JP7185486B2 - processing equipment - Google Patents

Description

The present invention relates to a processing apparatus comprising at least holding means, processing means for processing a workpiece held by the holding means, and control means for controlling the processing means.

For example, when machining a workpiece with a cutting device, as shown in Patent Document 1, based on an imaged image of a cutting groove, for example, the value of the formed groove width, the size of chipping, the cutting position, etc. A so-called kerf check is performed to determine whether multiple items are appropriate.

As a result of the kerf check, if any of the check items is not proper, the cutting device issues a warning assuming that an error has occurred. When a warning is issued by the cutting device, the operator stops the warning, checks the captured image and the set allowance for the groove width, etc., and determines whether the cause of the error is blade breakage or abnormal wear. It is judged whether it is due to erroneous detection of an error due to adhesion of cutting fluid or the like, or due to the allowable value being set too narrowly, and appropriate measures are taken. Then, after completing the countermeasures against the error, the cutting is restarted.

JP 2013-074198 A

However, in a mass production factory, a single operator may operate dozens of processing equipment. may be chased by In that case, the processing apparatus in which the error occurred is left unattended without taking any action against the error just by stopping the warning. For example, when the workpiece is a semiconductor wafer having a bonding pad or the like formed on its surface, if the processing apparatus in which the error occurs is left for a long period of time as described above, the cutting fluid, which is pure water, will remain in contact with the cutting fluid for a long period of time. It can also be left on the wafer in a paused state of processing, which can lead to corrosion of the bonding pads and damage to the device. SUMMARY OF THE INVENTION It is an object of the present invention to prevent a processing apparatus from being left unattended for a long period of time without any response by an operator after a warning is issued due to the occurrence of an error.

The present invention is a machining apparatus comprising holding means for holding a workpiece, machining means for machining the workpiece held by the holding means, and control means for controlling at least the machining means. A warning transmission means for transmitting a warning when an error occurs during the operation of the processing apparatus, a warning stop button for stopping the transmission of the warning, and a restoration process completion button for completing the restoration process of the error. and, if the recovery process completion button is not pressed within a predetermined time period after the warning stop button is pressed, the control means issues another warning as an additional warning from the warning transmission means. is transmitted , and the additional warning is different from the warning that is transmitted when an error occurs during operation of the processing apparatus .

an upper limit number storage unit for storing an upper limit number of times that the control means can stop warning for the same error; A warning stop button actuation number counting section for counting the number of times the warning stop button is pressed, and the number counted by the warning stop button actuation number counting section reaches the upper limit number of times stored in the upper limit number storage section. It is desirable to further include a warning stop canceling unit that does not stop the transmission of the warning even if the warning stop button is pressed when the warning stop button is pressed.

In the present invention, if the recovery process completion button is not pressed even after a predetermined time has passed since the warning stop button was pressed, the warning is issued again as an additional warning from the warning issuing means. , there is an effect of preventing the operator from leaving the machine unattended for a long period of time.
Further, by making the additional warning different from the warning issued when an error occurs during operation of the processing apparatus, it is possible to clearly notify the operator of the additional warning.
Further, the control means stores an upper limit number of times that the warning can be stopped for the same error, and an upper limit number storage unit for storing the upper limit number of times to stop the warning for the same error. When the number of times counted by the warning stop button actuation number counting section that counts the number of times the button is pressed and the number of times counted by the warning stop button actuation number counting section reaches the upper limit number of times stored in the upper limit number storage section, after that, By further providing a warning stop canceling unit that does not stop sending the warning even if the warning stop button is pressed, it is possible to more reliably prevent the operator from leaving the error without responding to it.

It is a perspective view showing a to-be-processed object. It is a perspective view showing the whole processing apparatus. It is a sectional view showing cutting. FIG. 5 is a cross-sectional view showing how a cut groove is captured during a kerf check; It is a figure showing the display in the screen of a touch panel.

