SG11202003861RA - Process for forming inkjet nozzle chambers - Google Patents
Process for forming inkjet nozzle chambersInfo
- Publication number
- SG11202003861RA SG11202003861RA SG11202003861RA SG11202003861RA SG11202003861RA SG 11202003861R A SG11202003861R A SG 11202003861RA SG 11202003861R A SG11202003861R A SG 11202003861RA SG 11202003861R A SG11202003861R A SG 11202003861RA SG 11202003861R A SG11202003861R A SG 11202003861RA
- Authority
- SG
- Singapore
- Prior art keywords
- inkjet nozzle
- nozzle chambers
- forming inkjet
- forming
- chambers
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/7684—Smoothing; Planarisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/18—Electrical connection established using vias
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762591093P | 2017-11-27 | 2017-11-27 | |
PCT/EP2018/081277 WO2019101605A1 (en) | 2017-11-27 | 2018-11-14 | Process for forming inkjet nozzle chambers |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202003861RA true SG11202003861RA (en) | 2020-05-28 |
Family
ID=64426875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202003861RA SG11202003861RA (en) | 2017-11-27 | 2018-11-14 | Process for forming inkjet nozzle chambers |
Country Status (8)
Country | Link |
---|---|
US (2) | US20190160818A1 (en) |
EP (1) | EP3676098B1 (en) |
JP (1) | JP7111813B2 (en) |
CN (1) | CN111655494B (en) |
AU (1) | AU2018371072A1 (en) |
SG (1) | SG11202003861RA (en) |
TW (1) | TW201924950A (en) |
WO (1) | WO2019101605A1 (en) |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4558333A (en) | 1981-07-09 | 1985-12-10 | Canon Kabushiki Kaisha | Liquid jet recording head |
ATE139186T1 (en) * | 1989-03-24 | 1996-06-15 | Canon Kk | METHOD FOR MANUFACTURING INK JET RECORDING HEADS |
JP3143307B2 (en) * | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | Method of manufacturing ink jet recording head |
JPH08142339A (en) * | 1994-11-16 | 1996-06-04 | Canon Inc | Production of liquid jet recording head in ink jet recording apparatus |
JP3368094B2 (en) * | 1995-04-21 | 2003-01-20 | キヤノン株式会社 | Method of manufacturing ink jet recording head |
JP3343875B2 (en) * | 1995-06-30 | 2002-11-11 | キヤノン株式会社 | Method of manufacturing inkjet head |
US5872058A (en) | 1997-06-17 | 1999-02-16 | Novellus Systems, Inc. | High aspect ratio gapfill process by using HDP |
JP4570178B2 (en) * | 1998-11-26 | 2010-10-27 | 富士フイルム株式会社 | Ink jet head, manufacturing method thereof, and printing apparatus |
US6474795B1 (en) * | 1999-12-21 | 2002-11-05 | Eastman Kodak Company | Continuous ink jet printer with micro-valve deflection mechanism and method of controlling same |
EP1297959A1 (en) * | 2001-09-28 | 2003-04-02 | Hewlett-Packard Company | Inkjet printheads |
KR100396559B1 (en) * | 2001-11-05 | 2003-09-02 | 삼성전자주식회사 | Method for manufacturing monolithic inkjet printhead |
US6755509B2 (en) | 2002-11-23 | 2004-06-29 | Silverbrook Research Pty Ltd | Thermal ink jet printhead with suspended beam heater |
JP2005125577A (en) * | 2003-10-23 | 2005-05-19 | Canon Inc | Liquid jetting recording head and its manufacturing method |
JP2005186528A (en) * | 2003-12-26 | 2005-07-14 | Canon Inc | Liquid ejection head and manufacturing method therefor |
