JP7162551B2 - processing equipment - Google Patents

Description

The present invention relates to a processing apparatus, and more particularly to a processing apparatus for centering a workpiece.

A conveying mechanism that extracts one work piece from a cassette containing a plurality of work pieces, temporarily places the work piece on guide rails, positions the work piece at a predetermined position, and then holds the work piece on a chuck table. It has been known.

In particular, a processing device (cutting device) that transports the workpiece to the chuck table by rotating the bottom of the guide rail to open and close the guide rail to raise and lower the guide rail can reduce the cost by reducing the unit that raises and lowers the workpiece. (see, for example, Patent Document 1). However, in the processing apparatus disclosed in Patent Literature 1, a workpiece temporarily placed on a pair of guide rails is displaced by several millimeters in the X-axis direction (direction between the guide rails).

Therefore, there has been proposed a processing apparatus that positions the workpiece at a predetermined position in the X-axis direction by increasing or decreasing the distance between the guide rails (see, for example, Patent Document 2).

JP 2016-207808 A JP-A-11-204461

The processing apparatus shown in the above-mentioned Patent Document 2 requires a unit for controlling the interval between the guide rails, so the number of parts increases, and there is a problem that it is desired to reduce the cost and weight.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and an object of the present invention is to provide a processing apparatus capable of reducing cost and weight.

In order to solve the above-described problems and achieve the object, the processing apparatus of the present invention includes a cassette mounting portion on which a cassette containing a plurality of workpieces is mounted, and a cassette mounting portion on which a cassette is mounted. a loading/unloading means for loading/unloading the workpiece from the cassette, a temporary placement section for temporarily placing the workpiece carried out by the loading/unloading means, and holding the workpiece transferred from the temporary placement section. A processing apparatus comprising a chuck table, a processing unit for processing a workpiece held on the chuck table, and a processing feed unit for processing and feeding the chuck table in an X-axis direction, the cassette mounting portion The temporary placement section is arranged in the Y-axis direction perpendicular to the X-axis direction, and the loading/unloading means moves the gripping section for gripping the workpiece contained in the cassette and the gripping section in the Y-axis direction. a moving part, wherein the temporary placement part has a bottom part that extends in the Y-axis direction and supports the workpiece, and a side wall part, and the bottom part opens and closes in a double-sided manner; An elevating part for raising and lowering the guide rail and the bottom part of the guide rail are interlocked to press the work piece from the outside toward the center to move the work piece to a predetermined position in the X-axis direction. abutting portion for positioning, lowering the guide rail toward the chuck table positioned directly below the workpiece supported by the guide rail, opening the bottom of the guide rail to expose the workpiece; is placed on the chuck table while being positioned at a predetermined position in the X-axis direction.

In the processing apparatus, the workpiece is a frame unit in which the workpiece is fixed to the opening of the annular frame with tape, and the chuck table fixes the frame unit with a diameter smaller than the gap between the pair of guide rails. can be

In the above processing apparatus, the abutment section includes an abutment block set movably toward the center from the outer circumference of the workpiece supported by the guide rail, an urging part positioned at a retracted position retracting to the outside of the workpiece; and an action portion that presses the block toward the workpiece with a force exceeding the biasing force of the biasing portion.

The processing apparatus may further include a movement assisting section that ejects gas from the bottom of the guide rail to assist movement of the workpiece by the abutting section.

ADVANTAGE OF THE INVENTION This invention is effective in the ability to achieve cost reduction and weight reduction.

