JP7128881B2 - Optical component detection system and method for detecting at least one component - Google Patents

Description

Semiconductor components are applied in many technological areas, such as, for example, semiconductor electronics, photovoltaics, and the formation of optical detectors and radiation sources (eg light emitting diodes). The diverse use of semiconductor components places ever higher demands on semiconductor component manufacturers, especially with respect to quality. Defects or failure points in or on semiconductor components are undesirable. This is because they lead to less-than-perfect functionality of semiconductor components. The semiconductor components are therefore already inspected for defects and faults during production. One possibility for inspecting semiconductor components is to reproduce them in the micrometer range by means of an optical system.

However, conventional constructions of optical systems have only a small depth of field. If the surface to be copied of the semiconductor component to be inspected is tilted with respect to the image sensor surface of the image sensor of the optical system, the semiconductor component cannot be imaged perfectly sharply in the image. Furthermore, the optical components incorporated within the optical system have a large mass. The adjustment process is therefore slow, or the optical system oscillates when focus changes due to component displacement, which significantly degrades image quality. Therefore, in order to record an image, one has to wait until the vibration has subsided. This longer image recording time results in a smaller throughput of the semiconductor components when the semiconductor components are continuously formed/inspected.

DE 102008018586 A1 relates to an optical detection device for detecting at least one surface of a component. The component is directed by the fixing member toward the camera device such that a first surface of the component is illuminated by a light source having a first light beam in the short wave range. Furthermore, the detection device has a second light source, which irradiates a second light beam in the long-wave range onto the second surface of the component, the second surface of the component then facing the surface. A light beam reflected from the surface is received by a camera device.

JP 2016-128781 teaches an apparatus for inspecting electronic components. The device has first and second image recording means which record images of different areas of the electronic component, these areas being two different areas of a rectangular parallelepiped. be.
From DE 102 011 089 055 A1, an instrument is known which has a shaft, at one end of which is arranged a lens which can be linearly displaced by means of an image recording device and an operating drive. A lens is fixed to a runner, and the runner is displaceable along a displacement direction within a cylindrical slide pipe. An operating drive has two coils, which are arranged around the slide pipe. The operating drive is of simple construction and can be easily installed. Furthermore it is easily sterilized, for example using an autoclave.
A camera module with an image sensor and a lens group is known from US 2015/0168679 A1. The lens group is displaced relative to the image sensor by means of a manipulator. The operating device then has a holder for the lens group, the holder being connected to the image sensor via a spring. Due to this configuration, the camera module is particularly insensitive to vibrations. A device comparable insofar is also known from US 2014/0368724.
From US 2011/0176046 A1 a lens displacement device is known, such as can be used, for example, for camera modules of mobile phones. The device has an image sensor and a lens, the lens being displaceable relative to the image sensor via a displacement unit. The lens group is then connected to the image sensor via a spring. The device is constructed particularly compactly.

DE 102008018586 A1 JP 2016-128781

The problem of the present application is to provide an efficient optical component detection system for detecting components.

Proposed Solution An optical component detection system is proposed for detecting at least one surface of at least one component. The receptacle is arranged to position the component in front of the camera device for detection of the first surface of the component by the camera device. A camera device has an image sensor arranged to receive the light reflected at the surface of the component. The optical component detection system further includes a first optically effective member positioned in the optical path of the light reflected to the image sensor; device. The operating device has a holder for the first optically effective member. The holder is fixed inside a hollow cylindrical lens barrel, and the central longitudinal axis of the lens barrel is oriented coaxially with respect to the optical axis of the first optically effective member. The holder can elastically bend at least in the longitudinal direction of the lens barrel. The manipulator further comprises a first manipulation for adjusting the relative spacing between the optically effective member and the image sensor to displace the optically effective member along the optical axis relative to the image sensor. have a drive.

With an elastically deflectable holder it is possible to hold only the first optically effective member without appropriate screws or a longitudinally displaceable frame of the optically effective member. . If the optically active member is an achromatic, the achromatic lens pair (eg, crown glass lens and flint glass lens) can be held by the holder. A frame of lens pairs is therefore not required, reducing the mass to be moved of the optically effective member and the overall mass of the optical component detection system. Due to the smaller mass of the optically effective member with the holder, the position of the optically effective member can be displaced by applying a relatively small force. A smaller mass allows less inertia driving of the optically effective member. The focal plane of the component is thus rapidly readjusted.

The resiliently flexible holder can have a rubber-containing material or a coil spring, or can be formed as a bellows. Alternatively, the holder can be formed as a disc spring, in which case the disc spring has an opening in its core, in which opening the first optically effective member is received. ing.

Disturbances such as vibrations from external sources to the optically effective member can thus be significantly damped or especially avoided. Measurements performed by optical component detection systems are therefore less sensitive to disturbances.

Furthermore, the resiliently deflectable holder can be steplessly extended or retracted by virtue of its elastic properties, thus allowing precise adjustment of the position of the first optically effective member.

Components sometimes cannot be precisely aligned to the optics in a real manufacturing environment. In such cases, it is not possible to image the component perfectly sharply with sufficient depth of field. The optical component detection system presented here allows a series of multiple image recordings to be performed rapidly.

Good and rapid adjustability of the optical component detection system allows the measurement of the component to be carried out faster and more precisely, thus resulting in a high throughput.

Variants and morphological image sensors can be CCD chips. In another variant, the image sensor can be an image sensor sensitive for a given wavelength range, such as a CMOS chip or a microbolometric array or a pyroelectric array.

The barrel has a small transparency. In a variant, the barrel comprises permanent magnet material. Furthermore, the barrel can comprise at least aluminum or plastic.

The coil can be placed either attached to the barrel or spaced therefrom. The position of the coil can be displaced with respect to the position of the holder on the optical axis.

The holder has a first end region and the first end region of the holder is fixed to the barrel. The holder also has a second end region in which the first optically effective member is retained. In the non-actuated state, the position of the first end region of the holder can coincide with the position of the ends of the coil with respect to the optical axis. In another variant, the position of the first end region of the holder can be arranged inside or outside the coil with respect to the optical axis. Alternatively or additionally, the second end region of the holder can be located inside or outside the coil with respect to the optical axis.

The holder of the first operating drive can be surrounded at least sectionally by the coil. A controller is arranged to control the current supplied to the coil to generate the magnetic field. The holder further comprises a yoke containing soft iron or, as a permanent magnet component, a yoke containing soft iron or a yoke of permanent magnets, the yoke moving along the central longitudinal axis of the barrel according to the current supplied to the coil. are arranged to displace the holder by

This construction reduces wear or galling of the means for adjusting the relative spacing. Furthermore, the force exerted on the holder by the magnetic field allows precise adjustment of the relative spacing.

When a holder with a yoke containing soft iron is placed at one end of the coil, a force acts on the coil in the direction of the coil center. When the magnetic field is lowered and then turned off, there is no longer any force acting on the holder. The holder then assumes its initial position again.

If the holder has a permanent magnet yoke, the holder can be stretched in two directions according to the direction of current flow through the coil and the orientation of the north and south poles of the permanent magnets of the permanent magnet component. The permanent magnet component thus allows the desired displacement of the relative spacing in both directions.

The housing can be arranged to position the component in front of the camera device such that the focal plane of the component is at least partially projected onto the image sensor surface of the image sensor.

The optical component detection system further comprises a second optical component controlled by the controller for displacing the image sensor to displace the image sensor relative to the first optical member along the optical axis. You can have an operational drive.

The second operating drive can have at least one piezo actuator or a finely traveling, linearly actuated axis system. The fine-running, linear-acting axis system can be a system of connecting rods.

By means of a second actuation drive it is possible to displace the image sensor on the optical axis and to project the focal plane onto the image sensor surface of the image sensor. Therefore, it is possible to quickly focus the optics on the component.

Therefore, already in the first recording of the component by the image sensor, a defined part of the component is clearly imaged in the image.

Furthermore, the optical component detection system can have a light source, which is arranged to deliver light to the surface of the component. The light source is arranged to deliver light having a predetermined wavelength or light in a predetermined wavelength range to the surface of the component. The light emitted from the light source can be visible light, infrared light and/or polarized light having wavelengths within the range of approximately 380 nm to 780 nm. Additionally, the image sensor can be sensitive in the infrared or to polarized light.

Optionally, the control device controls the first and/or second operating drive to project the focal plane of the reflected light onto the image sensor surface directed toward the reflected light. can be arranged to adjust the relative spacing between the optically effective member of and the image sensor.

By controlling the first and/or second operating drive, quick and precise adjustment of the relative spacing between the first optically effective member and the image sensor can be made so that the focal plane is aligned with the image. It is projected onto the image sensor surface of the sensor.

