JP7142380B2 - Light irradiation device and exposure device provided with same - Google Patents

Description

The present invention relates to a light irradiation device mainly used for exposure when manufacturing liquid crystal panels, and an exposure apparatus provided with the same.

When liquid crystal is used as a TN system display panel, it does not operate normally if the liquid crystal is enclosed between two glass substrates and a voltage is applied to the transparent electrodes formed on the inner surfaces of these glass substrates. This is because the liquid crystal molecules are in a scattered state.

In order for the liquid crystal to operate normally in the TN mode, it is necessary to align the liquid crystal molecules in a fixed direction and to make the rising direction of the liquid crystal molecules fixed. Specifically, the liquid crystal molecules are oriented in a direction tilted by about 3° with respect to the glass substrate, and this tilt angle is called a pretilt angle.

One of the pair of glass substrates capable of aligning liquid crystal is arranged so as to be oriented in the X direction, and the other opposing glass substrate is arranged in the Y direction orthogonal to the X direction. (TN method)

As described above, liquid crystal alignment treatment is necessary for the manufacture of liquid crystal panels, and rubbing treatment for physically rubbing the surface of a glass substrate has been conventionally performed (for example, Patent Document 1). This rubbing treatment is a treatment method in which an organic polymer film formed on a glass substrate is rubbed in a predetermined direction with a cloth having a long pile, thereby forming a film capable of orienting liquid crystal molecules in a certain direction. is.

With the spread of the rubbing process and the rapid response speed of the TN method, the mass production of liquid crystal panels with stable performance became possible at low cost. There is a history of the spread of liquid crystal monitors as monitors for

However, the rubbing method has problems related to reliability such as poor uniformity, possibility of electrostatic breakdown of TFTs, and adherence of powder dust generated during rubbing.

In addition, the pretilt angle that can be achieved by the rubbing method is about 3° in the TN method, which is representative of the horizontally aligned liquid crystal mode, as described above, and it constitutes a liquid crystal mode display panel that can be driven at low voltage and supports high-speed response. It was difficult to do so.

In order to deal with such problems of the rubbing method, an exposure machine capable of carrying out photo-alignment treatment has been proposed at present, and the use of a long-arc mercury lamp as a light source for this exposure machine has been attempted.

JP 2007-17475 A

However, exposure machines using long-arc mercury lamps are also considered to have problems. In general, the photosensitive characteristics of exposure materials are set so that they respond to light in a specific wavelength band, but looking at the spectral characteristics of light from a mercury lamp, the light is composed of many emission lines of mercury rays. I know there is.

Therefore, when a mercury lamp is used as the light source for exposure, the amount of light having a wavelength outside the photosensitive characteristics of the exposure material increases, and there is a risk that the exposure material may be overexposed by the light having a wavelength outside the photosensitive wavelength band. It is thought that there is

Of course, it is also possible to cut light rays (short wave side and long wave side) outside the photosensitive characteristics with a selective wavelength reflective film, but a narrow band cut filter (band pass filter) is required and high accuracy is required. is required, resulting in an increase in the cost of the device.

In addition, since the light emitted from a long-arc mercury lamp diffuses over a wide range, it is difficult to control the irradiation angle of the light from the mercury lamp, which is important for performing photo-alignment treatment. has also been studied, but in this case there is another problem that the utilization efficiency of the light emitted from the mercury lamp is lowered.

There is also a method of obliquely irradiating collimated (parallelized) light onto a glass substrate, but this method has the problem that the optical system is complicated and the equipment becomes large and expensive. Conceivable.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a light irradiation device for an exposure device that can carry out optical alignment treatment with a simple configuration.

