JP7131273B2 - 量子カスケードレーザ - Google Patents
量子カスケードレーザ Download PDFInfo
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- JP7131273B2 JP7131273B2 JP2018190154A JP2018190154A JP7131273B2 JP 7131273 B2 JP7131273 B2 JP 7131273B2 JP 2018190154 A JP2018190154 A JP 2018190154A JP 2018190154 A JP2018190154 A JP 2018190154A JP 7131273 B2 JP7131273 B2 JP 7131273B2
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- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3401—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers
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- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3401—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers
- H01S5/3402—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers intersubband lasers, e.g. transitions within the conduction or valence bands
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- H01S5/0287—Facet reflectivity
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- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1082—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region with a special facet structure, e.g. structured, non planar, oblique
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- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
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- H01S2301/00—Functional characteristics
- H01S2301/17—Semiconductor lasers comprising special layers
- H01S2301/176—Specific passivation layers on surfaces other than the emission facet
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- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
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- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02461—Structure or details of the laser chip to manipulate the heat flow, e.g. passive layers in the chip with a low heat conductivity
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- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
- H01S5/2275—Buried mesa structure ; Striped active layer mesa created by etching
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Semiconductor Lasers (AREA)
Description
図1の(b)部及び(c)部並びに図4の(a)部及び(b)部に示されるように、第1領域13cにおいて、接続面25は、レーザ構造体13の一側面13hから他側面13iまで延在することができる。量子カスケードレーザ11によれば、第2端面13bがレーザ構造体13の一側面13hから他側面13iに延在することを可能にする。半導体メサ23のメサ端面23a及びその周辺のエリアを第2端面13bに提供できる。
図1の(d)部、並びに図4の(d)部に示されるように、レーザ構造体13は、第1延在部37及び第2延在部39を第1領域13cに有する。第1延在部37及び第2延在部39は、埋込体31の電流ブロック部35から延出する。第1延在部37及び第2延在部39は、半導体メサ23の一側面23b及び他側面23cから電流ブロック部35を介して基板33への熱伝搬の経路を提供できる。
実施例に係る量子カスケードレーザ11を説明する。基板33は、導電性を有しており、例えばn型InP基板を備えることができる。中赤外のレーザ光を放出する量子カスケードレーザの半導体層の半導体材料は、InPに近い格子定数を有する。InPの半導体基板は、これらの半導体層に良好な結晶品質を提供できる。InPは、中赤外光を透過可能であって、このInP基板は下部クラッドとして使用可能である。半導体基板は、分子線エピタキシー及び有機金属気相成長といった成長法による結晶成長に用いられる。
半導体ウエハ61:n型InP基板。
積層体63。
半導体膜63a(下部クラッド層24f):n型InP。
半導体膜63b(コア層24a):例えば、GaInAs/AlInAs、GaInAsP/AlInAsから成る超格子構造。
半導体膜63c(回折格子層24d):n型InGaAs。
半導体膜63d(上部クラッド層24b):n型InP。
半導体膜63e(コンタクト層24e):n型InGaAs。
Claims (5)
- 量子カスケードレーザであって、
第1端面を含む第1領域、第2端面を含む第2領域、エピ面、及び基板面を有するレーザ構造体と、
前記レーザ構造体の前記第2端面及び前記エピ面上に設けられた絶縁膜と、
前記レーザ構造体の前記エピ面及び前記絶縁膜上に設けられ、前記絶縁膜の開口を介して前記エピ面に接触を成す電極と、