FIG. 1 is a perspective view showing a configuration example of a processing apparatus according to Embodiment 1. FIG. FIG. 2 is a perspective view showing a main part of a temporary placement section of the processing apparatus shown in FIG. 1. FIG. 3 is another perspective view showing the main part of the temporary placement section of the processing apparatus shown in FIG. 1. FIG. FIG. 4 is a front view of the temporary placement section of the processing apparatus shown in FIG. 1 as seen from the cassette side. FIG. 5 is a cross-sectional view taken along line VV in FIG. FIG. 6 is a front view seen from the cassette side schematically showing a state in which the guide rails of the temporary placement section of the processing apparatus shown in FIG. FIG. 7 is a perspective view showing a main part of the temporary placement section shown in FIG. 6. FIG. 8 is another perspective view showing the main part of the temporary placement section shown in FIG. 6. FIG. FIG. 9 is a front view of the temporary placement portion shown in FIG. 6 as seen from the cassette side. FIG. 10 is a front view, viewed from the cassette side, schematically showing a state in which the workpiece supported by the guide rails shown in FIG. 6 is placed on the holding surface of the chuck table. FIG. 11 is a perspective view showing the main part of the temporary placement part shown in FIG. 7, with the bottom part rotated toward the open state. FIG. 12 is another perspective view showing the main part of the temporary placement section shown in FIG. 11. FIG. FIG. 13 is a front view of the temporary placement portion shown in FIG. 11 as seen from the cassette side. FIG. 14 is a perspective view showing a main portion of the temporary placement portion shown in FIG. 7 with the bottom portion positioned in an open state. 15 is another perspective view showing the main part of the temporary placement section shown in FIG. 14. FIG. FIG. 16 is a front view of the temporary placement portion shown in FIG. 14 as seen from the cassette side. 17 is a cross-sectional view taken along line XVII--XVII in FIG. 14. FIG. 18 is a front view, viewed from the cassette side, schematically showing a state in which the bottom portion of the guide rail shown in FIG. 7 is positioned in an open state; FIG. FIG. 19 is a front view schematically showing a state in which the guide rail shown in FIG. 18 is raised, viewed from the cassette side.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A processing apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a processing apparatus according to Embodiment 1. FIG. FIG. 2 is a perspective view showing a main part of a temporary placement section of the processing apparatus shown in FIG. 1. FIG. 3 is another perspective view showing the main part of the temporary placement section of the processing apparatus shown in FIG. 1. FIG. FIG. 4 is a front view of the temporary placement section of the processing apparatus shown in FIG. 1 as seen from the cassette side. FIG. 5 is a cross-sectional view taken along line VV in FIG.

A processing apparatus 1 according to Embodiment 1 shown in FIG. 1 is a cutting apparatus that cuts (corresponds to processing) a workpiece 210 of a workpiece 200 . In the first embodiment, the workpiece 210 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, gallium, or the like. A workpiece 210 has devices 203 formed in regions partitioned in a grid pattern by a plurality of division lines 202 formed in a grid pattern on a surface 201 .

Also, the workpiece 210 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thin central portion and a thick outer peripheral portion. A rectangular package substrate, a ceramic substrate, a ferrite substrate, or a substrate containing at least one of nickel and iron may be used. In the first embodiment, the back surface 204 of the workpiece 200 is attached to a tape 205 having an annular frame 206 attached to the outer peripheral edge of the workpiece 200 , and the workpiece 210 is fixed to the opening 207 of the annular frame 206 with the tape 205 . frame unit.

The processing apparatus 1 shown in FIG. 1 is an apparatus that holds a workpiece 210 of a workpiece 200 on a chuck table 30 and cuts the workpiece 200 along a dividing line 202 with a cutting blade 41 . As shown in FIG. 1, the processing apparatus 1 includes a cassette elevator 8 which is a cassette mounting portion on which a cassette 7 is mounted, a loading/unloading unit 10 which is a loading/unloading means, a temporary placement portion 20, and a chuck table 30. , a cutting unit 40 which is a processing unit, a camera unit 50, a cleaning unit 60, a transport unit (not shown), and a control unit 100.

As shown in FIG. 1, the processing apparatus 1 also includes an X-axis movement unit, which is a processing feed unit that relatively moves the chuck table 30 and the cutting unit 40 in the X-axis direction parallel to the holding surface 31 of the chuck table 30 . A Y-axis moving unit 80, which is an indexing feed unit that relatively moves the unit 70, the chuck table 30, and the cutting unit 40 in the Y-axis direction parallel to the holding surface 31 and perpendicular to the X-axis direction, and the chuck table 30. A Z-axis moving unit 90, which is a cutting feed unit, relatively moves the cutting unit 40 in the Z-axis direction perpendicular to the holding surface 31 and parallel to the vertical direction. As shown in FIG. 1, the processing apparatus 1 is a so-called facing dual type cutting apparatus having two cutting units 40, that is, a two-spindle dicer.

The cassette 7 is a storage container that is formed in a box shape and stores a plurality of workpieces 200 at intervals in the Z-axis direction. The cassette 7 has an opening 7-1 for inserting and removing the workpiece 200. As shown in FIG. The opening 7-1 faces the temporary placement section 20. As shown in FIG. In the first embodiment, the cassette elevator 8 has the cassette 7 placed on its upper surface, and moves the cassette 7 up and down in the Z-axis direction by a motor (not shown).

