JP7090621B2 - 静電蠕動ポンプ及び動作方法 - Google Patents

静電蠕動ポンプ及び動作方法 Download PDF

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Publication number
JP7090621B2
JP7090621B2 JP2019535779A JP2019535779A JP7090621B2 JP 7090621 B2 JP7090621 B2 JP 7090621B2 JP 2019535779 A JP2019535779 A JP 2019535779A JP 2019535779 A JP2019535779 A JP 2019535779A JP 7090621 B2 JP7090621 B2 JP 7090621B2
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Japan
Prior art keywords
central
side portion
electrodes
passage
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2019535779A
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English (en)
Japanese (ja)
Other versions
JP2020504797A5 (https=
JP2020504797A (ja
Inventor
ルドルフ マリア ジョゼフ フォンケン
ヨハネス ウィルヘルムス ウィーカンプ
マレイケ クリー
セルゲイ シュレポフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
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Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of JP2020504797A publication Critical patent/JP2020504797A/ja
Publication of JP2020504797A5 publication Critical patent/JP2020504797A5/ja
Application granted granted Critical
Publication of JP7090621B2 publication Critical patent/JP7090621B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/12—Coating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2019535779A 2016-12-30 2018-01-01 静電蠕動ポンプ及び動作方法 Expired - Fee Related JP7090621B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662440542P 2016-12-30 2016-12-30
US62/440,542 2016-12-30
PCT/EP2018/050001 WO2018122400A1 (en) 2016-12-30 2018-01-01 Electrostatic peristaltic pump and method of operation

Publications (3)

Publication Number Publication Date
JP2020504797A JP2020504797A (ja) 2020-02-13
JP2020504797A5 JP2020504797A5 (https=) 2021-02-12
JP7090621B2 true JP7090621B2 (ja) 2022-06-24

Family

ID=60997448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019535779A Expired - Fee Related JP7090621B2 (ja) 2016-12-30 2018-01-01 静電蠕動ポンプ及び動作方法

Country Status (5)

Country Link
US (1) US11204026B2 (https=)
EP (1) EP3563060B1 (https=)
JP (1) JP7090621B2 (https=)
CN (1) CN110226038B (https=)
WO (1) WO2018122400A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010029946A1 (ja) * 2008-09-09 2010-03-18 株式会社神戸製鋼所 熱線遮蔽カバー
WO2010029955A1 (ja) * 2008-09-09 2010-03-18 株式会社神戸製鋼所 積層板および複合成形体

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018122080A1 (en) * 2016-12-30 2018-07-05 Koninklijke Philips N.V. Electrostatic peristaltic pump and method of operation
CN110665089B (zh) * 2019-09-20 2021-10-19 浙江师范大学 一种血液输送用静电蠕动泵

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007518910A (ja) 2003-06-30 2007-07-12 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 媒体流生成装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192197A (en) * 1991-11-27 1993-03-09 Rockwell International Corporation Piezoelectric pump
US5705018A (en) 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
US5836750A (en) 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6659740B2 (en) * 1998-08-11 2003-12-09 Jean-Baptiste Drevet Vibrating membrane fluid circulator
US6568286B1 (en) * 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6435840B1 (en) * 2000-12-21 2002-08-20 Eastman Kodak Company Electrostrictive micro-pump
EP1581283A1 (en) * 2002-12-30 2005-10-05 Koninklijke Philips Electronics N.V. Fluid dispensing system
EP1644639B1 (en) * 2003-06-30 2009-02-11 Nxp B.V. Device for generating sound by means of a medium stream generated
WO2015042192A1 (en) * 2013-09-17 2015-03-26 Pratheev Sabaratnam Sreetharan Zipping actuator fluid motivation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007518910A (ja) 2003-06-30 2007-07-12 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 媒体流生成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010029946A1 (ja) * 2008-09-09 2010-03-18 株式会社神戸製鋼所 熱線遮蔽カバー
WO2010029955A1 (ja) * 2008-09-09 2010-03-18 株式会社神戸製鋼所 積層板および複合成形体

Also Published As

Publication number Publication date
US20190338764A1 (en) 2019-11-07
CN110226038A (zh) 2019-09-10
US11204026B2 (en) 2021-12-21
JP2020504797A (ja) 2020-02-13
EP3563060A1 (en) 2019-11-06
EP3563060B1 (en) 2021-03-10
WO2018122400A1 (en) 2018-07-05
CN110226038B (zh) 2021-06-22

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