JP7032045B2 - 測定エンコーダ - Google Patents

測定エンコーダ Download PDF

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Publication number
JP7032045B2
JP7032045B2 JP2016519754A JP2016519754A JP7032045B2 JP 7032045 B2 JP7032045 B2 JP 7032045B2 JP 2016519754 A JP2016519754 A JP 2016519754A JP 2016519754 A JP2016519754 A JP 2016519754A JP 7032045 B2 JP7032045 B2 JP 7032045B2
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JP
Japan
Prior art keywords
scale
light
light source
readhead
encoder device
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JP2016519754A
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English (en)
Japanese (ja)
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JP2016532095A (ja
JP2016532095A5 (enExample
Inventor
エリオット マクアダム シモン
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Renishaw PLC
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Renishaw PLC
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Publication of JP2016532095A5 publication Critical patent/JP2016532095A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2016519754A 2013-10-01 2014-09-26 測定エンコーダ Active JP7032045B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13275238.7 2013-10-01
EP13275238 2013-10-01
PCT/EP2014/070617 WO2015049174A1 (en) 2013-10-01 2014-09-26 Measurement encoder

Publications (3)

Publication Number Publication Date
JP2016532095A JP2016532095A (ja) 2016-10-13
JP2016532095A5 JP2016532095A5 (enExample) 2020-11-12
JP7032045B2 true JP7032045B2 (ja) 2022-03-08

Family

ID=49263260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016519754A Active JP7032045B2 (ja) 2013-10-01 2014-09-26 測定エンコーダ

Country Status (5)

Country Link
US (1) US10823587B2 (enExample)
EP (1) EP3052897B1 (enExample)
JP (1) JP7032045B2 (enExample)
CN (1) CN105814408B (enExample)
WO (1) WO2015049174A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105723179B (zh) * 2013-10-18 2019-05-31 上海交通大学 主动式位置编码器及其操作方法
DE102014209004A1 (de) * 2014-05-13 2015-11-19 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
WO2016174433A1 (en) 2015-04-29 2016-11-03 Renishaw Plc Method of determining sub-divisional error
WO2017042570A1 (en) 2015-09-09 2017-03-16 Renishaw Plc Encoder apparatus
US10295378B2 (en) * 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration outputting structured illumination to a scale plane for providing displacement signals
JP7114371B2 (ja) * 2018-07-03 2022-08-08 株式会社ミツトヨ 光電式エンコーダの信号処理方法
EP3623769A1 (en) 2018-09-12 2020-03-18 Renishaw PLC Measurement device
JP7120200B2 (ja) * 2019-10-15 2022-08-17 株式会社デンソー 回転角検出装置
WO2022044753A1 (ja) * 2020-08-25 2022-03-03 パナソニックＩｐマネジメント株式会社 エンコーダ
US11828629B2 (en) * 2021-05-28 2023-11-28 Pixart Imaging (Penang) Sdn. Bhd. Multi-track optical encoder
WO2024134155A1 (en) * 2022-12-20 2024-06-27 Renishaw Plc Encoder apparatus
EP4390328A1 (en) * 2022-12-21 2024-06-26 Renishaw plc Encoder apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3586665A (en) 1969-04-26 1971-06-22 Zeiss Stiftung Apparatus for producing phase-shifted electric signals
JP2004271453A (ja) 2003-03-11 2004-09-30 Yaskawa Electric Corp 光学式エンコーダ
JP2006349604A (ja) 2005-06-20 2006-12-28 Olympus Corp 光学式エンコーダ

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ATE51445T1 (de) * 1986-02-07 1990-04-15 Saphirwerk Ind Prod Vorrichtung zur inkrementalen laengenmessung.
IN168444B (enExample) 1986-08-15 1991-04-06 Mitutoyo Mfg Co Ltd
JPH01173829U (enExample) 1988-05-13 1989-12-11
DE3823314A1 (de) * 1988-07-09 1990-01-11 Heidenhain Gmbh Dr Johannes Lichtelektrische positionsmesseinrichtung
JP2586121B2 (ja) 1988-09-30 1997-02-26 キヤノン株式会社 ロータリーエンコーダの原点検出系
JPH0313901A (ja) 1989-06-13 1991-01-22 Mitsubishi Electric Corp 発光ダイオード
JPH03128418A (ja) 1989-07-20 1991-05-31 Yokogawa Electric Corp 光学式エンコーダ
JP2670457B2 (ja) 1989-09-29 1997-10-29 キヤノン株式会社 零点位置検出装置
CN1022776C (zh) 1990-10-25 1993-11-17 刘光万 采用光传感方式的位移检测方法及装置
JP3530573B2 (ja) 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
GB9424969D0 (en) 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
JP3471971B2 (ja) * 1995-05-10 2003-12-02 キヤノン株式会社 複合型のロータリーエンコーダ
JP3631551B2 (ja) 1996-01-23 2005-03-23 株式会社ミツトヨ 光学式エンコーダ
DE19854733A1 (de) 1998-11-27 2000-05-31 Heidenhain Gmbh Dr Johannes Abtasteinheit einer Positionsmeßeinrichtung
DE60033075T3 (de) 1999-04-16 2012-08-30 Canon K.K. Kodierer
JP4697359B2 (ja) 2000-06-20 2011-06-08 株式会社安川電機 光学式エンコーダ
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement
JP3720751B2 (ja) * 2001-10-23 2005-11-30 オリンパス株式会社 光学式エンコーダ
GB0316921D0 (en) 2003-07-19 2003-08-27 Renishaw Plc Reader for a scale marking
US7126696B2 (en) * 2003-09-30 2006-10-24 Mitutoyo Corporation Interferometric miniature grating encoder readhead using fiber optic receiver channels
GB0413710D0 (en) 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
US7227124B2 (en) 2005-06-20 2007-06-05 Mitutoyo Corporation Illumination configuration for imaging-type optical encoders
GB0522651D0 (en) 2005-11-07 2005-12-14 Renishaw Plc Scale and readhead system
GB0621487D0 (en) * 2006-10-28 2006-12-06 Renishaw Plc Opto-electronic read head
US8384115B2 (en) 2008-08-01 2013-02-26 Cree, Inc. Bond pad design for enhancing light extraction from LED chips
GB0819767D0 (en) 2008-10-28 2008-12-03 Renishaw Plc Absolute encoder setup indication
JP5679643B2 (ja) * 2009-09-11 2015-03-04 キヤノン株式会社 光学式エンコーダ
US9362455B2 (en) * 2011-02-24 2016-06-07 Cree, Inc. Semiconductor light emitting diodes having multiple bond pads and current spreading structures
US8878204B2 (en) * 2012-05-04 2014-11-04 Cree, Inc. Submount based light emitter components and methods
JP6732366B2 (ja) * 2015-12-21 2020-07-29 株式会社ミツトヨ 光電式エンコーダおよび測定器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3586665A (en) 1969-04-26 1971-06-22 Zeiss Stiftung Apparatus for producing phase-shifted electric signals
JP2004271453A (ja) 2003-03-11 2004-09-30 Yaskawa Electric Corp 光学式エンコーダ
JP2006349604A (ja) 2005-06-20 2006-12-28 Olympus Corp 光学式エンコーダ

Also Published As

Publication number Publication date
EP3052897A1 (en) 2016-08-10
CN105814408B (zh) 2018-06-12
WO2015049174A1 (en) 2015-04-09
JP2016532095A (ja) 2016-10-13
US20160245673A1 (en) 2016-08-25
CN105814408A (zh) 2016-07-27
EP3052897B1 (en) 2019-07-17
US10823587B2 (en) 2020-11-03

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