The loading/unloading unit 10 unloads the workpiece 200 from the cassette 7 placed on the cassette elevator 8 and loads the workpiece 200 into the cassette 7 . The loading/unloading unit 10 includes a gripping portion 11 that grips the workpiece 200 stored in the cassette 7 and a moving portion 12 that moves the gripping portion 11 in the Y-axis direction. The grip portion 11 faces the opening 7-1 of the cassette 7 in the Y-axis direction. In Embodiment 1, the gripper 11 grips the annular frame 206 of the workpiece 200 . The moving portion 12 includes an arm portion 13 having a grip portion 11 attached to its lower end, and a moving unit (not shown) that moves the arm portion 13 in the Y-axis direction. It comprises driven rollers spaced apart in the axial direction, and an endless belt that is stretched over these rollers, circulates around the outer periphery of these rollers, and has an arm portion 13 attached thereto.

The temporary placement section 20 temporarily stores the workpiece 200 unloaded from the cassette 7 by the loading/unloading unit 10 and temporarily stores the workpiece 200 after cleaning by the cleaning unit 60 . The temporary placement section 20 is arranged at a position facing the opening 7-1 of the cassette 7 in the Y-axis direction. That is, the cassette elevator 8 and the temporary placement section 20 are arranged in the Y-axis direction. The temporary placement section 20 includes a pair of guide rails 21 , a connecting member 22 that connects the pair of guide rails 21 , and an elevating section 23 .

The guide rail 21 extends linearly in parallel with the Y-axis direction and can support the workpiece 200 . The guide rail 21 faces the end of the opening 7-1 of the cassette 7 in the X-axis direction, and can support the annular frame 206 of the workpiece 200 in the first embodiment. The connecting member 22 connects both ends of the pair of guide rails 21 in the Y-axis direction. The lifter 23 lifts and lowers the guide rail 21 in the Z-axis direction. In the first embodiment, the lifter 23 includes an air cylinder 24 that lifts the guide rail 21 in the Z-axis direction. In Embodiment 1, the air cylinder 24 raises and lowers the connecting member 22 in the Z-axis direction. The detailed configuration of the temporary placement section 20, particularly the guide rail 21 will be described later.

The chuck table 30 sucks and holds the workpiece 210 of the workpiece 200 transferred from the temporary placement section 20 on the holding surface 31 . The chuck table 30 has a disk shape, and a holding surface 31 for holding the workpiece 210 is formed of porous ceramic or the like. The chuck table 30 has a diameter smaller than the distance between the pair of guide rails 21 . In addition, the chuck table 30 is moved in the X-axis direction by the X-axis moving unit 70 over a machining area below the cutting unit 40 and a loading/unloading area separated from the bottom of the cutting unit 40 and where the workpiece 200 is loaded/unloaded. and is rotatable about an axis parallel to the Z-axis direction by a rotary drive source. The chuck table 30 is connected to a vacuum suction source (not shown), and is sucked by the vacuum suction source to suction-hold the workpiece 210 placed on the holding surface 31 and fix the workpiece 200, that is, the frame unit. . In the first embodiment, the chuck table 30 sucks and holds the back surface 204 side of the work 210 via the tape 205 .

The cutting unit 40 cuts (corresponds to machining) the workpiece 210 held on the chuck table 30 . The cutting units 40 are provided to be movable in the Y-axis direction by the Y-axis movement unit 80 with respect to the work 210 held on the chuck table 30, and are also movable in the Z-axis direction by the Z-axis movement unit 90. is provided in

One of the cutting units 40 is attached to one of the pillars 4 of the gate-shaped support frame 3 erected from the apparatus main body 2 via a Y-axis movement unit 80, a Z-axis movement unit 90, etc., as shown in FIG. is provided. The other cutting unit 40 is provided on the other column 5 of the support frame 3 via a Y-axis moving unit 80, a Z-axis moving unit 90, etc., as shown in FIG. Note that the support frame 3 connects the upper ends of the pillars 4 and 5 with a horizontal beam 6 .

The cutting unit 40 can position the cutting blade 41 at an arbitrary position on the holding surface 31 of the chuck table 30 by the Y-axis moving unit 80 and the Z-axis moving unit 90 . The cutting unit 40 includes a spindle housing 43 which is movably provided in the Y-axis direction and the Z-axis direction by a Y-axis moving unit 80 and a Z-axis moving unit 90, and a spindle housing 43 which is rotatably provided around the axis. A spindle 42 rotated by a motor and having a cutting blade 41 attached to its tip is provided. The cutting blade 41 is an extremely thin cutting grindstone having a substantially ring shape.

