JP7005690B2 - 基板処理装置、半導体装置の製造方法、およびプログラム - Google Patents
基板処理装置、半導体装置の製造方法、およびプログラム Download PDFInfo
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- JP7005690B2 JP7005690B2 JP2020104646A JP2020104646A JP7005690B2 JP 7005690 B2 JP7005690 B2 JP 7005690B2 JP 2020104646 A JP2020104646 A JP 2020104646A JP 2020104646 A JP2020104646 A JP 2020104646A JP 7005690 B2 JP7005690 B2 JP 7005690B2
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Description
基板を処理する処理室と、
前記処理室内へガスを供給するガス供給部と、
前記処理室内に配置され、基板を載置する基板載置面を有する基板載置部と、
前記基板載置面に対し、基板の下面を支持して当該基板を搬送するアームと、
を有し、
前記アームは、基板を支持する支持部が傾斜を有して構成されている、
技術が提供される。
以下に、本開示の一態様について説明する。
まず、図1~図7を用いて、本態様に係る基板処理装置の構成について説明する。本態様に係る基板処理装置は、半導体装置の製造工程で用いられるもので、処理対象となる基板を複数枚ごとに処理する装置として構成されている。処理対象となる基板としては、例えば、半導体装置(半導体デバイス)が作り込まれる半導体ウエハ基板(以下、単に「ウエハ」という。)が挙げられる。
図1に示すように、基板処理装置200は、処理容器202を備えている。処理容器202は、例えば、横断面が角形であり、扁平な密閉容器として構成されている。処理容器202は、アルミニウム(Al)やステンレス(SUS)等の金属材料により構成されている。処理容器202内には、シリコンウエハ等のウエハ100を処理する処理室201が形成されている。処理室201は、後述するガス分散構造230、基板載置部としての基台210等で構成される。
処理容器202の雰囲気を排気する排気系260を説明する。排気系260は、それぞれの処理空間209(209a~209d)に対応するように設けられている(図1参照)。例えば、処理空間209aは排気系260a、処理空間209bは排気系260b、処理空間209cは排気系260c、処理空間209dは排気系260dが対応する。
図5を用いて、ガス導入孔231a,231cに連通される第一ガス供給部300を説明する。
図6を用いて、ガス導入孔233b,233dに連通される第二ガス供給部340を説明する。
基板処理装置200は、基板処理装置200の各部の動作を制御するコントローラ280を有している。コントローラ280は、図7に記載のように、演算部(CPU)280a、一時記憶部(RAM)280b、記憶部280c、I/Oポート280dを少なくとも有する。コントローラ280は、I/Oポート280dを介して基板処理装置200の各構成に接続され、上位装置270や使用者の指示に応じて記憶部280cからプログラムやレシピを呼び出し、その内容に応じて各構成の動作を制御する。
次に、半導体製造工程の一工程として、上述した構成の基板処理装置200を用いて、ウエハ100に対する処理を行う基板処理工程について説明する。ここでは、基板処理工程として、図8に示すように、ウエハ100上に絶縁膜102と犠牲膜112とを交互に積層する場合を例に挙げる。図9は、ウエハ100上に絶縁膜102と犠牲膜112とを積層するためのフローである。以下の説明において、各部の動作はコントローラ280により制御される。
所定の処理空間209において、ウエハ100を所定の温度に維持するとともに、Si含有ガスとO含有ガスとをウエハ100上に供給する。このようにして、ウエハ100上に、絶縁膜102(1)としてのSiO膜が形成される。
所定の処理空間209において、ウエハ100を所定の温度に維持するとともに、Si含有ガスとN含有ガスとをウエハ100上に供給する。このようにして、ウエハ100上に、犠牲膜112(1)としてのSiN膜が形成される。
所定の処理空間209において、ウエハ100を所定の温度に維持するとともに、Si含有ガスとO含有ガスとをウエハ100上に供給する。このようにして、ウエハ100上に、絶縁膜102(2)としてのSiO膜が形成される。
所定の処理空間209において、ウエハ100を所定の温度に維持するとともに、Si含有ガスとN含有ガスとをウエハ100上に供給する。このようにして、ウエハ100上に、犠牲膜112(2)としてのSiN膜が形成される。
第一絶縁膜形成工程S02から第二犠牲膜形成工程S08までの組み合わせを所定回数行ったかどうかを判断する。すなわち、絶縁膜102と犠牲膜112が所定層形成されたか否かを判断する。例えば、絶縁膜102と犠牲膜112との合計総数の所望数が16層の場合には、上述した組み合わせが4回繰り返されたか否かを判断する。
上述したように、ローテーションアーム222は、基板載置面(例えば、基板載置面211a)に載置されたウエハ100を支持して、隣接する基板載置面(例えば、基板載置面211b)へ搬送する。
本件開示者は、ウエハ100の歪みは、基板処理工程における様々な条件に対応してランダムに発生する場合があるので、従来のローテーションアームでは、支持部とウエハ100との接触の方向を規制することができない、という知見を得た。
