JP7148337B2 - 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置 - Google Patents

位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置 Download PDF

Info

Publication number
JP7148337B2
JP7148337B2 JP2018172821A JP2018172821A JP7148337B2 JP 7148337 B2 JP7148337 B2 JP 7148337B2 JP 2018172821 A JP2018172821 A JP 2018172821A JP 2018172821 A JP2018172821 A JP 2018172821A JP 7148337 B2 JP7148337 B2 JP 7148337B2
Authority
JP
Japan
Prior art keywords
spatial frequency
grating
scale
light
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018172821A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020046223A5 (enExample
JP2020046223A (ja
Inventor
千裕 名倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2018172821A priority Critical patent/JP7148337B2/ja
Priority to US16/565,590 priority patent/US11085799B2/en
Publication of JP2020046223A publication Critical patent/JP2020046223A/ja
Publication of JP2020046223A5 publication Critical patent/JP2020046223A5/ja
Application granted granted Critical
Publication of JP7148337B2 publication Critical patent/JP7148337B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP2018172821A 2018-09-14 2018-09-14 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置 Active JP7148337B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018172821A JP7148337B2 (ja) 2018-09-14 2018-09-14 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置
US16/565,590 US11085799B2 (en) 2018-09-14 2019-09-10 Position detection apparatus that detects a position of an object by detecting light from a scale, and lithography apparatus, force sensor, and apparatus having force sensor including the position detection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018172821A JP7148337B2 (ja) 2018-09-14 2018-09-14 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置

Publications (3)

Publication Number Publication Date
JP2020046223A JP2020046223A (ja) 2020-03-26
JP2020046223A5 JP2020046223A5 (enExample) 2021-09-30
JP7148337B2 true JP7148337B2 (ja) 2022-10-05

Family

ID=69773927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018172821A Active JP7148337B2 (ja) 2018-09-14 2018-09-14 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置

Country Status (2)

Country Link
US (1) US11085799B2 (enExample)
JP (1) JP7148337B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12163813B2 (en) 2020-05-08 2024-12-10 Canon Kabushiki Kaisha Optical encoder and control apparatus for receiving light that forms moire fringes from a grating pattern
JPWO2022097399A1 (enExample) * 2020-11-06 2022-05-12
CN113418446B (zh) * 2021-06-17 2022-04-19 上海爱科锐特控制技术有限公司 绝对位置检测光栅传感装置及其工作方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5755010B2 (ja) 2011-04-14 2015-07-29 キヤノン株式会社 エンコーダ
JP5791340B2 (ja) 2011-04-14 2015-10-07 キヤノン株式会社 エンコーダ
JP5882590B2 (ja) 2011-02-28 2016-03-09 キヤノン株式会社 光学式エンコーダおよび光学式エンコーダを有する装置
JP6312505B2 (ja) 2014-04-08 2018-04-18 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP6400036B2 (ja) 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、工作装置、および、露光装置
JP6400035B2 (ja) 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、力覚センサ、および、装置
JP6486097B2 (ja) 2014-12-19 2019-03-20 キヤノン株式会社 位置検出装置、レンズ装置、撮像システム、工作装置、位置検出方法、プログラム、および、記憶媒体
JP6987045B2 (ja) 2015-09-09 2021-12-22 レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company エンコーダ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006006342A1 (ja) * 2004-07-12 2006-01-19 Mitsubishi Denki Kabushiki Kaisha 光学式エンコーダ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5882590B2 (ja) 2011-02-28 2016-03-09 キヤノン株式会社 光学式エンコーダおよび光学式エンコーダを有する装置
JP5755010B2 (ja) 2011-04-14 2015-07-29 キヤノン株式会社 エンコーダ
JP5791340B2 (ja) 2011-04-14 2015-10-07 キヤノン株式会社 エンコーダ
JP6312505B2 (ja) 2014-04-08 2018-04-18 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP6486097B2 (ja) 2014-12-19 2019-03-20 キヤノン株式会社 位置検出装置、レンズ装置、撮像システム、工作装置、位置検出方法、プログラム、および、記憶媒体
JP6987045B2 (ja) 2015-09-09 2021-12-22 レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company エンコーダ装置
JP6400036B2 (ja) 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、工作装置、および、露光装置
JP6400035B2 (ja) 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、力覚センサ、および、装置

Also Published As

Publication number Publication date
US20200088552A1 (en) 2020-03-19
US11085799B2 (en) 2021-08-10
JP2020046223A (ja) 2020-03-26

Similar Documents

Publication Publication Date Title
JP6312505B2 (ja) 光学式エンコーダおよびこれを備えた装置
JP3158878B2 (ja) 光学式エンコーダ
JP5755010B2 (ja) エンコーダ
KR101240413B1 (ko) 원점 검출 장치, 변위 측정 장치 및 광학 장치
US9024251B2 (en) Encoder having a scale that includes block patterns
JP5268529B2 (ja) 変位計測装置及び半導体製造装置
US20080173800A1 (en) Optical encoder and optical lens module
JP6162137B2 (ja) エンコーダシステムを使用する低コヒーレンス干渉法
JP2862417B2 (ja) 変位測定装置及び方法
KR101347945B1 (ko) 광학식 엔코더
JP6400036B2 (ja) 位置検出装置、工作装置、および、露光装置
JP7148337B2 (ja) 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置
JP6386337B2 (ja) 光学式エンコーダ
JP2005526951A (ja) 基準点タルボットエンコーダ
EP0694764B1 (en) Detector array for use in interferomic metrology systems
EP2778626B1 (en) Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, position detection method, program, and storage medium
JP2012049284A (ja) エンコーダ装置、光学装置、露光装置、露光方法およびデバイス製造方法
JPH06174424A (ja) 測長または測角装置
JP7475973B2 (ja) 光学式エンコーダ及び制御装置
JP2013101084A (ja) 位置検出方法及び装置、エンコーダ装置、並びに露光装置
US20240110816A1 (en) Optical encoder
JP7532176B2 (ja) 光学式エンコーダ及び制御装置
JP2025021438A (ja) 光学位置測定装置
JPH06196726A (ja) 受光素子及び該受光素子を備える変位検出装置
JPH07159608A (ja) 微小変位検出用光学素子

Legal Events

Date Code Title Description
RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20210103

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210113

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210820

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210820

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220531

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220603

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220802

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220826

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220922

R151 Written notification of patent or utility model registration

Ref document number: 7148337

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151