JP7184786B2 - 窒化チタン及びｉｔｏ系ｉｒ反射層を有する熱処理可能なコーティングされた物品 - Google Patents

窒化チタン及びｉｔｏ系ｉｒ反射層を有する熱処理可能なコーティングされた物品 Download PDF

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Publication number
JP7184786B2
JP7184786B2 JP2019546013A JP2019546013A JP7184786B2 JP 7184786 B2 JP7184786 B2 JP 7184786B2 JP 2019546013 A JP2019546013 A JP 2019546013A JP 2019546013 A JP2019546013 A JP 2019546013A JP 7184786 B2 JP7184786 B2 JP 7184786B2
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Prior art keywords
reflective layer
coated article
layer
glass substrate
nitride
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JP2019546013A
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Japanese (ja)
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JP2020512255A5 (enExample
JP2020512255A (ja
Inventor
ボイス・ブレント
ル・イーウェイ
ディン・グオウェン
クラベロ・セサル
シュウェイガート・ダニエル
リ・ミン・フー
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Guardian Glass LLC
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Guardian Glass LLC
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0652—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
    • E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/281—Interference filters designed for the infrared light
    • G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/90—Other aspects of coatings
    • C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/948—Layers comprising indium tin oxide [ITO]
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
    • E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
    • E06B2009/2417—Light path control; means to control reflection

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Civil Engineering (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Architecture (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Vapour Deposition (AREA)
JP2019546013A 2017-02-23 2018-02-21 窒化チタン及びｉｔｏ系ｉｒ反射層を有する熱処理可能なコーティングされた物品 Active JP7184786B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/440,065 US10392300B2 (en) 2017-02-23 2017-02-23 Heat treatable coated article having titanium nitride and ITO based IR reflecting layers
US15/440,065 2017-02-23
PCT/US2018/018936 WO2018156568A1 (en) 2017-02-23 2018-02-21 Heat treatable coated article having titanium nitride and ito based ir reflecting layers

Publications (3)

Publication Number Publication Date
JP2020512255A JP2020512255A (ja) 2020-04-23
JP2020512255A5 JP2020512255A5 (enExample) 2021-12-02
JP7184786B2 true JP7184786B2 (ja) 2022-12-06

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JP2019546013A Active JP7184786B2 (ja) 2017-02-23 2018-02-21 窒化チタン及びｉｔｏ系ｉｒ反射層を有する熱処理可能なコーティングされた物品

Country Status (14)

Country Link
US (3) US10392300B2 (enExample)
EP (1) EP3585745B9 (enExample)
JP (1) JP7184786B2 (enExample)
KR (1) KR20190128057A (enExample)
CN (1) CN110461790B (enExample)
AU (1) AU2018225127B2 (enExample)
BR (1) BR112019017246A2 (enExample)
ES (1) ES3012538T3 (enExample)
MX (1) MX2019010063A (enExample)
MY (1) MY192925A (enExample)
PH (1) PH12019501738B1 (enExample)
PL (1) PL3585745T3 (enExample)
RU (1) RU2754900C2 (enExample)
WO (1) WO2018156568A1 (enExample)

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FR3061172B1 (fr) * 2016-12-26 2020-03-27 Saint-Gobain Glass France Dispositif chauffant comprenant un substrat verrier revetu sur ses deux faces
US10392300B2 (en) 2017-02-23 2019-08-27 Guardian Glass, LLC Heat treatable coated article having titanium nitride and ITO based IR reflecting layers
US11709297B2 (en) 2018-09-24 2023-07-25 Vitro Flat Glass Llc Articles coated with coatings containing light absorption materials
CN109385611A (zh) * 2018-11-14 2019-02-26 东莞市银泰丰光学科技有限公司 一种超硬耐磨ito玻璃
FR3090622B1 (fr) * 2018-12-21 2022-07-22 Saint Gobain Vitrage de contrôle solaire comprenant deux couches à base de nitrure de titane
KR102299610B1 (ko) * 2019-01-30 2021-09-08 연세대학교 산학협력단 향상된 내마모성 및 유연성을 갖는 투명 나노막 적층 구조체
KR20210074757A (ko) * 2019-12-12 2021-06-22 쌩-고벵 글래스 프랑스 박막 다층 코팅이 구비된 투명 기재
FR3107703B1 (fr) * 2020-02-28 2023-06-23 Saint Gobain Vitrage de controle solaire comprenant une couche de nitrure de titane
EP3925938A1 (en) * 2020-06-19 2021-12-22 Saint-Gobain Glass France Heatable low-e glazing comprising two layers based on titanium nitride
FR3111631A1 (fr) 2020-06-19 2021-12-24 Saint-Gobain Glass France Vitrage de controle solaire comprenant une couche a base de nitrure de titane et une couche a base d’ito
FR3118440B1 (fr) * 2020-12-31 2022-12-23 Saint Gobain Vitrage antisolaire comprenant une couche mince à base de nitrure de titane et une couche de nitrure de silicium sous-stœchiométriques en azote.
WO2024160567A1 (de) * 2023-02-02 2024-08-08 Saint-Gobain Glass France Beschichtetes substrat mit wärmedämmenden und antireflektiven eigenschaften
WO2024199894A1 (de) 2023-03-28 2024-10-03 Saint-Gobain Glass France Scheibe mit einer titancarbid-beschichtung
WO2025247813A1 (de) 2024-05-28 2025-12-04 Saint-Gobain Glass France Scheibenanordnung mit einer titancarbid-beschichtung

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WO2016060082A1 (ja) 2014-10-14 2016-04-21 旭硝子株式会社 積層膜付き透明基板およびその製造方法
JP2016513056A (ja) 2013-02-20 2016-05-12 サン−ゴバン グラス フランス 熱放射反射コーティングを有する板ガラス

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WO2015197969A1 (fr) 2014-06-24 2015-12-30 Saint-Gobain Glass France Vitrage anticondensation
WO2016060082A1 (ja) 2014-10-14 2016-04-21 旭硝子株式会社 積層膜付き透明基板およびその製造方法

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EP3585745A1 (en) 2020-01-01
PL3585745T3 (pl) 2025-03-17
KR20190128057A (ko) 2019-11-14
US20200270173A1 (en) 2020-08-27
PH12019501738B1 (en) 2022-12-07
CN110461790A (zh) 2019-11-15
US10584058B2 (en) 2020-03-10
ES3012538T9 (en) 2025-05-28
AU2018225127B2 (en) 2022-06-02
RU2019126803A (ru) 2021-03-23
EP3585745B9 (en) 2025-04-09
US10793469B2 (en) 2020-10-06
EP3585745B1 (en) 2025-01-01
RU2754900C2 (ru) 2021-09-08
RU2019126803A3 (enExample) 2021-07-06
US20180237336A1 (en) 2018-08-23
MX2019010063A (es) 2019-10-15
WO2018156568A1 (en) 2018-08-30
AU2018225127A1 (en) 2019-08-15
PH12019501738A1 (en) 2020-06-01
ES3012538T3 (en) 2025-04-09
US20200010360A1 (en) 2020-01-09
MY192925A (en) 2022-09-15
CN110461790B (zh) 2023-04-04
JP2020512255A (ja) 2020-04-23
BR112019017246A2 (pt) 2020-04-14
US10392300B2 (en) 2019-08-27

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