JP7096782B2 - 基板に所定の物理的特性を与えるために基板上にナノ構造を形成するためのシステムおよび方法 - Google Patents

基板に所定の物理的特性を与えるために基板上にナノ構造を形成するためのシステムおよび方法 Download PDF

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JP7096782B2
JP7096782B2 JP2019043532A JP2019043532A JP7096782B2 JP 7096782 B2 JP7096782 B2 JP 7096782B2 JP 2019043532 A JP2019043532 A JP 2019043532A JP 2019043532 A JP2019043532 A JP 2019043532A JP 7096782 B2 JP7096782 B2 JP 7096782B2
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laser source
surface treatment
laser beam
pulsed
platen
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JP2019171854A (ja
JP2019171854A5 (enExample
Inventor
ティモシー・ジェイ・クラーク
イーイー・グアン
ロバート・ピー・ヘルロスキ
ジョン・シー・ジュハス
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Xerox Corp
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Xerox Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B29C64/273—Arrangements for irradiation using laser beams; using electron beams [EB] pulsed; frequency modulated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30—Auxiliary operations or equipment
    • B29C64/386—Data acquisition or data processing for additive manufacturing
    • B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00—Data acquisition or data processing for additive manufacturing
    • B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
JP2019043532A 2018-03-29 2019-03-11 基板に所定の物理的特性を与えるために基板上にナノ構造を形成するためのシステムおよび方法 Active JP7096782B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/940,073 2018-03-29
US15/940,073 US11097482B2 (en) 2018-03-29 2018-03-29 System and method for forming nano-structures on substrates to provide predetermined physical characteristics to the substrates

Publications (3)

Publication Number Publication Date
JP2019171854A JP2019171854A (ja) 2019-10-10
JP2019171854A5 JP2019171854A5 (enExample) 2022-03-22
JP7096782B2 true JP7096782B2 (ja) 2022-07-06

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JP2019043532A Active JP7096782B2 (ja) 2018-03-29 2019-03-11 基板に所定の物理的特性を与えるために基板上にナノ構造を形成するためのシステムおよび方法

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US (1) US11097482B2 (enExample)
JP (1) JP7096782B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7521174B2 (ja) * 2019-03-04 2024-07-24 株式会社プロテリアル 積層造形体および積層造形体の製造方法
US20210162493A1 (en) * 2019-12-02 2021-06-03 Xerox Corporation Method of three-dimensional printing and a conductive liquid three-dimensional printing system
CN114290665B (zh) * 2021-11-19 2024-05-24 浙江正向增材制造有限公司 光固化3d打印方法
CN115780826B (zh) * 2023-01-19 2023-05-05 杭州爱新凯科技有限公司 一种激光熔融3d打印方法及打印头

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015174284A (ja) 2014-03-14 2015-10-05 富士機械製造株式会社 立体造形物の製造方法及び製造装置
KR101676738B1 (ko) 2015-09-16 2016-11-16 주식회사 카본티씨지 3d 프린터 빔 조절장치
US20170165914A1 (en) 2015-12-14 2017-06-15 International Business Machines Corporation Pulsed uv light nozzle for selective curing of 3d printed material

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1190669A (ja) * 1997-09-16 1999-04-06 Amada Eng Center Co Ltd レーザ加工装置
DE102005013949A1 (de) * 2005-03-26 2006-09-28 Carl Zeiss Meditec Ag Scanvorrichtung
US20080299408A1 (en) 2006-09-29 2008-12-04 University Of Rochester Femtosecond Laser Pulse Surface Structuring Methods and Materials Resulting Therefrom
DE112013002917B4 (de) 2013-06-28 2021-07-22 Intel Corporation Erzeugung von Lichtmustern mit einem MEMS-Scanspiegel
CN108136502B (zh) * 2016-01-29 2020-11-17 惠普发展公司有限责任合伙企业 三维（3d）打印方法和系统
US10041642B2 (en) * 2016-02-05 2018-08-07 Timothy Lee Anderson Laser based visual effect device and system
EP3287262A1 (de) * 2016-08-26 2018-02-28 Multiphoton Optics Gmbh Vorrichtung und verfahren zur lasergestützten bearbeitung von körpern oder oberflächen
US20180186081A1 (en) * 2017-01-05 2018-07-05 Velo3D, Inc. Optics in three-dimensional printing
EP3354632A1 (en) * 2017-01-25 2018-08-01 Siemens Aktiengesellschaft Method to additively manufacture a fiber-reinforced ceramic matrix composite

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015174284A (ja) 2014-03-14 2015-10-05 富士機械製造株式会社 立体造形物の製造方法及び製造装置
KR101676738B1 (ko) 2015-09-16 2016-11-16 주식회사 카본티씨지 3d 프린터 빔 조절장치
US20170165914A1 (en) 2015-12-14 2017-06-15 International Business Machines Corporation Pulsed uv light nozzle for selective curing of 3d printed material

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US20190299528A1 (en) 2019-10-03
US11097482B2 (en) 2021-08-24
JP2019171854A (ja) 2019-10-10

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