JP7027668B2 - 中性層組成物 - Google Patents
中性層組成物 Download PDFInfo
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Description
NMR分析は、三重共鳴5mmのプローブを有するVarian Unity Inova(500MHz)分光計を含むNMR分光計を使用して常温で行った。NMR測定用溶媒(CDCl3)に分析対象物質を約10mg/ml程度の濃度で希釈させて使用し、化学的移動は、ppmで表現した。
br=広い信号、s=単一線、d=二重線、dd=二重二重線、t=三重線、dt=二重三重線、q=四重線、p=五重線、m=多重線
数平均分子量Mnおよび分子量分布は、ゲル浸透クロマトグラフィー(GPC)を使用して測定した。5mLのバイアルに測定対象の高分子物質を入れ、約1mg/mL程度の濃度になるように、テトラヒドロフラン(THF)に希釈した。次に、キャリブレーション用標準試料と分析しようとする試料をシリンジフィルタ(細孔サイズ:0.45μm)を用いて濾過させた後に測定した。分析プログラムは、Agilent technologies社のChemStationを使用し、試料の溶出時間(elution time)を検量線(calibration curve)と比較して、重量平均分子量Mwおよび数平均分子量Mnをそれぞれ求め、その比率Mw/Mnで分子量分布PDIを計算した。GPCの測定条件は、下記の通りである。
機器:Agilent technologies社の1200 series
カラム:Polymer laboratories社のPLgel mixed B 2個使用
溶媒:THF
カラム温度:35℃
サンプル濃度:1mg/mL、200L注入
標準試料:ポリスチレン(Mp:3900000、723000、316500、52200、31400、7200、3940、485)
下記化学式Aの化合物(DPM-C12)は、次の方式で合成した。250mLのフラスコにヒドロキノン(10.0g、94.2mmol)および1-ブロモドデカン(23.5g、94.2mmol)を入れ、100mLのアセトニトリルに溶かした後、過量の炭酸カリウムを添加し、75℃で約48時間の間窒素条件下で反応させた。反応後、残存する炭酸カリウムをフィルタリングして除去し、反応に使用したアセトニトリルも除去した。これにジクロロメタン(DCM) と水の混合溶媒を添加してウォークアップし、分離した有機層を集めて、MgSO4に通過させて脱水した。次に、カラムクロマトグラフィーでジクロロメタン(DCM) を使用して白色固体状の目的物(4-ドデシルオキシフェノール)(9.8g、35.2mmol)を約37%の収得率で得た。
1H-NMR(CDCl3):δ6.77(dd,4H);δ4.45(s,1H);δ3.89(t,2H);δ1.75(p,2H);δ1.43(p,2H);δ1.33-1.26(m,16H);δ0.88(t,3H)
1H-NMR(CDCl3):δ7.02(dd,2H);δ6.89(dd,2H);δ6.32(dt,1H);δ5.73(dt,1H);δ3.94(t,2H);δ2.05(dd,3H);δ1.76(p,2H);δ1.43(p,2H);1.34-1.27(m,16H);δ0.88(t,3H)
製造例1のモノマーA 2.0gと可逆的付加開裂連鎖移動(RAFT:reversible addition-fragmentation chain transfer)試薬であるシアノイソプロピルジチオベンゾエート64mg、ラジカル開始剤であるアゾビスイソブチロニトリル(AIBN)23mgおよびベンゼン5.34mLを10mLのシュレンクフラスコに入れ、窒素雰囲気下で常温で30分間撹拌した後、70℃で4時間の間RAFT重合反応を行った。重合後、反応溶液を抽出溶媒であるメタノール250mLに沈殿させた後、減圧濾過して乾燥させて、ピンク色の巨大開始剤を製造した。前記巨大開始剤の収得率は、約82.6重量%であり、数平均分子量Mnおよび分子量分布Mw/Mnは、それぞれ9,000および1.16であった。巨大開始剤0.3g、ペンタフルオロスチレンモノマー(モノマーB)2.7174gおよびベンゼン1.306mLを10mLのシュレンクフラスコに入れ、窒素雰囲気下で常温で30分間撹拌した後、115℃で4時間の間RAFT重合反応を行った。重合後、反応溶液を抽出溶媒であるメタノール250mLに沈殿させた後、減圧濾過して乾燥させて、淡いピンク色のブロック共重合体を製造した。
製造例1の化合物(DPM-C12、モノマーA)0.97g、ペンタフルオロスチレン(モノマーB)1.36g、グリシジルメタクリレート0.03g(モノマーC)、アゾビスイソブチロニトリル(AIBN)0.03gおよびテトラヒドロフラン(THF)2mLを10mLのフラスコ(シュレンクフラスコ)に入れ、窒素雰囲気下で60℃で12時間の間自由ラジカル重合反応を行った。重合後、反応溶液を抽出溶媒であるメタノール250mLに沈殿させた後、減圧濾過後に乾燥させて、ランダム共重合体を製造した。ランダム共重合体の数平均分子量Mnおよび分子量分布Mw/Mnは、それぞれ51,300g/molおよび2.07であった。
製造例1の化学式Aで表されるモノマーA、ペンタフルオロスチレン単量体由来のモノマーB、架橋性官能基を含むモノマーCおよび更なるモノマーDの含量を下記表1のように調節したことを除いて、製造例3と同一にランダム共重合体を製造した。
製造例2のブロック共重合体と製造例3のランダム共重合体を使用してそれぞれ架橋された中性層と自己組織化した高分子膜を形成し、その結果を確認した。具体的に、まず、製造例3のランダム共重合体をフルオロベンゼンに約0.5重量%の濃度で溶解させ、製造されたコーティング液をシリコンウェハー上に3000rpmの速度で60秒間スピンコートした後、約200℃での熱的架橋(thermal crosslinking)を通じて架橋された中性層を形成した。製造例2のブロック共重合体をフルオロベンゼンに約1.0重量%の濃度で溶解させ、製造されたコーティング液を前記中性層上に3000rpmの速度で60秒間スピンコートした後、約200℃での熱的アニール(thermal annealing)を通じて自己組織化したブロック共重合体を含む膜を形成した。
前記表1のように比率が調節された製造例4~7のランダム共重合体をそれぞれ使用したことを除いて、実施例1と同じ条件でブロック共重合体を含む膜を形成した。
前記表1のように比率が調節された製造例8および9のランダム共重合体を使用したことを除いて、実施例1と同じ条件でブロック共重合体を含む膜を形成した。
Claims (16)
- 下記化学式1で表される単位と、一つ以上のハロゲン原子を有する芳香族構造を有する単位とを含むランダム共重合体を、固形分を基準として50~99重量%の量で含み、
前記ランダム共重合体は、前記化学式1で表される単位を9モル%~32モル%の範囲内に含む中性層組成物:
[化学式1]
- Xは、酸素原子、カルボニル基、-C(=O)-O-または-O-C(=O)-である、請求項1に記載の中性層組成物。
- Yの環構造は、芳香環構造である、請求項1又は2に記載の中性層組成物。
- R1~R5が含むハロゲン原子の数は、3個以上である、請求項4に記載の中性層組成物。
- 化学式1で表される単位のモル数Dおよび一つ以上のハロゲン原子を含む芳香族構造を有する単位のモル数Aの比率A/Dは、2~10の範囲内である、請求項1から5のいずれか一項に記載の中性層組成物。
- ランダム共重合体は、架橋性官能基を有する単位をさらに含む、請求項1から6のいずれか一項に記載の中性層組成物。
- 架橋性官能基は、ヒドロキシ基、エポキシ基、イソシアネート基、グリシジル基、下記化学式5の置換基、ベンゾイルフェノキシ基、アルケニルオキシカルボニル基、(メタ)アクリロイル基またはアルケニルオキシアルキル基である、請求項7に記載の中性層組成物:
[化学式5]
- 架橋性官能基を含む単位は、全体共重合体を基準として40モル%以下の比率で含まれる、請求項7または8に記載の中性層組成物。
- 化学式1で表される単位のモル数Dおよび前記架橋性官能基を有する単量体単位のモル数Cの比率C/Dが0.05~4の範囲内にある、請求項7から9のいずれか一項に記載の中性層組成物。
- 下記化学式1で表される単位と、一つ以上のハロゲン原子を含む芳香族構造を有する単位とを含むランダム共重合体を含み、
前記ランダム共重合体は、前記化学式1で表される単位を9モル%~32モル%の範囲内の比率で含む中性層:
[化学式1]
- 請求項1から10のいずれか一項に記載の中性層組成物を基板上にコートする段階と、コートされた前記中性層組成物の層を固定させる段階とを含む中性層の形成方法。
- 請求項11に記載の中性層と;前記中性層の一面に形成されており、第1ブロックと前記第1ブロックとは化学的に区別される第2ブロックとを有するブロック共重合体を含む高分子膜と;を含む積層体。
- 請求項11に記載の中性層と;前記中性層の一面に形成されており、第1ブロックと前記第1ブロックとは化学的に区別される第2ブロックとを有するブロック共重合体を含む高分子膜を自己組織化した状態で形成する段階を含む積層体の製造方法。
- 請求項15に記載の積層体の高分子膜からブロック共重合体の第1または第2ブロックを選択的に除去する段階を含むパターン形成方法。
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