The image processing of the optical component detection system is arranged to record a first image of the component with the image sensor. The image sensor provides the first image to image processing. Based on the formed first image, image processing determines if the focal plane of the reflected light is substantially fully projected onto the image sensor surface of the image sensor. If the focal plane of the reflected light is not substantially fully projected onto the image sensor surface of the image sensor, then the image processing may be a first number of image regions of the first image, the reflected A first partial area of the focal plane of the light is arranged to define a first image area projected onto the image sensor surface of the image sensor.

The image processing further comprises generating a second image in which a second partial area of the focal plane of the reflected light of the first number of image areas of the first image is not projected onto the image sensor surface of the image sensor. Arranged to define the area. Image processing is further arranged to provide control commands to the controller. A controller is arranged to control the first and/or second operating drives to adjust the relative spacing between the optically effective member and the image sensor based on the control commands. . The second partial area of the focal plane of the reflected light is then adjusted such that the focal plane of the reflected light is projected onto the image sensor area of the image sensor.

Image processing is further arranged to record a second image of the component with the image sensor. Within the second image the image processing is performed such that a first partial area of the focal plane of the reflected light of the second number of image areas of the second image is not projected onto the image sensor surface of the image sensor. , defines a third image region. The image processing further comprises a fourth image in which a second partial area of the focal plane of the reflected light of the second number of image areas of the second image is projected onto the image sensor surface of the image sensor. define the area.

If the component cannot be sharply imaged in the image, the process described above can form at least two records of the component, in each of which the image areas sharply duplicate a portion of the component. ing. In addition, the dull image areas that are recognized are duplicated sharply in the next image, allowing inspection of the complete component.

In a first alternative, the image processing can be arranged to record the first image with an image sensor, which image sensor provides the first image to the image processing. The image processing further controls the first and/or second operating drive to adjust the relative spacing between the first optically effective member and the image sensor by a predetermined distance length. is arranged to provide control commands to the controller for Furthermore, the image processing is arranged to record a second image with the image sensor, in which case the image sensor provides the second image to the image processing.

The image processing can provide control instructions to the first and/or second operating drive after a predetermined period of time after recording the first image.

The predetermined distance length can depend on the optical properties of the first and/or the second optically effective member and/or the dimensions of the surface of the component. Preferably the predetermined distance length can depend on the depth of field, so that the predetermined distance length is less than, equal to or greater than the depth of field.

Thoroughly survey the surface of the component for defects by individual sharply reproducing image areas of the recorded image at a predetermined distance length less than, equal to, or greater than the depth of field be able to. If the predetermined distance length is greater than the depth of field, a predetermined surface area of the component can be examined for defects. Other surface areas are similarly investigated for defects. Inspecting a surface region for defects can thus be performed with less computational effort and/or within a shorter time.

In a second alternative, the image processing is arranged to record the first image with an image sensor, which image sensor provides the first image to the image processing. The image processing may further comprise first and/or first sensors for adjusting the relative spacing between the first optically effective member and the image sensor at a predetermined rate while recording the first image. arranged to provide control commands to the controller for controlling the two operating drives. Additionally, the image processing is arranged to record the second image with an image sensor, which image sensor provides the second image to the image processing. The second image is recorded after the first image or after a predetermined period of time after the first image is recorded and the relative spacing between the first optically effective member and the image sensor is adjusted. is recorded while In another alternative, the second image is recorded after a predetermined length change in the relative spacing between the image sensor and the first optically effective member.

Image processing may be performed on the first and/or second operating drives to stop adjusting the relative spacing between the image sensor and the first optically effective member after recording the second image. can be arranged to provide a control command for

The predetermined velocity may be determined based on optical properties of the first and/or second optically effective members, surface dimensions of the component, first and/or second optically effective members and/or images. These response characteristics due to the mass of the sensor and the first and/or second actuation drive can be relied upon.

The predetermined speed can be selected such that the relative spacing between the image sensor and the first optically effective member is displaced no further than the depth of field while the image is recorded. . The recorded image is thus recorded with sufficient sharpness even though the relative spacing between the image sensor and the first optically effective member is adjusted at the same time. By continuously adjusting the relative spacing between the image sensor and the first optically effective member, the image sensor and/or the first optically effective member can be deactivated and then reactivated. Doesn't need to be accelerated. This provides the advantage that vibrations caused by acceleration and stopping of the image sensor and/or the first optically effective member are avoided. Another advantage is that the time to inspect the component for defects is minimized. This is because the image sensor and/or the first optically effective member need only be accelerated and stopped once.

The image processing of the first and second alternatives is to define a first image area of a first plurality of image areas of the first image after recording the first image or after recording the second image. can be arranged. In the first image area a first partial area of the focal plane of the reflected light is projected onto the image sensor surface of the image sensor. Additionally or alternatively, the image processing defines a second image area of the first plurality of image areas of the first image, in which a second sub-area of the focal plane of the reflected light is Not projected onto the image sensor surface of the image sensor.

Furthermore, the image processing can additionally or alternatively define a third image area of the second number of image areas of the second image after recording the second image. In the third image area the first partial area of the focal plane of the reflected light is not projected onto the image sensor surface of the image sensor. Additionally or alternatively, the image processing further defines a fourth image area of the second number of image areas of the second image, in which a second partial area of the focal plane of the reflected light is It is projected onto the image sensor surface of the image sensor.

The image processing further comprises after recording the second image for adjusting the relative spacing between the image sensor and the first optically effective member to its initial length after recording the second image. Arrangements can be made to provide control commands to the controller for controlling the first and/or second operating drive.

The first and second image regions of the first image may each reproduce a portion of the component, which portions are substantially of the component in the third and fourth sub-regions of the second image. It can correspond to the above part. The first and second image regions of the first image completely replicate the component.

The first number of image regions of the first image can correspond to the second number of image regions of the second image.

The first and second image areas of the first image and/or the third and fourth image areas of the second image can be contiguous image areas. Alternatively, the first and second image regions of the first image and the third and fourth image regions of the second image can at least partially intersect.

In the first image a first partial area of the focal plane and in the second image a second partial area of the focal plane are located on the image sensor surface of the image sensor within a predetermined depth of field. can be projected onto In that case the second partial area of the focal plane in the first image and the first partial area of the focal plane in the second image are outside the predetermined depth of field on the image sensor surface of the image sensor. projected onto.

The image processing can be arranged to crop a first image region from the first image and a fourth image region from the second image. Further image processing is arranged to stitch the cut out first and fourth image regions to form a third image.

By forming a third image, when inspecting the component for faults or defects, the image processing only needs to inspect one image, not two images, so that the image is inspected. The time length and computational effort required for

The image processing further includes the component having at least one fault location based on the first image region of the first image and/or the fourth image region of the second image and/or the third image. It can be arranged to determine whether it is a dolphin or not. The image processing is arranged to provide fault location information for the component when the image processing defines at least one fault location.

The optical component detection system can have a position detection sensor for determining the position and/or orientation of the first optically effective member and/or the image sensor surface of the image sensor. It's well appointed. The position detection sensor is further arranged to provide information regarding the position and/or orientation of the optically effective member and/or the image sensor surface of the image sensor to the controller, the controller being provided with controlling the first and/or second operating drive based on the information obtained. The position sensor can be an optical or (electro-)mechanical position sensor.

The position detection sensor can be attached inside the lens barrel. In another variant, the position detection sensor can be integrated within the image sensor. The holder has a pattern on the surface area and the pattern is directed towards the image sensor. The image sensor is arranged to recognize the pattern on the surface area and determine the position and/or orientation of the optically effective member based on the recognized surface area.

The information provided allows the controller to precisely position the first optically effective member and/or the image sensor to project the focal plane of the reflected light onto the image sensor surface of the component. Is possible.

The camera device may have a second optically effective member in the optical path between the first optically effective member and the image sensor. The optical axis of the second optically effective member is oriented coaxially with respect to the optical axis of the first optically effective member.

The first optically effective member can be an achromat, or the achromat and/or the second optically effective member can be a focusing lens.

The refractive index of light increases continuously from red to blue, thus decreasing the focal length of the lens. Achromats are used to compensate or correct for this imaging error.

Furthermore, an optical component detection system is proposed for detecting at least one surface of at least one component. The receptacle is arranged to position the component in front of the camera device for detection of the first surface of the component by the camera device. A camera device has an image sensor arranged to receive light reflected at the first surface of the component. The optical component detection system further includes a first optically effective member positioned in the optical path of the light reflected to the image sensor and a manipulator for the first optical member. have. The operating device has a holder for the first optical member. The holder is fixed by a linear guide inside a hollow cylindrical lens barrel, and the central longitudinal axis of the lens barrel is oriented coaxially with respect to the optical axis of the first optically effective member. . The linear guides are arranged to guide the holder parallel to the optical axis. The manipulator further includes a first optically effective member for adjusting the relative spacing between the image sensor and the first optically effective member to displace the first optically effective member relative to the image sensor. Have an operational drive.