The camera unit 50 images the work 210 held by the holding surface 31 of the chuck table 30 . In Embodiment 1, the camera unit 50 is fixed to the cutting unit 40 so as to move together with the cutting unit 40 . The camera unit 50 includes an imaging element that captures an image of the area to be divided of the workpiece 210 before cutting held on the chuck table 30 . The imaging device is, for example, a CCD (Charge-Coupled Device) imaging device or a CMOS (Complementary MOS) imaging device. The camera unit 50 captures an image of the workpiece 210 held on the chuck table 30 to obtain an image for performing alignment for positioning the workpiece 210 and the cutting blade 41, etc., and transmits the obtained image to the control unit 100. Output.

The X-axis movement unit 70 feeds the chuck table 30 in the X-axis direction, which is the feed direction for processing. The Y-axis moving unit 80 is for indexing and feeding the cutting unit 40 in the Y-axis direction, which is the indexing direction. The Z-axis moving unit 90 feeds the cutting unit 40 in the Z-axis direction, which is the feeding direction.

The X-axis moving unit 70, the Y-axis moving unit 80, and the Z-axis moving unit 90 are known ball screws 81, 91 that are rotatably provided around the axis, and known ball screws 81, 91 that rotate the ball screws 81, 91 around the axis. pulse motors 82, 92 and well-known guide rails 83, 93 for supporting the chuck table 30 or cutting unit 40 so as to be movable in the X-axis direction, the Y-axis direction or the Z-axis direction.

The processing apparatus 1 also includes an X-axis direction position detection unit (not shown) for detecting the position of the chuck table 30 in the X-axis direction, and a Y-axis direction position detection unit (not shown) for detecting the position of the cutting unit 40 in the Y-axis direction. A detection unit and a Z-axis direction position detection unit (not shown) for detecting the position of the cutting unit 40 in the Z-axis direction are provided. The X-axis direction position detection unit and the Y-axis direction position detection unit are moved in the X-axis direction or the Y-axis direction by a linear scale parallel to the X-axis direction or the Y-axis direction and the X-axis movement unit 70 or the Y-axis movement unit 80. It can be composed of a reading head which is movably provided and reads the scale of the linear scale. The X-axis direction position detection unit and the Y-axis direction position detection unit detect the position of the chuck table 30 in the X-axis direction or the position of the cutting unit 40 in the Y-axis direction based on the information indicating the scale of the linear scale read by the reading head. It is output to the control unit 100 as information to indicate. The Z-axis direction position detection unit detects the Z-axis direction position of the cutting unit 40 based on the number of pulses of the pulse motor 92 that rotates the ball screw 91 around the axis. to the control unit 100.

The cleaning unit 60 cleans the workpiece 200 from which the workpiece 210 has been cut. The cleaning unit 60 includes a chuck table 61 that sucks and holds the workpiece 210 and rotates around an axis parallel to the Z-axis direction, and a cleaning water nozzle (not shown) that supplies cleaning water to the workpiece 210 sucked and held on the chuck table 30 . Prepare. Further, in Embodiment 1, the chuck table 61 of the cleaning unit 60 is provided so as to be vertically movable in the Z-axis direction by means of an illustrated air cylinder or the like. The transport unit transports the workpiece 200 having the workpiece 210 cut by the cutting unit 40 from the chuck table 30 to the chuck table 61 of the cleaning unit 60 .

The control unit 100 controls each of the above-described units of the processing apparatus 1 to cause the processing apparatus 1 to process the workpiece 200 with respect to the workpiece 210 . Specifically, the control unit 100 causes the loading/unloading unit 10 to support the workpiece 200 before cutting from the cassette 7 to the temporary placement section 20 on the guide rails 21 , and then causes the temporary placement section 20 to support the guide rails 21 . The workpiece 210 of the supported workpiece 200 is placed on the holding surface 31 of the chuck table 30 . After sucking and holding the workpiece 210 on the chuck table 30 , the control unit 100 causes the X-axis movement unit 70 to move the chuck table 30 and causes the camera unit 50 to image the workpiece 210 on the chuck table 30 . The control unit 100 performs alignment for aligning the positions of the workpiece 210 and the cutting blade 41, and relatively moves the chuck table 30 and the cutting blade 41 of the cutting unit 40 along the dividing line 202 to divide. The cutting blade 41 is cut into the line 202 .

After causing the cutting blade 41 to cut into all of the planned dividing lines 202 , the control unit 100 releases the suction holding of the chuck table 30 and causes the transfer unit to transfer the workpiece 200 on the chuck table 30 to the cleaning unit 60 . Let The control unit 100 causes the cleaning unit 60 to clean the workpiece 200 , causes the temporary placement section 20 to support the workpiece 200 on the chuck table 61 of the cleaning unit 60 on the guide rails 21 , and then moves the workpiece 200 to the carry-in/out unit 10 . It is carried into the cassette 7.