According to one aspect of the invention,
a light source having a plurality of LEDs;
a polarizing element that receives the light from the light source and irradiates the work with the transmitted light,
The optical axis of each LED has a first angle with respect to the workpiece,
a second angle that is half the light distribution angle of the light emitted from each LED is set smaller than the first angle;
By changing the power input to the LED, the illuminance of the light to the work or the exposure surface and the integrated light amount are adjusted ,
The light source comprises a plurality of LED modules in which a plurality of the LEDs are arranged,
a plurality of the light sources are arranged along the moving direction of the workpiece;
Power input to the plurality of LEDs arranged in the plurality of LED modules arranged in the light sources different from each other and arranged in a straight line along the moving direction of the work is adjusted by one driving power supply. A light irradiation device characterized by the following is provided.

Preferably,
further comprising a measuring instrument for measuring the illuminance of the workpiece or the exposure surface;
Light unevenness on the workpiece or the exposure surface is calculated from the illuminance and integrated light amount values of the workpiece or the exposure surface measured by the measuring instrument, and power input to the LEDs at positions corresponding to the unevenness is calculated. The unevenness is eliminated by changing the

Preferably,
The polarizing element has a shape elongated in the irradiation direction of the light emitted from the light source.

Preferably,
The polarizing element is composed of a plurality of wire grids,
Each wire grid is formed in a trapezoidal shape,
The lower side of one trapezoid and the upper side of the adjacent trapezoid are arranged linearly in the direction perpendicular to the irradiation direction of the light emitted from the light source.

Preferably,
The number of polarizing elements is less than the number of light sources.
Also, according to another aspect of the present invention,
An exposure apparatus is provided that includes the light irradiation device described above.

According to the light irradiation device of the present invention, the optical axes of the plurality of LEDs are inclined with respect to the work by the first angle, and the second angle corresponding to half the orientation angle of the light emitted from each LED is set to this angle. By setting the angle to be smaller than the first angle, all the light emitted from each LED is directed toward the optical axis of the LED rather than the perpendicular line from the LED toward the work.

As a result, it is possible to provide a light irradiation device for an exposure apparatus that can carry out a photo-alignment treatment with a simple structure and a large amount of light having an effective irradiation angle.

It is a figure which shows the light irradiation apparatus 10 to which this invention was applied. 1 is a front view showing a light irradiation device 10 having a light source 12 composed of a plurality of LED modules 100; FIG. 1 is a perspective view showing a light irradiation device 10 having an angle adjustment mechanism 110; FIG. FIG. 3 is a side view showing the light irradiation device 10 having an angle adjustment mechanism 110; FIG. 2 is a front view showing a light irradiation device 10 having a width direction position adjusting mechanism 120; FIG. 3 is a perspective view showing a light source 12 with a serrated LED base 130; FIG. 3 is a side view of light source 12 with sawtooth LED base 130; FIG. 10 is a perspective view showing the light irradiation device 10 having an overall angle adjustment mechanism 152; FIG. 3 is a side view showing the light irradiation device 10 having the overall angle adjustment mechanism 152; FIG. 10 is a front view showing a light irradiation device 10 according to Modification 1; FIG. 10 is a side view showing a light irradiation device 10 according to Modification 1; FIG. 11 is a front view showing a light irradiation device 10 according to Modification 2; FIG. 11 is a side view showing a light irradiation device 10 according to Modification 2; FIG. 11 is a perspective view showing a light irradiation device 10 according to Modification 3; FIG. 11 is a side view showing another light irradiation device 10 according to modification 3; FIG. 21 is a side view showing a light irradiation device 10 according to Modification 8; 14 is a plan view showing a polarizing element 14 according to Modification 9. FIG. FIG. 21 is a plan view showing a polarizing element 14 according to Modification 10; FIG. 11 is a plan view showing a light irradiation device 10 according to Modification 11; FIG. 21 is a perspective view showing a light irradiation device 10 according to Modification 11; FIG. 11 is a plan view showing a light irradiation device 10 according to Modification 11; FIG. 12 is a diagram showing an example of a driving power source 180 according to modification 11; FIG. 2 shows an LED module 100; FIG. 20 is a diagram showing the positional relationship between the LED groups Y and Z and the measuring instrument 190 on the exposure plane A according to modification 11; FIG. 12 is a diagram showing a range in which light from LED groups Y and Z irradiates an exposure surface A, in relation to modification 11; FIG. 12 is a diagram showing a range in which light from LED groups Y, Z, and V irradiates an exposure surface A, regarding modification 11;

