JP7134231B2 - ワークピース背面の損傷を最小限に抑えるためのシステムおよび方法 - Google Patents
ワークピース背面の損傷を最小限に抑えるためのシステムおよび方法 Download PDFInfo
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- H—ELECTRICITY
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45031—Manufacturing semiconductor wafers
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
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- G05B2219/49—Nc machine tool, till multiple
- G05B2219/49127—Variable clamping force as function of movement, force on workpiece
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Description
Claims (15)
- 熱遷移中のワークピースへの損傷を最小限に抑えるためのシステムであって、
1つ以上の開口部を有する上面を備えるプラテンと、
前記1つ以上の開口部のそれぞれとそれぞれ連通する複数の導管と、
前記複数の導管と連通するとともに、背面ガス供給システムと連通するバルブシステムと、
前記上面にワークピースを保持するクランプ力を生成するために前記プラテン内に配置された1つ以上の電極と、
電極電源と、
前記バルブシステムと通信して前記プラテンの前記上面への背面ガスの流れを変調するとともに、前記電極電源と通信して前記ワークピースに加えられるクランプ力を変調するコントローラと、
を備え、
前記ワークピースを前記プラテンに取り付けた後、かつ、前記ワークピースを前記プラテンから取り外す前、前記プラテン上に前記ワークピースが配置されている期間中、前記クランプ力は、複数回、交互に増加され低下され、背面ガス圧力は、前記クランプ力と連動して、複数回、交互に増加され低下される、システム。 - 前記電極電源は、第1のクランプ力を前記ワークピースに加えるための第1の電圧と、前記第1のクランプ力より低い第2のクランプ力を前記ワークピースに加えるための第2の電圧を出力する、請求項1に記載のシステム。
- 前記バルブシステムは、背面ガスを第1の圧力レベルおよび前記第1の圧力レベルより低い第2の圧力レベルで供給するように構成されている、請求項2に記載のシステム。
- 前記第1のクランプ力が前記ワークピースに加えられているときに、前記第1の圧力レベルが供給される、請求項3に記載のシステム。
- 前記第2のクランプ力は、前記第1のクランプ力の0%から50%の間である、請求項2に記載のシステム。
- 前記コントローラが、前記クランプ力および前記背面ガスの流れを10Hz未満の周波数で変調する、請求項1に記載のシステム。
- コントローラによって実行されると、前記コントローラに、
ワークピースをプラテンに取り付けた後、かつ、前記ワークピースを前記プラテンから取り外す前、前記プラテン上に前記ワークピースが配置されている期間中、前記ワークピースに加えられるクランプ力を変調させる命令、前記クランプ力は、複数回、交互に増加され低下され、および
前記ワークピースを前記プラテンに取り付けた後、かつ、前記ワークピースを前記プラテンから取り外す前、前記プラテン上に前記ワークピースが配置されている期間中、前記プラテンの上面への背面ガスの流れを変調させる命令、背面ガス圧力は、前記クランプ力と連動して、複数回、交互に増加され低下される、
を含む、非一時的なコンピュータ可読記憶媒体。 - 前記コントローラは電極電源と通信し、前記命令は、前記コントローラによって実行されると、前記電極電源に、第1のクランプ力を前記ワークピースに加えるために第1の電圧および前記第1のクランプ力より低い第2のクランプ力をワークピースに加えるために第2の電圧を出力させる、請求項7に記載の非一時的なコンピュータ可読記憶媒体。
- 前記コントローラはバルブシステムと通信し、前記命令は、前記コントローラによって実行されると、前記バルブシステムに、背面ガスを第1の圧力レベルで、および前記第1の圧力レベルより低い第2の圧力レベルで供給させる、請求項8に記載の非一時的なコンピュータ可読記憶媒体。
- 前記命令は、前記コントローラによって実行されると、前記第1のクランプ力が前記ワークピースに加えられているときに前記第1の圧力レベルが供給されるようにする、請求項9に記載の非一時的なコンピュータ可読記憶媒体。
- 前記第2のクランプ力は、前記第1のクランプ力の0%から50%の間である、請求項8に記載の非一時的なコンピュータ可読記憶媒体。
- 熱遷移中のワークピースへの損傷を最小限に抑える方法であって、
加熱されたプラテン上にワークピースを配置するステップと、
前記ワークピースを前記プラテンに取り付けた後、かつ、前記ワークピースを前記プラテンから取り外す前、前記ワークピースが前記加熱されたプラテン上に配置されている期間中、クランプ力と前記加熱されたプラテンの上面への背面ガスの流れを変調するステップであって、前記クランプ力は、複数回、交互に増加され低下され、背面ガス圧力は、前記クランプ力と連動して、複数回、交互に増加され低下される、ステップと、
前記ワークピースが目的の温度に達したとき、前記ワークピースを取り外すステップと、を含む、方法。 - 前記クランプ力は、第1のクランプ力と該第1のクランプ力より低い第2のクランプ力との間で変調される、請求項12に記載の方法。
- 前記背面ガスの流れが、第1の圧力レベルと該第1の圧力レベルより低い第2の圧力レベルとの間で変調される、請求項13に記載の方法。
- 前記第1のクランプ力が前記ワークピースに加えられているときに、前記第1の圧力レベルが供給される、請求項14に記載の方法。
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US15/797,264 US10732615B2 (en) | 2017-10-30 | 2017-10-30 | System and method for minimizing backside workpiece damage |
US15/797,264 | 2017-10-30 | ||
PCT/US2018/050155 WO2019089130A1 (en) | 2017-10-30 | 2018-09-10 | System and method for minimizing backside workpiece damage |
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JP2021501470A JP2021501470A (ja) | 2021-01-14 |
JP7134231B2 true JP7134231B2 (ja) | 2022-09-09 |
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JP (1) | JP7134231B2 (ja) |
KR (1) | KR102372030B1 (ja) |
CN (1) | CN111247631B (ja) |
TW (1) | TWI723290B (ja) |
WO (1) | WO2019089130A1 (ja) |
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US11864299B2 (en) * | 2022-05-10 | 2024-01-02 | Applied Materials, Inc. | System and method for dissipating workpiece charge build up |
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JP2011198838A (ja) | 2010-03-17 | 2011-10-06 | Tokyo Electron Ltd | 基板脱着方法 |
JP2015041669A (ja) | 2013-08-21 | 2015-03-02 | 住友電気工業株式会社 | 半導体装置の製造方法 |
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- 2018-09-10 JP JP2020523403A patent/JP7134231B2/ja active Active
- 2018-09-10 CN CN201880068623.9A patent/CN111247631B/zh active Active
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JP2006269556A (ja) | 2005-03-22 | 2006-10-05 | Elpida Memory Inc | プラズマ処理装置、及び半導体装置の製造方法 |
JP2011198838A (ja) | 2010-03-17 | 2011-10-06 | Tokyo Electron Ltd | 基板脱着方法 |
JP2015041669A (ja) | 2013-08-21 | 2015-03-02 | 住友電気工業株式会社 | 半導体装置の製造方法 |
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TWI723290B (zh) | 2021-04-01 |
JP2021501470A (ja) | 2021-01-14 |
CN111247631B (zh) | 2023-07-18 |
WO2019089130A1 (en) | 2019-05-09 |
KR20200063263A (ko) | 2020-06-04 |
TW201926507A (zh) | 2019-07-01 |
US20190129394A1 (en) | 2019-05-02 |
CN111247631A (zh) | 2020-06-05 |
US10732615B2 (en) | 2020-08-04 |
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