1 Configuration of Processing Apparatus The workpiece W shown in FIG. 1 is, for example, a semiconductor wafer having devices D in regions defined by division lines L on the surface Wa and bonding pads thereon. However, the workpiece W is not limited to a semiconductor wafer having bonding pads.

Various processing can be performed on the workpiece W by various processing apparatuses. Examples of processing devices include grinding devices, laser processing devices, cutting tools, cleaning devices, and expanding devices, but are not limited to these. A processing apparatus 1 shown in FIG. 2 as an example of a processing apparatus is a device for cutting a workpiece W such as a semiconductor wafer by cutting a blade. A dicing tape T is attached to the back surface Wb of the workpiece W during cutting of the semiconductor wafer. By attaching the dicing tape T, the workpiece W is fixed on the dicing tape T even after cutting. A workpiece W is supported by an annular frame F with a dicing tape T interposed therebetween.

The processing apparatus 1 includes holding means 6 for holding the workpiece W. As shown in FIG. The holding means 6 comprises a chuck table 60 holding the workpiece W, for example. Clamps 61 for supporting the annular frame F are arranged at the four corners of the chuck table 60 . Below the chuck table 60, for example, rotating means (not shown) for rotating the chuck table 60 and cutting feed means (not shown) for moving the chuck table 60 in the X-axis direction are arranged. The rotating means and cutting feed means are covered by a cover 62 and a bellows cover 63 attached thereto. play a protective role. When the chuck table 60 moves in the X-axis direction together with the cover 62, the bellows cover 63 expands and contracts.

The processing apparatus 1 includes processing means 2 for processing a workpiece W. As shown in FIG. As shown in FIG. 2, the processing means 2 includes a first cutting unit 20 and a second cutting unit 21 aligned in the Y-axis direction. The first cutting unit 20 includes a first cutting blade 200 and a motor (not shown) that rotates the first cutting blade 200. Similarly, the second cutting unit 21 rotates the second cutting blade 210 and the second cutting blade 210. and a motor (not shown).

The processing means 2 includes an indexing means (not shown) for moving the first cutting blade 200 and the second cutting blade 210 in the Y-axis direction, and an indexing means (not shown) for moving the first cutting blade 200 and the second cutting blade 210 in the Z-axis direction. A not-shown feeding means for moving is connected. As shown in FIG. 3, the chuck table 60 is moved toward the rotating first cutting blade 200 and the second cutting blade 210, and the first cutting blade 200 and the second cutting blade 210 are moved to the surface Wa of the workpiece W. By cutting 210, two cutting grooves can be formed in the workpiece W at the same time.

As shown in FIG. 2 , the processing device 1 includes control means 3 . The control means 3 controls at least the processing means 2, cutting feeding means, indexing feeding means, cutting feeding means and the like.

The processing device 1 includes imaging means 7 . The image capturing means 7 includes a microscope 70, an illumination means, etc., and for example, captures an image of the planned division line L formed on the surface Wa of the workpiece W before the cutting process is performed, so that the workpiece W and the blade are separated. In addition to being used to align the position of the workpiece, while cutting a plurality of planned division lines of the workpiece, images are taken of the cutting grooves formed in the workpiece W by cutting, and the captured images are analyzed. It is also used for the so-called kerf check, etc., to check whether the cutting process has been performed properly.

For example, an alignment means (not shown) is connected to the imaging means 7, and the alignment means is used for alignment between the processing means 2 and the workpiece W. As shown in FIG.

The imaging means 7 is also connected to image analysis means (not shown) for analyzing an image taken in the kerf check, for example, and as shown in FIG. The image of the cut groove thus formed is imaged from above (+Z side) of the workpiece W by the imaging means 7, and then the captured image is analyzed to measure the groove width of the formed cut groove. In this embodiment, two images are captured during the kerf check, and the kerf check is performed based on the captured two captured images of the workpiece W. FIG.

As shown in FIG. 2, the processing apparatus 1 includes an input means 4 for inputting processing conditions and responding to errors. FIG. 5 shows an example of screen display when the input means 4 is the touch panel 4A. The touch panel 4A includes a warning stop button 40 for stopping transmission of an error warning, and a recovery process completion button 41 for restarting the apparatus after handling the error.