(Configuration of light irradiation device 10)
A light irradiation device 10 according to an embodiment to which the present invention is applied will be described below. The light irradiation device 10 is incorporated in an exposure device and used mainly for exposure when manufacturing a liquid crystal panel. This light irradiation device 10 generally includes a light source 12 and a polarizing element 14, as shown in FIG.

The light source 12 is a member that irradiates the exposure light L toward the exposure surface A on which the workpiece (exposure object) X is placed, and a plurality of LEDs 16 are used in this embodiment. Since these LEDs 16 irradiate the exposure light L so as to scan the work X moving in a certain direction on the exposure surface A, the light sources 12 are arranged in a plurality of directions perpendicular to the moving direction of the work X. LEDs 16 are arranged substantially in series. Of course, the light irradiation device 10 may be moved to irradiate the work X with the exposure light L, or both the work X and the light irradiation device 10 may be moved.

Further, each LED 16 constituting the light source 12 is arranged with respect to the work X (that is, the exposure surface A) is arranged at an angle. By using an alignment film prepared by obliquely irradiating light with little variation in angle components in a liquid crystal panel, it is possible to create a stable pretilt angle and alignment state, and an arbitrary alignment mode liquid crystal panel can be realized. realizable.

In addition, as shown in FIG. 2, the light source 12 may be configured by putting together a plurality of LEDs 16 into one LED module 100 and arranging the plurality of LED modules 100 side by side in one direction, for example.

Also, as shown in FIGS. 3 and 4, an angle adjustment mechanism 110 may be provided that can adjust the irradiation angle of the entire light source 12 with respect to the polarizing element 14 . The illustrated angle adjustment mechanism 110 has a rotation shaft 112 extending along the direction in which the plurality of LED modules 100 constituting the light source 12 are arranged. The irradiation angle of the entire light source 12 with respect to the polarizing element 14 can be adjusted.

Further, as shown in FIG. 5, a width direction position adjusting mechanism 120 that can adjust the position of the light source 12 with respect to the polarizing element 14 in the direction in which the plurality of LED modules 100 are arranged may be provided. As a result, it is possible to adjust the illuminance unevenness of the light emitted from each LED module 100 to be reduced.

Moreover, instead of arranging the individual LED modules 100 at a predetermined angle with respect to the polarizing element 14, as shown in FIGS. A respective LED 16 may be positioned on the angled surface 132 corresponding to each tooth, which is at a predetermined angle with respect to the teeth.

Returning to FIG. 1, the second angle θ2, which is half the light distribution angle of the light L emitted from each LED 16, is set to be smaller than the first angle θ1 described above.

The polarizing element 14 is an element that transmits and polarizes only the light component vibrating in one direction out of the light emitted from the light source 12, and in this embodiment, a wire grid polarizing element is used. A wire grid polarizing element is obtained by forming a wire grid on one surface of a transparent substrate (glass substrate). In this embodiment, the wire grid forming surface 18 may be the surface of the polarizing element 14 on the light source 12 side or the surface opposite to the light source 12 . Also, the polarizing element 14 is preferably arranged so as to be parallel to the workpiece X (exposure surface A).

As a modified example of this polarizing element 14, as shown in FIG. , and the cover member 40 may constitute the polarizing element group 150 .

The optical filter 30 is disposed between the light source 12 and the polarizing element 14, and is a member that selectively transmits light L emitted from the light source 12 and having a predetermined wavelength or longer. A wavelength selective film is formed on the . Further, like the polarizing element 14, the optical filter 30 is preferably arranged parallel to the workpiece X (exposure surface A). As long as the optical filter 30 satisfies the following conditions, it may be a long-pass filter that transmits light of a predetermined wavelength or more, or a filter that transmits light of a predetermined wavelength range and has longer and shorter wavelengths than that. A bandpass filter can be used that blocks the wavelengths of light. Furthermore, the optical filter 30 may be arranged on the opposite side of the polarizing element 14 to the light source 12 side.

The cover member 40 is, for example, a glass plate material that transmits the light L from the light source 12 , and is arranged substantially parallel to the workpiece X at a position facing the wire grid forming surface 18 of the polarizing element 14 . That is, when the wire grid forming surface 18 of the polarizing element 14 is formed on the side opposite to the light source 12 side as shown in the drawing, the cover member 40 is also disposed on the opposite side of the polarizing element 14 to the light source 12 side. be. Conversely, when the wire grid forming surface 18 of the polarizing element 14 is formed on the light source 12 side (not shown), the cover member 40 is also arranged on the light source 12 side of the polarizing element 14 .

The surfaces (both sides) of the cover member 40 may not be subjected to antireflection treatment such as an antireflection film, but it is preferable to apply antireflection treatment such as an antireflection film to one or both surfaces. be.

Further, it is preferable to seal the space S between the cover member 40 and the wire grid forming surface 18 of the polarizing element 14 . For example, a holding frame 42 that holds the peripheral edges of the cover member 40 and the polarizing element 14 may be provided, and the space S between the cover member 40 and the wire grid forming surface 18 of the polarizing element 14 may be sealed with the holding frame 42 . Conceivable.

In addition, the above-mentioned "sealing" means that micro solids such as siloxane compounds do not enter the space S, and "sealing" in a complete sense is not necessary.

A so-called “reflective type” wire grid is preferably used for the polarizing element 14 . If the "reflection type" is used, the wire grid is heated by the light L from the light source 12, and the possibility of damaging the wire grid forming surface 18 or the like due to an undesired rise in the temperature of the sealed space is low. is.

Furthermore, for the purpose of cooling the closed space S, members forming the space S such as the cover member 40, the polarizing element 14, or the holding frame 42 may be cooled by a method such as forced air cooling or water cooling.

A polarizing element group angle adjusting mechanism capable of adjusting the irradiation angle of the entire polarizing element group 150 with respect to the workpiece X (exposure surface A) and the light source 12 may be provided. This polarizing element group angle adjusting mechanism may adjust the angle of the optical filter 30, the polarizing element 14, and the cover member 40 collectively, or may adjust the angle of the optical filter 30, the polarizing element 14, and the cover member 40 respectively. The angles may be individually adjusted.

8 and 9, the light source 12 angle adjusting mechanism 110 and the polarizing element group angle adjusting mechanism described above are collectively used to set the light source 12 and the light source 12 with respect to the work X (exposure surface A). An overall angle adjustment mechanism 152 that can adjust the angle of the polarizing element group 150 collectively may be used. The overall angle adjustment mechanism 152 illustrated has an overall rotation axis 154 extending along the direction in which the plurality of LED modules 100 constituting the light source 12 are arranged and the direction in which the polarizing element group 150 extends. By rotating the overall rotating shaft 154, the irradiation angle of the light source 12 and the polarizing element group 150 as a whole with respect to the workpiece X (exposure surface A) can be adjusted.

Further, a polarizing element group width direction position adjusting mechanism may be provided for adjusting the position of the polarizing element group 150 in the direction in which the polarizing element group 150 extends (the direction in which the plurality of LED modules 100 are arranged).

In addition, the width direction position adjustment mechanism 120 of the light source 12 and the above-described polarizing element group width direction position adjustment mechanism are put together, and the light source is arranged in the direction in which the polarizing element group 150 extends (the direction in which the plurality of LED modules 100 are arranged). 12 and the polarizing element group 150 may be provided.

