CN110226038B - 静电蠕动泵及其操作方法 - Google Patents

静电蠕动泵及其操作方法 Download PDF

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Publication number
CN110226038B
CN110226038B CN201880008850.2A CN201880008850A CN110226038B CN 110226038 B CN110226038 B CN 110226038B CN 201880008850 A CN201880008850 A CN 201880008850A CN 110226038 B CN110226038 B CN 110226038B
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CN
China
Prior art keywords
membrane
channel
electrodes
midline
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201880008850.2A
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English (en)
Chinese (zh)
Other versions
CN110226038A (zh
Inventor
R·M·J·冯克恩
J·W·威克普
M·克莱
S·舒列波夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
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Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of CN110226038A publication Critical patent/CN110226038A/zh
Application granted granted Critical
Publication of CN110226038B publication Critical patent/CN110226038B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/12—Coating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN201880008850.2A 2016-12-30 2018-01-01 静电蠕动泵及其操作方法 Expired - Fee Related CN110226038B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662440542P 2016-12-30 2016-12-30
US62/440,542 2016-12-30
PCT/EP2018/050001 WO2018122400A1 (en) 2016-12-30 2018-01-01 Electrostatic peristaltic pump and method of operation

Publications (2)

Publication Number Publication Date
CN110226038A CN110226038A (zh) 2019-09-10
CN110226038B true CN110226038B (zh) 2021-06-22

Family

ID=60997448

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880008850.2A Expired - Fee Related CN110226038B (zh) 2016-12-30 2018-01-01 静电蠕动泵及其操作方法

Country Status (5)

Country Link
US (1) US11204026B2 (https=)
EP (1) EP3563060B1 (https=)
JP (1) JP7090621B2 (https=)
CN (1) CN110226038B (https=)
WO (1) WO2018122400A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4559513B2 (ja) * 2008-09-09 2010-10-06 株式会社神戸製鋼所 積層板および複合成形体
JP2010065564A (ja) * 2008-09-09 2010-03-25 Kobe Steel Ltd 熱線遮蔽カバー
WO2018122080A1 (en) * 2016-12-30 2018-07-05 Koninklijke Philips N.V. Electrostatic peristaltic pump and method of operation
CN110665089B (zh) * 2019-09-20 2021-10-19 浙江师范大学 一种血液输送用静电蠕动泵

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US6007309A (en) * 1995-12-13 1999-12-28 Hartley; Frank T. Micromachined peristaltic pumps
US20020081218A1 (en) * 2000-12-21 2002-06-27 Eastman Kodak Company Electrostrictive micro-pump
US20040020265A1 (en) * 2000-06-02 2004-02-05 Cleopatra Cabuz 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
CN1732026A (zh) * 2002-12-30 2006-02-08 皇家飞利浦电子股份有限公司 流体分配系统
WO2015042192A1 (en) * 2013-09-17 2015-03-26 Pratheev Sabaratnam Sreetharan Zipping actuator fluid motivation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192197A (en) * 1991-11-27 1993-03-09 Rockwell International Corporation Piezoelectric pump
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6659740B2 (en) * 1998-08-11 2003-12-09 Jean-Baptiste Drevet Vibrating membrane fluid circulator
EP1644639B1 (en) * 2003-06-30 2009-02-11 Nxp B.V. Device for generating sound by means of a medium stream generated
CN100430599C (zh) 2003-06-30 2008-11-05 Nxp股份有限公司 用于产生介质流的设备

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6007309A (en) * 1995-12-13 1999-12-28 Hartley; Frank T. Micromachined peristaltic pumps
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US20040020265A1 (en) * 2000-06-02 2004-02-05 Cleopatra Cabuz 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US20020081218A1 (en) * 2000-12-21 2002-06-27 Eastman Kodak Company Electrostrictive micro-pump
CN1732026A (zh) * 2002-12-30 2006-02-08 皇家飞利浦电子股份有限公司 流体分配系统
WO2015042192A1 (en) * 2013-09-17 2015-03-26 Pratheev Sabaratnam Sreetharan Zipping actuator fluid motivation

Also Published As

Publication number Publication date
US20190338764A1 (en) 2019-11-07
JP7090621B2 (ja) 2022-06-24
CN110226038A (zh) 2019-09-10
US11204026B2 (en) 2021-12-21
JP2020504797A (ja) 2020-02-13
EP3563060A1 (en) 2019-11-06
EP3563060B1 (en) 2021-03-10
WO2018122400A1 (en) 2018-07-05

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Granted publication date: 20210622

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