JP7096628B1 - 隔膜圧力計及び複合圧力計 - Google Patents
隔膜圧力計及び複合圧力計 Download PDFInfo
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- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
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- G01L21/00—Vacuum gauges
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Abstract
【解決手段】 隔膜圧力計10は、被測定圧力(Pm)下に配置される構造体40と、対向配置されて前記構造体に取付けられる2つの隔膜20と、前記2つの隔膜に固定され、前記2つの隔膜の変位を検出する検出素子30と、を有する。前記2つの隔膜の各々は、両面の一方が対向面とされ、前記両面の他方を非対向面としたとき、前記構造体及び前記2つの隔膜は、前記対向面及び前記非対向面の一方が臨む空間を基準真空(Pr)に維持する気密空間40Aとし、前記対向面及び前記非対向面の他方に前記被測定圧力を作用させる。
【選択図】 図1
Description
本発明の他の目的は、環境温度に依存せずに大気圧から高真空までの広い範囲の圧力を、上記隔膜圧力計を含む2種類の圧力計を組み合わせて測定できる複合圧力計を提供することを目的とする。
被測定圧力下に配置される構造体と、
対向配置されて前記構造体に取付けられる2つの隔膜と、
前記2つの隔膜に固定され、前記2つの隔膜の変位を検出する検出素子と、
を有し、
前記2つの隔膜の各々は、両面の一方が対向面とされ、前記両面の他方を非対向面としたとき、前記構造体及び前記2つの隔膜は、前記対向面及び前記非対向面の一方が臨む空間を基準真空に維持する気密空間とし、前記対向面及び前記非対向面の他方に前記被測定圧力を作用させる隔膜圧力計に関する。
本発明の一態様(7)の隔膜圧力計と、
被測定圧力下に配置される電離真空計と、
を有し、
前記隔膜圧力計の測定領域と前記電離真空計の測定領域とがオーバーラップする複合圧力計に関する。
1.第1実施形態
図1は、本発明の第1実施形態に係る隔膜圧力計10を示している。この隔膜圧力計10は、2つの隔膜20と、検出素子30と、構造体40とを含む。構造体40は被測定圧力(Pm)下に配置される。2つの隔膜20は、対向配置されて構造体40に取付けられる。検出素子30は、2つの隔膜20に固定される。フランジ90は、構造体40を被測定圧力(Pm)下に配置して固定するための固定部材である。フランジ90は、例えば真空チャンバー等に取り付けられることで、構造体40を被測定圧力(Pm)下に配置する。構造体40は、熱絶縁体92を介してフランジ90に取付けることができる。こうすると、フランジ90が環境温度の影響を受けても、その環境温度の固体伝熱を熱絶縁体92により遮断することができる。フランジ90の大気圧側には、検出素子30を駆動する駆動回路や信号出力回路等が設けられる回路ブロック94が固定される。2つの隔膜20の変位を検出する検出素子30は、例えば振動子等の圧電素子である。駆動回路である発振回路により振動子30を振動させ、その共振抵抗Zを求める。この測定された共振抵抗Zと、固有共振抵抗Z0(高真空における値)との差ΔZ(=Z-Z0)から、気体の圧力を測定することができる。
本発明の第2実施形態に係る複合圧力計200は、本発明の第1実施形態に係る隔膜圧力計10と、電離真空計100とを含む。隔膜圧力計10と電離真空計100とは、連結部材110により連結されて、共に被測定圧力(Pm)下に配置される。連結部材110は、真空チャンバーに固定される。
Claims (10)
- 被測定圧力下に配置される構造体と、
対向配置されて前記構造体に取付けられる2つの隔膜と、
前記2つの隔膜に固定され、前記2つの隔膜の変位を検出する検出素子と、
を有し、
前記2つの隔膜の各々は、両面の一方が対向面とされ、前記両面の他方を非対向面としたとき、前記構造体及び前記2つの隔膜は、前記対向面及び前記非対向面の一方が臨む空間を基準真空に維持する気密空間とし、前記対向面及び前記非対向面の他方に前記被測定圧力を作用させる隔膜圧力計。 - 請求項1において、
前記構造体は、
対向配置される前記2つの隔膜を支持する内側構造体と、
前記内側構造体が内部に支持され、前記2つの隔膜の前記非対向面を前記被測定圧力の雰囲気中に露出させる開口を含む外側構造体と、
を含み、
前記2つの隔膜、前記前記内側構造体及び前記外側構造体で気密に囲まれる前記気密空間が前記基準真空に設定されて、前記対向面に前記基準真空が作用し、前記非対向面に前記被測定圧力が作用する隔膜圧力計。 - 請求項1において、
前記構造体は、
内部の前記気密空間が前記基準真空に設定される外側構造体と、
前記外側構造体に支持されて、前記外側構造体内に配置されて、前記基準真空により断熱される内側構造体と、
を有し、
前記内側構造体は、
前記外側構造体より外方に突出した突出端に、前記被測定圧力の気体の導入口を有する導入管と、
前記導入管を介して前記被測定圧力に設定される内側室と、
を含み、
前記2つの隔膜は、前記内側室の一部の隔壁として設けられて、前記対向面に前記被測定圧力が作用し、前記非対向面に前記基準真空が作用する隔膜圧力計。 - 請求項3において、
前記内側室は、
前記導入管を介して前記被測定圧力に設定される第1室と、
前記外側構造体の前記内部と連通し、前記第1室とは気密に隔離される第2室と、
前記第1室と前記第2室に区画し、かつ、前記2つの隔膜と連結される、前記2つの隔膜の変位を許容するように変形可能なベローズと、
を含み、
前記2つの隔膜は、前記対向面が、前記第1室の内部に臨んで配置され、
前記検出素子は前記第2室に配置される隔膜圧力計。 - 請求項1乃至4のいずれか一項において、
