JP2016532095A - 測定エンコーダ - Google Patents
測定エンコーダ Download PDFInfo
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- JP2016532095A JP2016532095A JP2016519754A JP2016519754A JP2016532095A JP 2016532095 A JP2016532095 A JP 2016532095A JP 2016519754 A JP2016519754 A JP 2016519754A JP 2016519754 A JP2016519754 A JP 2016519754A JP 2016532095 A JP2016532095 A JP 2016532095A
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- scale
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- read head
- light source
- encoder
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- 238000005259 measurement Methods 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 description 22
- 230000000737 periodic effect Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 8
- 230000005670 electromagnetic radiation Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- BIIBYWQGRFWQKM-JVVROLKMSA-N (2S)-N-[4-(cyclopropylamino)-3,4-dioxo-1-[(3S)-2-oxopyrrolidin-3-yl]butan-2-yl]-2-[[(E)-3-(2,4-dichlorophenyl)prop-2-enoyl]amino]-4,4-dimethylpentanamide Chemical compound CC(C)(C)C[C@@H](C(NC(C[C@H](CCN1)C1=O)C(C(NC1CC1)=O)=O)=O)NC(/C=C/C(C=CC(Cl)=C1)=C1Cl)=O BIIBYWQGRFWQKM-JVVROLKMSA-N 0.000 description 1
- YZSCPLGKKMSBMV-UHFFFAOYSA-N 5-fluoro-4-(8-fluoro-4-propan-2-yl-2,3-dihydro-1,4-benzoxazin-6-yl)-N-[5-(1-methylpiperidin-4-yl)pyridin-2-yl]pyrimidin-2-amine Chemical compound FC=1C(=NC(=NC=1)NC1=NC=C(C=C1)C1CCN(CC1)C)C1=CC2=C(OCCN2C(C)C)C(=C1)F YZSCPLGKKMSBMV-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
- G01D5/2457—Incremental encoders having reference marks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Abstract
Description
Claims (12)
- 少なくとも1つのスケールトラックを画定する一連の特徴を備えるスケールと、前記スケールの特徴を読み取る読取りヘッドとを備え、前記読取りヘッドが、前記スケールを照明する少なくとも1つの光源と、少なくとも1つの検出器とを備える、エンコーダ装置であって、
前記少なくとも1つの光源の構成は、前記スケールの方へ投影される光の中に構造が位置するような構成であり、前記読取りヘッドは、前記読取りヘッドによって出力される信号内の測定誤差を低減させるために、前記構造が傾斜し、その結果、それが前記スケールの特徴に対して実質的に位置ずれされるように構成されることを特徴とするエンコーダ装置。 - 前記スケールの方へ投影される光の中の前記構造の主な細長い構造のどれでも、前記スケールの特徴に対して傾斜することを特徴とする請求項1に記載のエンコーダ装置。
- 前記光源の構成は、少なくとも1つの方向に、投影される光の前記構造の周期性を与え、前記読取りヘッドは、周期性の方向が傾斜し、その結果、それが前記スケールの特徴の前記周期性に対して実質的に位置ずれされるように構成されることを特徴とする請求項1に記載のエンコーダ装置。
- 前記少なくとも1つの光源は、前記エンコーダ装置の測定次元で測定される前記スケールの方へ投影される光の強度分布が、0.5以下の変調深さを有するように構成することができることを特徴とする請求項1に記載のエンコーダ装置。
- 光の中の前記構造は、特徴のアレイを備え、前記読取りヘッドは、特徴の前記アレイが前記スケールの特徴に対して傾斜するように構成されることを特徴とする請求項1に記載のエンコーダ装置。
- 前記少なくとも1つの光源は発光ダイオード(LED)を備え、前記LEDは、前記投影される光の中に前記構造を与える特徴を前記LEDの放出表面上に備えることを特徴とする請求項1に記載のエンコーダ装置。
- 前記特徴は、ボンドパッドおよび/または少なくとも1つの流れスプレッダを構成することを特徴とする請求項6に記載のエンコーダ装置。
- 前記エンコーダ装置はインクリメンタルエンコーダ装置であり、前記スケールは一連のインクリメンタルスケールマークを備えることを特徴とする請求項1に記載のエンコーダ装置。
- 前記構造が傾斜し、その結果、それが前記スケールの前記一連のインクリメンタルスケールマークに対して実質的に位置ずれされるように構成されることを特徴とする請求項8に記載のエンコーダ装置。
- 前記検出器は光検出器を構成し、光が前記読取りヘッド内の前記スケールおよび少なくとも1つの回折格子と相互作用して、前記スケールおよび前記読取りヘッドの相対運動とともに変化する結果領域を前記光検出器に生じさせることを特徴とする請求項1に記載のエンコーダ装置。
- 前記読取りヘッドは回折格子を備え、前記少なくとも1つの光源からの光が、まず前記スケールと相互作用して第1の組の回折次数を生じさせ、次いで前記読取りヘッドの回折格子と相互作用してさらなる回折次数を生じさせ、該回折次数が、前記スケールおよび前記読取りヘッドの相対運動とともに変化する干渉縞を前記検出器に生じさせるように結合することを特徴とする請求項1に記載のエンコーダ装置。
- スケールを読み取ってそれらの間の相対位置を判定するエンコーダ読取りヘッドであって、
前記スケールを照明する光源であって、前記光源の構成がそれが投影する光の中に構造を与える光源と、
前記読取りヘッドの読取り方向に対して実質的に平行なアレイ内に延びる複数の感知チャネルを画定する光検出器のアレイとを備え、
光の中の前記構造であってそれが前記光源から前記スケールの方へ投影されるときの光の中の前記構造が前記複数の感知チャネルに対して傾斜するように、前記読取りヘッドが構成されていることを特徴とするエンコーダ読取りヘッド。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP13275238 | 2013-10-01 | ||