本態様によれば、以下に示す1つまたは複数の効果を奏する。
以上に、本開示の態様を具体的に説明したが、本開示が上述の態様に限定されることはなく、その要旨を逸脱しない範囲で種々変更が可能である。
以下に、本開示の好ましい態様について付記する。
本開示の一態様によれば、
基板を処理する処理室と、
前記処理室内へガスを供給するガス供給部と、
前記処理室内に配置され、基板を載置する基板載置面を有する基板載置部と、
前記基板載置面に対し、基板の下面を支持して当該基板を搬送するアームと、
を有し、
前記アームは、基板を支持する支持部が傾斜を有して構成されている、
基板処理装置が提供される。
好ましくは、
前記支持部は、前記傾斜の上端側が基板の端縁近傍に位置した状態で当該基板を支持するように構成されている、
付記1に記載の基板処理装置が提供される。
好ましくは、
前記アームは、回転軸に取り付けられ、
前記基板載置部は、前記回転軸を中心として周状に複数配置され、
前記アームは、前記回転軸が回転することにより、複数の前記基板載置面の間で基板を搬送する、
付記1または2に記載の基板処理装置が提供される。
好ましくは、
前記アームは、前記支持部の下端部分に、上方に向かって湾曲する湾曲部をさらに有して構成されている、
付記1~3のいずれか1態様に記載の基板処理装置が提供される。
好ましくは、
前記湾曲部は、基板の外周側壁部に接触しない曲率半径を有する、
付記4に記載の基板処理装置が提供される。
好ましくは、
前記アームが基板を支持するときに、前記外周側壁部における最も前記湾曲部側に突出している部分の位置は、前記湾曲部の先端部の位置よりも上方にある、
付記5に記載の基板処理装置が提供される。
好ましくは、
前記アームにおける前記湾曲部の先端の位置と、前記アームの他端の位置とは、所定の範囲の差になるように構成されている、
付記4~6のいずれか1態様に記載の基板処理装置が提供される。
本開示の他の一態様によれば、
処理室内で基板を処理する工程と、
ガス供給部から前記処理室内へガスを供給する工程と、
前記処理室内に配置され、基板を載置する基板載置面を有する基板載置部に対し、基板の下面を支持して当該基板を搬送する搬送工程と、
を有し、
基板を支持する支持部が傾斜を有して構成されているアームにより、前記搬送工程を行う、
半導体装置の製造方法が提供される。
本開示のさらに他の一態様によれば、
処理室内で基板を処理する手順と、
ガス供給部から前記処理室内へガスを供給する手順と、
基板を支持する支持部が傾斜を有して構成されているアームにより、前記処理室内に配置され、基板を載置する基板載置面を有する基板載置部に対し、基板の下面を支持して当該基板を搬送する搬送手順と、
をコンピュータによって基板処理装置に実行させるプログラムが提供される。
200 基板処理装置
201 処理室
210 基台
211,211a,211b,211c,211d 基板載置面
222 ローテーションアーム
222a 支持部
222b 湾曲部
300 第一ガス供給部
340 第二ガス供給部
Claims (7)
- 基板を処理する処理室と、
前記処理室内へガスを供給するガス供給部と、
前記処理室内に配置され、基板を載置する基板載置面を有する基板載置部と、
前記基板載置面に対し、基板の下面を支持して当該基板を搬送するアームと、
を有し、
前記アームは、基板を支持する支持部が傾斜を有して構成され、前記支持部の下端部分に、上方に向かって湾曲する湾曲部をさらに有して構成されており、
前記湾曲部は、基板の外周側壁部に接触しない曲率半径を有する、
基板処理装置。 - 前記支持部は、前記傾斜の上端側が基板の端縁近傍に位置した状態で当該基板を支持するように構成されている、
請求項1に記載の基板処理装置。 - 前記アームは、回転軸に取り付けられ、
前記基板載置部は、前記回転軸を中心として周状に複数配置され、
前記アームは、前記回転軸が回転することにより、複数の前記基板載置面の間で基板を搬送する、
請求項1または2に記載の基板処理装置。 - 前記アームが基板を支持するときに、前記外周側壁部における最も前記湾曲部側に突出している部分の位置は、前記湾曲部の先端部の位置よりも上方にある、
請求項1~3のいずれか1項に記載の基板処理装置。 - 前記アームにおける前記湾曲部の先端の位置と、前記アームの他端の位置とは、所定の範囲の差になるように構成されている、
請求項1~4のいずれか1項に記載の基板処理装置。 - 処理室内で基板を処理する工程と、
ガス供給部から前記処理室内へガスを供給する工程と、
前記処理室内に配置され、基板を載置する基板載置面を有する基板載置部に対し、基板を支持する支持部が傾斜を有して構成され、前記支持部の下端部分に、上方に向かって湾曲し、基板の外周側壁部に接触しない曲率半径を有する湾曲部をさらに有して構成されているアームにより、基板の下面を支持して当該基板を搬送する搬送工程と、
を有する半導体装置の製造方法。 - 処理室内で基板を処理する手順と、
ガス供給部から前記処理室内へガスを供給する手順と、
前記処理室内に配置され、基板を載置する基板載置面を有する基板載置部に対し、基板を支持する支持部が傾斜を有して構成され、前記支持部の下端部分に、上方に向かって湾曲し、基板の外周側壁部に接触しない曲率半径を有する湾曲部をさらに有して構成されているアームにより、基板の下面を支持して当該基板を搬送する搬送手順と、
をコンピュータによって基板処理装置に実行させるプログラム。
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