The control unit 100 includes an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input/output interface device. is a computer having The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the processing device 1 to the processing device 1 via the input/output interface device. output to each unit that

In addition, the control unit 100 is connected to a display unit (not shown) for displaying the state of the processing operation and images captured by the camera unit 50, and an input unit used by the operator to register processing content information. The display unit is configured by a liquid crystal display device or the like. The input unit is configured by an external input device such as a touch panel or a keyboard provided on the display screen of the display unit.

Next, this specification describes the configuration of the temporary placement section 20 , particularly the guide rails 21 . As shown in FIGS. 2, 3 and 4, the guide rail 21 includes a side wall member 211, a bottom member 212, and a rotating device 213 (shown in FIG. 1). The side wall member 211 is attached to the connecting member 22 and has a horizontally flat upper wall portion 214 and a side wall portion 215 connected to the ends of the guide rails 21 of the upper wall portion 214 on the side apart from each other. Prepare. The side wall portion 215 is formed flat along the vertical direction.

The bottom member 212 is formed in a band plate shape extending in the Y-axis direction, and as shown in FIGS. It is rotatably provided at the lower end of the side wall portion 215 over the open state. Note that the rotation center of the bottom member 212 is parallel to the Y-axis direction. Further, the center of rotation of the bottom member 212 is provided at the ends of the guide rails 21 which are separated from each other in the closed state in which the upper surface is parallel to the horizontal direction. Bottom member 212 supports annular frame 206 of workpiece 200 on top surface 217 in the closed state. The bottom member 212 does not support the annular frame 206 of the workpiece 200 in the open state.

The rotating device 213 is a rotary cylinder that is attached to the side wall portion 215 and has an output shaft that rotates about the axis attached to the bottom member 212 . The rotating device 213 rotates the bottom member 212 between the closed state and the open state. In this way, the bottom members 212 of the pair of guide rails 21 are opened and closed like double doors by rotating the bottom members 212 .

Further, in the first embodiment, the temporary placement section 20 includes the abutting section 25 and the movement assisting section 26 . The abutting portion 25 is provided on each guide rail 21 . In the embodiment, the abutting portion 25 is provided above the chuck table 30 positioned in the loading/unloading area. As the bottom member 212 rotates to open from the closed state to the open state, the abutting portion 25 moves the workpiece 200 along the X-axis direction along the pair of guide rails in conjunction with the rotation of the bottom member 212 . 21 from the outside toward the center to position the workpiece 200 at a predetermined position in the X-axis direction. In the first embodiment, the abutting portion 25 moves the annular frame 206 of the workpiece 200 to the X direction as the bottom member 212 rotates to open from the closed state to the open state, that is, in conjunction with the rotation of the bottom member 212 . The outer sides of the pair of guide rails 21 are pressed toward the center along the axial direction.

As shown in FIGS. 2, 3 and 5, the abutting portion 25 is provided in a notch portion 216 formed by cutting out a portion of the side wall portion 215 of the side wall member 211 of each guide rail 21, and is connected to the pair of link members. 251 , a pair of abutting blocks 252 , a pair of urging portions 253 and an action portion 27 .

Each link member 251 is formed in a doglegged shape in plan view, and the central portion in the longitudinal direction is located on the innermost side of the pair of guide rails 21 . Each link member 251 is attached to the upper wall portion 214 of the side wall member 211 so as to be rotatable around the central portion. The rotation center of the link member 251 is parallel to the Z-axis direction. Also, the pair of link members 251 are spaced apart in the Y-axis direction.

The abutment block 252 is set so as to be movable from the outer circumference toward the center of the workpiece 200 supported by the guide rails 21 . The abutment block 252 is formed in a columnar shape parallel to the Z-axis direction and attached to one end of the pair of link members 251 adjacent to each other. The abutment block 252 is attached to one end of a link member 251 that is rotatable around the center, so that it can move from the outer periphery toward the center of the workpiece 200 supported by the guide rail 21. set.

The urging portion 253 positions the abutment block 252 at the retracted position shown in FIG. In Embodiment 1, the urging portion 253 is provided at the other end of the pair of link members 251 away from each other, and the abutment block 252 is oriented outwardly of the workpiece 200 supported by the guide rails 21 . The link member 251 is biased. When the abutting block 252 is positioned at the retracted position, the biasing portion 253 abuts against the inner surface of the notch portion 216 to restrict the displacement of the abutting block 252 to the outside of the workpiece 200 from the retracted position. ing.