US7441865B2 (en) | 2004-01-21 | 2008-10-28 | Silverbrook Research Pty Ltd | Printhead chip having longitudinal ink supply channels |
JP4646610B2 (en) * | 2004-12-01 | 2011-03-09 | キヤノン株式会社 | Inkjet recording head |
KR100708142B1 (en) * | 2005-06-20 | 2007-04-16 | 삼성전자주식회사 | Inkjet printhead and method of manufacturing the same |
US7857428B2 (en) * | 2005-10-11 | 2010-12-28 | Silverbrook Research Pty Ltd | Printhead with side entry ink chamber |
US7699441B2 (en) * | 2006-12-12 | 2010-04-20 | Eastman Kodak Company | Liquid drop ejector having improved liquid chamber |
US7819503B2 (en) | 2007-06-15 | 2010-10-26 | Silverbrook Research Pty Ltd | Printhead integrated circuit comprising inkjet nozzle assemblies having connector posts |
CN101821104A (en) * | 2007-10-24 | 2010-09-01 | 西尔弗布鲁克研究股份有限公司 | Manufacturing has the method for the ink jet-print head of planar nozzle plate |
EP2543514B1 (en) | 2008-01-16 | 2015-05-06 | Memjet Technology Limited | Printer with zero insertion force printhead cartridge |
US7923379B2 (en) | 2008-11-12 | 2011-04-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-step process for forming high-aspect-ratio holes for MEMS devices |
US8967772B2 (en) | 2009-10-22 | 2015-03-03 | Memjet Technology Ltd. | Inkjet printhead having low-loss contact for thermal actuators |
US8469488B2 (en) | 2010-05-17 | 2013-06-25 | Zamtec Ltd | Printer having waste fluid container |
TWI531482B (en) | 2010-05-17 | 2016-05-01 | 滿捷特科技公司 | Printing system having valved ink and gas distribution for printhead |
JP6132652B2 (en) * | 2013-05-02 | 2017-05-24 | キヤノン株式会社 | Method for manufacturing liquid discharge head |
JP6128991B2 (en) * | 2013-06-28 | 2017-05-17 | キヤノン株式会社 | Method for manufacturing liquid discharge head |
JP2015202587A (en) * | 2014-04-11 | 2015-11-16 | キヤノン株式会社 | Liquid discharge head and manufacturing method of the same |
JP2016095373A (en) * | 2014-11-13 | 2016-05-26 | キヤノン株式会社 | Method for manufacturing optically molded object, method for manufacturing liquid discharge head, and photosensitive resin composition |
TWI687987B (en) | 2015-02-17 | 2020-03-11 | 愛爾蘭商滿捷特科技公司 | Process for filling etched holes |
-
2018
- 2018-10-16 TW TW107136301A patent/TW201924950A/en unknown
- 2018-11-14 AU AU2018371072A patent/AU2018371072A1/en not_active Abandoned
- 2018-11-14 CN CN201880072892.2A patent/CN111655494B/en active Active
- 2018-11-14 EP EP18807237.5A patent/EP3676098B1/en active Active
- 2018-11-14 SG SG11202003861RA patent/SG11202003861RA/en unknown
- 2018-11-14 WO PCT/EP2018/081277 patent/WO2019101605A1/en unknown
- 2018-11-14 JP JP2020528209A patent/JP7111813B2/en active Active
- 2018-11-26 US US16/200,415 patent/US20190160818A1/en not_active Abandoned
-
2020
- 2020-06-26 US US16/914,139 patent/US20210031512A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN111655494B (en) | 2022-06-14 |
TW201924950A (en) | 2019-07-01 |
EP3676098B1 (en) | 2021-01-06 |
JP2021504184A (en) | 2021-02-15 |
CN111655494A (en) | 2020-09-11 |
US20190160818A1 (en) | 2019-05-30 |
EP3676098A1 (en) | 2020-07-08 |
JP7111813B2 (en) | 2022-08-02 |
WO2019101605A1 (en) | 2019-05-31 |
AU2018371072A1 (en) | 2020-05-14 |
US20210031512A1 (en) | 2021-02-04 |
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