Furthermore, an operating device for the optically effective member is proposed, which has a holder for the first optically effective member. The holder is fixed inside a hollow cylindrical lens barrel, and the central longitudinal axis of the lens barrel is oriented coaxially with respect to the optical axis of the first optically effective member. The holder can elastically bend at least in the longitudinal direction of the lens barrel. The manipulator further comprises a first manipulator drive for displacing the holder to displace the first optically effective member relative to the image sensor along the optical axis.

Furthermore, an operating device for the optically effective member is proposed, which has a holder for the first optically effective member. The holder is fixed inside a hollow cylindrical lens barrel by a linear guide, and the central longitudinal axis of the lens barrel is oriented coaxially with respect to the optical axis of the first optically effective member. . The linear guide is arranged to guide the holder parallel to the optical axis. The operating device further comprises a first operating drive for displacing the holder to displace the first optically effective member relative to the barrel along the optical axis.

A method for additionally detecting at least one surface of at least one component is proposed, the method comprising the steps of: aligning the component with respect to a camera device; light reflected at the first surface of the component is received by an image sensor of the camera device; a longitudinally elastically deflectable holder inserts the first holding an optically effective member; wherein the longitudinal direction is oriented parallel to the optical axis of the optically effective member; along the optical axis a first optically effective The relative spacing between the image sensor and the first optically effective member is adjusted to displace the member relative to the image sensor.

The method may further comprise the steps of; moving the image sensor and the first optically effective member to displace the image sensor relative to the first optically effective member along the optical axis; and optionally projecting the focal plane of the reflected light onto the image sensor surface of the image sensor toward which the reflected light is directed. and the optically effective member.

Furthermore, the method can have the following steps: exposing the first surface of the component with light. The light can be light of a given wavelength or of a given wavelength range.

The method may further comprise the steps of: recording a first image; based on the first image, the focal plane of the reflected light is substantially completely on the image sensor surface of the image sensor; of the first plurality of image areas of the first image if the focal plane of the reflected light is not substantially fully projected onto the image sensor surface of the image sensor; defining a first image area in which a first partial area of the focal plane of the reflected light is projected onto the image sensor surface of the image sensor; defining an image area of the focal plane of the reflected light in which a second partial area of the focal plane of the reflected light is not projected onto the image sensor surface of the image sensor; adjusting the relative spacing between the image sensor and the first optical member for projection onto the image sensor surface of the image sensor; recording a second image; defining a third image area of the image area of the second image in which the first sub-area of the focal plane of the reflected light is not projected onto the image sensor surface of the image sensor; defines a fourth image area of the plurality of image areas in which a second partial area of the focal plane of the reflected light is projected onto the image sensor surface of the image sensor.

In a first alternative, the method can comprise the steps of: recording a first image; Adjust distance length only; record a second image.

In a second alternative, the method may comprise the steps of: recording a first image; after the first image is recorded, or after a predetermined period of time after the first image is recorded, and between the image sensor and the first optical A second image is recorded during the adjustment of the relative spacing between the effective members.

The method according to the first and second alternatives may further comprise the steps of: defining a first image area of the first plurality of image areas of the first image; A first partial area of the focal plane of the light is projected onto an image sensor surface of the image sensor; and/or defines a second image area of the multiple image areas of the first image, in which and/or defining a third image area of the second plurality of image areas of the second image, wherein , the first partial area of the focal plane of the reflected light is not projected onto the image sensor surface of the image sensor; and/or the fourth partial area of the second number of partial areas of the second image. , in which a second partial area of the focal plane of the reflected light is projected onto the image sensor surface of the image sensor.

The method may further comprise the steps of: cropping a first image region from the first image and a fourth image region from the second image; and forming a third image; The first and fourth cropped image regions are stitched together.

The method may further comprise the step of: based on the first image region of the first image and/or the fourth image region of the second image and/or the third image the component comprises at least determine if it has one fault point; and provide fault point information for the component if the component has at least one fault point.

Even if some of the above aspects are described in terms of methods, these aspects also apply to the apparatus. Quite analogously, the aspects described above with respect to the apparatus are equally applicable to the method.

Other objects, features, advantages and applicability will become apparent from the following description of non-limiting examples with reference to the accompanying drawings. In that case, all described and/or imaged features, by themselves or in any combination, are indicative of the subject matter disclosed herein, regardless of its grouping in a claim or its attribution. there is As such, the dimensions and positions of components shown in the figures are not necessarily to scale; they may differ from that shown in the embodiment to be implemented.

FIG. 2 is a side top view diagrammatically showing an operating device for an optically effective member; Fig. 3 schematically shows a top view of the holder of the operating device; Fig. 3 schematically shows a top view of the holder of the operating device; 1 is a side top view diagrammatically showing an optical component detection system for detecting at least one surface of at least one component; FIG. FIG. 2 diagrammatically shows an image record with image areas of different sharpness; FIG. FIG. 2 diagrammatically shows an image record with image areas of different sharpness; FIG. Fig. 4 diagrammatically shows an image record consisting of image areas of a preceding image record; 1 is a side top view diagrammatically showing a focal plane of a component to be imaged with respect to a surface of an image sensor of an optical component detection system; FIG. 1 is a side top view diagrammatically showing a focal plane of a component to be imaged with respect to a surface of an image sensor of an optical component detection system; FIG. 1 is a side top view diagrammatically showing a focal plane of a component to be imaged with respect to a surface of an image sensor of an optical component detection system; FIG. Fig. 4 shows a time-velocity diagram by which the relative spacing between the optically effective member and the image sensor of the optical component detection system changes; Fig. 4 shows a time-focusing distance diagram, by means of which an embodiment for recording an image of a component is to be explained; Fig. 4 shows another time-focusing distance diagram, by means of which another embodiment for recording an image of a component is intended to be explained;

The device variants and their functioning and driving perspectives described herein are only used to better understand their structure, method of functioning and characteristics. They do not limit the disclosure to, for example, the examples. The figures are partly diagrammatic, in which the essential properties and effects are partly greatly enlarged in order to clarify the function, working principle, technical form and features. . In that case, each functional method, principle, technical form and feature disclosed in the figures or text is included in all claims, text and other figure features, this disclosure, Alternatively, it can be freely and arbitrarily combined with other functional methods, principles, technical forms and features disclosed therefrom, so that all conceivable combinations correspond to the device described. In that case combinations between all individual forms in the text, i.e. in each section of the specification, in the claims and combinations between the various variations in the text, in the claims and in the figures are also included. and may be covered by other claims. The claims also do not limit the possibilities of combining the disclosure and thus all indicated features with one another. All disclosed features are expressly disclosed herein either alone or in combination with any other feature.

Within the detailed illustrations, corresponding or functionally similar components are provided with matching reference numerals. The apparatus and method are described using several embodiments.

FIG. 1 shows an operating device 100 for an achromat 130 as a first optically active member. Achromat 130 consists of flint glass 130B and crown glass 130A. The operating device 100 has a holder 140 for the achromat 130 . The holder 140 is fixed inside a hollow cylindrical lens barrel 110 , the central longitudinal axis of which is oriented coaxially with respect to the optical axis OA of the achromat 130 . In this embodiment, holder 140 is formed in the shape of a ring. The holder 140 accommodates the achromat 130 through the opening of the holder 140 so that the optical axis OA of the achromat is coaxial with the longitudinal central axis of the lens barrel 110 . The lens barrel 110 has a small permeability (transmittance μ>1) and a paramagnetic material. A paramagnetic material is aluminum. In another variant, the lens barrel 110 has plastic as material.

The holder 140 can elastically bend at least in the longitudinal direction of the lens barrel. To that end, the holder 140 has a rubber-containing material, which is elastically deformable. In another variant, the holder 140 is formed as a bellows or coil spring. In another variant, the holder 140 is formed as a disk spring, which holds the achromat 130 such that its optical axis OA is coaxial with the central longitudinal axis of the barrel 110 .

As shown in FIG. 1, holder 140 is fixed to lens barrel 110 in a first end region. The material thickness of the holder 140 decreases along the optical axis OA towards the second end region of the holder 140 in which the achromat 130 is held. In that case, the second end region of the holder 140 is not fixed to the lens barrel 110 and is spaced from the lens barrel 110 in a direction perpendicular to the optical axis OA. For this purpose the holder 140 has at least one recess which serves as a frame for the achromat 130 . An achromat 130 is contained and retained within the recess.

The operating device 100 further comprises a first operating drive 120 for displacing the holder 140 in order to displace the achromat 130 relative to the lens barrel 110 along the optical axis OA. For this purpose, the first operating drive 120 has a coil 121 in FIG. 1 which surrounds the holder 140 at least in sections.

In FIG. 1, the coil 121 is attached to the lens barrel 110 . In another variation, coil 121 is spaced apart from barrel 110 .

In FIG. 1, the first end region of the holder 140 is arranged outside the coil 121 with respect to the optical axis OA. The second end region of the holder 140, on the other hand, is arranged inside the coil 121 with respect to the optical axis OA.