The action part 27 is fixed to the bottom member 212 of the guide rail 21, retracts from the abutment block 252 when the bottom member 212 is in the closed state, and moves the abutment block 252 when the bottom member 212 is in the open state. The workpiece 200 is pressed with a force exceeding the biasing force of the biasing portion 253 . The acting portion 27 is fixed to the lower surface of the bottom member 212 and arranged in the center of the notch portion 216 in the Y-axis direction.

When the bottom member 212 is positioned in the closed state, the action portion 27 includes an outer protruding portion 271 protruding to the outside of the pair of guide rails 21 from the bottom member 212 and an upwardly extending portion extending upward from the tip of the outer protruding portion 271 . and a housing portion 272 .

The upwardly extending portion 272 has a cam surface 273 at the central portion in the Y-axis direction. When the bottom member 212 is in the closed state, the cam surfaces 273 are provided from the upper end of the upwardly extending portion 272 to both ends of the recessed notch 274 in the Y-axis direction, and are slanted toward each other as they go downward. there is The cam surface 273 is separated from the abutment block 252 when the bottom member 212 is in the closed state, and when the bottom member 212 rotates from the closed state toward the open state, the cam surface 273 contacts the abutment block 252 and the urging portion. The abutting portion 25 is pushed toward the inside of the pair of guide rails 21 against the urging force of 253 to move the abutting portion 25 inward of the pair of guide rails 21, thereby guiding the abutting block 252. The workpiece 200 supported by the rail 21 is brought into contact with the annular frame 206 .

The movement assisting portion 26 ejects gas from the bottom member 212 of the guide rail 21 to assist the movement of the workpiece 200 by the abutting block 252 of the abutting portion 25 . The movement assisting part 26 includes a plurality of ejection holes 261 provided in the bottom member 212 and an air supply source 262 (shown in FIG. 1) that supplies pressurized gas to the plurality of ejection holes 261 . When the workpiece 210 supported by the annular frame 206 of the workpiece 200 supported by the bottom member 212 of the guide rail 21 is placed on the holding surface 31 of the chuck table 30 , the movement assisting part 26 is operated by the air supply source 262 . The pressurized gas is ejected from the ejection holes 261 to facilitate the movement of the annular frame 206 with respect to the guide rails 21 with the pressurized gas.

Next, the operation of the temporary placement section 20 will be described with reference to the drawings. FIG. 6 is a front view seen from the cassette side schematically showing a state in which the guide rails of the temporary placement section of the processing apparatus shown in FIG. FIG. 7 is a perspective view showing a main part of the temporary placement section shown in FIG. 6. FIG. 8 is another perspective view showing the main part of the temporary placement section shown in FIG. 6. FIG. FIG. 9 is a front view of the temporary placement portion shown in FIG. 6 as seen from the cassette side. FIG. 10 is a front view, viewed from the cassette side, schematically showing a state in which the workpiece supported by the guide rails shown in FIG. 6 is placed on the holding surface of the chuck table. FIG. 11 is a perspective view showing the main part of the temporary placement part shown in FIG. 7, with the bottom part rotated toward the open state. FIG. 12 is another perspective view showing the main part of the temporary placement section shown in FIG. 11. FIG. FIG. 13 is a front view of the temporary placement portion shown in FIG. 11 as seen from the cassette side. FIG. 14 is a perspective view showing a main portion of the temporary placement portion shown in FIG. 7 with the bottom portion positioned in an open state. 15 is another perspective view showing the main part of the temporary placement section shown in FIG. 14. FIG. FIG. 16 is a front view of the temporary placement portion shown in FIG. 14 as seen from the cassette side. 17 is a cross-sectional view taken along line XVII--XVII in FIG. 14. FIG. 18 is a front view, viewed from the cassette side, schematically showing a state in which the bottom portion of the guide rail shown in FIG. 7 is positioned in an open state; FIG. 19 is a front view schematically showing a state in which the guide rail shown in FIG. 18 is lifted, viewed from the cassette side; FIG.

The temporary placement section 20 operates as follows under the control of the control unit 100 . Before the workpiece 200 unloaded from the cassette 7 is temporarily placed in the temporary placement section 20, the bottom member 212 is closed as shown in FIGS. positioned in a state. The temporary placement section 20 is stopped at a raised position by the lifting section 23 , and the annular frame 206 of the workpiece 200 unloaded from the cassette 7 by the loading/unloading unit 10 is temporarily placed on the bottom member 212 . At this time, the bottom member 212 is positioned in the closed state, and the abutment block 252 is positioned at the retracted position. Further, the processing apparatus 1 positions the chuck table 30 directly below the workpiece 210 of the workpiece 200 carried out from the cassette 7 by the loading/unloading unit 10 and supported by the guide rails 21 .

