JP7137373B2 - Stage device and microscope system - Google Patents

Description

The present invention relates to a stage device and a microscope system.

2. Description of the Related Art Conventionally, a stage device having a plate and a drive unit for moving the plate in a certain direction is mounted on various devices such as microscopes, inspection devices, and measuring devices. Patent Document 1 discloses a stage device having a structure in which a middle table 12 is assembled on a fixed base plate 11 and a setting table 13 is further assembled on the middle table 12 .

In Patent Document 2, a movable frame 2 arranged via an X-axis linear motion guide device 4 in the frame of a fixed frame 1 and a Y-axis linear motion guide device 7 in the frame of the movable frame 2 a driving device 5 for moving the moving frame 2 is disposed on the fixed frame 1; and a driving device 8 for moving the stage 3 is disposed on the moving frame 2. disclosed.

JP 2010-247245 A JP 2017-13210 A

The stage device disclosed in Patent Document 1 has a structure in which a table in one axial direction is stacked on top of a table in the other axial direction. of table and moving mechanism height is required. Further, in the stage apparatus disclosed in Patent Document 2, since a driving device for moving the stage is arranged on the stage, a driving device having a ball screw, a bearing block, etc. is arranged on the stage. Plate and drive height is required.

SUMMARY OF THE INVENTION An object of the present invention is to provide a stage apparatus whose height is minimized.

A stage device according to one aspect of the present invention has the following configuration. That is, the stage device is a stage device having a base plate having an attachment surface that can be attached to an external device, and a first movable plate having a first opening and being relatively movable with respect to the base plate. There is
The base plate is
having a first guide portion that guides the movement of the first movable plate in the first direction;
The first movable plate is
A linear motion guide mechanism is configured in combination with the first guide portion, and has a second guide portion that guides the movement of the first movable plate in the first direction,
The first guide portion and the second guide portion are arranged on the mounting surface side, and the base plate is arranged in the first direction, the second direction intersecting the first direction, and the second direction. It is arranged in the first opening of the first movable plate in a third direction intersecting the one direction and the second direction .

A stage device according to another aspect of the present invention has the following configuration. That is, a base plate having an attachment surface capable of being attached to an external device, a first movable plate having a first opening and being relatively movable with respect to the base plate, and a second opening having the a second movable plate movable relative to the first movable plate, comprising:
The base plate is
having a first guide portion that guides the movement of the first movable plate in the first direction;
The first movable plate is
a second guide portion that constitutes a linear motion guide mechanism in combination with the first guide and guides the movement of the first movable plate in the first direction;
a third guide portion that guides movement in a second direction of the second movable plate that intersects the first direction;
The second movable plate is
A linear motion guide mechanism is configured in combination with the third guide portion, and has a fourth guide portion that guides the movement of the second movable plate in the second direction,
The first guide portion, the second guide portion, and the third guide portion and the fourth guide portion are arranged on the mounting surface side,
In the first direction, the second direction that intersects with the first direction, and the third direction that intersects with the first direction and the second direction, the base plate moves the first movable plate in the first direction. arranged in one opening, wherein the first movable plate is arranged in the second opening of the second movable plate in the first direction, the second direction, and the third direction; It is characterized by

A stage device according to another aspect of the present invention has the following configuration. That is, a stage apparatus having a base plate having an attachment surface capable of being attached to an external device, and a first movable plate having a first opening and being relatively movable with respect to the base plate,
The base plate is
having first guide portions provided on first side surfaces adjacent to the mounting surface and facing each other and guiding the movement of the first movable plate in the first direction;
The first movable plate is
Each is provided on a second side surface opposite to the first side surface, and in combination with the first guide portion, constitutes a linear motion guide mechanism, and guides the movement of the first movable plate in the first direction. having a second guide,
The first side surface and the second side surface are provided with the first guide portion and the second guide portion that guide movement in the first direction via rolling elements in grooves formed in the respective side surfaces. is formed and
The base plate is arranged in the first opening in the first direction, a second direction intersecting the first direction, and a third direction intersecting the first direction and the second direction. It is characterized by

According to the present invention, it is possible to provide a stage apparatus whose height is minimized.

2 is an exploded perspective view of the stage device according to the first embodiment; FIG. FIG. 4 is an exploded perspective view of a stage device according to a second embodiment; FIG. 11 is an exploded perspective view of a stage device according to a third embodiment; FIG. 11 is an exploded perspective view of a stage device according to a third embodiment; FIG. 11 is an exploded perspective view of a stage device according to a fourth embodiment; FIG. 11 is an exploded perspective view of a stage device according to a fourth embodiment; FIG. 11 is an exploded perspective view of a stage device according to a fifth embodiment; FIG. 11 is an exploded perspective view of a stage device according to a fifth embodiment; FIG. 11 is an exploded perspective view of a stage device according to a sixth embodiment; FIG. 11 is an exploded perspective view of a stage device according to a seventh embodiment; FIG. 11 is an exploded perspective view of a stage device according to a seventh embodiment; FIG. 11 is an exploded perspective view of a stage device according to a seventh embodiment; The figure which shows the state which installed the stage apparatus of 8th Embodiment in the apparatus. FIG. 4 is a diagram illustrating a stage having conventional cross roller guides;

Embodiments of a stage device and a microscope system to which the present invention can be applied will be described in detail below with reference to the drawings.

(First embodiment)
The stage apparatus described in the first embodiment includes a base plate having an attachment surface that can be attached to an external device, and a first movable plate having a first opening and movable relative to the base plate. In the stage apparatus having the linear guide mechanism, the linear guide mechanism is arranged on the mounting surface side, and the base plate is arranged in the first opening of the first movable plate.

FIG. 1 is an exploded perspective view of the stage device in the first embodiment, and FIG. 1(a) is an exploded perspective view showing a linear guide mechanism of the stage device 210. FIG. FIG. 1B is a perspective view of the stage device 210 viewed from below. FIG. 1(c) is a cross-sectional view of the stage device 210 cut along AA in FIG. 1(b).

The stage device 210 has a base plate unit 208 and a movable plate unit 209 .

The base plate unit 208 includes a base plate 211 having an attachment surface 211a that allows the stage device 210 to be attached to various devices (external devices) such as microscopes, inspection devices, and measurement devices. Fixed rails 216, 217) are arranged.

The movable plate unit 209 also includes a first movable plate 223 having an opening 222 (first opening), and the first movable plate 223 has a second linear motion guide (fixed rail 224 and coordinating rails 225) are arranged.

Here, the first linear guides (fixed rails 216, 217) guide the movement of the first movable plate 223 in the first direction, and the second linear guides (fixed rail 224 and adjustment rail 225) guide the movement of the first movable plate 223 in the first direction. ) form the linear motion guide mechanisms LM11 and LM12 in combination with the first linear motion guide portion, and guide the movement of the first movable plate 223 in the first direction.

Mounting portions 212, 213, 214, and 215 for mounting the stage device 210 to various devices (external devices) such as a microscope, inspection device, and measuring device are formed on the mounting surface 211a. In order to secure mounting accuracy of the stage device 210, the flatness and parallelism of the mounting portions 212, 213, 214, and 215 are formed with higher accuracy.

Linear motion guide installation portions 218 and 219 for mounting fixed rails 216 and 217, which are the first linear motion guide portions, are formed on the mounting surface 211a. Fixed rails 216, 217 are arranged. If the linear motion guide installation parts 218 and 219 are not secured in mutual flatness and parallelism, the fixed rails 216 and 217 constituting the first linear motion guide part will be bent and installed, which will affect the positioning performance. Therefore, it is formed with a high precision of micrometer level. The mounting portions 212, 213, 214, 215 and the linear motion guide installation portions 218, 219 are substantially flush with each other, and can be processed simultaneously or in association with each other.

The fixed rails 216 and 217 are secured to the base plate 211 by using a fixing screw (not shown) as a fixing member in a state in which a jig (not shown) processed with high precision is used to obtain parallelism at the micrometer level. A round hole 220 and an elongated round hole 221 formed in the base plate 211 are used to position the jig.

In the first linear motion guide portion (fixed rails 216, 217) arranged on the base plate 211, since the arrangement configuration uses the fixed rails 216, 217 capable of highly accurate positioning, the mounting portions 212, 213, 214 , 215 and the base plate 211, the mounting accuracy of the position and parallelism of the first direct-acting guide can be ensured.

In the second linear motion guide portion (fixed rail 224, adjusting rail 225) arranged on the first movable plate 223, the fixed rail 224 and the adjusting rail 225 are arranged so as to facilitate adjustment of the relative position with respect to the base plate 211. It is configured with a combination of The adjustment rail is a rail whose position can be adjusted. For example, when the arrangement position is fixed by one fixed rail 224, the other adjustment rail 225 performs fine adjustment to absorb errors in the mounting position. be able to.

The second linear motion guide portion (fixed rail 224, adjustment rail 225) arranged on the mounting surface side of the first movable plate 223 is similar to the above-described first linear motion guide portion (fixed rails 216, 217). cooperate to guide the movement of the first movable plate 223 in the first direction. That is, the first linear motion guide portion and the second linear motion guide portion are arranged on the mounting surface 211a side of the base plate 211, and the second linear motion guide portion is the same as the first linear motion guide portion. , constitute the linear guide mechanisms LM11 and LM12, which guide the movement of the first movable plate 223 in the first direction.

The first movable plate 223 is formed with linear motion guide installation portions 226 and 227 for mounting a fixed rail 224 and an adjustment rail 225 as a second linear motion guide portion. A fixed rail 224 and an adjustable rail 225 are arranged at 227 . If the linear motion guide installation portions 226 and 227 are not secured for mutual flatness and parallelism, the fixed rail 224 and the adjustment rail 225 that constitute the second linear motion guide portion will be bent and installed, resulting in poor positioning performance. It is formed with a high degree of accuracy on the order of micrometers.

The fixed rail 224 is fixed to the first movable plate using a fixing screw (not shown) as a fixing member in a state in which micrometer-level straightness is achieved by a jig (not shown) processed with high precision. A round hole 228 and an elongated hole 229 formed in 223 are used to position the jig and fix to the first movable plate 223 . Also, the adjustment rail 225 is temporarily fixed to the first movable plate 223 using a fixing screw (not shown).

