SG10202001106VA - Processing apparatus - Google Patents
Processing apparatusInfo
- Publication number
- SG10202001106VA SG10202001106VA SG10202001106VA SG10202001106VA SG10202001106VA SG 10202001106V A SG10202001106V A SG 10202001106VA SG 10202001106V A SG10202001106V A SG 10202001106VA SG 10202001106V A SG10202001106V A SG 10202001106VA SG 10202001106V A SG10202001106V A SG 10202001106VA
- Authority
- SG
- Singapore
- Prior art keywords
- processing apparatus
- processing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Dicing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019026640A JP7162551B2 (en) | 2019-02-18 | 2019-02-18 | processing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10202001106VA true SG10202001106VA (en) | 2020-09-29 |
Family
ID=72116873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10202001106VA SG10202001106VA (en) | 2019-02-18 | 2020-02-07 | Processing apparatus |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7162551B2 (en) |
CN (1) | CN111584393A (en) |
SG (1) | SG10202001106VA (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4564832B2 (en) | 2004-11-30 | 2010-10-20 | 株式会社ディスコ | Rectangular substrate splitting device |
JP6218600B2 (en) | 2013-12-26 | 2017-10-25 | 株式会社ディスコ | Processing equipment |
JP2017112227A (en) | 2015-12-16 | 2017-06-22 | 株式会社ディスコ | Processing device |
JP6665041B2 (en) | 2016-06-20 | 2020-03-13 | 株式会社ディスコ | Cutting equipment |
-
2019
- 2019-02-18 JP JP2019026640A patent/JP7162551B2/en active Active
-
2020
- 2020-02-07 SG SG10202001106VA patent/SG10202001106VA/en unknown
- 2020-02-14 CN CN202010092645.8A patent/CN111584393A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP7162551B2 (en) | 2022-10-28 |
CN111584393A (en) | 2020-08-25 |
JP2020131336A (en) | 2020-08-31 |
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