The temporary placement unit 20 lowers the guide rails 21 toward the chuck table 30 positioned directly below the workpiece 200 by the elevating unit 23, and stops the guide rails 21 at the lowered position, as shown in FIG. Next, the workpiece 210 supported by the annular frame 206 of the workpiece 200 supported on the bottom member 212 of the guide rail 21 is placed on the holding surface 31 of the chuck table 30 via the tape 205 . In the temporary placement section 20, the movement assisting section 26 ejects pressurized gas from the air supply source 262 from the ejection holes 261, and the bottom member 212 is moved by the rotation device 213 as shown in FIGS. is rotated from the closed state to the open state.

Then, in the temporary placement portion 20 , the upwardly extending portion 272 of the working portion 27 approaches the abutting block 252 , and the cam surface 273 provided on the upwardly extending portion 272 contacts the abutting block 252 . The temporary placement section 20 further rotates the bottom member 212 toward the open state, and the cam surface 273 presses the abutment block 252 toward the inside of the pair of guide rails 21 against the biasing force of the biasing section 253 . do. As shown in FIGS. 14, 15, 16, 17 and 18, the temporary placement section 20 positions the bottom member 212 in the open state and opens the bottom member 212. As shown in FIGS.

Then, in the temporary placement section 20, the abutment blocks 252 provided on the guide rails 21 press the annular frame 206 of the workpiece 200 toward the inside of the pair of guide rails 21, thereby moving the workpiece 200. It is placed on the chuck table 30 while being positioned at a predetermined position in the X-axis direction with respect to the chuck table 30, and the ejection of the pressurized gas from the ejection holes 261 of the movement assisting portion 26 is stopped. For this reason, the annular frame 206 is positioned without rubbing the guide rails 21 with the gas jetted from the jetting holes 261 of the movement assisting portion 26 . Then, the processing apparatus 1 suction-holds the workpiece 210 on the holding surface 31 of the chuck table 30 via the tape 205 . In this way, the workpiece 200 is pressed from the outside by the abutment block 252 until just before it is sucked and held from the chuck table 30 .

As shown in FIG. 19 , the temporary placement section 20 is lifted by the lifting section 23 and retracted from the chuck table 30 . Then, the processing device 1 cuts the workpiece 210 with the cutting unit 40 . When the machining of the workpiece 210 is completed, the processing apparatus 1 positions the chuck table 30 holding the workpiece 200 directly below between the pair of guide rails 21 as shown in FIG. Stop. The processing apparatus 1 supports the workpiece 200 on the chuck table 30 with the pair of guide rails 21 by carrying out the reverse operation of placing the workpiece 200 supported by the guide rails 21 on the chuck table 30 . .

That is, the processing apparatus 1 lowers the guide rail 21 with the bottom member 212 positioned in the open state by the elevating section 23 toward the chuck table 30 on which the workpiece 200 is placed. 21 is stopped. In the processing apparatus 1, the movement assisting portion 26 of the temporary placement portion 20 ejects the pressurized gas of the air supply source 262 from the ejection hole 261, and the bottom member 212 is moved from the open state to the closed state by the rotating device 213. Rotate. When the bottom member 212 is positioned in the closed state, the processing apparatus 1 supports the annular frame 206 of the workpiece 200 on the bottom member 212 and raises the guide rail 21 by the elevating section 23 . Thus, the processing apparatus 1 separates the workpiece 200 from the chuck table 30 .

The processing apparatus 1 performs the same operation as that for placing the workpiece 200 on the chuck table 30 to place the workpiece 200 supported by the guide rails 21 on the chuck table 61 of the cleaning unit 60 . The processing apparatus 1 suction-holds the workpiece 200 on the chuck table 61 and cleans the workpiece 200 with the cleaning unit 60 . The cleaning unit 60 lowers the chuck table 61 during cleaning, and raises the chuck table 61 before and after cleaning.

When the cleaning of the cleaning unit 60 is completed, the processing apparatus 1 performs the same operation as the operation of detaching the workpiece 200 from the chuck table 30 to detach the workpiece 200 from the chuck table 61 and move the workpiece 200 to be processed by the pair of guide rails 21 . Supports object 200 . The processing apparatus 1 loads the workpiece 200 supported by the guide rails 21 into the cassette 7 by the loading/unloading unit 10 . As described above, the temporary placement unit 20 temporarily places the workpiece 200 on the guide rails 21 and positions the workpiece 200 at a predetermined position in the X-axis direction with respect to the chuck tables 30 and 61. .

The processing apparatus 1 according to the first embodiment described above includes an abutment portion 25 that presses the workpiece 200 supported by the pair of guide rails 21 in the X-axis direction, that is, the centering, from the outside of the workpiece 200; It is realized by the gas ejected from the bottom member 212 of the guide rail 21 . Further, in the processing apparatus 1, when the action portion 27 is fixed to the bottom member 212 and the bottom member 212 is rotated from the closed state to the open state, the abutting portion 25 moves from the retracted position to the annular frame 206 of the workpiece 200. The acting portion 27 presses toward the inner side of the pair of guide rails 21 . As a result, the processing apparatus 1 can position the workpiece 200 with the abutting portion 25 using the rotation device 213 that rotates the bottom member 212, and can move the workpiece 200 without requiring a new drive source. It is possible to position the annular frame 206 of the workpiece 200 at a desired position in the X-axis direction without rubbing the guide rail 21. - 特許庁Therefore, the processing apparatus 1 has the effect of achieving cost reduction and weight reduction.

In the processing apparatus 1, the workpiece 200 is placed on the chuck table 30, and the workpiece 200 is pressed from the outside by the abutment block 252 until just before the workpiece 200 is suction-held from the chuck table. There is also an effect that positional deviation of the workpiece 200 can be suppressed to the utmost limit.

It should be noted that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the present invention. In the above-described embodiment, a cutting device is shown as the processing device 1, but in the present invention, the processing device 1 is not limited to a cutting device, and is a laser processing device that laser-processes the workpiece 210 of the workpiece 200. Various processing devices for performing various processing on the workpiece 210 of the workpiece 200 may be used.

1 processing device 7 cassette 8 cassette elevator (cassette placing portion)
10 loading/unloading unit (loading/unloading means)
11 Grasping Part 12 Moving Part 20 Temporary Placement Part 21 Guide Rail 23 Elevating Part 25 Abutting Part 26 Movement Auxiliary Part 27 Working Part 30 Chuck Table 40 Cutting Unit (Processing Unit)
70 X-axis movement unit (processing feed unit)
200 workpiece 205 tape 206 annular frame 207 opening 210 workpiece 212 bottom member (bottom)
215 side wall portion 252 abutting block 253 biasing portion

Claims (4)

A cassette mounting portion on which a cassette containing a plurality of workpieces is mounted, a loading/unloading means for loading and unloading the workpieces from the cassette mounted on the cassette loading portion, and the loading/unloading means. a temporary placement section for temporarily placing the unloaded workpiece, a chuck table for holding the workpiece transferred from the temporary placement section, and a processing unit for processing the workpiece held on the chuck table; a processing feed unit that feeds the chuck table in the X-axis direction,
The cassette placing portion and the temporary placing portion are arranged in the Y-axis direction orthogonal to the X-axis direction,
The loading/unloading means is
comprising a gripping portion for gripping the workpiece contained in the cassette and a moving portion for moving the gripping portion in the Y-axis direction,
The temporary placement part is
a pair of guide rails extending in the Y-axis direction and having a bottom portion for supporting a workpiece and a side wall portion, the bottom portion opening and closing in a double-door fashion;
an elevating unit that elevates and lowers the guide rail;
an abutting section that presses the workpiece from the outside toward the center in conjunction with the rotation of the bottom of the guide rail to position the workpiece at a predetermined position in the X-axis direction;
The guide rail is lowered toward the chuck table positioned directly below the workpiece supported by the guide rail, and the bottom of the guide rail is opened to move the workpiece to a predetermined position in the X-axis direction. A processing device placed on the chuck table while being positioned. 2. A workpiece according to claim 1, wherein the workpiece is a frame unit in which the workpiece is taped to the opening of the annular frame, and the chuck table fixes the frame unit with a diameter smaller than the distance between the pair of guide rails. processing equipment. The abutting part is
an abutment block set movably toward the center from the outer periphery of the workpiece supported by the guide rail;
an urging portion that positions the abutting block at a retracted position to retract to the outside of the workpiece in the X-axis direction;
It is fixed to the bottom of the guide rail, retracts from the abutment block when the bottom is closed, and pushes the abutment block toward the workpiece when the bottom is opened, and the biasing force of the biasing part and an action portion that presses with a force exceeding
The processing apparatus according to claim 1 or 2, comprising: 4. The processing apparatus according to claim 1, 2 or 3, further comprising a movement assisting part for ejecting gas from the bottom of the guide rail and assisting movement of the workpiece by the abutting part.

Images