化ケイ素を含む前記第2の誘電体層が、少なくとも、ITOを含む前記第1のIR反射層と、前記ジルコニウムの窒化物を含む前記第2のIR反射層との間に位置するように、前記ガラス基材上の、少なくとも窒化ケイ素を含む前記第1の誘電体層及び前記第2の誘電体層の上にある、第2の層のIR反射層と、
前記ガラス基材上の、少なくとも前記ジルコニウムの窒化物を含む前記第2のIR反射層の上にある、窒化ケイ素を含む第3の誘電体層と、を含み、
ITOを含む前記第1のIR反射層が、300~800Åの厚さであり、かつ前記ジルコニウムの窒化物を含む前記第2のIR反射層が、130~300Åの厚さであり、
窒化ケイ素を含む前記第2の誘電体層が、200~450Åの厚さであり、
前記コーティングが、銀ベースのIR反射層を含有せず、かつ2つのIR反射層のみを含み、
前記コーティングが、0.30以下の垂直放射(En)値を有し、及び
前記コーティングされた物品が、約15~80%の可視透過率及び少なくとも1.17の光対太陽利得比(LSG)を有する、コーティングされた物品。 - ITOを含む前記第1のIR反射層が、前記ジルコニウムの窒化物を含む前記第2のIR反射層よりも少なくとも100Å物理的に厚い、請求項21に記載のコーティングされた物品。
- ITOを含む前記第1のIR反射層が、前記ジルコニウムの窒化物を含む前記第2のIR反射層よりも少なくとも300Å物理的に厚い、請求項21又は22に記載のコーティングされた物品。
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