In another variant, the position of the first end region of holder 140 coincides with the end of coil 121 with respect to optical axis OA. In other variations, the location of the first end of holder 140 is inside or outside coil 121 with respect to the optical axis. In other variations, the second end of holder 140 is located inside or outside coil 121 with respect to optical axis OA.

The holder 140 has yokes 141 , 142 comprising soft iron in the second end region of the holder 140 . In another variant, the holder 140 has permanent magnet yokes 141,142. In FIG. 1 the holder 140 has yokes 141 , 142 in the second end region of the holder 140 . The yokes 141 and 142 are arranged to face the frame of the holder 140 . In another variant, yokes 141 , 142 are arranged between achromat 130 and holder 140 .

When a current is passed through coil 121, a magnetic field is created within it. When the coil 121 is energized, a magnetic field acts on the yokes 141 and 142 containing soft iron to attract the yokes 141 and 142 containing soft iron to the center of the coil 121 . Yokes 141, 142 comprising soft iron are unalloyed iron of high purity. The holder 140 is thereby stretched or compressed (depending on where the coil 120 is positioned relative to the soft iron yokes 141, 142, respectively, along the optical axis OA). This is because the holder, on the one hand, is rigidly fixed inside the barrel 110 . On the other hand, the yokes 141, 142 containing the soft iron of the holder 140 are drawn into the center of the coil 121 by the magnetic field. The applied magnetic field causes the holder 140 to stretch or compress such that the position of the achromat 130 is displaced by the holder 140 along the optical axis OA. Since the orientation of the achromat 130 is not changed in that case, displacement of the achromat 130 only displaces the focus of the achromat 130 along the optical axis OA.

In another variant, the holder 140 has yokes 141, 142 of permanent magnets. The permanent magnet yokes 141, 142 extend longitudinally parallel to the optical axis OA. The north and south poles of the permanent magnet yokes 141, 142 are oriented such that the north and south poles are oriented in opposite directions along the optical axis OA. In this case, holder 140 is deformed according to the direction of current flow in coil 121 . The holder 140 is thus deformed both in the first direction and in the second direction, where the second direction is opposite to the first direction.

Since the holder 140 is elastically flexible, it has deformation resistance against deformation. When the holder 140 deforms, the force generated by the deformation resistance increases or decreases according to the degree of deformation of the holder 140 . Therefore, when a magnetic field is generated and the holder 140 is deformed by the force generated by the magnetic field, the force generated by the deformation resistance and the force generated by the magnetic field form a force balance. When the magnetic field is reduced and finally turned off, the holder 140 again assumes its initial position due to its elastically flexing properties. By controlling the current intensity of the current as desired, the position of the holder 140 along the optical axis OA is thus adjusted.

The structure shown in FIG. 1 thus provides a lightweight structure for the optically effective component. Additionally, the achromat 130 is much less susceptible to vibration by the holder 140 . This is because all external vibrations are damped by the holder 140 . A suitable magnetic field deforms the holder 140 when the focus of the achromat 130 has to be displaced. Vibration of the steering drive 120 is minimized since only a small mass is then moved.

In another embodiment, operating device 100 has a linear guide (not shown) instead of coil 121 . The linear guides are arranged to guide the holder 140 parallel to the optical axis OA. Accordingly, the position of the holder 140 and the position of the achromat 130 are also displaceable along the optical axis OA. The operating device 100 has a drive (not shown) which is arranged to run the holder 140 along the linear guide.

A possible embodiment of the holder 140 is shown in FIGS. 2 and 3 show holder 140, yokes 141, 142 and achromat 130 in top view.

In FIG. 2, holder 140 consists of at least two holder pieces 143 , 144 which together hold achromat 130 . In a variant, the achromat 130 is arranged between two holder pieces 143, 144, so that the two holder pieces 143, 144 face each other. In another variant, the holder consists of at least four holder pieces (not shown), which are arranged displaced by 90° each about the optical axis OA and which hold the achromat 130 .

According to a variant of the holder 140 shown in FIG. 3, the holder 140 has yokes 141, 142 in two holder pieces 143, 144, respectively. In variants with four holder pieces, the holder 140 has yokes in at least two holder pieces each, or yokes in all four regions.

FIG. 3 shows another variant of holder 140 in which holder 140 is formed as ring holder 145 for holding achromat 130 .

According to the variant shown in FIG. 4, the yoke 146 is ring-shaped. The induced current generated by the magnetic field in the ring-shaped yoke 146 is interrupted by a plurality of slits in the link-shaped yoke 146 . Due to the ring-shaped yoke 146, the force generated by the magnetic field uniformly acts on the holder 140, and the holder is uniformly deformed. Alternatively, the yoke can be formed as described with respect to FIG.

FIG. 4 shows an optical component detection system 200 for detecting at least one surface O of a semiconductor chip B as a component. Optical component detection system 200 includes housing 150 . The housing portion 150 is arranged to position the semiconductor chip B in front of the camera device 220 so that the first surface O of the semiconductor chip B is detected by the camera device 220 . The first surface is the side surface of the semiconductor chip B in FIG. However, the housing portion 150 is not limited to orienting this surface O of the semiconductor chip B with respect to the camera device 220 . The housing part 150 is arranged so that the other surface of the semiconductor chip B is also directed toward the camera device 220, so that the other surface of the semiconductor chip B is also inspected. Further, the optical component detection system 200 includes a light source (not shown) that directs light to the first surface O of the semiconductor chip B, or illuminates the semiconductor chip B. arranged. The light emitted by the light source is, in a variant, visible light having a wavelength in the region of about 380 to 790 nm. In other variations, infrared light or polarized light is used.

The camera device 220 has a CCD chip 230 as an image sensor, which is arranged to receive the light reflected by the first surface O of the semiconductor chip B. FIG. In other variations, the image sensor can be a CMOS chip or an image sensor sensitive to a given wavelength range, such as a microbolometer array or a pyroelectric array. The CCD chip--according to the wavelength range used--has an adapted sensitivity for each wavelength range, or even for polarized light. In the optical path of the reflected light L there is also arranged an operating device 100 as shown in FIG. 1 together with an achromat 130 as a first optically effective member. Additionally, a condenser lens 160 as a second optical member is arranged in the optical path between the achromat 130 and the CCD chip 230 . The optical axis of the condenser lens 160 is oriented coaxially with the optical axis OA of the achromat 130 .

The operating device 100 has a coil 121 as a first operating drive 120 in the optical component detection system 200 shown in FIG. In this embodiment, the holder 140 can elastically bend in the longitudinal direction of the lens barrel 110 .

Alternatively, optical component detection system 200 has a linear guide instead of coil 121 . The holder 140 is fixed inside the lens barrel 110 via a linear guide. Furthermore, the linear guides are arranged to guide the holder 140 parallel to the optical axis OA. The linear guide is designed as a rail, which runs parallel to the optical axis OA. In another variant, the linear guide is formed as two rails. The two rails are then symmetrically opposed with respect to the axis OA.

The first surface O of the semiconductor chip B is not arranged parallel to the image sensor surface 231 of the CCD chip 230 in FIG. 4, but is tilted by an angle alpha with respect to the optical axis OA. Angle alpha is greater or less than 90° in FIG.

The optical component detection system 200 in FIG. 4 further comprises a control unit ECU, which is arranged to control the first operating drive 120 . The control unit ECU thus controls the current supplied to the coil 121 and thus displaces the relative spacing between the achromat 130 and the CCD chip 230 (or the image sensor surface 231 of the CCD chip 230). arranged. If the optical component detection system 200 has a linear guide instead of the coil 121, the controller ECU is arranged to control the motor that causes the holder 140 to travel along the linear guide. .

In FIG. 4, the control unit ECU has an image processing BV. In another variant, the control unit ECU and the image processing BV can be two separate units, which are arranged to communicate with each other.

Additionally, in FIG. 4 the optical image detection system 200 comprises a second operating drive 240 controlled by the control unit ECU. A second operating drive 240 is arranged to displace the CCD chip 230 to move the CCD chip 230 relative to the achromat 130 along the optical axis OA.

The optical component detection system 200 further includes a position detection sensor 250, which is arranged to determine the position and/or orientation of the image sensor surface 231 of the achromat 130 and/or CCD chip 230. there is The position detection sensor 250 is arranged inside the lens barrel 110 in FIG. 1 and fixed to the yoke 142 . In another variation, the position detection sensor 250 can be positioned and fixed inside the barrel 110 and relative to the yoke 141 .

In another variation, position detection sensor 250 can be integrated within CCD chip 230 . The holder 140 then has markings on at least one surface area facing the CCD chip 230 . CCD chip 230 is arranged to detect this marking and determine the position and/or orientation of achromat 130 based on the detected marking.

The position detection sensor 250 provides information regarding the position and/or orientation of the achromat 130 and/or the image sensor surface 231 of the CCD chip 230 to the control unit ECU, and the control unit detects the first and/or It controls the second operating drive 120,240. The position sensor 250 is an optical position sensor, but in another variant it can be an (electro-)mechanical position sensor.