前記構造体は、前記構造体を前記被測定圧力下に配置して固定する固定部材に、熱絶縁体を介して取付けられる隔膜圧力計。 - 請求項1乃至5のいずれか一項において、
前記構造体を包囲する、少なくとも一部に被測定気体を通過させる防着シールド及び/又は熱シールドをさらに有する隔膜圧力計。 - 請求項1乃至6のいずれか一項において、
前記検出素子が水晶振動子である隔膜圧力計。 - 請求項7に記載の隔膜圧力計と、
被測定圧力下に配置される電離真空計と、
を有し、
前記隔膜圧力計の測定領域と前記電離真空計の測定領域とがオーバーラップする複合圧力計。 - 請求項8において、
前記隔膜圧力計の測定領域と前記電離真空計の測定領域とは、0.01~10.0Paの範囲でオーバーラップする複合圧力計。 - 請求項8または9において、
前記電離真空計のイオン電流値は窒素換算値に換算され、前記隔膜圧力計の測定値は、前記電離真空計の前記窒素換算値の上限値と整合するようにレベルシフトされる複合圧力計。
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JP2022045867A JP7096628B1 (ja) | 2022-03-22 | 2022-03-22 | 隔膜圧力計及び複合圧力計 |
TW111135124A TWI823570B (zh) | 2022-03-22 | 2022-09-16 | 隔膜壓力計及複合壓力計 |
KR1020220131166A KR20230137806A (ko) | 2022-03-22 | 2022-10-13 | 격막 압력계 및 복합 압력계 |
CN202211300136.5A CN116793562A (zh) | 2022-03-22 | 2022-10-24 | 隔膜压力计及复合压力计 |
EP22213007.2A EP4261514A3 (en) | 2022-03-22 | 2022-12-13 | Diaphragm pressure gauge and compound pressure gauge |
US18/066,358 US20230304883A1 (en) | 2022-03-22 | 2022-12-15 | Diaphragm pressure gauge and compound pressure gauge |
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TWI795918B (zh) * | 2015-01-15 | 2023-03-11 | 美商Mks儀器公司 | 製造測量裝置之方法 |
EP3845881B1 (en) * | 2018-10-17 | 2023-12-06 | Q'Z Corporation | Pressure meter |
US11591929B2 (en) * | 2019-08-16 | 2023-02-28 | Rosemount Aerospace, Inc. | Sensor assemblies, gas turbines with sensor assemblies, and methods of cooling sensor assemblies |
JP6721806B1 (ja) * | 2019-09-13 | 2020-07-15 | キヤノンアネルバ株式会社 | 電離真空計およびカートリッジ |
KR102390110B1 (ko) * | 2019-09-13 | 2022-04-25 | 캐논 아네르바 가부시키가이샤 | 전리 진공계 및 카트리지 |
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2022
- 2022-03-22 JP JP2022045867A patent/JP7096628B1/ja active Active
- 2022-09-16 TW TW111135124A patent/TWI823570B/zh active
- 2022-10-13 KR KR1020220131166A patent/KR20230137806A/ko unknown
- 2022-10-24 CN CN202211300136.5A patent/CN116793562A/zh active Pending
- 2022-12-13 EP EP22213007.2A patent/EP4261514A3/en active Pending
- 2022-12-15 US US18/066,358 patent/US20230304883A1/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3965746A (en) | 1974-11-04 | 1976-06-29 | Teledyne Industries, Inc. | Pressure transducer |
JP2010243276A (ja) | 2009-04-03 | 2010-10-28 | Seiko Epson Corp | 相対圧力センサー、相対圧力測定装置及び相対圧力測定方法 |
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TWI823570B (zh) | 2023-11-21 |
KR20230137806A (ko) | 2023-10-05 |
TW202338311A (zh) | 2023-10-01 |
EP4261514A2 (en) | 2023-10-18 |
EP4261514A3 (en) | 2023-11-15 |
CN116793562A (zh) | 2023-09-22 |
US20230304883A1 (en) | 2023-09-28 |
JP2023140031A (ja) | 2023-10-04 |
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