(Effect of the light irradiation device 10 according to the present embodiment)
According to the light irradiation device 10 according to the present embodiment, the optical axes CL of the plurality of LEDs 16 are inclined by the first angle θ1 with respect to the work X, which corresponds to half the orientation angle of the light L emitted from each LED 16. By setting the second angle θ2 to be smaller than the first angle θ1, all of the light L emitted from each LED 16 is directed toward the optical axis CL side of the LED 16 with respect to the perpendicular line from the LED 16 to the workpiece X. Become.

Accordingly, it is possible to provide the light irradiation device 10 for an exposure apparatus that can perform a photo-alignment treatment with a simple configuration and a large amount of light having an effective irradiation angle.

(Modification 1)
As shown in FIGS. 10 and 11, reflecting mirrors 160 may be arranged at both ends of the light source 12 and the polarizing element group 150 in the width direction. As a result, it is possible to prevent the illuminance from decreasing at both ends in the width direction of the light irradiation device 10 on the workpiece X (exposure surface A).

(Modification 2)
Further, as shown in FIGS. 12 and 13, the light L that is part of the light L emitted in a direction substantially perpendicular to the direction in which the light source 12 extends (the width direction) and does not enter the polarizing element group 150 is A width direction reflecting mirror 164 extending in the width direction of the light source 12 and the polarizing element group 150 may be provided.

Furthermore, the light irradiation device 10 may include both the reflecting mirror 160 according to Modification 1 and the width direction reflecting mirror 164 according to Modification 2.

(Modification 3)
As shown in FIG. 14, a light source unit 170 may be configured by arranging a plurality of sets of the light irradiation devices 10 described above.

In addition, when the light source unit 170 is configured, it is preferable that the angle of each light irradiation device 10 can be adjusted independently. Furthermore, it is preferable that each LED module 100 and each polarizing element group 150 included in each light irradiation device 10 can be independently adjusted in angle.

Also, the light source unit 170 may be composed of the polarizing element groups 150 whose number is smaller than the number of the light sources 12 composed of the plurality of LED modules 100 . For example, in the light source unit 170 shown in FIG. 15, five light sources 12 are used, whereas only one polarizing element group 150 is used. By configuring the light source unit 170 with the polarizing element groups 150 whose number is smaller than the number of the light sources 12 in this manner, the light sources 12 and the polarizing element groups 150 are arranged one-to-one (the number of the light sources 12 and the number of the polarizing element groups 150 are equal to each other). are the same).

(Modification 4)
When the illuminance of the work X (exposure surface A) measured by a measuring instrument for measuring the illuminance of the work X (exposure surface A) or the integrated amount of light deviates from a predetermined specified value, the power input to each LED 16 is changed. It is preferable to adjust the illuminance and the integrated amount of light by adjusting the light intensity.

(Modification 5)
Calculating the unevenness of the light L on the work X (exposure surface A) from the illuminance of the work X (exposure surface A) measured by a measuring instrument for measuring the illuminance of the work X (exposure surface A) and the value of the integrated light amount, The unevenness is preferably eliminated by changing the power input to the LED 16 at the position corresponding to the unevenness that has occurred.

In addition, unevenness in the illuminance and unevenness in the integrated amount of light on the work X (exposure surface A) may occur at the boundary between the polarizing element groups 150 or each component of the polarizing element group 150 (the polarizing element 14, the optical filter 30, the cover member 40). ), it is preferable to eliminate the unevenness by changing the power input to the LED 16 at the position corresponding to the boundary.

(Modification 6)
When the workpiece X or at least the light source 12 is moved in a certain direction and the workpiece X is exposed, if unevenness in the integrated amount of light occurs in the direction of movement, by changing the power input to the corresponding LED 16 during movement It is preferable to eliminate the light amount unevenness.