The touch panel 4A displays two images 43a and 43b of the cutting groove Wg that have been picked up. An image 43a and an image 43b are images of the cutting groove Wg formed in the workpiece W by the first cutting blade 200 and the second cutting blade 210, respectively. Based on the images 43a and 43b, the width of the groove formed by cutting (Width in FIG. 5) and the actual cutting position from the planned division line L are determined by the image analysis means (not shown). A cutting position deviation (Hair Line Offset in FIG. 5) representing the amount of deviation of the tip and a chipping size (Chipping Max in FIG. 5), which is the maximum chipping value of the chip that occurred during cutting, were measured. The measurement results 44a and 44b are displayed in the upper left corners of the images 43a and 43b, respectively. Z1 written on the touch panel 4A is a symbol for identifying cutting by the first cutting blade 200, and similarly, Z2 is for identifying cutting by the second cutting blade 210. . Around the center of the touch panel 4A, preset allowable values for margin width, allowable groove width, allowable cutting position deviation, and allowable chipping size are displayed as setting allowable values 45a to 45g. ing. At the time of the kerf check, whether or not the measurement result 44a and the measurement result 44b are within the range of preset allowable values 45a to 45g is used as a reference to determine whether the values are appropriate.

An error display field 47 for warning the operator of the occurrence of an error is provided on the upper part of the touch panel 4A. In the error display column 47, an error may be displayed by blinking characters representing the content of the error. For example, a mechanism may be provided in which the displayed characters become larger each time an error due to the same cause is repeated.

As shown in FIG. 1 , the processing apparatus 1 includes warning transmission means 5 . The warning transmission means 5 has an indicator lamp 50 and a speaker 51 . The indicator lamp 50 lights, flashes, or the like to visually notify or warn the operator of the occurrence of an error, for example, when an error occurs. The indicator lamp 50 preferably has a configuration that can emit light of various colors. Similarly, when an error occurs, the speaker 51 receives an electric signal or the like from a sound source (not shown), for example, and emits a warning sound in order to warn of the occurrence of an error. The speaker 51 can emit a plurality of types of sounds as warning sounds, and it is even better if the sound elements such as the volume, pitch, and timbre of the sounds can be changed according to the number of times the warnings are emitted. .

In order for the operator to stop the warning sound that is transmitted when an error occurs, the warning transmission means 5 keeps pressing the recovery process completion button even after a predetermined period of time, for example 10 minutes, has passed after pressing the warning stop button 40 shown in FIG. If 41 is not pressed, a first additional warning is issued as an additional warning. Such predetermined time is stored in a storage element such as a memory provided in the control means 3, for example. Then, when the stored time elapses, the first additional warning is transmitted from the warning transmitting means 5 under the control of the control means 3. - 特許庁The warning sound of this first additional warning may be the same sound as the first warning sound or a different sound. After issuing the first additional warning, the warning stop button 40 is pressed again, and if the recovery process completion button 41 is not pressed even after the predetermined time has elapsed, a second additional warning is issued. As described above, it is possible to adopt a configuration in which the cycle of issuing an additional warning after stopping the warning continues until the recovery process completion button 41 is pressed.

At this time, the time interval from one warning transmission to the next warning transmission takes a predetermined time as described above, and is shortened, for example, 10 minutes, 8 minutes, 6 minutes, . . . You can become

In addition, with respect to the specification of emitting a different warning sound for each number of warnings, for example, the warning sound may be different for each number of warnings, or the first warning sound and the first additional warning sound may be the same, but the warning sound of the second additional warning may be different. In that case, for example, it is more preferable to set the warning sound and music so that the sense of danger increases as the number of warnings increases. At this time, the control means 3 plays a role of causing the warning transmission means 5 to re-transmit a warning as an additional warning.