EP13275238.7 | 2013-10-01 | ||
PCT/EP2014/070617 WO2015049174A1 (en) | 2013-10-01 | 2014-09-26 | Measurement encoder |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2016532095A true JP2016532095A (ja) | 2016-10-13 |
JP2016532095A5 JP2016532095A5 (ja) | 2020-11-12 |
JP7032045B2 JP7032045B2 (ja) | 2022-03-08 |
Family
ID=49263260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016519754A Active JP7032045B2 (ja) | 2013-10-01 | 2014-09-26 | 測定エンコーダ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10823587B2 (ja) |
EP (1) | EP3052897B1 (ja) |
JP (1) | JP7032045B2 (ja) |
CN (1) | CN105814408B (ja) |
WO (1) | WO2015049174A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015055145A1 (zh) * | 2013-10-18 | 2015-04-23 | 上海交通大学 | 主动式位置编码器及其操作方法 |
DE102014209004A1 (de) * | 2014-05-13 | 2015-11-19 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP7042620B2 (ja) | 2015-04-29 | 2022-03-28 | レニショウ パブリック リミテッド カンパニー | サブディビジョナルエラーを決定する方法 |
ES2830777T3 (es) | 2015-09-09 | 2021-06-04 | Renishaw Plc | Aparato codificador |
US10295378B2 (en) * | 2017-06-29 | 2019-05-21 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration outputting structured illumination to a scale plane for providing displacement signals |
JP7114371B2 (ja) * | 2018-07-03 | 2022-08-08 | 株式会社ミツトヨ | 光電式エンコーダの信号処理方法 |
EP3623769A1 (en) * | 2018-09-12 | 2020-03-18 | Renishaw PLC | Measurement device |
JP7120200B2 (ja) * | 2019-10-15 | 2022-08-17 | 株式会社デンソー | 回転角検出装置 |
WO2024134156A1 (en) * | 2022-12-20 | 2024-06-27 | Renishaw Plc | Encoder apparatus |
EP4390328A1 (en) * | 2022-12-21 | 2024-06-26 | Renishaw plc | Encoder apparatus |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3586665A (en) * | 1969-04-26 | 1971-06-22 | Zeiss Stiftung | Apparatus for producing phase-shifted electric signals |
JPS62265525A (ja) * | 1986-02-07 | 1987-11-18 | ザーフィアヴェルク・インドウストリープロドゥクテ・アクチェンゲゼルシャフト | 長さの増分の測定装置 |
JPH01173829U (ja) * | 1988-05-13 | 1989-12-11 | ||
JPH0313901A (ja) * | 1989-06-13 | 1991-01-22 | Mitsubishi Electric Corp | 発光ダイオード |
JPH03128418A (ja) * | 1989-07-20 | 1991-05-31 | Yokogawa Electric Corp | 光学式エンコーダ |
JPH08304118A (ja) * | 1995-05-10 | 1996-11-22 | Canon Inc | 複合型のロータリーエンコーダ |
JPH09196706A (ja) * | 1996-01-23 | 1997-07-31 | Mitsutoyo Corp | 光学式エンコーダ |
JP2002005692A (ja) * | 2000-06-20 | 2002-01-09 | Yaskawa Electric Corp | 光学式エンコーダ |
JP2004271453A (ja) * | 2003-03-11 | 2004-09-30 | Yaskawa Electric Corp | 光学式エンコーダ |
JP2006349604A (ja) * | 2005-06-20 | 2006-12-28 | Olympus Corp | 光学式エンコーダ |
JP2011059004A (ja) * | 2009-09-11 | 2011-03-24 | Canon Inc | 光学式エンコーダ |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4912322A (en) | 1986-08-15 | 1990-03-27 | Mitutoyo Mfg. Co., Ltd. | Optical type displacement detecting device |
DE3823314A1 (de) | 1988-07-09 | 1990-01-11 | Heidenhain Gmbh Dr Johannes | Lichtelektrische positionsmesseinrichtung |
JP2586121B2 (ja) | 1988-09-30 | 1997-02-26 | キヤノン株式会社 | ロータリーエンコーダの原点検出系 |
JP2670457B2 (ja) | 1989-09-29 | 1997-10-29 | キヤノン株式会社 | 零点位置検出装置 |
CN1022776C (zh) | 1990-10-25 | 1993-11-17 | 刘光万 | 采用光传感方式的位移检测方法及装置 |
JP3128418B2 (ja) | 1993-12-07 | 2001-01-29 | 東陶機器株式会社 | 給湯装置の燃焼制御装置 |
JP3530573B2 (ja) | 1994-04-27 | 2004-05-24 | キヤノン株式会社 | 光学式変位センサ |
GB9424969D0 (en) | 1994-12-10 | 1995-02-08 | Renishaw Plc | Opto-electronic scale reading apparatus |
DE19854733A1 (de) | 1998-11-27 | 2000-05-31 | Heidenhain Gmbh Dr Johannes | Abtasteinheit einer Positionsmeßeinrichtung |
DE60033075T3 (de) | 1999-04-16 | 2012-08-30 | Canon K.K. | Kodierer |
GB0109057D0 (en) | 2001-04-11 | 2001-05-30 | Renishaw Plc | Absolute postition measurement |
JP3720751B2 (ja) * | 2001-10-23 | 2005-11-30 | オリンパス株式会社 | 光学式エンコーダ |
GB0316921D0 (en) | 2003-07-19 | 2003-08-27 | Renishaw Plc | Reader for a scale marking |
US7126696B2 (en) * | 2003-09-30 | 2006-10-24 | Mitutoyo Corporation | Interferometric miniature grating encoder readhead using fiber optic receiver channels |
GB0413710D0 (en) | 2004-06-21 | 2004-07-21 | Renishaw Plc | Scale reading apparatus |
US7227124B2 (en) | 2005-06-20 | 2007-06-05 | Mitutoyo Corporation | Illumination configuration for imaging-type optical encoders |
GB0522651D0 (en) | 2005-11-07 | 2005-12-14 | Renishaw Plc | Scale and readhead system |
GB0621487D0 (en) * | 2006-10-28 | 2006-12-06 | Renishaw Plc | Opto-electronic read head |
US8384115B2 (en) | 2008-08-01 | 2013-02-26 | Cree, Inc. | Bond pad design for enhancing light extraction from LED chips |
GB0819767D0 (en) | 2008-10-28 | 2008-12-03 | Renishaw Plc | Absolute encoder setup indication |
US9362455B2 (en) * | 2011-02-24 | 2016-06-07 | Cree, Inc. | Semiconductor light emitting diodes having multiple bond pads and current spreading structures |
US8878204B2 (en) * | 2012-05-04 | 2014-11-04 | Cree, Inc. | Submount based light emitter components and methods |
JP6732366B2 (ja) * | 2015-12-21 | 2020-07-29 | 株式会社ミツトヨ | 光電式エンコーダおよび測定器 |
-
2014
- 2014-09-26 WO PCT/EP2014/070617 patent/WO2015049174A1/en active Application Filing
- 2014-09-26 EP EP14792751.1A patent/EP3052897B1/en active Active
- 2014-09-26 CN CN201480065266.2A patent/CN105814408B/zh active Active
- 2014-09-26 US US15/024,519 patent/US10823587B2/en active Active
- 2014-09-26 JP JP2016519754A patent/JP7032045B2/ja active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3586665A (en) * | 1969-04-26 | 1971-06-22 | Zeiss Stiftung | Apparatus for producing phase-shifted electric signals |
JPS62265525A (ja) * | 1986-02-07 | 1987-11-18 | ザーフィアヴェルク・インドウストリープロドゥクテ・アクチェンゲゼルシャフト | 長さの増分の測定装置 |
JPH01173829U (ja) * | 1988-05-13 | 1989-12-11 | ||
JPH0313901A (ja) * | 1989-06-13 | 1991-01-22 | Mitsubishi Electric Corp | 発光ダイオード |
JPH03128418A (ja) * | 1989-07-20 | 1991-05-31 | Yokogawa Electric Corp | 光学式エンコーダ |
JPH08304118A (ja) * | 1995-05-10 | 1996-11-22 | Canon Inc | 複合型のロータリーエンコーダ |
JPH09196706A (ja) * | 1996-01-23 | 1997-07-31 | Mitsutoyo Corp | 光学式エンコーダ |
JP2002005692A (ja) * | 2000-06-20 | 2002-01-09 | Yaskawa Electric Corp | 光学式エンコーダ |
JP2004271453A (ja) * | 2003-03-11 | 2004-09-30 | Yaskawa Electric Corp | 光学式エンコーダ |
JP2006349604A (ja) * | 2005-06-20 | 2006-12-28 | Olympus Corp | 光学式エンコーダ |
JP2011059004A (ja) * | 2009-09-11 | 2011-03-24 | Canon Inc | 光学式エンコーダ |
Also Published As
Publication number | Publication date |
---|---|
CN105814408A (zh) | 2016-07-27 |
WO2015049174A1 (en) | 2015-04-09 |
US20160245673A1 (en) | 2016-08-25 |
US10823587B2 (en) | 2020-11-03 |
EP3052897B1 (en) | 2019-07-17 |
EP3052897A1 (en) | 2016-08-10 |
CN105814408B (zh) | 2018-06-12 |
JP7032045B2 (ja) | 2022-03-08 |
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