In FIG. 4 the control unit ECU controls the first and/or second operating drive to project the focal plane SE of the reflected light onto the image sensor surface 231 of the CCD chip 230 facing the reflected light. It is arranged to displace the relative spacing between the achromat 130 and the CCD chip 230 by controlling 120,240.

In one possible case, surface O of semiconductor chip B is substantially parallel to image sensor surface 231 of CCD chip 230 . The control unit ECU controls the first and/or second operating drive 120 , 240 such that the focal plane SE is projected onto the image sensor surface 231 of the CCD chip 230 .

When the CCD chip 230 then records an image of the semiconductor chip B, the semiconductor chip B is sharply imaged in the image and the semiconductor chip B is inspected for possible defects or faults. An image acquisition process BV provides fault location information about the semiconductor chip B when the defect or fault location is determined by the image processing BV.

The first and/or second operating drives 120, 240 are arranged to increase or decrease the relative spacing between the achromat 130 and the CCD chip 230 by 100 μm within a few milliseconds. More precisely, the first and/or second steering drive 120, 240 is arranged to change the relative spacing by 100 μm within 2 to 10 ms, preferably within about 5 ms. The relative spacing between the achromat 130 and the CCD chip 230 is increased or decreased so that no or no overshoot of the achromat 130 and/or the CCD chip 230 occurs, especially along the direction of movement.

Since semiconductor chip B in FIG. , it is impossible to project the focal plane SE of the reflected light L substantially completely onto the image sensor surface 231 of the CCD chip 230 .

The image processing BV is arranged to record the first image BA by the CCD chip 230 . Based on the first image BA recorded by the CCD chip 230, the image processing BV determines whether the focal plane SE of the reflected light L is substantially completely projected onto the image sensor surface 231 of the CCD chip 230, determine. If the image processing BV determines that the focal plane SE is not substantially completely projected onto the image sensor surface 231 of the CCD chip 230, then the image processing BV performs the first image BA of the first image BA. A first image area B1 of the plurality of image areas B1, B2 is defined. In the first image area B1 a first partial area of the focal plane SE of the reflected light L is projected onto the image sensor surface 231 of the CCD chip 230 .

A first recorded image BA is shown diagrammatically in FIG. 5, the image areas with solid lines being the sharply imaged image areas. In other words, the image area with solid lines is the image area where the partial area of the focal plane SE of the reflected light L is projected onto the image sensor surface 231 of the CCD chip 230 . Image areas with dashed lines are image areas that are not sharp, or image areas where a partial area of the focal plane SE is not projected onto the image sensor surface 231 of the CCD chip 230 .

The image processing BV defines a second image area B2 of the first number of image areas B1, B2 on the basis of the first image BA, in which a second portion of the focal plane SE of the reflected light L The area is not projected onto the image sensor surface 231 of the CCD chip 230 .

The image processing BV then provides control signals to the control unit ECU. The controller ECU controls the first and/or second operating drives 120, 240 based on control signals to adjust the relative spacing between the achromat 130 and the CCD chip 230. FIG. A second portion of the focal plane SE of the reflected light L is then projected onto the image sensor surface 231 of the CCD chip 230 . A second partial area of the focal plane SE of the reflected light L is then projected onto the image sensor surface 231 of the CCD chip 230 . A first partial area of the focal plane SE of the light L reflected against it is no longer projected onto the image sensor surface 231 of the CCD chip 230 . Image processing BV then sends signals to CCD chip 230 to record a second image BB.

As shown diagrammatically in FIG. 6, the image processing BV defines a third image area B3 of a second plurality of image areas B3, B4 of the second image BB on the basis of the second image BB. In the third image area B3, the first partial area of the focal plane SE of the reflected light L is not projected onto the image sensor surface 231 of the CCD chip 230. FIG. The image processing BV then defines a fourth image area B4 of the second number of image areas B3, B4 of the second image BB. In the fourth image area B4 a second partial area of the focal plane SE of the reflected light L is projected onto the image sensor surface 231 of the CCD chip 230 . In the second image BB, the fourth image area B4 therefore duplicates one section of the semiconductor chip B sharply. The first and second numbers of image areas are not limited to two numbers.

The first and second image areas B1, B2 of the first image BA, in a preferred form, each reproduce a part of the semiconductor chip B, which part is the third and fourth image of the second image BB. It substantially corresponds to the portion of the semiconductor chip B within the regions B3 and B4. It is thus guaranteed that in the image areas B1, B2, B3, B4 of the first and second images BA, BB, the same part of the semiconductor chip B is reproduced.

The first and second image areas B1, B2 of the first image BA and the third and fourth image areas B3, B4 of the second image BB are shown as successive image areas in FIGS. ing. Alternatively, the first and second image areas B1, B2 of the first image BA and the third and fourth image areas B3, B4 of the second image BB can at least partially intersect. .

The image processing BV is arranged to crop a first image area B1 from the first image BA and a fourth image area B4 from the second image BB. Based on the cropped image areas B1, B4, the image processing BV forms a third image BC. A third image BC is a perfectly sharp copy of the semiconductor chip B. FIG. This is because the semiconductor chip B is clearly reproduced in the first image area B1 of the first image BA and in the fourth image area B4 of the second image BB.

The image processing BV further performs the semiconductor chip B based on the first image area B1 of the first image B2 and/or the fourth image area B4 of the second image BB and/or the third image BC. It is arranged to determine if it has at least one defect or failure point. If the semiconductor chip B has a defect or faulty location, the image processing BV provides the faulty location information.

8 to 10 show the focal plane SE with the associated depth of field ST. In order to record the semiconductor chip B clearly, the focal plane SE must be substantially projected onto the image sensor surface 231 of the CCD chip 230 . Since the focal plane SE has a predetermined depth of field ST, the semiconductor chip B is clearly imaged even if the focal plane SE is not perfectly parallel to the image sensor surface 231 of the CCD chip 230. . Likewise, if the focal plane SE is projected within a predetermined distance in front of or behind the image sensor surface 231 of the CCD chip 230, the semiconductor chip B will be imaged sharply. The depth of field ST then describes the distance within which the object, here the semiconductor chip B, is sufficiently sharply imaged.

As shown in FIG. 8, the focal plane SE is projected parallel to and spaced apart from the image sensor surface 231 of the CCD chip 230 along the optical axis OA. The depth of field ST of the focal plane SE is sufficiently large in FIG. 8 that the thus projected image of the reflected light L on the focal plane SE is sharp.

In FIGS. 9 and 10 the case of a tilted semiconductor chip B is shown diagrammatically. Since the surface O of the semiconductor chip B is tilted with respect to the image sensor surface 231 of the CCD chip 230 , the focal plane SE of the reflected light L is also tilted with respect to the image sensor surface 231 of the CCD chip 230 .

In FIG. 9, the first partial area of the focal plane SE is projected onto the image sensor surface 231 of the CCD chip 230, so that in the first recorded image BA the first image area B1 is the semiconductor chip. B shows sharp imaging. Although the focal plane SE only partially intersects the image sensor surface 231 of the CCD chip 230, the first image area B1 of the first image BA is sharply imaged thanks to the depth of field ST. . In the second image area B2, the second partial area of the focal plane SE with the depth of field ST is no longer projected onto the image sensor surface 231 of the CCD chip 230, so that the first image BA 2 image area B2 represents a blurred image of the semiconductor chip B. FIG.

In response to control commands of the image processing BV, the control unit ECU controls the first and/or second operating drives 120, 240 to adjust the relative spacing between the achromat 130 and the CCD chip 230. FIG. The focal plane SE is then displaced with respect to the image sensor surface 231 of the CCD chip 230 so that a second partial area of the focal plane SE is projected onto the image sensor surface 231 of the CCD chip 230 .

As shown diagrammatically in FIG. 10, in the second recorded image BB, in the fourth image area B4, the second part of the focal plane SE with the depth of field ST of the reflected light L A region is projected onto the image sensor surface 231 of the CCD chip 230 . Since also in the second image BB the focal plane SE only partially intersects the image sensor surface 231 of the CCD chip 230, the depth of field ST allows the fourth image area B4 of the second image BC to be One portion of the semiconductor chip B is clearly reproduced. In contrast, in the third image area B3 of the second image BC, the first partial area of the focal plane SE with the depth of field ST is no longer projected onto the image sensor surface 231 of the CCD chip 230. do not have. Therefore, the third image area B3 of the second image BB reproduces part of the semiconductor chip B in a blurred manner.

Corresponding to the preceding description of the optical component detection system 200, a method for detecting the surface of at least one semiconductor chip B is described.

In one step, semiconductor chip B is oriented with respect to camera device 200 . In a next step, the first surface O of the semiconductor chip B is detected by the camera device 220 .

In a next step, the CCD chip 230 receives the light L reflected from the surface O of the semiconductor chip B. FIG. In another step, the achromat 130 is held in the path of the reflected light L by a longitudinally resilient holder 140 . The longitudinal direction is oriented parallel to the optical axis OA of the achromat 130 . In a next step, the relative spacing between CCD chip 230 and achromat 130 is adjusted in order to displace achromat 130 relative to CCD chip 230 along optical axis OA.

A time-velocity (t,v) diagram is shown in FIG. With a diagram of this kind the controller ECU is arranged to adjust the relative spacing between the achromat 130 and the CCD chip 230 .

At time t0, the relative spacing between the achromat 130 and the CCD chip 230 is adjusted by the first and/or second operating drives 120,240. The achromat 130 and/or the CCD chip 230 are then accelerated by the first and/or the second operating drive 120, 240 to a predetermined speed v1 within half of the first period (t0-t1). . After a half period (t0-t1), the achromat 130 and/or CCD chip 230 are braked by the first and/or second operating drive 120,240.

After displacement of the achromat 130 and/or the CCD chip 230, the focal plane SE is projected onto the image sensor surface 231 of the CCD chip 230 as shown in FIG. A first image BA is recorded within a second time period (t1-t2) after the achromat 130 and/or the CCD chip 230 are stopped.

After that, first and second image regions B1, B2 are defined by image processing BV based on the first image BA. For the first image BA, a first partial area of the focal plane SE is projected onto the image sensor surface 231 of the CCD chip 230 in the first image area B1. In contrast, in the second image area B2, the second part of the focal plane SE is not projected onto the image sensor surface 231 of the CCD chip 230. FIG. The CCD chip 230 takes 6 to 12 ms (for example, 8 to 10 ms) to record and read out an image, according to the light conditions and chip size during recording, and the readout speed (pixel/s) to adjust the readout period. time required.

The control unit ECU, following initiation of the third period (t2-t3) in response to the control command of the image processing BV, controls the first and/or or to control the second operating drive 120 , 240 . The relative spacing is then adjusted in such a way that the second partial area of the focal plane SE is projected onto the image sensor surface 231 of the image sensor 230 .

Therefore, the achromat 130 and/or the CCD chip 230 are accelerated to a predetermined speed by half of the third period (t2-t3). After half of the third period (t2-t3) the achromat 130 and/or the CCD chip 230 are braked. A second image BB is recorded by the CCD chip 230 as soon as the achromat 130 and/or the CCD chip 230 are stationary. The distance interval over which the relative spacing between the achromat 130 and the CCD chip 230 is reduced or increased is in the region of 70 to 150 μm, preferably 100 μm. This distance interval is moved in a period of 2 ms to 10 ms, preferably within 10 ms. The distance interval over which the relative spacing movement between the achromat 130 and the CCD chip 230 takes place depends on the first and/or second optically effective members 130, 160 used and their optical properties. .

The image processing BV may also issue other operational commands to the first and/or second operations to displace the relative spacing between the image sensor 230 and the achromat 130 to the initial length after recording the second image BB. Arranged to provide to the drives 120,240.

In another variant, three images with three image areas each are recorded by the CCD chip 230 . In one of the three image areas each partial area of the focal plane SE is projected onto the image sensor surface 231 of the CCD chip 230, and in the other two image areas the focal plane SE is projected onto the image sensor surface of the CCD chip 230. 231 is not projected. The sequence of three image recordings functions like the sequence of two image recordings, but with three images each having three image areas. To record the three images and adjust the relative spacing between the achromat 130 and the CCD chip 230 accordingly, the optical component detection system requires 80 to 120 ms, preferably 100 ms.

In a first variant, the housing 150 places the semiconductor chip B in front of the camera device 220 in such a way that the focal plane SE is at least partially projected onto the image sensor surface 231 of the CCD chip 230 . , is arranged to locate. The image processing BV thus records the initial first image BA by means of the CCD chip 230 . The image processing BV then defines the first and second image regions B1, B2 and sends a control command to the control unit ECU before or at time t0. Based on the control command, the control unit ECU activates the first and/or second operating drive to accelerate the achromat 130 and/or the CCD chip 230 to the speed v1 within half of the first period (t0-t1). 120, 240 are controlled. After half of the first period (t0-t1) the achromat 130 and/or the CCD chip 230 are braked. A second image BB is recorded by the CCD chip 230 when the achromat 130 and/or the CCD chip 230 are stationary.

FIGS. 12 and 13 each show a time-focusing distance-diagram in which different steps 310 to 360 and 410 to 460 are carried out at different times, wherein steps corresponding to each other are identical. are provided. 12 and 13 three images of semiconductor chip B are recorded. An image is subdivided into three image areas, with only one image area having a sharp image of a partial area of the semiconductor chip B in each case. Only one image region in each case is therefore within the region of the depth of field. However, the number of recorded images is not limited to this number. In still other variations, more image regions can be wholly or at least partially within and/or intersect with the depth of field.

In FIG. 12, the semiconductor chip B is positioned in front of the camera device 220 by the housing portion 150 before time t0. After time t 0 , CCD 230 records a first image of semiconductor chip B in step 310 . Following step 310, in step 311, the image processing BV defines within the first image a first image area of a first number of image areas, in which a first portion of the focal plane SE of the reflected light. A region is projected onto the image sensor surface 231 of the CCD sensor 230 . Furthermore, the image processing BV defines in step 311 second and third image areas of the first image, in which the second and third partial areas of the focal plane SE of the reflected light L respectively are located on the CCD sensor. 230 is not projected onto the image sensor surface 231 .

After a predetermined period of time after recording the first image in step 310, the image processing BV provides operating commands to the first and/or second operating drives 120,240. At step 320, the first and/or second operating drives 120, 240 adjust the relative spacing between the CCD chip 230 and the achromat 130 by a predetermined distance length. Accordingly, the relative spacing between the CCD chip 230 and the achromat 130 is adjusted while defining the first, second and third image areas by the image processing BV.

The predetermined distance length depends on the optical properties of the achromat 130, the lens 160 and/or the dimensions of the surface O of the component B. Preferably, the predetermined distance length is predetermined by the depth of field ST, so that the predetermined distance length is less than, equal to or greater than the depth of field ST. As shown in FIG. 12, the speed for traveling the predetermined distance interval is low at first and then increases significantly. After a certain partial distance has been traveled, the speed is reduced at first significantly and then less. Abrupt movement and stopping of the achromat 130 and/or the CCD chip 230 by the first and/or second operating drive 120, 240 and concomitant overshoot along the movement direction are thus avoided.

After finishing adjusting the relative spacing in step 320 , a second image is recorded by the CCD chip 230 in step 330 . Following step 330, in step 331, image processing BV defines the fourth and sixth image regions of the second number of image regions in the second image, in which the focal plane SE of the light L reflected therein. The first and third partial areas are not projected onto the image sensor surface 231 of the CCD chip 230 . Further in step 331 the image processing BV defines a fifth image area of the second image, in which a second partial area of the focal plane SE of the reflected light L is located on the image sensor surface 231 of the CCD chip 230. being projected.

After the recording of the second image has taken place in step 330, the image processing again provides control commands to the first and/or second operating drive 120,240. At step 340, the first and/or second operating drives 120, 240 adjust the relative spacing between the CCD chip 230 and the achromat 130 by a predetermined distance length. In another variation, the relative spacing between CCD chip 230 and achromat 130 in step 340 is set to a second predetermined distance length that is greater or less than the predetermined distance length in step 320. can only be adjusted. Similarly, the relative spacing between the CCD chip 230 and the achromat 130 is adjusted while defining the fourth, fifth and sixth image areas by image processing BV.

After adjusting the relative spacing in step 340 , a third image is recorded by the CCD chip 230 in step 350 . Following successful recording of the third image, in step 351 the image processing BV defines the seventh and eighth image areas of the third image, in which the first and the first focal planes SE of the reflected light L. 2 are not projected onto the image sensor surface 231 of the CCD chip 230 . Furthermore, the image processing BV defines in step 351 a ninth image area of the third image, in which a third partial area of the focal plane SE of the reflected light L is on the image sensor surface 231 of the CCD chip 230. being projected.

After the third image has been recorded in step 350, the image processing BV provides further control commands to the first and/or second operating drives 120,240. The first and/or second operating drives 120, 240 adjust the relative spacing between the CCD chip 230 and the achromat 130 in step 360 to their initial length. Similarly, the relative spacing between the CCD chip 230 and the achromat 130 is adjusted while the seventh, eighth and ninth image areas are defined by the image processing BV. Adjusting the relative spacing between CCD chip 230 and achromat 130 to its initial length is performed similarly to adjusting the relative spacing in steps 320 and 340, but of course in the opposite direction.

After step 360, the image processing BV checks whether the semiconductor chip B has defects based on predetermined image areas of the first, second and third images respectively in successive steps 312, 332, 352. do.

In another variation, the image processing BV can form a fourth image in step 353 after steps 360, 312, 332, 352, in which the first image of the first, second and third images , crop and stitch the fifth and ninth image regions.

In another variant, the image processing BV implements step 311 after steps 330,331,340,350,351,360. Further, the image processing BV may perform step 331 after steps 340, 350, 351, 360 and/or step 351 after any of steps 312,332.

Therefore, it is possible to separate the image processing and the inspection of the image of the semiconductor chip B from the image recording process. The independence of image recording of semiconductor chip B from image processing and image inspection reduces the process of image recording to fewer steps. The duration of image recording per component is thus reduced and a greater number of components and corresponding image recordings can be achieved in the same time.

In FIG. 13, semiconductor chip B is positioned in front of camera device 220 before time t0. A first image is recorded by the CCD chip in step 410 after time t0 and provided to the image processing BV. During step 410 the image processing BV provides control commands to the first and/or second operating drives 120, 240 to adjust the relative spacing between the CCD chip 230 and the achromat 130 at a predetermined speed. do. The first and/or second operating drive 120, 240 already adjusts the relative spacing between the CCD chip 230 and the achromat 130 while the recording of the first image is still taking place.

The point at which the relative spacing between the CCD chip 230 and the achromat 130 is adjusted at a predetermined speed and the predetermined speed depend on the optical properties of the achromat 130, the lens 160, the depth of field ST, the surface of the component B The dimensions of O, the mass of the achromat 130 and/or the lens 160 and/or the image sensor 230 and their response behavior by the first and/or second steering drive 120, 240 are matched. If the depth of field is, for example, of the order of 70 μm, the focal plane SE can be moved by a maximum of 70 μm during the recording of the first image. A sharp image of the partial area of the semiconductor chip B is thus ensured on the image area of the recorded image.

In FIG. 13, the predetermined speed along the distance traveled over which the image is formed is kept constant. In other variations, the speed of adjusting the relative spacing between CCD chip 230 and achromat 130 can vary within a predetermined speed range or between at least two different speeds.

After focal plane SE has been displaced by a predetermined distance length and/or for a predetermined time period, a second image is recorded by CCD chip 230 in step 430 . Independently of the recording of the second image, the relative spacing between CCD chip 230 and achromat 130 is adjusted at a predetermined speed. In another variant, the second image is recorded when the predetermined focal plane position is reached.

After focal plane SE has been displaced a further predetermined distance length and/or for a predetermined time period, a third image is recorded by CCD chip 230 in step 450 . As in the recording of the second image, also during the recording of the third image the relative spacing between the CCD chip 230 and the achromat 130 is adjusted at a predetermined rate. In another variant, the predetermined speed is lowered during recording of the third image until the relative spacing between CCD chip 230 and achromat 130 is no longer adjusted.

Steps 311, 312, 331, 332, 351, 352, 353, 360 can be implemented as already described with respect to FIG.

According to FIG. 13, the achromat 130 and/or the image sensor 230 are accelerated and stopped only once while the first, second and third images are recorded. Since each stop and new acceleration is avoided, the duration for image recording per component is further reduced. Similarly, vibrations of the optical component detection system due to new accelerations and stops are avoided.

Claims (19)

An optical component detection system (200) for detecting at least one surface of at least one component (B), comprising a housing (150), said housing comprising a first arranged to position the component (B) in front of the camera device (220) for detection of the surface (O) by the camera device (220);
In that case the camera device (220) comprises an image sensor (230) arranged to receive the light (L) reflected at the first surface (O) of the component (B). and
The optical component detection system (200) then comprises a first optically effective member (130) positioned in the optical path of the light (L) reflected to the image sensor (230), the control a device (ECU), an image processing (BV) and an operating device (100) for a first optically effective member (130), the operating device (100) comprising:
a holder (140) for a first optically effective member (130), where the holder (140) is fixed inside the hollow cylindrical lens barrel (110) and the mirror The central longitudinal axis of the barrel (110) is oriented coaxially with respect to the optical axis (OA) of the first optically effective member (130), and in that case the holder (140) comprises at least the barrel It can elastically bend in the longitudinal direction,
and the operating device
A relative position between the optically effective member (130) and the image sensor (230) to displace the optically effective member (130) relative to the image sensor (230) along the optical axis (OA). having a first operating drive (120) for adjusting the spacing, wherein a control unit (ECU) is arranged to control the first operating drive (120);
In that case the image processing (BV) is arranged to: record a first image (BA) by means of an image sensor (230), said first image being provided to the image processing (BV) is,
- for controlling the first operating drive (120) to adjust the relative spacing between the first optically effective member (130) and the image sensor (230) by a predetermined distance length; to provide a control command to the control unit (ECU),
- recording a second image (BB) by the image sensor (230), said second image being provided to image processing (BV);
so arranged,
The image processing (BV) is then arranged as follows after the recording of the first image (BA) or after the recording of the second image (BB): of the first image (BA) A first image area (B1) of the first number of image areas (B1, B2) is defined in which a first partial area of the focal plane (SE) of the reflected light (L) is located on the image sensor ( 230) on the image sensor surface (231), and - defining a second image area (B2) of the first number of image areas (B1, B2) of the first image (BA), wherein the second partial area of the focal plane (SE) of the reflected light (L) is not projected onto the image sensor surface (231) of the image sensor (230), and - the second image ( BB) defines a third image area (B3) of the second number of image areas (B3, B4) in which a first partial area of the focal plane (SE) of the reflected light (L) is not projected onto the image sensor surface (231) of the image sensor (230),
- defining a fourth image area (B4) of the second number of image areas (B3, B4) of the second image (BB), in which the focal plane (SE) of the reflected light (L); the second partial area is projected onto the image sensor surface (231) of the image sensor (230),
is arranged to
Optical component detection system. The first operating drive (120) then has a coil (121) that at least sectionally surrounds the holder (140),
A control unit (ECU) is then arranged to control the current supplied to the coil (121) to generate the magnetic field,
In that case, the holder (140) comprises soft iron or permanent magnet components (141, 142), which move the holder (140) according to the current supplied to the coil (121) to the lens barrel (110). ) arranged to be displaced along the central longitudinal axis of the
The optical component detection system (200) of claim 1. moreover,
an image sensor (230) controlled by a control unit (ECU) to displace the image sensor (230) along the optical axis (OA) relative to the first optically effective member (130); having a second manipulating drive (240) for displacing and/or having at least one light source, said light source delivering light to the first surface (O) of the component (B) are arranged to
In that case, optionally, the control unit (ECU)
A first optically arranged to adjust the relative spacing between the active component (130) and the image sensor (230) by control of the first and/or second operating drive (120, 240);
3. An optical component detection system (200) according to claim 1 or 2. Image processing (BV) is then arranged as follows:
- recording a first image (BA) by an image sensor (230), said first image being provided to image processing (BV);
- based on the first image (BA), whether the focal plane (SE) of the reflected light (L) is substantially completely projected onto the image sensor surface (231) of the image sensor (230); determine,
If the focal plane (SE) of the reflected light (L) is not substantially fully projected onto the image sensor surface (231) of the image sensor (230),
- defining a first image area (B1) of the first number of image areas (B1, B2) of the first image (BA), in which the focal plane (SE) of the reflected light (L); the first partial area is projected onto an image sensor surface (231) of the image sensor (230),
- defining a second image area (B2) of the first number of image areas (B1, B2) of the first image (BA), in which the focal plane (SE) of the reflected light (L); the second partial area is not projected onto the image sensor surface (231) of the image sensor (230), and
- adjusting the relative spacing between the first optically effective member (130) and the image sensor (230) and imaging a second partial area of the focal plane (SE) of the reflected light (L); providing control instructions to a control unit (ECU) to control the first and/or second operating drives (120, 240) for projection onto the image sensor surface (231) of the sensor (230);
- recording a second image (BB) by the image sensor (230), said second image being provided to image processing (BV);
- defining a third image area (B3) of the second number of image areas (B3, B4) of the second image (BB), in which the focal plane (SE) of the reflected light (L); the first partial area is not projected onto the image sensor surface (231) of the image sensor (230); and - the second number of image areas (B3, B4) of the second image (BB); 4 image areas (B4) in which a second partial area of the focal plane (SE) of the reflected light (L) is projected onto the image sensor surface (231) of the image sensor (230). there is
Optical component detection system (200) according to any one of claims 1 to 3. Having a second operating drive (240) according to claim 3, wherein the image processing (BV) is as follows:
- the first and/or second operating drive (120) for adjusting the relative spacing between the first optically effective member (130) and the image sensor (230) by a predetermined distance length; , 240) to provide control commands to a control unit (ECU) for controlling
An optical component detection system (200) according to any one of claims 1 to 3, arranged. Having a second operating drive (240) according to claim 3, wherein the image processing (BV) is as follows:
- recording a first image (BA) by an image sensor (230), said first image being provided to image processing (BV);
a first and/or for adjusting the relative spacing between the first optical member (130) and the image sensor (230) at a predetermined speed during recording of the first image (BA); or providing control commands to a control unit (ECU) to control the second operating drive (120, 240);
- after recording the first image (BA) or after a predetermined period of time after the first image (BA) has been recorded and the first optically effective member (130) and the image sensor ( 230) is adjusted while recording a second image (BB) by the image sensor (230), said second image being provided to image processing (BV)
An optical component detection system (200) according to any one of claims 1 to 3, arranged to: In that case the first and second image areas (B1, B2) of the first image (BA) each copy a part of the component (B), said part being the third and third of the second image (BB). corresponding to said portion of the component (B) in the fourth image portion (B3, B4) and/or where in the first image (BA) the first partial area of the focal plane (SE) is and in the second image (BB) a second sub-region of the focal plane (SE), within a predetermined depth of field (ST), on the image sensor surface (231) of the image sensor (230) and then in the first image (BA) the second partial area of the focal plane (SE) and in the second image (BB) the first the partial area is projected onto the image sensor surface (231) of the image sensor (230) outside the predetermined depth of field (ST);
An optical component detection system (200) according to claim 1 or 4. In that case, the image processing (BV) furthermore:
- crop the first image area (B1) from the first image (BA) and the fourth image area (B4) from the second image (BB), and - crop the third image (BC) and/or - the first image area (B1) of the first image (BA) and/or the second determining whether the component (B) has at least one fault location on the basis of the fourth image area (B4) of the image (BB) and/or the third image (BC); and image processing (BV) defines at least one fault point,
- provides fault location information for component (B),
8. An optical component detection system (200) according to any one of claims 1 or 4 or 7, arranged to: having a second operating drive (240) according to claim 3, and further comprising:
a position detection sensor (250) for detecting the position and/or orientation of the first optically effective member (130) and/or the image sensor surface (231) of the image sensor (230); and arranged to provide information regarding the position and/or orientation of the optically effective member (130) and/or the image sensor surface (231) of the image sensor (230) to a control unit (ECU). said controller controlling the first and/or second operating drive (120, 240) based on the information provided;
in which case the position detection sensor is optionally an optical or (electro-)mechanical position detection sensor,
An optical component detection system (200) according to any one of the preceding claims. In that case the camera device (220) has a second optically effective member (160) in the optical path between the first optically effective member (130) and the image sensor (230). wherein the optical axis of the second optically effective member (160) is oriented coaxially with respect to the optical axis of the first optically effective member (130); and/ or where the first optically effective member (130) is an achromatic and/or where the second optically effective member (160) is a condensing lens;
An optical component detection system (200) according to any one of claims 1 to 9. An optical component detection system (200) for detecting at least one surface of at least one component (B), comprising a housing (150), said housing comprising a first arranged for detection by a camera device (220) of the surface (O),
In that case the camera device (220) comprises an image sensor (230) arranged to receive the light (L) reflected at the first surface (O) of the component (B). and
a first optically effective member (130), in which case the optical component detection system (200) is positioned in the optical path of the reflected light (L) to the image sensor (230); It has an operating device (100) for a control unit (ECU), an image processing (BV) and a first optically effective member (130), the operating device (100):
a holder (140) for a first optically effective member (130), wherein the holder (140) is fixed inside the hollow cylindrical lens barrel (110) by a linear guide; and the central longitudinal axis of the lens barrel (110) is oriented coaxially with respect to the optical axis (OA) of the first optically effective member (130), and then the linear guide is positioned in the holder arranged to guide (140) parallel to the optical axis (OA),
relative spacing between the image sensor (230) and the first optically effective member (130) for the manipulator to displace the optically effective member (130) relative to the image sensor (230) a first operating drive (120) for adjusting the, wherein a control unit (ECU) is arranged to control the first operating drive (120);
In that case the image processing (BV) is arranged as follows:
- recording a first image (BA) by an image sensor (230), said first image being provided to image processing (BV);
- for controlling the first operating drive (120) to adjust the relative spacing between the first optically effective member (130) and the image sensor (230) by a predetermined distance length; to provide a control command to the control unit (ECU),
- recording a second image (BB) by the image sensor (230), said second image being provided to image processing (BV);
so arranged,
The image processing (BV) is then performed after recording the first image (BA) or after recording the second image (BB) as follows:
- defining a first image area (B1) of the first number of image areas (B1, B2) of the first image (BA), in which the focal plane (ES) of the reflected light (L); the first partial area is projected onto the image sensor surface (231) of the image sensor (230), and - the second of the first number of image areas (B1, B2) of the first image (BA) defines an image area (B2) of , in which a second partial area of the focal plane (SE) of the reflected light (L) is projected onto the image sensor surface (231) of the image sensor (230). and - defining a third image area (B3) of the second number of image areas (B3, B4) of the second image (BB), in which the focal plane of the reflected light (L) ( SE) is not projected onto the image sensor surface (231) of the image sensor (230), and - the second multiple image areas (B3, B4) of the second image (BB) ) in which a second partial area of the focal plane (SE) of the reflected light (L) is projected onto the image sensor surface (231) of the image sensor (230). being projected
An optical component detection system arranged to A method for detecting at least one surface of at least one component (B), comprising the steps of:
- orienting the component (B) with respect to the camera device (220);
- detecting the first surface (O) of the component (B) with a camera device (220);
- receiving the light (L) reflected at the first surface (O) of the component (B) by the image sensor (230) of the camera device (220);
- holding the first optically effective member (130) in the path of the reflected light (L) by means of a longitudinally elastically flexible holder (140), wherein said longitudinal direction is optical oriented parallel to the optical axis (OA) of the effective member (130);
- record the first image (BA),
- adjusting the relative spacing between the image sensor (230) and the first optically effective member (130), wherein the first optically effective member (130) is imaged along the optical axis; displaced relative to the sensor (230);
- record a second image (BB),
Defining a first image area (B1) of the first number of image areas (B1, B2) of the first image (BA), in which the first focal plane (SE) of the reflected light (L) one sub-area is projected onto the image sensor surface (231) of the image sensor (230), and - a second image area of the multiple image areas (B1, B2) of the first image (BA) define (B2), in which a second partial area of the focal plane (SE) of the reflected light (L) is not projected onto the image sensor surface (231) of the image sensor (230); - defining a third image area (B3) of the second number of image areas (B3, B4) of the second image (BB), in which the focal plane (SE) of the reflected light (L); the first partial area is not projected onto the image sensor surface (231) of the image sensor (230); and - the second number of image areas (B3, B4) of the second image (BB); 4 image areas (B4) in which a second partial area of the focal plane (SE) of the reflected light (L) is projected onto the image sensor surface (231) of the image sensor (230). there is
Method. It has the following steps:
- the image sensor (230) to project the focal plane (SE) of the reflected light (L) onto the image sensor surface (231) of the image sensor (230) facing the reflected light (L); adjusting the relative spacing between and the optically effective member (130);
13. The method of claim 12. It has the following steps:
- based on the first image (BA), the focal plane (SE) of the reflected light (L) is projected substantially completely onto the image sensor surface (231) of the image sensor (230); to define
14. A method according to any one of claims 12 or 13. It has the following steps:
- adjusting the relative spacing between the image sensor (230) and the first optically effective member (130) at a predetermined speed while recording the first image (BA);
- after the recording of the first image (BA) or after a predetermined period of time after the first image (BA) has been recorded and the image sensor (230) and the first optically effective member ( 130) recording a second image (BB) during adjustment of the relative spacing between
14. A method according to any one of claims 12 or 13. In that case the first and second image areas (B1, B2) of the first image (BA) each copy a part of the component (B), said part being the third and third of the second image (BB). corresponding to said portion of the component (B) in the fourth image area (B3, B4) and/or where in the first image (BA) the first partial area of the focal plane (SE) is and in the second image (BB) a second partial area of the focal plane (SE) is projected onto the image sensor surface (231) of the image sensor (230) within the predetermined depth of field (ST). has been
In that case a second partial area of the focal plane (SE) in the first image (BA) and a first partial area of the focal plane (SE) in the second image (BB) are predetermined. projected onto the image sensor surface (231) of the image sensor (230) outside the defined depth of field (ST),
15. A method according to any one of claims 12 or 14. It has the following steps:
- cut out a first image area (B1) from the first image (BA) and a fourth image area (B4) from the second image (BB), and - form a third image (BC) and/or - the first image area (B1) of the first image (BA) and/or the second image Based on the fourth image area (B4) and/or the third image (BC) of (BB), determine whether the component (B) has at least one faulty location, and the component (B) has at least In the case of having one failure point,
- provides fault location information for component (B),
17. A method according to any one of claims 12 or 14 or 16. In that case the holder (140) has a component comprising soft iron, and the holder (140) is deformed in a first direction relative to the image sensor (230) along the optical axis (OA) by the generated magnetic field. 18. The method of any one of claims 12-17, wherein In that case the holder (140) has a permanent magnet component and the magnetic field generated by the holder (140) causes a first magnetic field to the image sensor (230) according to the direction of current flow in the coil (121). or deformed in a second direction, where the second direction is opposite to the first direction,
18. A method according to any one of claims 12-17.

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