The control means 3 provided in the processing apparatus 1 includes an upper limit number storage section 30 , a warning stop button actuation number counting section 32 , and a warning stop cancellation section 34 . The upper limit number of times storage unit 30 can store the upper limit number of warning stops that can stop the warning for the same error. The warning stop button actuation count unit 32 can count the number of times the warning stop button 40 is pushed after the warning sending means 5 issues a warning until the restoration process completion button 41 is pushed. In the warning stop canceling section 34, when the number of times counted by the warning stop button actuation count counting section 32 reaches the upper limit number of times stored in the upper limit number storage section 30, the warning stop button 40 is pressed thereafter without warning. It can be controlled so as not to stop the transmission.

As described above, since the control means 3 provided in the processing apparatus 1 is provided with the upper limit number storage unit 30, for example, the information on the upper limit number of warning sounds stored in the upper limit number storage unit 30 is sent as a warning. By transmitting to the means 5, it is possible to transmit a different warning sound only when the number of warning sounds has reached the upper limit.

In addition, since the control means 3 is provided with the warning stop button actuation frequency counting section 32 for counting the number of times the warning stop button 40 is actuated, for example, while the warning is issued by the warning issuing means 5, the warning stop button actuation count is counted. Information on the number of operations of the warning stop button 40 counted by the part 32 is transmitted to the touch panel 4A, so that the warning is displayed on the touch panel 4A as to how many times the warning is counted from the start of the cutting. will also be able to

When an error occurs, a display such as flashing by the indicator lamp 50, a warning sound emitted from the speaker 51, and a warning display displayed on the upper portion of the touch panel 4A are appropriately combined to warn the operator.

2 Operation of Processing Apparatus Operation of the processing apparatus 1 when cutting the workpiece W using the processing apparatus 1 configured as described above will be described.

(Alignment)
For example, a dicing tape T is attached to the back surface Wb of the workpiece W, which is a semiconductor wafer, as shown in FIG. After that, it is placed on the chuck table 60 of the processing apparatus 1 shown in FIG. The workpiece W placed on the chuck table 60 is fixed on the chuck table 60 by being gripped by the annular frame F with four clamps 61 arranged on the four sides of the chuck table 60 .

Next, the workpiece W held on the chuck table 60 and the processing means 2 are aligned. Alignment is performed using imaging means 7 and alignment means connected to imaging means 7 . The imaging means 7 captures an image of the planned division line L of the workpiece W from above (+Z side) of the workpiece W, and based on the information of the captured image, the alignment means connected to the imaging means 7 determines the pattern. perform matching. Alignment means executes image processing such as pattern matching, and along with detection of the coordinate position of the planned dividing line L where the first cutting blade 200 and the second cutting blade 210 should cut, the first cutting blade 200 and the second cutting blade 210 are moved in the Y-axis direction by indexing means. As a result, alignment between the planned division line L to be cut and the processing means 2 is completed.

(cutting)
After that, the first cutting blade 200 and the second cutting blade 210 are lowered in the -Z direction by the cutting feed means and positioned at the cutting start position. Then, the chuck table 60 is moved in the +X direction by the cutting feed means from the cutting start position shown in FIG. It cuts into the planned division line L. After the cutting of one line is completed, the first cutting blade 200 and the second cutting blade 210 are once raised in the +Z direction and retreated from the workpiece W. After that, the first cutting blade 200 and the second cutting blade 210 are moved in the Y-axis direction by the indexing means, and are positioned, for example, to cut a line next to the previously cut line. Thereafter, similarly, the first cutting blade 200 and the second cutting blade 210 are similarly lowered in the -Z direction to position them at the cutting start position, and the chuck table 60 is moved in the +X direction to perform cutting. By performing similar cutting while indexing and feeding the first cutting blade 200 and the second cutting blade 210 in the Y-axis direction by intervals of the line to be divided L, all the lines to be divided L in the same direction are cut.

After cutting all the planned division lines L in the same direction, the chuck table 60 is rotated by 90 degrees, and the above series of cutting processes are repeated to cut along all the planned division lines L, for example, A workpiece W is divided into very small, substantially rectangular parallelepiped chips. At this time, the first cutting blade 200 and the second cutting blade 210 are caused to cut from the front surface Wa to the back surface Wb of the workpiece W to completely cut individual chips. The first cutting blade 200 and the second cutting blade 210 are cut to a predetermined depth without cutting completely, thereby forming a cutting groove Wg of a predetermined depth, and then thinning the back surface Wb. Processing methods such as manufacturing individual chips by grinding are also conceivable.

(kerf check)
For example, the image of the cutting groove Wg formed on the surface Wa of the workpiece W is imaged by the imaging means 7 for each cutting of several planned dividing lines L, and the captured image is analyzed to perform appropriate cutting. Check if it has been processed.

One portion of each of the cutting groove Wg formed by the first cutting blade 200 and the cutting groove Wg formed by the second cutting blade 210 is imaged by the imaging means 7 . Images 43a and 43b of the cutting groove Wg formed by the first cutting blade 200 and the second cutting blade 210 are displayed on the touch panel 4A shown in FIG. As described above, on the screen of the touch panel 4A, Z1 and Z2 are used as codes for identifying the first cutting blade 200 and the second cutting blade 210, respectively.

After the imaging by the imaging means 7, for example, the groove width of the cut groove Wg formed, the cutting position deviation, and the chipping size are measured by the image analysis means. Measurement results are displayed as 44a and 44b in the upper left of image 43a and image 43b.

(Occurrence of error)
As shown in FIG. 5, regarding the chipping size of the cutting groove Wg formed by the second cutting blade 210, the measurement result 44b shows that the value of the chipping size (Chipping Max) is 0.012 mm. The allowable value is 0.010 mm when looking at the set allowable value of 45g for the chipping size of Z2, and the measured result exceeds the preset allowable value. Therefore, in order to notify the operator of the occurrence of the error and prompt the operator to deal with the error, a warning is issued by the warning transmission means 5 and an error is displayed in the error display field 47 of the touch panel 4A. The operation of the processing apparatus 1 when an error related to cutting occurs and an error warning is issued will be described below.

(Send warning)
For example, in response to the occurrence of an error, the indicator lamp 50 provided in the warning transmission means 5 lights/blinks. Also, a speaker 51, which is also provided in the warning transmitting means 5, receives an electric signal from the sound source and transmits a warning sound (for example, piyo, piyo, piyo...). Furthermore, the contents of the error are displayed in the error display column 47 of the touch panel 4A. For example, when the operator who notices the issued warning presses the warning stop button 40 on the upper right of the touch panel 4A, for example, the light of the indicator lamp 50 that has been lit is extinguished, or the warning is issued from the speaker 51. It stops, and the display of the error display column 47 of the touch panel 4A disappears.

The cause of the error that occurred in this cutting process is, for example, that the chipping size is detected to be larger than the actual size due to halation or the like caused on the surface Wa of the workpiece W. As a countermeasure for such an error, for example, the permissible value 45g of the chipping size in Z2 may be changed.

(Transmission of the first additional warning)
However, it is assumed that, for example, 10 minutes, which is the predetermined time, has passed since the operator pressed the warning stop button 40 without taking any action against the above error occurring in the processing apparatus 1 . Then, the indicator lamp 50 lights up and blinks again. At this time, the color and lighting pattern of the lighting/blinking lights may be the same as or different from those at the time of the first warning. Also, a warning sound of the first additional warning (for example, piyoyo, piyoyo, piyoyo...) is transmitted from the speaker 51 provided in the warning transmission means 5 . The warning sound of the first additional warning may be the same as or different from the first warning sound. Furthermore, the content of the error is displayed again in the error display field 47 of the touch panel 4A. At this time, for example, if the error display in the error display column 47 in the first additional warning is made to use characters larger than those displayed at the time of the first warning, the display at the time of the first warning is emphasized. Even better. After that, for example, when the operator who notices the transmitted first additional warning similarly presses the warning stop button 40 on the upper right of the touch panel 4A, the indicator lamp 50 is similarly extinguished and the transmission of the first additional warning is stopped. Then, the error display in the error display column 47 disappears.