(Modification 7)
The illuminance and the integrated amount of light described above may be adjusted by continuously turning on or turning off each LED 16 .

Alternatively, the illuminance and the integrated amount of light described above may be adjusted by repeatedly turning on and off each LED 16 .

(Modification 8)
As shown in FIG. 16, the shape of the (wire-grid) polarizing elements 14 constituting the polarizing element group 150 is preferably elongated in the irradiation direction of the light L emitted from each light source 12 .

(Modification 9)
17, a wire grid is formed on a disk-shaped wafer, cut into rectangles, and the irradiation direction of the light L emitted from each light source 12 is determined. , (the direction in which the LED modules 100 are arranged).

(Modification 10)
Also, as shown in FIG. 18, the wire grid forming the polarizing element 14 is formed in a substantially trapezoidal shape, and the direction perpendicular to the irradiation direction of the light L emitted from each light source 12 (each LED module 100), the lower side of one trapezoid and the upper side of the adjacent trapezoid may be arranged substantially linearly. By forming and arranging the wire grid in a substantially trapezoidal shape in this direction, the range of illuminance unevenness or integrated light amount unevenness in the irradiation direction of the light L emitted from each light source 12 is widened compared to the case of the ninth modification. However, since the degree of unevenness is reduced accordingly, it is easy to adjust, which is preferable.

(Modification 11)
2 may be arranged in plurality (three in modification 11) along the moving direction of the workpiece X as shown in FIGS. 19 and 20. FIG. In this case, one LED module 100 in each light source 12 is arranged so as to line up on a straight line along the moving direction of the work X (the LED modules 100 surrounded by a dashed line in FIG. 19). Hereinafter, a plurality of LED modules 100 arranged in a line and arranged in mutually different light sources 12 are referred to as "the same group of LED modules 100". The LED modules 100 in the same group may or may not be on the same plane.

Furthermore, as shown in FIG. 21, the power supplied to the LED modules 100 of the same group is supplied from one driving power supply 180. In FIG. Thereby, the amount of light emitted from the LED modules 100 in the same group can be adjusted by one driving power source 180 . Note that FIG. 21 shows an example in which power is supplied in parallel from one drive power source 180 to each LED module 100 in the same group. power may be supplied in series from a single drive power supply 180.

Here, a modified example of the drive power source 180 will be described. As shown in FIG. Alternatively, as shown in FIG. 22(b), one dimming signal is input to output power to each of a plurality of groups (two in this example) of the LED modules 100. You may make it Furthermore, as shown in FIG. 22(c), a plurality of (two in this example) dimming signals are input to the drive power supply 180 to control a plurality of groups (two in this example) of LEDs. Electric power may be output to each module 100 .

Furthermore, in each LED module 100 according to this modification, as shown in FIG. 23, five LEDs 16 arranged in a straight line constitute one set of LEDs, and two sets of LEDs are arranged in parallel to each other. are placed.

A method for adjusting the amount of light emitted from each LED 16 via the drive power supply 180 when using the LED module 100 in which two sets of LED groups Y and Z are arranged in this way will be described.

As shown in FIG. 24, a measuring instrument 190 for measuring illuminance is set at a position corresponding to an intermediate position between one LED group Y and the other LED group Z on the exposure plane A. As shown in FIG. Thereby, the amount of light emitted from one LED group Y and the amount of light emitted from the other LED group Z are measured by the measuring device 190 .

Specifically, while the measuring instrument 190 set on the exposure surface A moves in the movement direction of the work X, the integrated light amount is measured for each LED module 100 of the same group (scan measurement). When the measurement of the amount of light from the LED modules 100 related to one group is completed, the position of the measuring instrument 190 on the exposure plane A is shifted in the width direction of the light source 12, and the integrated amount of light from the LED modules 100 of the adjacent group is measured. Measure. By proceeding with this step by step, the integrated amount of light for all groups is measured. Of course, instead of moving the measuring instrument 190, the light irradiation device 10 may be moved with respect to the measuring instrument 190, or both may be moved.