FIG. 1(b) is a perspective view of the positioning stage device 210 viewed from the mounting surface 211a of the base plate 211. FIG. The first linear motion guide portion (fixed rails 216, 217) and the second linear motion guide portion (fixed rail 224, adjustment rail 225) are arranged on the mounting surface 211a side, and the base plate 211 It is arranged in the opening 222 (first opening) of one movable plate 223 .

When assembling the base plate unit 208 and the movable plate unit 209, rolling elements (not shown) (eg, balls, rollers, cylindrical rollers, etc.). The adjustment rail 225 does not interfere with the insertion of the rolling elements in the temporarily fixed state. The rolling elements are inserted into each rail to a predetermined position in a state in which no preload is applied to the rolling elements. After inserting the rolling elements into each rail to a predetermined position, the fixing screws are tightened so as to apply preload to the rolling elements using a jig (not shown). As a working method, a predetermined preload is applied to the position where the rolling element exists, and it is fixed to the first movable plate 223 with a fixing screw (not shown). The movable plate unit 209 is moved to change the position of the rolling elements, and fixing screws (not shown) at the positions where the rolling elements are present are fixed with a predetermined screw tightening torque to fix the entire linear motion guide.

A fixed By fixing the rolling element between the rail 217 and the adjustment rail 225 in a state where it is inserted, the first movable plate 223 can move in the first direction with respect to the base plate 211 . The moving direction of the first movable plate 223 with respect to the base plate 211 is indicated by an arrow in FIG. 1(b). The difference between the opening dimension a in the movement direction of the opening 222 (first opening) and the dimension b of the base plate 211 is the movable distance of the stage device 210 .

The nested structure in which the base plate 211 is arranged in the opening 222 (first opening) of the first movable plate 223 allows the bottom surface of the base plate 211 (mounting surface 211a that can be attached to an external device). to the upper surface of the first movable plate 223, the positioning stage device 210 can be provided.

(Second embodiment)
The stage apparatus described in the second embodiment includes a base plate having an attachment surface that can be attached to an external device, and a first movable plate having a first opening and being relatively movable with respect to the base plate. In the stage apparatus having explain.

FIG. 2 is an exploded perspective view of the stage device according to the second embodiment, and FIG. 2(a) is an exploded perspective view showing a linear guide mechanism of the stage device 140. FIG. FIG. 2B is a perspective view of the stage device 140 viewed from below. FIG. 2(c) is a cross-sectional view cut along BB in FIG. 2(b).

The stage device 140 has a base plate 141 and a first movable plate 142 .

The base plate 141 has an attachment surface 141a that can be attached to an external device, and is provided on first side surfaces 143 and 144 that are adjacent to the attachment surface 141a and face each other. It has a first direct-acting guide portion (fixed rails 145, 146) that guides the .

In addition, the first movable plate 142 is provided on second side surfaces 154 and 155 facing the first side surfaces 143 and 144, respectively, and is combined with the first direct-acting guides (fixed rails 145 and 146) to It constitutes the linear motion guide mechanisms LM21 and LM22, and has a second linear motion guide portion (fixed rail 156, adjustment rail 157) that guides the movement of the first movable plate 142 in the first direction.

First side surfaces 143 and 144 of the base plate 141 and second side surfaces 154 and 155 of the first movable plate 142 facing the first side surfaces 143 and 144 are formed with grooves, respectively. A first linear motion guide portion (fixed rails 145, 146) and a second linear motion guide portion (fixed rail 156, adjusting rail 156) guide movement in the first direction of the first movable plate 142 via inner rolling elements. rails 157) are formed.

FIG. 2B is a perspective view of the stage device 140 viewed from the mounting surface 141a of the base plate 141. FIG. A base plate 141 is arranged within the opening 166 (inside the first opening) of the first movable plate 12 .

A mounting surface 141a of the base plate 141 is formed with device mounting portions 162, 163, 164, and 165 for mounting the stage device 140 to various devices (external devices) such as microscopes, inspection devices, and measuring devices. Two side surfaces (first side surfaces) 143 and 144 of the base plate 141 are formed with grooves (V grooves) having highly accurate V-shaped cross-sectional shapes. They function as fixed rails 145 and 146 of the first linear motion guide.

The first movable plate 142 has a plurality of plates 147 , 148 , 149 , 150 and is constructed by fastening the plurality of plates with a plurality of screws 151 . Shims 152 and 153, which are adjusting members, can be used to adjust the gap between the plates as needed.

As for the method of assembling the first movable plate 142 , first, the plates 149 and 150 are fixed to the plate 147 . Between the fixed rail 145 provided on the first side 143 of the base plate 141 and the fixed rail 156 provided on the second side 154 of the plate 147, the fixed rail provided on the first side 144 of the base plate 141 A plurality of plates 148 are inserted with rolling elements (for example, balls, rollers, cylindrical rollers, etc.) inserted in predetermined positions between 146 and adjustment rails 157 provided on the second side surface 155 of the plate 148 . is temporarily fixed with a screw 151 of .

The rollers are appropriately preloaded by the length c of the plate 149 and the length d of the plate 150. If necessary, shims 152 and 153 are interposed, and a plurality of screws 151 are fully tightened with a predetermined screw tightening torque. do. The plates 147, 148 have a shape suitable for grooving the second side surfaces 154, 155 with micrometer-level accuracy. The side surfaces (portions not including the second side surface) 158, 159, 160, and 161 that contact the plates 149 and 150 also have shapes suitable for planar processing with high micrometer-level precision.

Here, two side surfaces (second side surfaces) 154 and 155 of the plates 147 and 148 constituting the first movable plate 142 are formed with grooves (V grooves) having highly accurate V-shaped cross-sectional shapes. A groove formed on the second side surface functions as a fixed rail 156 and an adjusting rail 157 of the second linear motion guide.

The side surfaces 158 and 159 of the plate 147 and the side surfaces 160 and 161 of the plate 148 are not grooves but highly precise planes. The lengths c and d of the plates 149 and 150 are also formed with highly accurate dimensions, and the rolling elements (not shown) of the linear motion guide mechanisms LM21 and LM22 are fixed with screws 151 in a state where they are sandwiched at predetermined positions of the rails. Thus, a desired preload can be applied to the rolling elements of the linear motion guide mechanisms LM21 and LM22.

Although the V-shaped groove is formed in this embodiment, the cross-sectional shape of the groove may be a U-shaped groove, for example. Moreover, it is possible to use a ball, a roller, a cylindrical roller, or the like as the rolling element. For example, when cylindrical rollers are used, linear motion guide mechanisms LM21 and LM22 can be configured that are superior in rigidity and resistant to preload as compared to balls.

A fixed By fixing the rolling elements between the rail 146 and the adjustment rail 157 in a state where they are inserted, the first movable plate 142 can move in the first direction with respect to the base plate 141 . The moving direction of the first movable plate 142 with respect to the base plate 141 is indicated by an arrow in FIG. 2(b). The base plate 141 has a nested structure in which the opening 166 of the first movable plate 142 is inserted. It becomes the movable distance of the device 140 .

The nested structure in which the base plate 141 is arranged in the opening 166 (first opening) of the first movable plate 142 allows the bottom surface of the base plate 141 (mounting surface 211a that can be attached to an external device). to the upper surface of the first movable plate 142, the stage device 140 can be provided.

(Third embodiment)
A stage device described in the third embodiment includes a base plate having an attachment surface capable of being attached to an external device, a first movable plate having a first opening and relatively movable with respect to the base plate, a and a second movable plate having two openings and movable relative to the first movable plate. A linear motion guide mechanism between the base plate and the first movable plate and a linear motion guide mechanism between the first movable plate and the second movable plate are arranged on the mounting surface side, and the base plate A configuration in which one movable plate is arranged in the first opening and the first movable plate is arranged in the second opening of the second movable plate will be described.

FIG. 3 is an exploded perspective view of the stage device 26 in the third embodiment. The stage device 26 has a base plate unit 27 , an intermediate plate unit (first movable plate unit) 28 and an upper plate unit (second movable plate unit) 29 .

The base plate unit 27 includes a base plate 1 on which a first linear motion guide (Y-axis fixed rails 6 and 7) is arranged. The first linear motion guides (Y-axis fixed rails 6 and 7) guide the movement of the first movable plate 11 in the first direction (Y direction).

The intermediate plate unit 28 includes a first movable plate 11 having a first opening 10. The first movable plate 11 has second linear guides (Y-axis fixed rail 12, Y-axis adjustment rail 13) and a third direct-acting guide (X-axis fixed rails 14, 15). Here, the second linear motion guide portion (Y-axis fixed rail 12, Y-axis adjustment rail 13) constitutes the linear motion guide mechanisms LM31 and LM32 in combination with the first linear motion guide portion. It guides the movement of the movable plate 11 in the first direction. Also, the third linear motion guide portions (X-axis fixed rails 14 and 15) guide the movement of the second movable plate 20 in the second direction intersecting the first direction.

The top plate unit 29 includes a second movable plate 20 having a second opening 30. The second movable plate 20 has a fourth linear motion guide (X-axis fixed rail 21, X-axis adjustment rail 22) are arranged. Here, the fourth linear motion guide portion (X-axis fixed rail 21, X-axis adjustment rail 22) constitutes the linear motion guide mechanisms LM33 and LM34 in combination with the third guide portion, and the second movable plate 20 guides movement in the second direction.

As shown in FIG. 3, the base plate 1 has a mounting surface 1a on which the stage device 26 can be mounted to various devices (external devices) such as microscopes, inspection devices, and measuring devices. Mounting portions 2, 3, 4 and 5 for mounting the stage device 26 are formed. The mounting portions 2, 3, 4, and 5 are formed with a higher degree of precision, because if the mutual flatness and parallelism are not ensured, the mounting to the device will be hindered.