前記レーザ構造体の前記第2端面及び前記エピ面上に設けられ、前記電極及び前記基板面から離れた金属膜と、
を備え、
前記絶縁膜は、前記金属膜と前記第2端面及び前記エピ面との間に設けられ、
前記エピ面は前記基板面の反対側にあり、
前記第1領域及び第2領域は、第1軸の方向に配置され、
前記第2領域は、前記第1軸の方向に延在するコア層を有する半導体メサを含み、
前記第2端面は前記第1領域と前記第2領域との境界に位置し、
前記第2端面は前記半導体メサを終端させ、
前記第1領域は、前記第1軸の方向に延在する接続面を含み、
前記接続面は、前記第2端面を前記第1端面に接続し、
前記絶縁膜は、前記接続面上に設けられ、
前記絶縁膜は、前記第1端面の上端から離れており、
前記金属膜は、前記接続面上に設けられ、
前記金属膜は、前記第1端面の上端から離れ、
前記第1端面は、前記基板面を前記接続面に接続する、量子カスケードレーザ。 - 前記レーザ構造体は、埋込体及び基板を含み、
前記第2端面は、前記基板内に底を有し、
前記基板は前記埋込体を搭載し、
前記埋込体は、前記第2領域において前記半導体メサを埋め込む電流ブロック部を有する、請求項1に記載された量子カスケードレーザ。 - 前記接続面は、前記レーザ構造体の一側面から他側面まで延在し、
前記絶縁膜及び前記金属膜は、前記接続面上に設けられる、請求項1又は請求項2に記載された量子カスケードレーザ。 - 前記レーザ構造体は、前記埋込体の前記電流ブロック部から延出する第1延在部及び第2延在部を前記第1領域に有し、
前記金属膜は、前記第1延在部及び前記第2延在部上に設けられる、請求項2に記載された量子カスケードレーザ。 - 前記第1延在部及び前記第2延在部は、それぞれ、前記第1軸の方向に延在する第1側面及び第2側面を有し、
前記第1側面及び前記第2側面は前記第1端面に接続され、
前記接続面は、前記第1側面及び前記第2側面を互いに接続し、
前記第2端面は、前記第1側面及び前記第2側面を互いに接続し、
前記絶縁膜及び前記金属膜は、前記接続面、前記第1側面及び前記第2側面上に設けられる、請求項4に記載された量子カスケードレーザ。
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JP2018190154A JP7131273B2 (ja) | 2018-10-05 | 2018-10-05 | 量子カスケードレーザ |
US16/584,973 US11121525B2 (en) | 2018-10-05 | 2019-09-27 | Quantum cascade laser |
CN201910933613.3A CN111009821A (zh) | 2018-10-05 | 2019-09-29 | 量子级联激光器 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060187985A1 (en) | 2005-02-18 | 2006-08-24 | Binoptics Corporation | High reliability etched-facet photonic devices |
JP2013254765A (ja) | 2012-06-05 | 2013-12-19 | Hamamatsu Photonics Kk | 量子カスケードレーザ |
JP2015222811A (ja) | 2014-05-01 | 2015-12-10 | 住友電気工業株式会社 | 量子カスケード半導体レーザ、量子カスケード半導体レーザを作製する方法 |
JP2017037870A (ja) | 2015-08-06 | 2017-02-16 | 住友電気工業株式会社 | 量子カスケードレーザデバイス |
JP2018098263A (ja) | 2016-12-08 | 2018-06-21 | 住友電気工業株式会社 | 量子カスケード半導体レーザ |
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JP3966067B2 (ja) * | 2002-04-26 | 2007-08-29 | 富士ゼロックス株式会社 | 表面発光型半導体レーザ素子およびその製造方法 |
CN102709812B (zh) * | 2012-06-01 | 2013-11-13 | 长春理工大学 | 衬底上分布有导热通道的量子级联激光器 |
JP6163080B2 (ja) * | 2013-10-28 | 2017-07-12 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
CN103545712A (zh) * | 2013-10-29 | 2014-01-29 | 中国科学院半导体研究所 | 带有分布反馈光栅和多孔波导量子级联激光器及制作方法 |
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2018
- 2018-10-05 JP JP2018190154A patent/JP7131273B2/ja active Active
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- 2019-09-27 US US16/584,973 patent/US11121525B2/en active Active
- 2019-09-29 CN CN201910933613.3A patent/CN111009821A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060187985A1 (en) | 2005-02-18 | 2006-08-24 | Binoptics Corporation | High reliability etched-facet photonic devices |
JP2013254765A (ja) | 2012-06-05 | 2013-12-19 | Hamamatsu Photonics Kk | 量子カスケードレーザ |
JP2015222811A (ja) | 2014-05-01 | 2015-12-10 | 住友電気工業株式会社 | 量子カスケード半導体レーザ、量子カスケード半導体レーザを作製する方法 |
JP2017037870A (ja) | 2015-08-06 | 2017-02-16 | 住友電気工業株式会社 | 量子カスケードレーザデバイス |
JP2018098263A (ja) | 2016-12-08 | 2018-06-21 | 住友電気工業株式会社 | 量子カスケード半導体レーザ |
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US11121525B2 (en) | 2021-09-14 |
JP2020061408A (ja) | 2020-04-16 |
US20200112143A1 (en) | 2020-04-09 |
CN111009821A (zh) | 2020-04-14 |
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