Based on the amount of light measured by the measuring device 190, a control device (not shown) inputs a dimming signal to the corresponding driving power source 180 so as to achieve the optimum amount of light. The power output from the drive power supply 180 that receives this dimming signal to the corresponding LED module 100 is adjusted, and finally the light amount emitted from the LED group Y and the LED group Z is adjusted.

In this way, the adjustment of the amount of light by the driving power supply 180 is performed for each LED module 100 . Of course, it is not limited to this, and the light amount may be adjusted by the drive power source 180 not for each LED module 100 but for each LED group or each LED 16 .

As shown in FIG. 25, virtual lines ( The light distribution angle of the light from each LED 16 and the distance between the exposure surface A and the LED 16 are set so that the light from both LEDs 16 can be received between the positions P1 and P2 where the dashed line ) intersects with the exposure surface A. is preferred.

According to this example, when three LED groups Y, Z, and V are used in one LED module 100 as shown in FIG. All (three in this example) LEDs 16 to be able to receive light from The same is true when the number of LED groups is one, or four or more.

It should be considered that the embodiments disclosed this time are illustrative in all respects and not restrictive. The scope of the present invention is indicated by the scope of the claims rather than the above description, and is intended to include all modifications within the scope and meaning equivalent to the scope of the claims.

DESCRIPTION OF SYMBOLS 10... Light irradiation apparatus, 12... Light source, 14... Polarizing element, 16... LED, 18... Wire grid forming surface 30... Optical filter 40... Cover member, 42... Holding frame 100... LED module 110... Angle adjustment mechanism, 112 Rotation shaft 120 Width direction position adjustment mechanism 130 LED base 132 Inclined surface 150 Polarizing element group 152 Overall angle adjustment mechanism 154 Overall rotation shaft 160 Reflector 164 Width direction reflection Mirror 170 Light source unit 180 Driving power supply 190 Measuring device X Work (exposure object) A Exposure surface L Exposure light CL Optical axis (of LED 16) θ1 First angle θ2 .

Claims (6)

a light source having a plurality of LEDs;
a polarizing element that receives the light from the light source and irradiates the work with the transmitted light,
The optical axis of each LED has a first angle with respect to the workpiece,
a second angle that is half the light distribution angle of the light emitted from each LED is set smaller than the first angle;
By changing the power input to the LED, the illuminance of the light on the work or the exposure surface and the integrated light amount are adjusted ,
The light source comprises a plurality of LED modules in which a plurality of the LEDs are arranged,
a plurality of the light sources are arranged along the moving direction of the workpiece;
Power input to the plurality of LEDs arranged in the plurality of LED modules arranged in the light sources different from each other and arranged in a straight line along the movement direction of the work is adjusted by one driving power supply. A light irradiation device characterized by: further comprising a measuring instrument for measuring the illuminance of the workpiece or the exposure surface;
Light unevenness on the workpiece or the exposure surface is calculated from the illuminance and integrated light amount values of the workpiece or the exposure surface measured by the measuring instrument, and power input to the LEDs at positions corresponding to the unevenness is calculated. 2. The light irradiation device according to claim 1, wherein the unevenness is eliminated by changing. 3. The light irradiation device according to claim 1, wherein the polarizing element has a shape elongated in the irradiation direction of the light emitted from the light source. The polarizing element is composed of a plurality of wire grids,
Each wire grid is formed in a trapezoidal shape,
3. The light irradiation device according to claim 1, wherein the lower side of one trapezoid and the upper side of the adjacent trapezoid are arranged linearly in a direction perpendicular to the irradiation direction of the light emitted from the light source. The light irradiation device according to any one of claims 1 to 4, wherein the number of said polarizing elements is smaller than the number of said light sources. An exposure apparatus comprising the light irradiation device according to claim 1 .

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