JP6999101B2 - エッチング方法 - Google Patents
エッチング方法 Download PDFInfo
- Publication number
- JP6999101B2 JP6999101B2 JP2017027118A JP2017027118A JP6999101B2 JP 6999101 B2 JP6999101 B2 JP 6999101B2 JP 2017027118 A JP2017027118 A JP 2017027118A JP 2017027118 A JP2017027118 A JP 2017027118A JP 6999101 B2 JP6999101 B2 JP 6999101B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- etched
- sic
- etching
- sodium hydroxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005530 etching Methods 0.000 title claims description 99
- 238000000034 method Methods 0.000 title claims description 30
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 159
- 239000000758 substrate Substances 0.000 claims description 116
- 239000013078 crystal Substances 0.000 claims description 33
- 239000012298 atmosphere Substances 0.000 claims description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 239000003513 alkali Substances 0.000 claims description 11
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001882 dioxygen Inorganic materials 0.000 claims description 3
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims 1
- 229910001948 sodium oxide Inorganic materials 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 89
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 87
- 239000010408 film Substances 0.000 description 27
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 19
- 230000007547 defect Effects 0.000 description 11
- 238000007654 immersion Methods 0.000 description 11
- 238000002474 experimental method Methods 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000012937 correction Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000004090 dissolution Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007781 pre-processing Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 230000000415 inactivating effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004439 roughness measurement Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30608—Anisotropic liquid etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02378—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Plasma & Fusion (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Weting (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Laser Beam Processing (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Magnetic Heads (AREA)
Description
以下、容器内の溶融水酸化ナトリウムを流動させつつエッチングを行う例を説明する。本変形例では、図5に示すように、電気炉30と、電気炉30内に設置され上面側に基板を保持する基板保持部32と、溶融水酸化ナトリウムを貯留して供給口34mから供給可能なタンク34と、基板保持部32上の基板面PLSを流れた溶融水酸化ナトリウムSHLを流入させて収容する収容部36とを配置する。
本実験例では、溶融NaOH(溶融水酸化ナトリウム)にSiCウエハを半分程度に浸漬することで、溶融NaOHに浸漬している浸漬部IMと、溶融NaOHに浸漬していない非浸漬部NIMとが生じる状態でエッチングした。なお、以下の実験例で用いたSiCウエハは、前加工としてダイヤモンドホイールの#1000で表面を研削したものである。
本発明者は、Ni(ニッケル)製のるつぼに固形のNaOHを約5g入れ,電気炉で加熱して750℃の溶融状態にし、Ni線で固定したSiCウエハ(SiC基板)を溶融したNaOHに半分程度に浸漬し、20分間のエッチングを行った。使用したウエハはオフ角4°、10mm角の4H-SiCウエハである。前加工としてはダイヤモンドホイール(SD#1000)によって研削を施した。エッチグレートの評価はエッチング前後の厚さの差分から求めた。粗さ測定には触針式粗さ測定機(Taylor Hobson 社製PGI840)を用いた。なお、研削を行う主な理由は、ウエハのうねりや反りを除去しておくためである。
図6にエッチング後のSiCウエハ表面の形状を示す。図6を得るための計測では、基板面で直線に沿った表面の高さを計測した。
また、浸漬部IMと非浸漬部NIMの界面付近Vとをレーザ顕微鏡像によって観察し撮像した。撮像結果をそれぞれ図7、図8に示す。
本実験例では、エッチングの特性が温度、ガス雰囲気でどのように影響されるかを調べる実験を行った。
実験例1の実験方法を基本にして、実験時間を20~120分、温度を600~750℃としてエッチング実験を行った。本実験例では、浸漬部IMと非浸漬部NIMの界面付近Vとについて、エッチング温度とエッチングレーとトの関係を調べた。実験結果を図10に示す。
実験例1の実験条件を基本にして、実験時間を30分間とし、ガス雰囲気を大気の場合と窒素ガス(酸素ガスを排除して不活性にするためのガス)の場合とでそれぞれ実験を行い、その影響を調査した。