(Send second additional warning)
Then, in the same manner as described above, it is assumed that the predetermined time has elapsed since the operator pressed the warning stop button 40 without taking any action against the error in the processing apparatus 1 again. Then, a second additional warning is similarly issued. The warning sound of the second additional warning (eg, beep, beep, beep, . . . ) may be the same as or different from the warning sound of the first additional warning or the first warning sound. For example, as the number of warnings increases, the volume of the warning sound increases, and the tone and melody of the warning sound give a sense of danger.

(No warning stop until recovery processing is completed)
The upper limit number of times that the warning can be stopped is stored in the upper limit number storage unit 30 in advance. Then, the number of warnings counted by the warning stop button actuation number counting section 32 during the period from when the warning is issued by the warning sending means 5 until the restoration process completion button 41 is pressed is stored in the upper limit number storage section 30. When the stored upper limit number of times is reached and an additional warning is subsequently issued, even if the warning stop button 40 is actuated, the warning is not stopped due to the effect of the warning stop canceling part 34. - 特許庁

For example, the predetermined upper limit number of times is set to 3 times. Since the second additional warning is the third warning in total counting from the first warning, after stopping the second additional warning by the warning stop button 40, when the third additional warning is transmitted, the warning stop button Pressing 40 does not stop the warning.

For example, by transmitting the information of the upper limit number of warning sounds stored in the upper limit number storage unit 30 to the warning transmitting means 5, the warning transmitting means 5 generates a different warning only when the number of warning sounds reaches the upper limit number of times. emit sound.

For example, the warning stop button actuation number count unit 32 and the touch panel 4A are interlocked, and the number of times the warning is issued is displayed in the error display field 47 above the touch panel 4A.

By performing such control by the processing apparatus 1, it is possible to intermittently warn the operator of the occurrence of an error and prompt the operator to take action against the error. You can prevent the situation from happening.

1: processing device 2: processing means 20: first cutting unit 200: first cutting blade 21: second cutting unit 210: second cutting blade Z1: display of first cutting blade on touch panel Z2: second cutting blade on touch panel Display of cutting blade 3: control means 4: input means 4A: touch panel 40: warning stop button 41: recovery process completion button (execution button)
43a: Image of cutting groove formed by first cutting blade 43b: Image of cutting groove formed by second cutting blade 44a: Measurement results 44b: Measurement results 45a to 45g: Set allowable values 47: Error display 5: Warning Transmitting means 50: Indicator light 51: Speaker 6: Holding means 60: Chuck table 61: Clamp 62: Cover 63: Accordion cover 7: Imaging means 70: Microscope W: Workpiece Wa: Front surface Wb: Back surface Wg: Cutting groove
D: Device L: Planned division line T: Dicing tape F: Annular frame

Claims (2)

A processing apparatus comprising holding means for holding a workpiece, processing means for processing the workpiece held by the holding means, and control means for controlling at least the processing means,
a warning transmission means for transmitting a warning when an error occurs during operation of the processing device;
Input means including a warning stop button for stopping the transmission of the warning and a recovery process completion button for completing the error recovery process,
If the recovery process completion button is not pressed within a predetermined period of time after the warning stop button is pressed, the control means causes the warning transmission means to re-transmit a warning as an additional warning,
The additional warning is different from the warning issued when an error occurs during operation of the processing equipment,
processing equipment. The control means
an upper limit number storage unit that stores an upper limit number of times that a warning can be stopped for the same error;
a warning stop button actuation frequency count unit that counts the number of times the warning stop button is pressed after the warning transmission means issues the warning and before the recovery process completion button is pressed;
When the number of times counted by the warning stop button actuation number counting unit reaches the upper limit number of times stored in the upper limit number storage unit, the warning stop button is thereafter pressed to prevent the transmission of the warning from being stopped. and a stop cancellation unit,
The processing apparatus according to claim 1.

Images