JP7104260B1 - 半導体パッケージおよび高周波モジュール - Google Patents
半導体パッケージおよび高周波モジュール Download PDFInfo
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- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
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- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
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- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6661—High-frequency adaptations for passive devices
- H01L2223/6677—High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/141—Disposition
- H01L2224/1412—Layout
- H01L2224/1415—Mirror array, i.e. array having only a reflection symmetry, i.e. bilateral symmetry
- H01L2224/14152—Mirror array, i.e. array having only a reflection symmetry, i.e. bilateral symmetry being non uniform, i.e. having a non uniform pitch across the array
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/141—Disposition
- H01L2224/1412—Layout
- H01L2224/14177—Combinations of arrays with different layouts
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- H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
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Abstract
Description
図1は、本実施形態の半導体パッケージ1を、その厚さ方向から見た図である。図2は、半導体パッケージ1の一部分についての、厚さ方向に沿った断面の概略図である。
図1および図2に示すように、半導体パッケージ1は、RFICチップ10と、モールド樹脂20と、第1絶縁層30と、第2絶縁層40と、複数の再配線50と、複数のバンプBと、を備えている。
半導体パッケージ1を厚さ方向から見ることを平面視という。半導体パッケージ1の厚さ方向は、半導体パッケージ1と基板2とが対向する方向でもある。半導体パッケージ1を平面視した図を平面図という。図2、図3に示すように、厚さ方向をZ軸によって表す。厚さ方向において、半導体パッケージ1側を下側あるいは-Z側と表し、基板2側を上側あるいは+Z側と表す。なお、+Z側が重力方向における上側でなくてもよい。図1は、半導体パッケージ1を+Z側から見た平面図である。
に電気的に接続されている。図示は省略するが、他の端子12(GND端子12g、デジタル信号端子12d、電源端子)もそれぞれ、再配線50を介して、はんだバンプBに電気的に接続されている。
本明細書では、高周波端子12sに接続されるバンプBを「高周波バンプBs」といい、GND端子12gに接続されるバンプBを「GNDバンプBg」といい、デジタル信号端子12dに接続されるバンプBを「デジタルバンプBd」という。
高周波パッド2sは、ビアホール2bを介して、アンテナ2c(例えばパッチアンテナなど)に接続される。高周波モジュール3はアンテナモジュールと呼ぶこともできる。
GNDパッド2gは、ビアホール2bを介して、基板2のGND層2dに接続されている。
Claims (7)
- RFICチップと、
平面視において前記RFICチップを囲うモールド樹脂と、
複数のはんだバンプと、
前記RFICチップを前記複数のはんだバンプに接続する複数の再配線と、を備え、
前記複数のはんだバンプには、平面視において、前記RFICチップと重なる位置に配置された第1バンプ群と、前記モールド樹脂と重なる位置に配置された第2バンプ群と、が含まれ、
前記第2バンプ群には、少なくとも、前記RFICチップの高周波端子に接続される高周波バンプと、前記RFICチップのGND端子に接続されるGNDバンプとが含まれ、
前記第2バンプ群における最小ピッチは前記第1バンプ群における最小ピッチよりも大きい、半導体パッケージ。 - 前記RFICチップが有する全ての高周波端子は、前記第2バンプ群に接続されている、請求項1に記載の半導体パッケージ。
- 前記RFICチップが有する全てのデジタル信号端子は、前記第1バンプ群に接続されている、請求項1または2に記載の半導体パッケージ。
- 前記複数の再配線および前記複数のはんだバンプは、前記RFICチップが有する高周波回路ブロックに対して、平面視において重ならないように配置されている、請求項1から3のいずれか1項に記載の半導体パッケージ。
- 前記RFICチップは少なくとも2つの高周波回路ブロックを有し、
前記第1バンプ群の少なくとも一部が、平面視において、前記2つの高周波回路ブロックの間に位置している、請求項1から4のいずれか1項に記載の半導体パッケージ。 - 前記複数のはんだバンプは、平面視において、互いに直交する第1中心線および第2中心線の双方に対して対称に配置されている、請求項1から5のいずれか1項に記載の半導体パッケージ。
- 請求項1~6のいずれか1項に記載の半導体パッケージと、
前記半導体パッケージが実装された基板と、を備え、
前記基板は、前記高周波バンプに接合される高周波パッドと、前記GNDバンプに接合されるGNDパッドと、を有し、
前記高周波パッドおよび前記GNDパッドはそれぞれ、前記基板に形成されたビアホール上に配置されている、高周波モジュール。
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JP2022041146A JP7104260B1 (ja) | 2022-03-16 | 2022-03-16 | 半導体パッケージおよび高周波モジュール |
PCT/JP2022/030260 WO2023176006A1 (ja) | 2022-03-16 | 2022-08-08 | 半導体パッケージおよび高周波モジュール |
EP22846880.7A EP4273919A1 (en) | 2022-03-16 | 2022-08-08 | Semiconductor package and high frequency module |
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WO2018110513A1 (ja) * | 2016-12-15 | 2018-06-21 | 株式会社村田製作所 | 能動素子、高周波モジュールおよび通信装置 |
JP2021141370A (ja) * | 2020-03-02 | 2021-09-16 | 株式会社デンソー | 半導体パッケージ |
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JP2021141370A (ja) * | 2020-03-02 | 2021-09-16 | 株式会社デンソー | 半導体パッケージ |
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JP7248849B1 (ja) | 2022-08-03 | 2023-03-29 | 株式会社フジクラ | 半導体パッケージおよび高周波モジュール |
WO2024029132A1 (ja) * | 2022-08-03 | 2024-02-08 | 株式会社フジクラ | 半導体パッケージおよび高周波モジュール |
JP2024021278A (ja) * | 2022-08-03 | 2024-02-16 | 株式会社フジクラ | 半導体パッケージおよび高周波モジュール |
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JP2023135848A (ja) | 2023-09-29 |
EP4273919A1 (en) | 2023-11-08 |
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