電気炉内に窒素を流しながらエッチングを行った。浸漬部IMと非浸漬部NIMの界面付近Vとについて、窒素流量とエッチングレートとの関係を図12(a)に、窒素流量と粗さとの関係を図12(b)にそれぞれ示す。なお、図12(a)で窒素流量0L/minは、窒素を流さないので、電気炉内が大気雰囲気のままであることを意味する。
次に、大気の影響を調べるためのエッチングを行った。浸漬部IMと非浸漬部NIMの界面付近Vとについて、空気流量とエッチングレートとの関係を図13(a)に、空気流量と粗さとの関係を図13(b)にそれぞれ示す。浸漬部IM、界面付近Vとも、空気流量に関わらずエッチングレートはほとんど変化しなかった。しかし、同じエッチング時間でも浸漬部IMでは空気流量が増加するほど潜傷(エッチプット)が除去されていくことがわかった。また空気流量が20L/minでは界面付近Vに膜状の凹凸ができ、粗さが著しく増大した。
本実験例では、一方の基板面がSi面で他方の基板面がC面であるSiC基板で、両基板面についてエッチング量(SiCの除去量)を測定することで、エッチング速度を比較した。
以上説明したように、実験例1~3により、溶融NaOHを用いたSiC基板のウエットエッチングで非浸漬部におけるSi面(Si原子で終端されている基板面)の高能率な鏡面化現象を見出した。その基礎特性の調査のための実験から、750℃、20分間のエッチングで到達面粗さ1.4nmRaとなり、750℃、45分間でエッチングレートが最大の304μm/h となることがわかった。さらにエッチング雰囲気においては、空気が作用していることがわかった。
20 SiC結晶部材
20r 被照射面
22 改質層
B レーザ光
F 界面位置
PL SiC基板
SHL 溶融水酸化ナトリウム
Claims (7)
- 基板面がSi面とC面とで構成されるSiC基板を溶融アルカリでエッチングするエッチング方法であって、
前記溶融アルカリとして所定の高温域にした溶融水酸化ナトリウムを用いることで、高温かつ酸素を含む環境下で前記SiC基板の被エッチング面に酸化被膜を形成しつつ、前記被エッチング面に等方性エッチングを行うことで前記酸化被膜を除去し、前記被エッチング面のSi面をC面よりも高い速度で除去することを特徴とするエッチング方法。 - 前記高温かつ酸素を含む環境下として、大気中で前記溶融水酸化ナトリウムを用いる環境下とすることを特徴とする請求項1に記載のエッチング方法。
- 前記高温かつ酸素を含む環境下として、前記被エッチング面に酸素ガスを供給する空間で前記溶融水酸化ナトリウムを用いる環境下とすることを特徴とする請求項1に記載のエッチング方法。
- 前記SiC基板の被エッチング面に前記溶融水酸化ナトリウムを流すことで前記酸化被膜を除去することを特徴とする請求項1~3の何れか1項に記載のエッチング方法。
- 前記被エッチング面に前記溶融水酸化ナトリウムを流す際、前記被エッチング面を上面側にして前記SiC基板を水平面に対して所定角度傾斜させ、前記被エッチング面の上部側から下部側へ前記溶融水酸化ナトリウムを流すことを特徴とする請求項4に記載のエッチング方法。
- 前記所定の高温域を650℃以上とすることを特徴とする請求項5に記載のエッチング方法。
- レーザ光を集光するレーザ集光手段をSiC結晶部材の被照射面上に非接触に配置する工程と、
前記レーザ集光手段により、被照射面にレーザ光を照射して前記SiC結晶部材内部に前記レーザ光を集光するとともに、前記レーザ集光手段と前記SiC結晶部材とを相対的に移動させて、前記SiC結晶部材内部に2次元状の改質層を形成する工程と、
前記改質層により分断されてなる結晶層を前記改質層から剥離することでSiC結晶基板を形成する工程と、
を行い、前記剥離によって得られた前記SiC結晶基板を前記SiC基板として用いることを特徴とする請求項6に記載のエッチング方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017027118A JP6999101B2 (ja) | 2017-02-16 | 2017-02-16 | エッチング方法 |
CN201780086671.6A CN110313055B (zh) | 2017-02-16 | 2017-10-26 | 蚀刻方法 |
US16/485,937 US10923354B2 (en) | 2017-02-16 | 2017-10-26 | Etching method |
KR1020197024181A KR102326876B1 (ko) | 2017-02-16 | 2017-10-26 | 에칭 방법 |
PCT/JP2017/038670 WO2018150637A1 (ja) | 2017-02-16 | 2017-10-26 | エッチング方法 |
TW107105000A TWI776854B (zh) | 2017-02-16 | 2018-02-12 | 蝕刻方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017027118A JP6999101B2 (ja) | 2017-02-16 | 2017-02-16 | エッチング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018133486A JP2018133486A (ja) | 2018-08-23 |
JP6999101B2 true JP6999101B2 (ja) | 2022-01-18 |
Family
ID=63169238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017027118A Active JP6999101B2 (ja) | 2017-02-16 | 2017-02-16 | エッチング方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10923354B2 (ja) |
JP (1) | JP6999101B2 (ja) |
KR (1) | KR102326876B1 (ja) |
CN (1) | CN110313055B (ja) |
TW (1) | TWI776854B (ja) |
WO (1) | WO2018150637A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6795811B2 (ja) * | 2017-02-16 | 2020-12-02 | 国立大学法人埼玉大学 | 剥離基板製造方法 |
JP6865431B2 (ja) * | 2017-02-16 | 2021-04-28 | 国立大学法人埼玉大学 | エッチング方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011151317A (ja) | 2010-01-25 | 2011-08-04 | Toyota Motor Corp | 炭化珪素単結晶の欠陥検出方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3593195B2 (ja) * | 1995-12-28 | 2004-11-24 | 新日本製鐵株式会社 | SiC単結晶基板の製造方法 |
JP5461859B2 (ja) * | 2008-03-28 | 2014-04-02 | Jfeミネラル株式会社 | AlNバルク単結晶及び半導体デバイス並びにAlN単結晶バルクの製造方法 |
JP4835749B2 (ja) * | 2009-12-18 | 2011-12-14 | 住友電気工業株式会社 | Iii族窒化物結晶基板、エピ層付iii族窒化物結晶基板、ならびに半導体デバイスおよびその製造方法 |
KR20110076448A (ko) * | 2009-12-29 | 2011-07-06 | (주)비에이치세미콘 | 탄화물 세라믹 열판 및 그 제조방법 |
JP2011241096A (ja) * | 2010-05-14 | 2011-12-01 | Mitsubishi Electric Corp | 炭化ケイ素単結晶の製造方法 |
CN102569055B (zh) * | 2010-12-14 | 2014-05-21 | 北京天科合达蓝光半导体有限公司 | 一种碳化硅单晶晶片表面及平整度的调整方法 |
JPWO2013031172A1 (ja) * | 2011-08-26 | 2015-03-23 | 国立大学法人 奈良先端科学技術大学院大学 | SiC半導体素子およびその製造方法 |
JP2014022677A (ja) | 2012-07-23 | 2014-02-03 | Disco Abrasive Syst Ltd | ウェーハの加工方法 |
KR101418004B1 (ko) * | 2013-01-25 | 2014-07-09 | 한국전기연구원 | 산화제가 첨가된 에천트를 이용한 고농도 실리콘카바이드 에칭방법 |
JP2014203833A (ja) * | 2013-04-01 | 2014-10-27 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
DE112016000831T5 (de) * | 2015-02-20 | 2017-11-02 | Sumitomo Electric Industries, Ltd. | Siliziumkarbid-Halbleitervorrichtung |
JP6379076B2 (ja) * | 2015-08-19 | 2018-08-22 | 濱田重工株式会社 | 単結晶SiCウェハのウェットエッチング方法及びウェットエッチング装置 |
-
2017
- 2017-02-16 JP JP2017027118A patent/JP6999101B2/ja active Active
- 2017-10-26 US US16/485,937 patent/US10923354B2/en active Active
- 2017-10-26 KR KR1020197024181A patent/KR102326876B1/ko active IP Right Grant
- 2017-10-26 WO PCT/JP2017/038670 patent/WO2018150637A1/ja active Application Filing
- 2017-10-26 CN CN201780086671.6A patent/CN110313055B/zh active Active
-
2018
- 2018-02-12 TW TW107105000A patent/TWI776854B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011151317A (ja) | 2010-01-25 | 2011-08-04 | Toyota Motor Corp | 炭化珪素単結晶の欠陥検出方法 |
Non-Patent Citations (1)
Title |
---|
KATSUNO Masakazu, et al.,Mechanism of Molten KOH Etching of SiC Single Crystals: Comparative Study with Thermal Oxidation,Japanese Journal of Applied Physics,1999年08月,Vol.38,No.8,pp.4661-4665 |
Also Published As
Publication number | Publication date |
---|---|
CN110313055A (zh) | 2019-10-08 |
KR102326876B1 (ko) | 2021-11-16 |
US10923354B2 (en) | 2021-02-16 |
CN110313055B (zh) | 2023-06-16 |
TW201832287A (zh) | 2018-09-01 |
US20200020535A1 (en) | 2020-01-16 |
WO2018150637A1 (ja) | 2018-08-23 |
KR20190105634A (ko) | 2019-09-17 |
JP2018133486A (ja) | 2018-08-23 |
TWI776854B (zh) | 2022-09-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6865431B2 (ja) | エッチング方法 | |
TWI728980B (zh) | 晶圓之薄化方法 | |
JP7029148B2 (ja) | エッチング方法 | |
TWI614803B (zh) | 單晶半導體晶圓以及製備半導體晶圓的方法 | |
JP6013858B2 (ja) | ウェーハの加工方法 | |
TW200300963A (en) | Silicon semiconductor wafer, and process for producing a multiplicity of semiconductor wafers | |
TW200805453A (en) | Method for manufacturing epitaxial wafer | |
JP6999101B2 (ja) | エッチング方法 | |
TWI358469B (ja) | ||
KR102202497B1 (ko) | 박리 기판 제조 방법 | |
JP2023099220A (ja) | ペリクル中間体およびペルクル | |
JP7007656B2 (ja) | 剥離基板製造方法 | |
US20160215415A1 (en) | Sapphire thinning and smoothing using high temperature wet process | |
CN117359104A (zh) | 一种基于液相下激光技术的碳化硅晶体化学机械抛光方法 | |
JP2005129810A (ja) | 光学素子及び液浸型投影露光装置 | |
JP2011129709A (ja) | 半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A80 | Written request to apply exceptions to lack of novelty of invention |
Free format text: JAPANESE INTERMEDIATE CODE: A80 Effective date: 20170314 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191209 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201006 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201202 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210615 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210625 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20211116 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211213 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6999101 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |