JP7144457B2 - 加速度追跡による高速走査システム - Google Patents

加速度追跡による高速走査システム Download PDF

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JP7144457B2
JP7144457B2 JP2019568593A JP2019568593A JP7144457B2 JP 7144457 B2 JP7144457 B2 JP 7144457B2 JP 2019568593 A JP2019568593 A JP 2019568593A JP 2019568593 A JP2019568593 A JP 2019568593A JP 7144457 B2 JP7144457 B2 JP 7144457B2
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velocity
tracking mirror
stage
substrate
optical scanning
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JP2020512599A (ja
JP2020512599A5 (https=
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オーウェンズ，ウィンザー
ステイカー，ブライアン
ハートレージ，ロブ
ジズミンスカス，エドビナス
スターン，デビッド
ハイルマン，ポール
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アプトン バイオシステムズ インコーポレイテッド
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G02B27/644—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for large deviations, e.g. maintaining a fixed line of sight while a vehicle on which the system is mounted changes course
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/682—Vibration or motion blur correction
    • H04N23/685—Vibration or motion blur correction performed by mechanical compensation
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/02—Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only
    • H04N3/08—Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only having a moving reflector

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Studio Devices (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2019568593A 2017-03-03 2018-03-02 加速度追跡による高速走査システム Active JP7144457B2 (ja)

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JP2022146662A JP7644738B2 (ja) 2017-03-03 2022-09-15 加速度追跡による高速走査システム

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US201762467048P 2017-03-03 2017-03-03
US62/467,048 2017-03-03
PCT/US2018/020737 WO2018161013A1 (en) 2017-03-03 2018-03-02 High speed scanning system with acceleration tracking

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JP2020512599A JP2020512599A (ja) 2020-04-23
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JP7144457B2 true JP7144457B2 (ja) 2022-09-29

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US (5) US10585296B2 (https=)
EP (2) EP4296654A3 (https=)
JP (2) JP7144457B2 (https=)
CN (2) CN114967111A (https=)
CA (1) CA3055249A1 (https=)
WO (1) WO2018161013A1 (https=)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2013344340B2 (en) 2012-11-19 2019-09-19 Pacific Biosciences Of California, Inc. Digital analysis of molecular analytes using single molecule detection
US10829816B2 (en) 2012-11-19 2020-11-10 Apton Biosystems, Inc. Methods of analyte detection
KR20220018622A (ko) 2013-08-22 2022-02-15 앱톤 바이오시스템즈, 인코포레이티드 전기적 방법을 이용한 분자 분석물질의 디지털 분석
CN114967111A (zh) 2017-03-03 2022-08-30 雅普顿生物系统公司 具有加速跟踪的高速扫描系统
JP7305611B2 (ja) 2017-03-17 2023-07-10 アプトン バイオシステムズ インコーポレイテッド 配列決定および高分解能画像化の方法
JP7478666B2 (ja) * 2018-03-30 2024-05-07 ディーアールエス ネットワーク アンド イメージング システムズ、リミテッド ライアビリティー カンパニー 地球観測イメージング中の焦点面アレイのスキャンのための方法およびシステム
JP2022501026A (ja) 2018-09-19 2022-01-06 アプトン バイオシステムズ インコーポレイテッド 高密度に詰め込まれた分析物の層および検出方法
WO2020134289A1 (zh) * 2018-12-26 2020-07-02 深圳市真迈生物科技有限公司 定位方法、定位装置和测序系统
CN110361827B (zh) * 2019-06-14 2020-05-12 中国科学院西安光学精密机械研究所 一种降低两轴快速反射镜中x轴和y轴耦合的控制方法
WO2021043383A1 (en) * 2019-09-02 2021-03-11 Leica Microsystems Cms Gmbh Microscope and method for imaging an object using a microscope
EP4025902B1 (en) * 2019-09-05 2025-06-04 Pacific Biosciences of California, Inc. High speed scanning systems for super resolution imaging
US11647287B1 (en) 2019-12-03 2023-05-09 Waymo Llc Autofocus actuator
US11223756B1 (en) 2019-12-03 2022-01-11 Waymo Llc Position sensor and hybrid substrate for camera focus management
CN115243823A (zh) * 2020-01-24 2022-10-25 诺万达公司 用于使用位置前馈补偿来提高大面积激光加工中的精度的系统和方法
CN111596456A (zh) * 2020-05-08 2020-08-28 山东大学 一种激光指向稳定控制系统
EP3913906A1 (en) * 2020-05-18 2021-11-24 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Physical object processing system and method
MX2022016575A (es) 2020-11-06 2023-04-11 Illumina Inc Aparato y metodo para obtener una imagen de una muestra en movimiento.
WO2022107510A1 (ja) * 2020-11-19 2022-05-27 株式会社デンソー 光学的測距装置
CN113253471B (zh) * 2021-07-12 2022-04-29 清华大学 旋转式三维光激发装置
TW202336423A (zh) 2021-10-01 2023-09-16 美商伊路米納有限公司 用於傳輸光之設備及方法
US11680786B2 (en) 2021-11-05 2023-06-20 Waymo Llc Capacitive position sensing for camera focus management
CN116953904A (zh) * 2022-04-18 2023-10-27 南京微纳科技研究院有限公司 光学系统、三维成像系统及三维成像方法
KR102804207B1 (ko) * 2022-10-04 2025-05-09 세메스 주식회사 기판 검사 장치 및 방법
JP7814286B2 (ja) 2022-10-28 2026-02-16 三菱重工業株式会社 アンモニア除害システム、浮体、及びアンモニア除害方法
WO2024102889A1 (en) * 2022-11-10 2024-05-16 Ultima Genomics, Inc. Methods and systems for counter scan area mode imaging
CN116091341B (zh) * 2022-12-15 2024-04-02 南京信息工程大学 一种低光图像的曝光差增强方法及装置
US12327741B2 (en) * 2023-02-28 2025-06-10 Kla Corporation Oscillating secondary stage for frame-mode overlay metrology
US20250102822A1 (en) * 2023-09-27 2025-03-27 Onto Innovation Inc. Blur reduction techniques for semiconductor inspection
TWI884657B (zh) * 2023-12-27 2025-05-21 錼創顯示科技股份有限公司 加工與檢測設備及檢測設備
WO2026048244A1 (ja) * 2024-08-28 2026-03-05 浜松ホトニクス株式会社 画像取得装置及び画像取得方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000171719A (ja) 1998-12-09 2000-06-23 Lasertec Corp 撮像装置
WO2008081729A1 (ja) 2006-12-22 2008-07-10 Nikon Corporation レーザ走査共焦点顕微鏡
US20110292200A1 (en) 2008-12-15 2011-12-01 Koninklijke Philips Electronics N.V. Scanning microscope
JP2015521750A (ja) 2012-06-07 2015-07-30 コンプリート・ゲノミックス・インコーポレーテッド 可動走査ミラーを伴う撮像システム

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4516023A (en) 1982-06-03 1985-05-07 Klimsch/Optronics Scanner/plotter optical system
DD285836A5 (de) * 1989-07-05 1991-01-03 Veb Carl Zeiss Jena,Dd Verfahren zur geometrieinvarianten bilderzeugung
JPH09250912A (ja) * 1996-03-14 1997-09-22 Nikon Corp パターン測定装置
IL135139A0 (en) * 1997-09-19 2001-05-20 Nikon Corp Stage apparatus, scanning type exposure apparatus, and device produced with the same
FR2784189B3 (fr) * 1998-10-05 2000-11-03 Commissariat Energie Atomique Biopuce et dispositif de lecture d'une biopuce comportant une pluralite de zones de reconnaissance moleculaire
US6555169B2 (en) 2000-04-25 2003-04-29 William Tenckhoff System and method for masking door hinges during painting
JP3859459B2 (ja) * 2000-04-26 2006-12-20 松下電器産業株式会社 撮像装置
JP2001332595A (ja) 2000-05-25 2001-11-30 Sony Corp 焦点合わせ制御機構及びこれを用いた検査装置
US7561270B2 (en) * 2000-08-24 2009-07-14 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
US6624894B2 (en) * 2001-06-25 2003-09-23 Veeco Instruments Inc. Scanning interferometry with reference signal
JP2006106378A (ja) * 2004-10-06 2006-04-20 Yokogawa Electric Corp 共焦点顕微鏡
KR100724740B1 (ko) * 2005-09-08 2007-06-04 삼성전자주식회사 미러 패키지 및 광 스캐너
JP2007194779A (ja) * 2006-01-18 2007-08-02 Pentax Corp 三次元撮影装置
US8084706B2 (en) * 2006-07-20 2011-12-27 Gsi Group Corporation System and method for laser processing at non-constant velocities
US8115170B2 (en) * 2007-01-09 2012-02-14 International Business Machines Corporation Method and apparatus for creating time-resolved emission images of integrated circuits using a single-point single-photon detector and a scanning system
US8089436B1 (en) * 2007-02-21 2012-01-03 Lockheed Martin Corporation Image stability in liquid crystal displays
EP2291539B1 (en) * 2008-06-25 2018-03-14 Okura, Michael Apparatus for melting curve analysis of nucleic acids in microarray format
US7924422B2 (en) * 2009-02-12 2011-04-12 Tokyo Electron Limited Calibration method for optical metrology
US8107147B2 (en) * 2009-03-27 2012-01-31 Microvision, Inc. Two-mirror scanning system
US20110242312A1 (en) * 2010-03-30 2011-10-06 Lasertec Corporation Inspection system and inspection method
JP5574792B2 (ja) * 2010-04-13 2014-08-20 キヤノン株式会社 撮影装置
US8428390B2 (en) * 2010-06-14 2013-04-23 Microsoft Corporation Generating sharp images, panoramas, and videos from motion-blurred videos
US20140204196A1 (en) 2011-09-09 2014-07-24 Ventana Medical Systems, Inc. Focus and imaging system and techniques using error signal
JP2013152429A (ja) 2011-12-27 2013-08-08 Canon Inc 画像処理装置、画像処理方法、およびプログラム
US9488823B2 (en) 2012-06-07 2016-11-08 Complete Genomics, Inc. Techniques for scanned illumination
AU2013344340B2 (en) 2012-11-19 2019-09-19 Pacific Biosciences Of California, Inc. Digital analysis of molecular analytes using single molecule detection
WO2014190027A1 (en) * 2013-05-22 2014-11-27 Massachusetts Institute Of Technology Methods, systems, and apparatus for imaging spectroscopy
US10136063B2 (en) * 2013-07-12 2018-11-20 Hanwha Aerospace Co., Ltd Image stabilizing method and apparatus
US9581798B2 (en) * 2013-07-22 2017-02-28 Fundacio Institut De Ciencies Fotoniques Light sheet-based imaging device with extended depth of field
JP5729622B2 (ja) * 2013-10-22 2015-06-03 国立大学法人 東京大学 ブラーレス画像撮像システム
US9645496B2 (en) * 2014-08-08 2017-05-09 David A. Markle Maskless digital lithography systems and methods with image motion compensation
US9581640B2 (en) * 2014-10-08 2017-02-28 Eastman Kodak Company Vision-guided alignment method
JP2016138901A (ja) * 2015-01-26 2016-08-04 株式会社日立エルジーデータストレージ 光モジュール、及び走査型画像表示装置
CN114967111A (zh) 2017-03-03 2022-08-30 雅普顿生物系统公司 具有加速跟踪的高速扫描系统
JP7305611B2 (ja) 2017-03-17 2023-07-10 アプトン バイオシステムズ インコーポレイテッド 配列決定および高分解能画像化の方法
CN110031907B (zh) 2019-04-18 2024-09-20 西安天和防务技术股份有限公司 光机扫描成像系统
EP4025902B1 (en) 2019-09-05 2025-06-04 Pacific Biosciences of California, Inc. High speed scanning systems for super resolution imaging

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000171719A (ja) 1998-12-09 2000-06-23 Lasertec Corp 撮像装置
WO2008081729A1 (ja) 2006-12-22 2008-07-10 Nikon Corporation レーザ走査共焦点顕微鏡
US20110292200A1 (en) 2008-12-15 2011-12-01 Koninklijke Philips Electronics N.V. Scanning microscope
JP2015521750A (ja) 2012-06-07 2015-07-30 コンプリート・ゲノミックス・インコーポレーテッド 可動走査ミラーを伴う撮像システム

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EP4296654A3 (en) 2024-02-28
US12259564B2 (en) 2025-03-25
US20200393691A1 (en) 2020-12-17
US20230400701A1 (en) 2023-12-14
WO2018161013A1 (en) 2018-09-07
US20220214557A1 (en) 2022-07-07
JP2022173295A (ja) 2022-11-18
JP2020512599A (ja) 2020-04-23
EP3589998B1 (en) 2023-08-23
CA3055249A1 (en) 2018-09-07
CN110582715A (zh) 2019-12-17
US20180252936A1 (en) 2018-09-06
CN114967111A (zh) 2022-08-30
EP3589998A4 (en) 2020-12-16
JP7644738B2 (ja) 2025-03-12
EP3589998A1 (en) 2020-01-08
EP4296654A2 (en) 2023-12-27
US10585296B2 (en) 2020-03-10
US20250172820A1 (en) 2025-05-29
CN110582715B (zh) 2022-04-29

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