JP7137373B2 - ステージ装置及び顕微鏡システム - Google Patents
ステージ装置及び顕微鏡システム Download PDFInfo
- Publication number
- JP7137373B2 JP7137373B2 JP2018120029A JP2018120029A JP7137373B2 JP 7137373 B2 JP7137373 B2 JP 7137373B2 JP 2018120029 A JP2018120029 A JP 2018120029A JP 2018120029 A JP2018120029 A JP 2018120029A JP 7137373 B2 JP7137373 B2 JP 7137373B2
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- stage device
- plate
- guide portion
- linear motion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 claims description 76
- 238000005096 rolling process Methods 0.000 claims description 57
- 238000001514 detection method Methods 0.000 claims description 35
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 29
- 230000036316 preload Effects 0.000 description 18
- 238000000034 method Methods 0.000 description 12
- 238000007689 inspection Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 5
- 239000002783 friction material Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018120029A JP7137373B2 (ja) | 2018-06-25 | 2018-06-25 | ステージ装置及び顕微鏡システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018120029A JP7137373B2 (ja) | 2018-06-25 | 2018-06-25 | ステージ装置及び顕微鏡システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020003527A JP2020003527A (ja) | 2020-01-09 |
| JP2020003527A5 JP2020003527A5 (enExample) | 2021-07-26 |
| JP7137373B2 true JP7137373B2 (ja) | 2022-09-14 |
Family
ID=69099690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018120029A Active JP7137373B2 (ja) | 2018-06-25 | 2018-06-25 | ステージ装置及び顕微鏡システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7137373B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102714822B1 (ko) * | 2021-08-13 | 2024-10-08 | 한국과학기술원 | 동물 생체 내부 조직의 현미경 영상화를 위한 고정 및 체온 유지 장치 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3144575U (ja) | 2008-06-23 | 2008-09-04 | 精研工業株式会社 | ２軸平面移動ステージ |
| JP2017013210A (ja) | 2015-07-06 | 2017-01-19 | 日本精工株式会社 | 二軸位置決めステージ装置 |
| JP2017219775A (ja) | 2016-06-09 | 2017-12-14 | キヤノン株式会社 | ステージ装置およびリニアアクチュエータ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3409298B2 (ja) * | 1997-10-07 | 2003-05-26 | 日立建機株式会社 | 移動ステージ装置とこの移動ステージ装置を備えた走査型プローブ顕微鏡 |
-
2018
- 2018-06-25 JP JP2018120029A patent/JP7137373B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3144575U (ja) | 2008-06-23 | 2008-09-04 | 精研工業株式会社 | ２軸平面移動ステージ |
| JP2017013210A (ja) | 2015-07-06 | 2017-01-19 | 日本精工株式会社 | 二軸位置決めステージ装置 |
| JP2017219775A (ja) | 2016-06-09 | 2017-12-14 | キヤノン株式会社 | ステージ装置およびリニアアクチュエータ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2020003527A (ja) | 2020-01-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102490020B (zh) | 一种简易精密位移台 | |
| TW528881B (en) | Position measuring apparatus | |
| US20020140296A1 (en) | Stage apparatus and method of using the same | |
| KR20190022318A (ko) | 갠트리 타입의 위치 결정 장치 | |
| KR20150111280A (ko) | 위치 결정 장치 | |
| JP2009216548A (ja) | 測定装置 | |
| US10663040B2 (en) | Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance | |
| KR101218772B1 (ko) | 유연기구를 이용한 회전 오차 보상 스테이지 | |
| JP7137373B2 (ja) | ステージ装置及び顕微鏡システム | |
| US7298495B2 (en) | System and method for positioning an object through use of a rotating laser metrology system | |
| CN101701803B (zh) | 双正交衍射光栅计量系统及其构成的共基面扫描工作台 | |
| JP4322762B2 (ja) | ステージガイド機構 | |
| JP2009083069A (ja) | 駆動装置、これを用いた加工機械および測定機械 | |
| US6857195B2 (en) | Apparatus for the measurement or machining of an object, provided with a displacement stage with wedge-shaped guides | |
| CN109828366B (zh) | 一种物镜转塔及显微镜 | |
| JP2013088710A (ja) | 光学測定機器におけるｘ−ｙテーブルの駆動用送りねじ機構 | |
| JP2002071346A (ja) | 表面性状測定機 | |
| RU2348952C2 (ru) | Устройство для прецизионного линейного перемещения оптических элементов | |
| CN209606705U (zh) | 一种显微镜头部装置及显微镜 | |
| US6601524B2 (en) | Translation table with a spring biased dovetail bearing | |
| JPH09211337A (ja) | 載物台 | |
| JPH05259263A (ja) | Ｘｙ微動ステージ | |
| CN112912787B (zh) | 预对准光学安装件 | |
| JP3184371B2 (ja) | シングルプレート型ｘ−ｙテーブル装置 | |
| CN1816962B (zh) | 带有位置测量系统的平面直接驱动装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20210208 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210603 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210603 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220518 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220520 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220624 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220805 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220902 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7137373 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |