JP7111813B2 - インクジェットノズルチャンバを形成するためのプロセス - Google Patents
インクジェットノズルチャンバを形成するためのプロセス Download PDFInfo
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- JP7111813B2 JP7111813B2 JP2020528209A JP2020528209A JP7111813B2 JP 7111813 B2 JP7111813 B2 JP 7111813B2 JP 2020528209 A JP2020528209 A JP 2020528209A JP 2020528209 A JP2020528209 A JP 2020528209A JP 7111813 B2 JP7111813 B2 JP 7111813B2
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- 238000000034 method Methods 0.000 title claims description 68
- 230000008569 process Effects 0.000 title claims description 68
- 238000000151 deposition Methods 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 37
- 229920002120 photoresistant polymer Polymers 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 18
- 230000008021 deposition Effects 0.000 description 13
- 238000003475 lamination Methods 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 238000000708 deep reactive-ion etching Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
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- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
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- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B41J2/14—Structure thereof only for on-demand ink jet heads
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
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- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
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- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/7684—Smoothing; Planarisation
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- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
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Description
(i)前面上にドライフィルムフォトレジストのレイヤを積層するステップと、
(ii)ドライフィルムフォトレジスト内にチャンバ壁に対応する壁開口を画定するステップと、
(iii)チャンバ壁及びチャンバ天井部を形成するように、壁開口内及びドライフィルムフォトレジスト上にチャンバ材を堆積させるステップと、
(iv)チャンバ天井部にノズル開口を画定するステップと、
(v)ドライフィルムフォトレジストを除去して、孔の上にインクジェットチャンバを形成するステップと
を含む。
(a)第1の堆積方法を使用して、第1のチャンバ材を堆積させて、壁開口を充填し、チャンバ壁を形成するサブステップと、
(b)第1のチャンバ材の上面を平坦化するサブステップと、
(c)第2の堆積方法を使用して、第1のチャンバ材の平坦化された上面の上に第2のチャンバ材を堆積させるサブステップと
を含む。
図1~6は、第1の態様によるインクジェットチャンバ70を形成するための例示的なMEMSプロセスフローを概略的に示す。プロセスはウエハ基板の1つの単位セルに関して示されているが、プロセスは、単一のウエハ基板上に、複数(通常は、数千)の同一の単位セルを形成するために使用されてもよいことが理解されるであろう。ウエハは通常、当該技術分野において知られているように、個々のプリントヘッドチップを提供するために、MEMSプロセスの完了後、切り分けられる。
完全にするため、上記のMEMSプロセスを使用して製造されてもよいインクジェットノズルデバイス10が、ここで記載される。
Claims (18)
- ウエハ基板の前面に画定された孔の上にインクジェットチャンバを形成するためのプロセスにおいて、前記プロセスが、
(i)ドライフィルムフォトレジストの層が孔の上にかかるように、孔を画定する前記前面上にドライフィルムフォトレジストのレイヤを積層するステップと、
(ii)フォトイメージングプロセスを使用して、前記ドライフィルムフォトレジスト内にチャンバ壁に対応する壁開口を画定するステップと、
(iii)チャンバ壁及びチャンバ天井部を形成するように、前記壁開口内及び前記ドライフィルムフォトレジスト上にチャンバ材を堆積させるステップと、
(iv)前記チャンバ天井部にノズル開口を画定するステップと、
(v)前記ドライフィルムフォトレジストを除去して、前記孔の上に前記インクジェットチャンバを形成するステップと
を含み、
ここで、前記チャンバ材が、酸化ケイ素、窒化ケイ素、及びオキシ窒化ケイ素からなる群から選択される
ことを特徴とするプロセス。 - 請求項1に記載のプロセスにおいて、前記前面が、結合されたヒータデバイスを備えることを特徴とするプロセス。
- 請求項1に記載のプロセスにおいて、追加のMEMS製造ステップをさらに含むことを特徴とするプロセス。
- 請求項3に記載のプロセスにおいて、前記インクジェットチャンバのためのそれぞれの入口が、前記孔によって画定されることを特徴とするプロセス。
- 請求項4に記載のプロセスにおいて、インク供給チャネルの裏側ウエハ薄型化及び裏側エッチングのうちの少なくとも1つをさらに含むことを特徴とするプロセス。
- 請求項5に記載のプロセスにおいて、前記プロセスが、複数のインクジェットチャンバを形成し、各インク供給チャネルが、前記孔の1つ又は複数に接することを特徴とするプロセス。
- 請求項6に記載のプロセスにおいて、各インク供給チャネルが、各孔より比較的広いことを特徴とするプロセス。
- 請求項1に記載のプロセスにおいて、前記ノズル開口が、前記孔と一直線に並ぶ、又は、前記孔からオフセットされることを特徴とするプロセス。
- 請求項1に記載のプロセスにおいて、前記インクジェットチャンバが、前記ノズル開口を有する吐出チャンバと、前記孔を有する副チャンバとを備え、前記吐出チャンバが、前記副チャンバに横方向に接続されていることを特徴とするプロセス。
- 請求項9に記載のプロセスにおいて、前記チャンバ壁が、前記インクジェットチャンバの周囲壁を画定することを特徴とするプロセス。
- 請求項1に記載のプロセスにおいて、前記ドライフィルムフォトレジストのレイヤが、5~20ミクロンの厚さを有することを特徴とするプロセス。
- 請求項1に記載のプロセスにおいて、前記ドライフィルムフォトレジストが、エポキシ樹脂を備えることを特徴とするプロセス。
- 請求項1に記載のプロセスにおいて、前記堆積ステップ(iii)が、TEOS CVD、高密度プラズマCVD(HDPCVD)、及び、プラズマ強化CVD(PECVD)からなる群から選択される少なくとも1つの堆積方法を使用して実行されることを特徴とするプロセス。
- 請求項13に記載のプロセスにおいて、
前記堆積ステップ(iii)が、
(a)第1の堆積方法を使用して、第1のチャンバ材を堆積させて、前記壁開口を充填し、それによって、前記チャンバ壁を形成し、前記チャンバ天井部を少なくとも部分的に形成するサブステップと、
(b)前記第1のチャンバ材の上面を平坦化するサブステップと
を含むことを特徴とするプロセス。 - 請求項14に記載のプロセスにおいて、
(c)第2の堆積方法を使用して、前記チャンバ天井部の形成を完了するように、前記第1のチャンバ材の前記平坦化された上面の上に第2のチャンバ材を堆積させるさらなるサブステップ
を含むことを特徴とするプロセス。 - 請求項15に記載のプロセスにおいて、前記第1のチャンバ材及び前記第2のチャンバ材が、同じものである、又は、互いに異なることを特徴とするプロセス。
- 請求項15に記載のプロセスにおいて、前記第1の堆積方法及び前記第2の堆積方法が、同じものである、又は、互いに異なることを特徴とするプロセス。
- 請求項14に記載のプロセスにおいて、前記平坦化が、化学機械平坦化(CMP)を使用して実行されることを特徴とするプロセス。
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US201762591093P | 2017-11-27 | 2017-11-27 | |
US62/591,093 | 2017-11-27 | ||
PCT/EP2018/081277 WO2019101605A1 (en) | 2017-11-27 | 2018-11-14 | Process for forming inkjet nozzle chambers |
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JP7111813B2 true JP7111813B2 (ja) | 2022-08-02 |
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US (2) | US20190160818A1 (ja) |
EP (1) | EP3676098B1 (ja) |
JP (1) | JP7111813B2 (ja) |
CN (1) | CN111655494B (ja) |
AU (1) | AU2018371072A1 (ja) |
SG (1) | SG11202003861RA (ja) |
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WO (1) | WO2019101605A1 (ja) |
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WO2019101605A1 (en) | 2019-05-31 |
CN111655494B (zh) | 2022-06-14 |
EP3676098A1 (en) | 2020-07-08 |
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CN111655494A (zh) | 2020-09-11 |
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