Linear motion guide installation portions 8 and 9 for mounting Y-axis fixed rails 6 and 7, which are first linear motion guide portions, are formed on the mounting surface 1a. If the linear motion guide installation portions 8 and 9 are not secured for mutual flatness and parallelism, the Y-axis fixed rails 6 and 7 constituting the first linear motion guide portion will be bent and installed, resulting in poor positioning performance. It is formed with a high degree of accuracy on the order of micrometers. The mounting portions 2, 3, 4, 5 and the linear motion guide installation portions 8, 9 are substantially flush with each other, and can be machined simultaneously or in association with each other.

In addition, the first movable plate 11 has a second linear guide portion (the Y-axis fixed rail 12 and the Y-axis adjustment rail 13) and a third linear motion guide portion (the X-axis fixed rails 14 and 15). Linear motion guide installation portions 16, 17, 18, and 19 for mounting are formed on the mounting surface side. If the two installation portions of the linear motion guide installation portions 16 and 17 and the two installation portions of the linear motion guide installation portions 18 and 19 that are paired with each other are not secured for mutual flatness and parallelism, the second 1 linear motion guide (Y-axis fixed rail 12, Y-axis adjustment rail 13) and the third linear motion guide (X-axis fixed rails 14, 15) are bent and attached, which affects the positioning performance. It is formed with high precision of meter level. The linear motion guide installation parts 16, 17, 18 and 19 are formed on substantially the same plane so that they can be machined simultaneously or in association with each other.

When the device to which the stage device 26 is attached is a microscope, if the first direction is set to the Y-axis direction shown in FIG. ), the height of the stage device 26 can be suppressed as much as possible. It is possible to dispose the first linear motion guides (Y-axis fixed rails 6 and 7) by straddling the holding part of the microscope. be.

On the second movable plate (top table plate) 20, linear motion guide installation portions 23 and 24 for mounting the fourth linear motion guide portion (X-axis fixed rail 21, X-axis adjustment rail 22) are provided on the mounting surface side. is formed in The linear guide installation parts 23 and 24 are formed on substantially the same plane so that they can be machined simultaneously or in association with each other.

The linear motion guide mechanisms LM31 and LM32 between the base plate 1 and the first movable plate 11 and the linear motion guide mechanisms LM33 and LM34 between the first movable plate 11 and the second movable plate 20 are mounted on the mounting surface. placed on the side. That is, the first linear motion guide portion (Y-axis fixed rails 6 and 7), the second linear motion guide portion (Y-axis fixed rail 12, Y-axis adjustment rail 13), and the third linear motion guide portion ( The X-axis fixed rails 14, 15) and the fourth direct-acting guide portion (X-axis fixed rail 21, X-axis adjustment rail 22) are arranged on the mounting surface 1a side of the base plate 1. As shown in FIG.

Here, as shown in FIG. 3 , the base plate 1 is placed in the first opening 10 of the first movable plate 11 , and the first movable plate 11 is positioned in the second opening of the second movable plate 20 . It is positioned within the opening 30 .

Between the first linear motion guide portion (Y-axis fixed rails 6, 7) and the second linear motion guide portion (Y-axis fixed rail 12, Y-axis adjustment rail 13), that is, between the Y-axis fixed rail 6 and By fixing the rolling elements between the Y-axis fixed rail 12 and between the Y-axis fixed rail 7 and the Y-axis adjustment rail 13 with the rolling elements inserted, the first movable plate 11 is fixed to the base plate 1 by: It becomes movable in the first direction.

Similarly, between the third linear motion guide portion (X-axis fixed rails 14, 15) and the fourth linear motion guide portion (X-axis fixed rail 21, X-axis adjustment rail 22), that is, the X-axis fixed By inserting and fixing rolling elements between the rail 14 and the X-axis fixed rail 21 and between the X-axis fixed rail 15 and the X-axis adjustment rail 22, the second movable plate 20 is fixed to the first It becomes movable in the second direction with respect to the movable plate 11 .

A linear motion guide mechanism LM31 composed of a combination of a second linear motion guide portion (Y-axis fixed rail 12, Y-axis adjustment rail 13) and a first linear motion guide portion (Y-axis fixed rails 6, 7) , LM32, and a combination of a fourth linear motion guide portion (X-axis fixed rail 21, X-axis adjustment rail 22) and a third linear motion guide portion (X-axis fixed rails 14, 15). As the linear motion guide mechanisms LM33 and LM34, for example, a cross roller guide or a ball guide using non-circulating balls, or a separate type linear motion guide in which balls circulate can be applied to reduce the thickness of the stage.

As shown in FIG. 3, the difference between the Y-direction dimension of the first opening 10 and the Y-direction dimension of the base plate 1 is the movable distance in the first direction (Y-direction), and the X-direction dimension of the opening 30 is The difference between the opening size and the Y-direction size of the first movable plate 11 is the movable distance in the second direction (X-direction). The same can be said for each embodiment with respect to the configuration of the linear motion guide mechanism, the processing of each member, and the accuracy of flatness and parallelism.

Next, a method for assembling the stage device 26 will be described. First, the Y-axis fixed rails 6 and 7, which are the first direct-acting guides of the base plate unit 27, are fixed to the base plate 1. As shown in FIG. The Y-axis fixed rails 6 and 7 are fixed to the base plate 1 by fixing screws (not shown), which are fixing members, in a state in which parallelism of the micrometer level is achieved by a jig.

The third direct-acting guides (X-axis fixed rails 14 and 15) of the intermediate plate unit 28 are secured to each other by fixing screws (not shown) in a state of micrometer-level parallelism with a jig (not shown). ) to the first movable plate 11 .

Next, one of the Y-axis fixed rails 12 of the second linear motion guide part is based on one of the rails of the third linear motion guide part (X-axis fixed rails 14 and 15), and a jig (unused ), and fixed to the first movable plate 11 by fixing screws (not shown).

The other Y-axis adjustment rail 13 of the second linear guide portion is first fixed to the first movable plate 11 in a temporarily fixed state.

Between the Y-axis fixed rail 6 of the base plate 1 and the Y-axis fixed rail 12 of the first movable plate 11, and between the Y-axis fixed rail 7 of the base plate 1 and the Y-axis adjustment rail 13 of the first movable plate 11 After inserting the rolling elements (not shown), the Y-axis adjusting rail 13 is fixed with a fixing screw (not shown) while preloading the rolling elements with a jig.

One X-axis fixed rail 21 of the fourth direct-acting guide portion of the upper plate unit 29 is fixed to the second movable plate 20 with straightness on the order of micrometers.

The other X-axis adjustment rail 22 of the fourth linear guide portion is first fixed to the second movable plate 20 in a temporarily fixed state.

Between the X-axis fixed rail 14 of the first movable plate 11 and the X-axis fixed rail 21 of the second movable plate 20, the X-axis fixed rail 15 of the first movable plate 11 and the second movable plate 20 After inserting a rolling element (not shown) between the X-axis adjustment rail 22 and the X-axis adjustment rail 22 while preloading the rolling element with a jig, the X-axis adjustment rail 22 is fixed with a fixing screw (not shown).

In the stage device 26 of FIG. 3, the Y-axis adjustment rail 13 and the X-axis adjustment rail 22 are arranged outside the two Y-axis fixed rails 7 and the X-axis fixed rail 15 arranged with parallelism at the micrometer level. Therefore, it is possible to adjust the preload on the Y-axis adjustment rail 13 and the X-axis adjustment rail 22 from the outside of the stage device 26 .

The linear motion guide installation portions 8, 9, 16, 17, 18, 19, 23, and 24 of the stage device 26 do not have a portion for positioning the linear motion guide portion by contacting the plate, and the plate shape is suitable for planar processing. I have to. It is possible to assemble the linear motion guide part with a jig instead of having a portion for contacting and positioning the linear motion guide part.

In order to install a conventional adjustment rail, it was necessary to form a back plate 77 having an adjustment screw hole 76 shown in FIG. 13(b) on the stage 64. In this embodiment, the first movable plate 11 and the second movable plate 20 shown in FIG. 3 have no back plate. The structure without a back plate having adjustment screw holes simplifies the shape of the first movable plate 11 and the second movable plate 20, simplifies the processing, reduces the weight, and makes it possible to reduce the size of the stage device 26. become. Further, by eliminating the need for the plurality of adjusting screws 68 shown in FIG. 13(a), it is possible to reduce the cost of parts.

FIG. 4 is a perspective view of the stage device 26 in the third embodiment, and includes the base plate unit 27 (base plate 1), the intermediate plate unit 28 (first movable plate 11), and the top plate unit 29 (second plate) described in FIG. The movable plate 20) is assembled and a motor, which is a drive unit, is arranged.

The first movable plate 11 is relatively movable in a first direction (Y direction) with respect to the base plate 1, and the second movable plate 20 is movable in a second direction (Y direction) with respect to the first movable plate 11. X direction). Moreover, when the base plate 1 is used as a reference, the second movable plate is relatively movable with respect to the base plate 1 .

FIG. 4(b) is a sectional view cut along CC in FIG. 4(a). A first drive unit (first drive motors 201 and 202) for driving the first movable plate 11 in the first direction (Y direction) is arranged between the base plate 1 and the first movable plate 11. It is Linear ultrasonic motors, for example, can be used as the first drive motors 201 , 202 . A piezoelectric element (stator) is arranged on the side surface of the base plate 1, and a friction material (moving element) is arranged on the side surface of the first movable plate 11 so as to face the piezoelectric element (stator). ) and the friction material (movable element) in the first direction, the first movable plate 11 can be driven in the first direction. Although FIG. 4B illustrates a twin-engine configuration using two linear ultrasonic motors as the first drive motors 201 and 202, the configuration is not limited to this example, and either one of them may be a single-engine configuration. It is also possible to switch the arrangement positions of the stator and the mover and drive the base plate 1 in the first direction with respect to the first movable plate 11 .

FIG. 4(c) is a sectional view taken along line DD of FIG. 4(a). Between the first movable plate 11 and the second movable plate 20, a second drive unit (second drive motor 203, 204) are arranged. The second drive motors 203 and 204 can use linear ultrasonic motors, like the first drive motors 201 and 202 .

A piezoelectric element (stator) is arranged on the side surface of the first movable plate 11, and a friction material (movable element) is arranged on the side surface of the second movable plate 20 so as to face the piezoelectric element (stator). The second movable plate 20 can be oriented in the second direction based on the driving force in the second direction generated between the element (stator) and the friction material (mover). Although FIG. 4C illustrates a twin-engine configuration using two linear ultrasonic motors as the second drive motors 203 and 204, the configuration is not limited to this example, and either one of them may be a single-engine configuration. It is also possible to switch the arrangement positions of the stator and the mover and drive the first movable plate 11 in the second direction with respect to the second movable plate 20 .

Configuration examples of the first drive units (first drive motors 201 and 202) and the second drive units (second drive motors 203 and 204) described in this embodiment are similar to those in the first and second embodiments described above, It can be applied to each embodiment described later.

Further, the first drive section (first drive motors 201, 202) and the second drive section (second drive motors 203, 204) may be configured using a manual mechanism, using an electric mechanism, or using a manual mechanism. It is also possible to combine motorized mechanisms. Examples of manual mechanisms include those using wires and pulleys and those using racks and pinions. As the electric mechanism, for example, a linear ultrasonic motor or a linear motor using a coreless coil and a magnet can be applied. Among rotary motors, a coreless motor with less cogging or a wire-driven mechanism using an ultrasonic motor can be applied for high-accuracy positioning and thinning of the stage. A combination of a manual mechanism and an electric mechanism is a combination of the manual mechanism and the electric mechanism, and has a switching unit (control unit) for switching between the manual automatic mode and the automatic mode.

A conventional stage device has a laminated structure in which a fixed base plate, an intermediate plate, an upper table plate, an X-axis rail, and a Y-axis rail are arranged between the mounting surface and the upper table plate. It is the sum of the thicknesses of all these parts.

In this embodiment, as shown in FIG. 4, the base plate 1 has a nested structure arranged in the first opening 10 of the first movable plate 11, and the first movable plate 11 By forming a nested structure arranged in the opening 30 (second opening) of the movable plate 20, the bottom surface of the base plate 1 (mounting surface 1a that can be attached to an external device) to the first movable plate 11 and the height to the upper surface of the second movable plate 20 can be minimized.

It is preferable that the base plate 1, the first movable plate 11, and the second movable plate 20 be made of the same material for each plate that constitutes the stage apparatus in terms of thermal expansion. In order to reduce the thickness of the stage device, it is necessary to reduce the height dimension of the stage device as much as possible. Also, in order to secure the movement stroke, it may be necessary to use a member shape with a large opening. Each plate constituting the stage device has a flexible member shape, but in order to reduce the bending of each plate, it is preferable to use a material with a higher Young's modulus (elastic modulus) for each member.

When the stage device 26 having the opening 126 provided in the base plate 1 is used for a microscope, the optical path of the illumination optical system can be formed from the mounting surface side. Further, since the stage device is thin, it is possible to secure a sufficient distance from the objective lens even if the second movable plate 20 is provided with an observation slide loading table, a cremmel, or various adjustment mechanisms.

(Fourth embodiment)
In the fourth embodiment, a configuration in which the stage device has a scale for position detection and a detection section for detecting the position of the plate will be described.

5 is an exploded perspective view of the stage device in the fourth embodiment, and FIG. 6(a) is an exploded perspective view of the stage device seen from a viewpoint different from that of FIG. FIG. 6(b) is a cross-sectional view of the assembled stage device of FIG. 6(a) taken along line EE, and FIG. 6(c) is a cross-sectional view of FIG. FIG. 3 is a cross-sectional view taken along line FF with the stage device assembled.

In the stage apparatus 130 of this embodiment, the second movable plate 50 is provided with a scale 55 having a pattern periodically formed in the first direction (Y direction) and the second direction (X direction). ing.

In the stage device 130 , the base plate 31 is provided with a first detection unit 57 that detects the position of the second movable plate 50 in the first direction (Y direction) with respect to the base plate 31 based on detection of the pattern of the scale 55 . It is Further, the base plate 31 is provided with a second detection unit 56 that detects the position of the second movable plate 50 in the second direction (X direction) with respect to the base plate 31 based on detection of the pattern of the scale 55 .

The upper plate unit 133 includes a second movable plate 50 on which a scale 55 and a fourth linear guide (X-axis fixed rail 51, X-axis adjustment rail 52) are arranged. It is The arrangement surface of the scale 55 and the fourth linear motion guide portion corresponds to the mounting surface 31a side of the base plate 31 and to the rear surface side of the upper surface 59 of the second movable plate 50 .

On the mounting surface side of the second movable plate 50, the linear motion guide installation portions 53 and 54 for mounting the fourth linear motion guide portion (the X-axis fixed rail 51 and the X-axis adjustment rail 52) are installed simultaneously or in association with each other. They are formed on substantially the same plane so that planar processing is possible.

The X-axis fixed rail 51 is fixed to the second movable plate 50 with straightness of micrometer level. The X-axis adjustment rail 52 is first fixed to the second movable plate 50 in a temporarily fixed state. Between the X-axis fixed rail 46 of the first movable plate 41 and the X-axis fixed rail 51 of the second movable plate 50, the X-axis fixed rail 47 of the first movable plate 41 and the second movable plate 50 After inserting a rolling element (not shown) between the X-axis adjustment rail 52 and the X-axis adjustment rail 52, the X-axis adjustment rail 52 is fixed with a fixing screw while preloading the rolling element with a jig. Here, as the fixing screw, for example, a screw similar to the fixing screw 264 for fixing the back plate 263 of the fifth embodiment, which will be described later, can be used.

Also in the stage device 130 of this embodiment, it is possible to adjust the preload on the X-axis adjustment rail 52 from outside the stage device 26 .

The linear motion guide installation portions 38, 39, 44, 45, 48, 49, 53, and 54 of the stage device 130 do not have a portion for positioning the linear motion guide portion by contacting the plate, and the plate shape is suitable for planar processing. I have to. A linear guide mechanism is assembled with a jig instead of having a portion for contacting and positioning the linear guide. As shown in FIG. 5, the second movable plate 50 is provided with a scale 55 that is a back reflection type XY scale. The first detector 57 arranged on the base plate 31 detects the position of the second movable plate 50 with respect to the base plate 31 in the first direction (Y direction) based on detection of the pattern of the scale 55 . Also, the second detection unit 56 arranged on the base plate 31 detects the position of the second movable plate 50 with respect to the base plate 31 in the second direction (X direction) based on detection of the pattern of the scale 55 .

By making the scale 55 an XY scale for rear surface reflection, it is possible to close the gap between the scale 55 and the first detection unit 57 (Y axis) and the second detection unit 56 (X axis). As a result, the height from the attachment surface 31a of the base plate 31 to the upper surface 59 of the second movable plate 50 can be reduced. A flexible substrate 58 is installed for wiring to the first detection section 57 (Y-axis) and the second detection section 56 (X-axis). It is also possible to use wiring such as lead wires instead of the flexible substrate 58 .

5 and 6, the base plate 31 is arranged in the opening 40 of the first movable plate 41 (nested structure). It does not have a nested structure with the movable plate 50 . Therefore, although the height of the stage device is higher than that of the stage device 26 of the third embodiment, the movable distance in the X direction can be increased regardless of the X-direction dimensions of the opening 40 and the first movable plate 41. Its structural feature is that it can be made large.

The movable distance required for a microscope stage device is a short movable distance in the Y direction (first direction) and a long movable distance in the X direction (second direction) depending on the shape of the slide glass. Therefore, the Y-axis (first) direction, in which the movable distance is small, has a nested structure to reduce the thickness, while the X-axis (second) direction has a large movable distance. It is possible to apply the structure to a microscope system.

When the stage device 130 is applied to a microscope system, the X-axis fixing rail 51 of the second movable plate 50 of the stage device 130 should be on the microscope base side, and the X-axis adjustment rail 52 should be placed in front of the operation side. Therefore, it is possible to easily perform attachment to the microscope and preload adjustment of the linear guide.

In the stage device 130, even if the size of the opening 40 of the first movable plate 41 is not large enough to accommodate the entire base plate 31, the first detection unit 57 (Y-axis) and the second detection unit 56 (X-axis) ) and the scale 55, and the portion facing the base plate unit 131 is thinned to escape, thereby reducing the thickness of the stage. As shown in FIG. 6, the second movable plate 50 of the stage device 130 does not have an opening for receiving the first movable plate 41. A stage structure may be used in which the surface of 50 is thinned to escape and be thinned.

In the configuration example of the stage device 130 shown in FIGS. 5 and 6, the second movable plate 50 does not have an opening and has the scale 55. However, the present invention is not limited to this example. For example, in the vicinity of the opening 30 (second opening) of the second movable plate 20 shown in FIG. The pattern of the scale is detected by the detectors in the first direction (Y direction) and the detectors in the second direction (X direction) arranged on the base plate 1. may In this case, the arrangement of the first detection section 57 (Y-axis) and the second detection section 56 (X-axis) and the arrangement of the flexible substrate 58 may be performed according to the arrangement position and arrangement shape of the opening. The configurations of the scale 55, the first detector 57 (Y-axis), and the second detector 56 (X-axis) described in this embodiment can also be applied to other embodiments.

(Fifth embodiment)
In the fifth embodiment, the configuration of the stage device, which is different from the procedure for assembling the linear motion guide mechanism in the stage device described in the fourth embodiment, will be described. 7 and 8 are perspective views illustrating the configuration of the stage device according to the fifth embodiment.

FIG. 7(a) is an exploded perspective view of the stage device 230 in the fifth embodiment. The stage device 230 has a base plate unit 238 , an intermediate plate unit 249 and an upper plate unit 259 . The basic configuration of the stage device is similar to that described in the fourth embodiment, but differs in that a detachable back plate 263 can be arranged for assembling the linear motion guide mechanism.

7B to 7D are diagrams for explaining the assembly procedure of the linear guide mechanism of the stage device 230 in the fifth embodiment. The back plate 263, the fixing screw 264, and the adjusting screw 265 will be described with reference to FIGS. 7(c) and 7(d).

FIG. 7B is a perspective view of the base plate unit 238 of the stage device 230 in the fifth embodiment. Mounting portions 232, 233, 234, and 235 for mounting the stage device 140 to various devices (external devices) such as microscopes, inspection devices, and measuring devices are formed on the mounting surface 231a of the base plate 231. FIG. In order to ensure mounting accuracy of the stage device 210, the flatness and parallelism of the mounting portions 232, 233, 234, and 235 are formed with higher accuracy.

A first linear motion guide portion (Y-axis fixed rails 236, 237) is arranged on the mounting surface 231a of the base plate 231, and the first linear motion guide portions (Y-axis fixed rails 236, 237) are mutually It is fixed to the base plate 231 with parallelism on the micrometer level. The first direct-acting guides (Y-axis fixed rails 236 and 237) are fixed to the base plate 231 by fixing screws (not shown), which are fixing members, in a parallel state using a jig (not shown). .

FIG. 7(c) is a perspective view of the intermediate plate unit 249 of the stage device 230 in the fifth embodiment. A back plate 263, a fixing screw 264, and an adjusting screw 265 are shown for explanation.

A third linear motion guide portion (X-axis fixed rails 246, 247) is arranged on the mounting surface side of the first movable plate 241, and the third linear motion guide portion (X-axis fixed rails 246, 247) is arranged. are fixed to the first movable plate 241 with mutual parallelism on the order of micrometers. The third linear motion guides (X-axis fixed rails 246 and 247) are aligned with a jig (not shown), and are fixed to the first movable plate 241 by a fixing screw (not shown), which is a fixing member. fixed to

Next, using either one of the third linear motion guides (X-axis fixed rails 246, 247) as a reference, the Y-axis fixed rail 242 is perpendicular to the micrometer level using a jig (not shown). (Second linear motion guide) is fixed to the first movable plate 241 with a fixing screw (not shown). The Y-axis adjustment rail 243 (second linear motion guide) is first fixed to the first movable plate 241 in a temporarily fixed state with a fixing screw (not shown). Although the fixing screw is not shown in FIG. 7(c), it is the same screw as the fixing screw 264 that fixes the back plate 263. FIG.

A linear motion guide installation portion 245 of the Y-axis adjustment rail 243 (second linear motion guide portion) arranged on the first movable plate 241 has a screw hole 248 for a fixing screw 264 for fixing the back plate 263 . formed. The back plate 263 is arranged with fixing screws so as to be adjacent to the Y-axis adjustment rail 243 (second linear motion guide). Note that bolt holes may be used instead of the screw holes 248 to fix the back plate 263 . By installing the back plate 263 on the linear motion guide installation portion 245 formed with high flatness on the first movable plate 241, a structure is obtained in which bending and distortion of the back plate 263 can be minimized.

A bolt hole 261 and an adjusting screw hole 262 are formed in the back plate 263 . It should be noted that a method of fixing to the first movable plate 241 with a screw hole instead of the bolt hole 261 may be used. An adjusting screw 265 is attached to each of the plurality of adjusting screw holes 262, and play is removed by applying an appropriate preload to the rails and rolling elements of the linear motion guide described in FIG. 8(a).

FIG. 7D is a perspective view of the upper plate unit 259 of the stage device 230 in the fifth embodiment. A back plate 263, a fixing screw 264, and an adjusting screw 265 are shown for explanation. The second movable plate 250 of the upper plate unit 259 has an X-axis fixed rail 251 (fourth linear motion guide) with micrometer-level straightness, and a fixed screw (not shown) is attached to the second movable plate 250. is fixed with The X-axis adjustment rail 252 (fourth linear motion guide) is first fixed to the second movable plate 250 in a temporarily fixed state. The back plate 263 is arranged so as to be adjacent to the X-axis adjustment rail 252 (fourth linear guide). Although the fixing screw is not shown in FIG. 7(d), it is the same screw as the fixing screw 264 that fixes the back plate 263. As shown in FIG.

A linear motion guide installation portion 254 of the X-axis adjustment rail 252 (fourth linear motion guide portion) disposed on the second movable plate 250 has a screw hole 255 for a fixing screw 264 for fixing the back plate 263 . formed. The back plate 263 is arranged with fixing screws so as to be adjacent to the X-axis adjustment rail 252 (fourth linear motion guide). Note that the back plate 263 may be fixed using bolt holes instead of the screw holes 255 . By installing the back plate 263 on the linear motion guide installation portion 254 formed on the second movable plate 250 with high flatness, a structure is obtained in which bending and distortion of the back plate 263 can be minimized.

FIG. 8(a) is a perspective view of a state where a detachable back plate 263 is attached to the stage device 230 according to the fifth embodiment. A back plate 263 is arranged on the first movable plate 241 so as to be adjacent to the Y-axis adjustment rail 243 (second linear motion guide), and the second movable plate 250 has an X-axis adjustment rail. A back plate 263 is arranged so as to be adjacent to 252 (fourth linear guide).

When inserting the rolling elements into the rails of each linear motion guide, the back plate 263 is attached. An adjustment screw 265 is mounted in an adjustment screw hole 262 provided in the back plate 263 .

First, assembly of the linear guide mechanisms LM81 and LM82 configured between the base plate 231 and the first movable plate 241 will be described. Between the Y-axis fixed rail 236 of the base plate 231 and the Y-axis fixed rail 242 of the first movable plate 241, and between the Y-axis fixed rail 237 of the base plate 231 and the Y-axis adjustment rail 243 of the first movable plate 241 A rolling element (not shown) is inserted between them.

The Y-axis adjustment rail 243 does not interfere with the insertion of the rolling elements in a temporarily fixed state. For the insertion of the rolling elements, the adjusting screw 265 of the back plate 263 arranged adjacent to the Y-axis adjusting rail 243 is loosened so that no preload is applied to the rolling elements, and the rolling elements are inserted to the predetermined position of the rail. do.

After the rolling elements have been inserted to a predetermined position on the rail, the adjustment screws 265 of the back plate 263 arranged adjacent to the Y-axis adjustment rail 243 are used to apply preload to the rolling elements. is pressed, the Y-axis adjustment rail 243 is fixed to the first movable plate 241 with a fixing screw (not shown).

As a work method, the adjustment screw 265 at the position where the rolling element exists is tightened with a predetermined screw tightening torque, the first movable plate 241 is moved to change the position of the rolling element, and the position where the rolling element exists is adjusted. Looseness of the linear guide mechanisms LM81 and LM82 is removed over the entire area while applying preload by tightening the screw 265 . It is also possible to check the looseness with a pick tester or dial gauge.

After removing looseness with the adjusting screw 265, the temporarily fixed Y-axis adjusting rail 243 is fixed with a predetermined screw tightening torque using a fixing screw (not shown) at the position where the rolling element exists. Although fixing screws for the Y-axis adjusting rail 243 are not shown in FIG. 8(a), the Y-axis adjusting rail 243 can be fixed with screws similar to the fixing screws 246 in FIG. 7(c). After the final tightening of the Y-axis adjustment rail 243 is completed, the adjustment screw 265 of the back plate 263 arranged adjacent to the Y-axis adjustment rail 243 is loosened, and then the fixing screw 264 of FIG. 7(c) is removed. , remove the back plate 263 from the first movable plate 241 . The outline of assembly of the linear guide mechanisms LM81 and LM82 configured between the base plate 231 and the first movable plate 241 has been described above.

Next, assembly of the linear guide mechanisms LM83 and LM84 configured between the first movable plate 241 and the second movable plate 250 will be described. Between the X-axis fixed rail 246 of the first movable plate 241 and the X-axis fixed rail 251 of the second movable plate 250, and between the X-axis fixed rail 247 of the first movable plate 241 and the second movable plate 250 A rolling element (not shown) is inserted between the X-axis adjustment rail 252 and the X-axis adjustment rail 252 .

The X-axis adjustment rail 252 does not interfere with the insertion of the rolling elements in a temporarily fixed state. When inserting the rolling elements, loosen the adjusting screw 265 of the back plate 263 adjacent to the X-axis adjusting rail 252 so that no preload is applied to the rolling elements, and then insert the rolling elements to a predetermined position on the rail. do.

After the rolling elements have been inserted to a predetermined position on the rail, the X-axis adjusting rail 252 is adjusted by the adjusting screw 265 in order to apply a suitable preload to the rolling elements using the adjusting screw 265 of the back plate 263 arranged adjacent to the X-axis adjusting rail 252 . is pressed, the X-axis adjustment rail 252 is fixed to the second movable plate 250 with a fixing screw (not shown).

As a work method, the adjustment screw 265 at the position where the rolling element exists is tightened with a predetermined screw tightening torque, the second movable plate 250 is moved to change the position of the rolling element, and the position where the rolling element exists is adjusted. While applying preload by tightening the screws 265, looseness of the linear motion guide mechanisms LM83 and LM84 is eliminated. It is also possible to check the looseness with a pick tester or dial gauge.

After removing looseness with the adjusting screw 265, the temporarily fixed X-axis adjusting rail 252 is fixed with a predetermined screw tightening torque using a fixing screw (not shown) at the position where the rolling element exists. Although fixing screws for the X-axis adjustment rail 252 are not shown in FIG. 8(a), the X-axis adjustment rail 252 can be fixed with a screw similar to the fixing screw 264 in FIG. 7(d). After the final tightening of the X-axis adjustment rail 252 is completed, the adjustment screw 265 of the back plate 263 arranged adjacent to the X-axis adjustment rail 252 is loosened, and then the fixing screw 264 of FIG. 7(d) is removed. , remove the back plate 263 from the second movable plate 250 . The outline of assembly of the linear guide mechanisms LM83 and LM84 configured between the first movable plate 241 and the second movable plate 250 has been described above. The above method is an example of assembly, and other methods can be used to assemble the linear motion guide mechanisms LM81 to LM84.

FIG. 8(b) is a perspective view of the stage device 230 in the fifth embodiment, viewed from the mounting surface side of the base plate 231. FIG. The assembled stage device 230 does not have the back plate 77 having the adjustment screw holes 76 shown in FIG. 13(b). Instead, a linear motion guide installation portion 245 having a screw hole 248 and a linear motion guide installation portion 254 having a screw hole 255 are formed. In the stage device 230 of the fifth embodiment, the adjusting rails (the Y-axis adjusting rail 243 and the X-axis adjusting rail 252) are pressurized and adjusted by the back plate 263, the adjusting rails are finally fixed, and the adjusting screw holes are formed. It is characterized in that the back plate can be attached and detached from the stage device.

The back plate 263 having the adjustment screw holes can be reused, and cost reduction can be achieved. In addition, since the back plate 263 is removed, the size and weight of the stage device 230 can be reduced.

In order to apply preload to the rolling elements of the linear motion guide mechanism and remove backlash, there is no need for a complicated part shape including a convex part, which is required for conventional stages. and cost reduction can be achieved. A processing machine for processing a complicated shape including convex portions with high precision is expensive, and the adjustment of the processing machine and the inspection of the processed shape are also complicated. If this embodiment is applied, it is easy to use for general purpose production of stages with different shapes by hole machining and plane machining, and it is also easy to inspect parts after machining.

(Sixth embodiment)
In the sixth embodiment, a configuration example of a stage device in which driving units are arranged will be described. 9(a) is an exploded perspective view of the stage device 270 in the sixth embodiment, FIG. 9(b) is a perspective view of the stage device 270 assembled, and FIG. 9(c) is a stage device. is assembled (FIG. 9(b)) and is a cross-sectional view taken along GG.

In the stage device 270 of FIG. 9, an example of using a cylindrical linear motor composed of a coreless coil, which is an electric mechanism, and a magnet, is shown as the configuration of the drive section. The stage device 270 has a base plate unit 271 , an intermediate plate unit 272 and an upper plate unit 273 .

The Y direction is set as the first direction, and the X direction is set as the second direction. Y-axis fixed rails 236 and 237 are used as the first linear motion guide portion, and the Y-axis fixed rail 242 is used as the second linear motion guide portion. , the Y-axis adjustment rail 243 is used. The X-axis fixed rails 246 and 247 are used as the third linear motion guide portion, and the X-axis fixed rail 251 and the X-axis adjustment rail 252 are used as the fourth linear motion guide portion.

9A, a base plate unit 271 is obtained by fixing a Y-axis coil 276 having a hole 275 to the base plate unit 238 of FIG. 7B with a coil mounting plate 277. In FIG. The intermediate plate unit 272 is obtained by fixing an X-axis coil 279 having a hole 278 to the first movable plate 241 shown in FIG. 7C with a coil mounting plate 280 . Furthermore, the Y-axis magnet bar 281 is fixed by two magnet bar fixtures 282 and 283 . In addition, the upper plate unit 273 has a magnet mounting plate 284 fixed to the second movable plate 250 of FIG. 286 and 287 are fixed.

The Y-direction driving section is composed of the Y-axis coil 276 and the Y-axis magnet bar 281 . During assembly, the Y-axis magnet bar 281 is passed through the hole 275 of the Y-axis coil 276 and fixed to the first movable plate 241 by the magnet bar fixtures 282 and 283 . The Y-direction driving section causes the first movable plate 241 to move relative to the base plate 231 in the first direction (Y-direction). In assembling the stage device 270, the position is adjusted so that the hole 275 of the Y-axis coil 276 and the Y-axis magnet bar 281 do not come into contact with each other throughout the Y-direction movable distance.

The X-direction drive section is composed of an X-axis coil 279 and an X-axis magnet bar 285 . When assembling, the X-axis magnet bar 285 is passed through the hole 278 of the X-axis coil 279, and the X-axis magnet bar 285 is attached to the magnet mounting plate 284 of the second movable plate 250 by the magnet bar fixtures 286 and 287. Fixed. The second movable plate 250 is relatively moved in the second direction (X direction) with respect to the first movable plate 241 by the X-direction driving section. In assembling the stage device 270, the position is adjusted so that the hole 278 of the X-axis coil 279 and the X-axis magnet bar 285 do not come into contact with each other throughout the X-direction movable distance.

FIG. 9B is a perspective view of the stage device 270 according to the sixth embodiment. The mounting surface 231a of the base plate 231 is positioned inside the area surrounded by 252. As shown in FIG. Mounting portions 232, 233, 234, and 235 for mounting the stage device 140 to various devices (external devices) such as microscopes, inspection devices, and measuring devices are formed on the mounting surface 231a of the base plate 231. FIG.

A first direction (Y direction ) and the X-axis coil 279, which is the armature of the second-direction (X-direction) drive section, are arranged in the stage device 270 according to the sixth embodiment. It is a feature of

A first direction (Y direction ) drive section and the drive section in the second direction (X direction) (Y-axis coil 276, X-axis coil 279). The structure can be easily repaired, adjusted, and inspected.

FIG. 9(c) is a sectional view taken along GG in the assembled state (FIG. 9(b)) of the stage device 270 in the sixth embodiment. An X-axis coil 279 that is a driving portion in the second direction (X-direction) is arranged outside the X-axis fixed rail 246 . In addition, although the Y-axis fixed rail 236 is hidden behind the Y-axis fixed rail 242, a Y-axis coil 276, which is a driving portion in the first direction (Y direction), is arranged outside the Y-axis fixed rail 236. . Although the mounting surface is hidden by the Y-axis fixed rail 242 in FIG. 9C, referring to FIG. The height to the top surface 288 of the top plate unit 273 can be seen as the position of the linear motion guide installation portion.

9(b) and 9(c), the stage device 270 includes an X-axis coil 279 as a second direction (X direction) drive unit and a first direction (Y direction) drive unit. Even if the Y-axis coil 276 is provided, the height from the mounting portions 232, 233, 234, and 235 on the mounting surface 231a of the base plate 231 to the top surface 288 of the top plate unit 273 does not exceed the height of the drive unit. is not added, and it is possible to realize a thin stage device.

In FIGS. 9A to 9C, an example of an electric mechanism using a cylindrical linear motor is shown as the configuration of the drive unit, but a manual mechanism and an electric mechanism are used as the configuration of the drive unit. or a combination of a manual mechanism and an electric mechanism. The configuration of the drive section is arranged outside the area sandwiched between the first linear motion guide section (Y-axis fixed rails 236, 237) and the third linear motion guide section (X-axis fixed rails 246, 247). As a result, the structure of the stage device can be easily repaired, adjusted, and inspected from the outside of the stage device 270 .

(Seventh embodiment)
In the seventh embodiment, a configuration example of a stage device in which driving units are arranged will be described. FIG. 10 is an exploded perspective view of stage device 300 in the seventh embodiment. The stage device 300 has a base plate unit 301 , an intermediate plate unit 302 and an upper plate unit 303 .

FIG. 11A(a) is an exploded perspective view of the base plate unit 301, the intermediate plate unit 302, and the Y-direction coil unit 313, which is the armature unit of the first direction (Y-direction) drive unit. FIG. 11A(b) is a perspective view showing a state in which a detachable back plate 352 is attached to the stage device 300, and FIG. 11A(c) is a perspective view showing the state in which the stage device 300 is assembled. FIG. 11B(d) is a cross-sectional view taken along line HH in the assembled state of the stage device (FIG. 11(c)), and FIG. FIG. 11A is a sectional view cut along II in the state (FIG. 11A(c)).

The base plate unit 301 includes a base plate 304 having a mounting surface 304a capable of mounting the stage device 300 to an external device or the like. and a one-direction (Y-direction) drive unit (Y-direction coil unit 313).

The intermediate plate unit 302 includes first movable plates 316, 317, 318, and 319 having openings 345, second linear motion guides (Y-axis fixed rail 323, Y-axis adjustment rail 324), and third It has a linear guide section (X-axis fixed rails 334, 335) and a drive section (X-direction coil unit 329) for the second direction (X-direction).

The upper plate unit 303 has a second movable plate 337 and a fourth linear guide (X-axis fixed rail 336, X-axis adjustment rail 338).

The first linear motion guide portions (Y-axis fixed rails 307, 308) of the base plate 304 constituting the base plate unit 301 are provided respectively on the first side surfaces 305, 306 adjacent to the mounting surface 304a and facing each other. guides the movement of the movable plates 316, 317 in the first direction. High-precision V-grooves are formed in the first side surfaces 305 and 306 as a configuration of the first linear motion guide portion (the Y-axis fixed rails 307 and 308).

Mounting portions 309, 310, 311, and 312 for mounting the stage device 300 to various devices such as a microscope, an inspection device, and a measuring device are formed on the mounting surface 304a. The mounting portions 309, 310, 311, and 312 are formed with high accuracy because poor mutual flatness and parallelism hinder mounting to the apparatus.

Further, a first direction (Y-direction) driving portion (Y-direction coil unit 313) is arranged on the base plate 304. The Y-direction coil unit 313 has a plurality of coils 314 and a plate member 315. The member 315 and the base plate 304 are fixed with screws (not shown) and are detachable.

The intermediate plate unit 302 has first movable plates 316, 317, 318 and 319, and the method of assembling the first movable plates 316, 317, 318 and 319 is the same as in the second embodiment. The first movable plates 316 , 317 , 318 , 319 have openings 345 when the first movable plates are assembled.

The second linear motion guide (Y-axis fixed rail 323, Y-axis adjustment rail 324) faces the first linear motion guide of the base plate 304, and the first movable plates 316, 317, 318, 319 It is provided on two side surfaces 321 and 322 . The second linear motion guide (Y-axis fixed rail 323, Y-axis adjustment rail 324) cooperates with the first linear motion guide (Y-axis fixed rails 307, 308) to move the first movable plate. (Movement in the first direction (Y direction)) is guided. That is, the first movable plates are provided on the second side surfaces 321 and 322 facing the first side surfaces 305 and 306, respectively, and are combined with the first linear motion guide portions to operate the linear motion guide mechanisms LM110 and LM111. and guides the movement of the first movable plate (first direction (Y direction)). High-precision V-grooves are formed in 321 and 322. First side surfaces 305 and 306 and second side surfaces 321 and 322 are formed with rolling elements in the grooves formed respectively. A first linear motion guide portion and a second linear motion guide portion for guiding the movement (first direction (Y direction)) of the movable plate are formed.

Side surfaces 325, 326, 327, and 328 of the first movable plates 316 and 317, which do not include the second side surface, are highly accurate planes. In addition, the lengths g and h of the first movable plates 318 and 319 constituting the first movable plate are also formed with highly accurate dimensions, and the rolling elements (not shown) of the linear motion guide mechanisms LM110 and LM111 are aligned with the rails. A desired preload can be applied to the rolling elements of the linear motion guide mechanisms LM110 and LM111 by fixing them with a plurality of screws 346 shown in FIG. As shown in FIG. 11A(a), shims 347 and 348, which are adjustment members, may be interposed as necessary for preload adjustment.

A magnet 320 is fixed to the first movable plate 316, and the Y-direction coil unit 313 and the magnet 320 constitute a first-direction (Y-direction) driving section. The first movable plate is driven in the first direction (Y direction) with respect to base plate 304 of base plate unit 301 .

Further, the intermediate plate unit 302 is provided with a drive section (X-direction coil unit 329) for the second direction (X-direction), and the X-direction coil unit 329 has a plurality of coils 330 and a plate member 331. , the plate member 331 and the first movable plate 318 of the intermediate plate unit 302 are fixed with screws (not shown) and are detachable.

The third direct-acting guide portions (X-axis fixed rails 334, 335) in the intermediate plate unit 302 are provided on a pair of side surfaces 332, 333 facing each other of the first movable plate, respectively. On two outer peripheral side surfaces (third side surfaces) 332 and 333 of the first movable plates 318 and 319, high-precision A V-groove is formed, and the third linear motion guide portion (X-axis fixed rails 334 and 335) guides the movement of the second movable plate 337 in the second direction (X direction). Then, with the base plate 304 and the first movable plates 316, 317, 318, 319 assembled, the base plate 304 is placed in the opening 345 of the first movable plate. The third linear motion guide portion (X-axis fixed rails 334, 335) is located on the outer peripheral side of the members (318, 319) intersecting the members (316, 322) having the second side surface of the first movable plate. are respectively located on the third side located in the

The second movable plate 337 of the top plate unit 303 has a fourth guide member that guides movement of the second movable plate 337 in the second direction (X direction) in cooperation with the third linear motion guide portion. linear motion guides (X-axis fixed rail 336, X-axis adjustment rail 338) are arranged. That is, the fourth linear guide portion (X-axis fixed rail 336, X-axis adjustment rail 338) is arranged to face the third guide portion. The rail 336 and the X-axis adjustment rail 338) constitute the linear motion guide mechanisms LM112 and LM113 in combination with the third linear motion guide portions (X-axis fixed rails 334 and 335). It guides movement in two directions (the X direction).

A scale 341 is arranged on the second movable plate 337 . This scale 341 has a pattern formed periodically in a first direction and a second direction. The base plate 304 is arranged in the opening 345 of the first movable plate, and the base plate 304 and the first movable plate are arranged substantially on the same plane. XY coordinates of the second movable plate 337 with respect to the base plate 304 (positions in the first direction and the second direction ) can be detected. That is, the Y-axis position detection section (first position detection section) 350 can detect the position of the second movable plate 337 in the first direction with respect to the base plate 304 based on detection of the pattern of the scale 341 . Also, the X-axis position detector (second position detector) 349 can detect the position of the second movable plate 337 with respect to the base plate 304 in the second direction based on pattern detection.

The flexible substrate 351 is provided for wiring to the X-axis position detection section 349 and the Y-axis position detection section 350, but instead of the flexible substrate 351, wiring such as lead wires can be used.

A magnet unit 342 in which a magnet 343 is fixed to a plate member 344 is fixed to the second movable plate 337 . The X-direction coil unit 329 and the magnet unit 342 in the X-direction (second direction) constitute a second-direction (X-direction) drive section (second-direction drive section). The second movable plate 337 is driven in the second direction relative to the other movable plates 316, 317, 318, 319.

The X-axis fixed rail 336, which is the fourth linear motion guide arranged on the second movable plate 337, is arranged so as to face the third linear motion guide, and has a micrometer-level straightness. It is fixed to the second movable plate 337 . An X-axis adjustment rail 338, which is a fourth linear motion guide portion, is fixed to the second movable plate 337, and a linear motion guide installation portion 339 of the X-axis adjustment rail 338 has a It has screw holes 340 for mounting a back plate 352 . Note that bolt holes may be used instead of the screw holes 340 to fix the back plate 352 .

In this embodiment, the fourth linear motion guide portion (X-axis fixed rail 336, X-axis adjustment rail 338) is arranged on the mounting surface side of the second movable plate 337. The four linear motion guides may be provided on the side surface of the second movable plate so as to face the third linear motion guides (X-axis fixed rails 334 and 335). Further, a second opening may be formed in the second movable plate, and the first movable plate may be positioned within the second opening of the second movable plate.

In this case, for example, a pattern periodically formed in the first direction (Y direction) and the second direction (X direction) is formed near the opening (second opening) of the second movable plate. The pattern of this scale is detected by the X-axis position detection section (second position detection section) 349 and the Y-axis position detection section (first position detection section) 350 arranged on the base plate 304. may In this case, the arrangement of the X-axis position detection section (second position detection section) 349 and the Y-axis position detection section (first position detection section) 350 and the flexible printed circuit board are arranged according to the arrangement position and arrangement shape of the opening. Placement can be done.

FIG. 11A(b) is a perspective view showing a state in which a detachable back plate 352 is attached to the stage device 300 according to the seventh embodiment. The X-axis adjustment rail 338 (fourth linear motion guide) is first fixed to the second movable plate 337 in a temporarily fixed state.

Between the X-axis fixed rail 335 (third linear motion guide) and the X-axis fixed rail 336 (fourth linear motion guide), between the X-axis fixed rail 334 (third linear motion guide) and the X-axis After inserting the rolling elements (not shown) between the adjustment rail 338 (fourth linear motion guide portion), X The axis adjustment rail 338 is fixed with a fixing screw (not shown).

A bolt hole 353 and an adjusting screw hole 354 are formed in the back plate 352 . Fixing screws 356 are attached to the plurality of bolt holes 353 to fix the back plate 352 to the second movable plate 337 . It should be noted that a method of fixing to the second movable plate 337 with a screw hole instead of the bolt hole 353 may be used.

Adjusting screws 355 are attached to the plurality of adjusting screw holes 354, respectively, and looseness is removed by appropriately preloading the rails and rolling elements of the linear motion guide portion in the same manner as described with reference to FIG. 8(a).

FIG. 11A(c) is a perspective view of the assembled state of the stage device 300 in the seventh embodiment. 3 is a perspective view of a stage device 300; FIG. A coil 314, which is the armature of the drive unit in the Y direction (first direction) and a coil 314 in the X direction (second A characteristic feature of the stage device 300 in the seventh embodiment is that the coil 330, which is the armature of the drive section in the direction of ), is arranged. All the armatures of the coils 314 and 330 of the stage device 300 are out of plane from any surface on the side of the upper surface 357 shown in FIG. It is a structure that does not appear.

FIG. 11B(d) is a cross-sectional view of the assembled state of the stage device (FIG. 11A(c)) taken along line HH. 308 and cross-sectional portions of the Y-axis fixed rail 323 and the Y-axis adjustment rail 324 of the second linear motion guide are shown. The Y-direction coil unit 313 of the driving portion for the first direction is composed of a plurality of coils 314 and plate members 315, and the Y-direction coil unit 313 and the magnet 320 constitute the driving portion for the Y direction, which is the first direction. there is Since the Y-direction coil unit 313 of the drive section for the first direction (Y-direction) is located in the outer region of the region sandwiched between the Y-axis fixed rails 307 and 308 of the first linear motion guide section, the stage device 300 The structure of the stage device makes it easy to repair, adjust, and inspect the Y-direction coil unit 313 from the mounting surface side of the mounting portions 309 and 310 in .

Here, a single-shot type drive unit in which the Y-direction coil unit 313 and the magnet 320 are arranged outside the Y-axis fixed rail 307 is shown, but a single-shot type drive unit in which the Y-axis fixed rail 308 is arranged, It is also possible to configure a twin-engine type stage apparatus in which the drive units are arranged outside the Y-axis fixed rail 307 and the Y-axis fixed rail 308 .

A drive portion in the first direction (Y direction) of the stage device 300 does not protrude in the height direction up to the upper surface 357 of the upper plate unit 303 when viewed from the mounting portions 309 and 310 (in the thickness direction from the upper surface). Because of its non-protruding structure), it has the advantage of not interfering with the objective lens positioned above the stage device when used in a microscope stage.

FIG. 11B(e) is a cross-sectional view of the assembled state of the stage device (FIG. 11A(c)) taken along line I-I, showing the X-axis fixed rails 334 and 335 of the third linear motion guide section. 8 shows cross-sectional portions of the X-axis fixed rail 336 and the X-axis adjustment rail 338 of the fourth linear motion guide. The X-direction coil unit 329 of the drive section for the second direction (X-direction) is composed of a plurality of coils 330 and plate members 331 . A magnet unit 342 in which a magnet 343 is fixed to a plate member 344 and an X-direction coil unit 329 constitute a second direction (X-direction) drive unit. Since the X-direction coil unit 329 of the drive section for the second direction (X-direction) is located in the outer region of the region sandwiched between the Y-axis fixed rails 307 and 308 of the first linear motion guide section, the stage device 300 The structure of the stage device makes it easy to repair, adjust, and inspect the X-direction coil unit 329 from the mounting surface side of the mounting portions 310 and 312 in .

Referring to FIGS. 11B(d) and 11B(e), stage device 300 is provided with mounting surface 304a (mounting portions 309, 310) of base plate 304 even if the X-direction driving portion and the Y-direction driving portion are added. , 311, 312) to the upper surface 357 of the upper plate unit 303 (second movable plate 337), and the height of the drive unit is not added, making it possible to realize a thin stage device. Become.

(Eighth embodiment)
In the eighth embodiment, the configuration of an apparatus 400 incorporating a stage device will be described. Here, the configuration of a microscope system in which a stage device is incorporated in a microscope is shown as an example of the device 400. The device 400 is a precision machine tool, a measuring device (measuring device), and an inspection device that can be positioned with micrometer accuracy. Applicable to the required equipment. In this embodiment, the stage device 300 of the seventh embodiment is used as the configuration of the stage device, but any stage device of the first to sixth embodiments may be used.

FIG. 12(a) is a side view of the stage device 300 installed in the device 400, and FIG. 12(b) is a perspective view showing a microscope (before mounting the stage device 300) as a typical example of the device 400. FIG. 12C and 12D are perspective views of the stage device 300 installed in the device 400. FIG.

The device 400 (microscope) is a holding unit that holds the stage device 300, an objective lens 401, an eyepiece lens 407, and a lens barrel 408 that are optical systems, a handle (knob) 402 that is a focusing system, and the stage device 300. It is composed of a stage setting portion 404 , an arm (mirror column) 409 and a mirror leg 410 .

Some members such as a reflecting mirror (illumination system) as a light source and an adjusting screw are omitted. The observation optical system is composed of an objective lens 401 , an eyepiece lens 407 and a lens barrel 408 . An observation optical system is provided for observing a sample, which is an observation target, and an observation image of the sample can be obtained via such an observation optical system. The focusing system (handle 402) can be moved in the vertical direction (Z direction) corresponding to the amount of rotation to adjust the focal length to the sample.

An arm (mirror column) 409 and a mirror leg 410 (base member) hold the above-described observation optical system, illumination system, and focusing system. The stage mounting portion 404 is part of the holding portion. The stage device 300 is arranged between an objective lens 401 that constitutes an optical system and a stage setting portion 404 that is a holding portion. fixed and placed. The objective lens 401 of the device 400 can be moved in the direction indicated by the arrow 403 (Z direction) by the handle 402 .

The movable range of the objective lens 401 indicated by the arrow 403 with respect to the upper surface 357 of the stage device 300 is finite, and if an attempt is made to increase this movable range, the overall size of the device 400 and the movable mechanism of the objective lens 401 become large. . The stage device 300 is installed between the distance J from the stage installation portion 404 of the device 400 to the objective lens 401 . Therefore, the stage device 300 is required to be as thin as possible from the stage installation portion 404 to the upper surface 357 of the stage device 300 .

By arranging the small and thin stage device 300 of the present embodiment, the movable range of the objective lens can be increased, so an expansion of the measurement range can be expected.

Referring to FIG. 12(c), when the stage device 300 is installed in the device 400, the X-axis fixed rail 336 of the stage device 300 and the mirror base 406, which is a reference for positioning the stage of the device 400, are separated. Positioning using a jig (not shown) as a reference is preferable because it increases the accuracy of placement. Positioning with the X-axis fixing rail 336 and the mirror base 406 facilitates the positioning of the stage device 300 in the X direction, which is the second direction, and the device 400 .

In a microscope system incorporating the stage device 300, the movable distance in the X direction is larger than that in the Y direction, and when the stage device 300 is driven in the X direction during microscope observation, it can be installed so as to minimize skew. .

When the stage device 300 is installed in the device 400, the X-direction coil unit 329, which is the armature of the second-direction drive section, is arranged on the near side when the device operator operates it, so maintenance and It is suitable for inspection and adjustment.

Referring to FIG. 12(d), stage apparatus 300, in a state of being installed in apparatus 400, is arranged to have Y-direction coil unit 313, which is the armature of the drive section in the first direction, and the drive section in the second direction. repair and adjustment of the X-direction coil unit 329, which is the armature of the

Although preferred embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of the gist. The configuration of the stage device is also not limited to the above embodiment, and various modifications and changes are possible.

(Modification 1)
For example, in the third embodiment, a linear motion guide mechanism configured between the base plate and the first movable plate and a linear motion guide mechanism configured between the first movable plate and the second movable plate 3 described the configuration in which both are arranged on the mounting surface side of the base plate (FIG. 3), but either one of the linear motion guide mechanisms may be arranged on the side surface of the plate.

For example, a linear motion guide mechanism configured between a first movable plate and a second movable plate may be arranged as shown in FIG. It is also possible to provide it on the side surface of the movable plate.

Further, a linear guide mechanism configured between the first movable plate and the base plate is provided on the side surface of the first movable plate and the side surface of the base plate opposite to this side surface, for example, as shown in FIG. is also possible.

(Modification 2)
In the configuration of the stage apparatus described in the seventh embodiment, the linear guide mechanism configured between the base plate and the first movable plate, and the linear motion guide mechanism configured between the first movable plate and the second movable plate. 11A and 11B). may

For example, as shown in FIG. 1, it is possible to provide a linear guide mechanism configured between the first movable plate and the second movable plate on the mounting surface side of the base plate.

Further, it is also possible to provide a linear guide mechanism configured between the first movable plate and the base plate, for example, on the mounting surface side of the base plate as shown in FIG.

208: base plate unit, 210: stage device, 211: base plate, 216: fixed rail (first linear motion guide section (first guide section), 217: adjustment rail (first linear motion guide section (first guide portion), 222: opening, 223: first movable plate, 224: fixed rail (second linear motion guide portion (second guide portion)), 225: adjustment rail (second linear motion guide portion (second guide portion)), 211a: mounting surface, LM11: linear guide mechanism (216, 224), LM12: linear guide mechanism (217, 225)

Claims (14)

A stage device comprising: a base plate having a mounting surface that can be attached to an external device; and a first movable plate having a first opening and movable relative to the base plate,
the base plate has a first guide portion that guides the movement of the first movable plate in the first direction;
The first movable plate has a second guide portion that constitutes a linear motion guide mechanism in combination with the first guide portion and guides the movement of the first movable plate in the first direction,
The first guide portion and the second guide portion are arranged on the mounting surface side, and the base plate is arranged in the first direction, the second direction intersecting the first direction, and the second direction. A stage device, wherein the stage device is arranged in the first opening of the first movable plate in a third direction intersecting the one direction and the second direction . further comprising a second movable plate movable relative to the first movable plate;
The first movable plate further has a third guide portion that guides movement of the second movable plate in a second direction intersecting the first direction,
The second movable plate further comprises a fourth guide that forms a linear motion guide mechanism in combination with the third guide and guides the movement of the second movable plate in the second direction. The stage device according to claim 1, characterized by: the second movable plate has a second opening;
The first movable plate is arranged within the second opening of the second movable plate in the first direction, the second direction, and the third direction. Item 3. The stage device according to item 2. 4. The stage apparatus according to claim 2, wherein said third guide portion and said fourth guide portion are arranged on said mounting surface side. a base plate having a mounting surface capable of being attached to an external device; a first movable plate having a first opening and movable relative to the base plate; and a second opening having the first a second movable plate that is relatively movable with respect to the movable plate of
the base plate has a first guide portion that guides the movement of the first movable plate in the first direction;
The first movable plate is
a second guide that forms a linear motion guide mechanism in combination with the first guide and guides the movement of the first movable plate in the first direction;
a third guide portion that guides movement in a second direction of the second movable plate that intersects the first direction;
The second movable plate has a fourth guide portion that constitutes a linear motion guide mechanism in combination with the third guide portion and guides the movement of the second movable plate in the second direction,
The first guide portion, the second guide portion, and the third guide portion and the fourth guide portion are arranged on the mounting surface side,
In the first direction, the second direction that intersects with the first direction, and the third direction that intersects with the first direction and the second direction, the base plate moves the first movable plate in the first direction. arranged in one opening, wherein the first movable plate is arranged in the second opening of the second movable plate in the first direction, the second direction, and the third direction; A stage device characterized by: A stage device comprising: a base plate having a mounting surface that can be attached to an external device; and a first movable plate having a first opening and movable relative to the base plate,
The base plate has first guide portions provided on respective first side surfaces facing each other adjacent to the mounting surface for guiding movement of the first movable plate in the first direction,
The first movable plate is provided on a second side surface facing the first side surface, and is combined with the first guide portion to form a linear motion guide mechanism. having a second guide portion that guides movement in the first direction;
The first side surface and the second side surface are provided with the first guide portion and the second guide portion that guide movement in the first direction via rolling elements in grooves formed in the respective side surfaces. is formed and
The base plate is arranged in the first opening in the first direction, a second direction intersecting the first direction, and a third direction intersecting the first direction and the second direction. A stage device characterized by: further comprising a second movable plate movable relative to the first movable plate;
The first movable plate further has a third guide portion that guides movement of the second movable plate in a second direction intersecting the first direction,
The second movable plate further comprises a fourth guide that forms a linear motion guide mechanism in combination with the third guide and guides the movement of the second movable plate in the second direction. 7. The stage device according to claim 6, characterized by: the second movable plate has a second opening;
The first movable plate is arranged within the second opening of the second movable plate in the first direction, the second direction, and the third direction. Item 8. The stage device according to item 7. The third guide portions are arranged on third side surfaces located on the outer peripheral side of the member that intersects the member having the second side surface of the first movable plate,
9. A stage device according to claim 7, wherein said fourth guide portion is arranged so as to face said third guide portion. 10. A first driving means for driving the first movable plate in the first direction is arranged between the base plate and the first movable plate. The stage device according to any one of 1. A second driving means for driving the second movable plate in the second direction is arranged between the first movable plate and the second movable plate. Item 6. The stage device according to any one of Items 2 to 5. 8. A second driving means for driving the second movable plate in the second direction is further provided between the first movable plate and the second movable plate. 10. The stage device according to any one of items 1 to 9. further comprising a scale disposed on the second movable plate and having a pattern periodically formed in the first direction and the second direction;
the second movable plate is further movable relative to the base plate;
The base plate is
first detection means for detecting the position of the second movable plate with respect to the base plate in the first direction based on detection of the pattern;
second detection means for detecting the position of the second movable plate with respect to the base plate in the second direction based on detection of the pattern;
8. The stage device according to claim 2 or 7, characterized by comprising: A microscope system comprising an optical system and a holder that holds a stage device via a mounting surface,
The stage device is held between the optical system and the holding section,
A microscope system, wherein the stage device is the stage device according to any one of claims 1 to 13.

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