JP6998285B2 - 磁気センサ装置 - Google Patents

磁気センサ装置 Download PDF

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Publication number
JP6998285B2
JP6998285B2 JP2018192240A JP2018192240A JP6998285B2 JP 6998285 B2 JP6998285 B2 JP 6998285B2 JP 2018192240 A JP2018192240 A JP 2018192240A JP 2018192240 A JP2018192240 A JP 2018192240A JP 6998285 B2 JP6998285 B2 JP 6998285B2
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JP
Japan
Prior art keywords
magnetic field
magnetic
component
additional
correction
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JP2018192240A
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English (en)
Japanese (ja)
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JP2020060457A (ja
JP2020060457A5 (enExample
Inventor
司也 渡部
吉隆 奥津
将規 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Microdevices Corp
TDK Corp
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TDK Corp
Asahi Kasei EMD Corp
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Publication date
Application filed by TDK Corp, Asahi Kasei EMD Corp filed Critical TDK Corp
Priority to JP2018192240A priority Critical patent/JP6998285B2/ja
Priority to US16/587,299 priority patent/US10976383B2/en
Priority to DE102019126872.9A priority patent/DE102019126872A1/de
Priority to CN201910962464.3A priority patent/CN111044942B/zh
Publication of JP2020060457A publication Critical patent/JP2020060457A/ja
Publication of JP2020060457A5 publication Critical patent/JP2020060457A5/ja
Application granted granted Critical
Publication of JP6998285B2 publication Critical patent/JP6998285B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0029—Treating the measured signals, e.g. removing offset or noise
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0035—Calibration of single magnetic sensors, e.g. integrated calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0017—Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
JP2018192240A 2018-10-11 2018-10-11 磁気センサ装置 Active JP6998285B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2018192240A JP6998285B2 (ja) 2018-10-11 2018-10-11 磁気センサ装置
US16/587,299 US10976383B2 (en) 2018-10-11 2019-09-30 Magnetic sensor device
DE102019126872.9A DE102019126872A1 (de) 2018-10-11 2019-10-07 Magnetsensorvorrichtung
CN201910962464.3A CN111044942B (zh) 2018-10-11 2019-10-11 磁传感器装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018192240A JP6998285B2 (ja) 2018-10-11 2018-10-11 磁気センサ装置

Publications (3)

Publication Number Publication Date
JP2020060457A JP2020060457A (ja) 2020-04-16
JP2020060457A5 JP2020060457A5 (enExample) 2020-10-01
JP6998285B2 true JP6998285B2 (ja) 2022-02-10

Family

ID=69955836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018192240A Active JP6998285B2 (ja) 2018-10-11 2018-10-11 磁気センサ装置

Country Status (4)

Country Link
US (1) US10976383B2 (enExample)
JP (1) JP6998285B2 (enExample)
CN (1) CN111044942B (enExample)
DE (1) DE102019126872A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11550362B2 (en) 2021-03-31 2023-01-10 Microsoft Technology Licensing, Llc Rotatably coupled touch screen displays
US12228621B2 (en) * 2021-09-20 2025-02-18 Tdk Corporation Magnetic sensor device
DE102022124095A1 (de) 2021-09-21 2023-03-23 Tdk Corporation Magnetsensor-vorrichtung
DE102021210552B4 (de) * 2021-09-22 2023-05-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Vorrichtung und verfahren zum kalibrieren eines magnetsensorsystems mittels einer inhomogenen magnetfeldquelle
JP2023083648A (ja) * 2021-12-06 2023-06-16 Tdk株式会社 磁気センサ、電気制御装置、補正方法及び磁気センサの製造方法
JP7734098B2 (ja) * 2022-02-17 2025-09-04 Tdk株式会社 磁気センサ
JP2024010867A (ja) * 2022-07-13 2024-01-25 Tdk株式会社 磁気センサ装置および磁気式エンコーダ
JP7754339B2 (ja) * 2022-09-30 2025-10-15 株式会社村田製作所 センサ増幅回路、センサシステム、およびセンサ増幅回路の較正方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008123144A1 (ja) 2007-03-23 2008-10-16 Asahi Kasei Emd Corporation 磁気センサ及びその感度測定方法
JP2016017830A (ja) 2014-07-08 2016-02-01 旭化成エレクトロニクス株式会社 磁気センサ
US20180003777A1 (en) 2016-06-30 2018-01-04 The Charles Stark Draper Laboratory, Inc. Calibration and Monitoring for 3-Axis Magnetometer Arrays of Arbitrary Geometry

Family Cites Families (13)

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Publication number Priority date Publication date Assignee Title
FR2772133B1 (fr) * 1987-12-08 2000-04-07 Crouzet Sa Procede et dispositif de compensation des effets des perturbations magnetiques dues au porteur d'un magnetometre a champ total
JPH08179021A (ja) * 1994-12-22 1996-07-12 Ishikawa Seisakusho Ltd ３軸磁力計の磁気測定値の補正方法
CN101932942B (zh) * 2008-02-05 2014-01-29 株式会社村田制作所 测定误差的修正方法及电子元器件特性测定装置
US8350594B2 (en) * 2008-11-08 2013-01-08 Massachusetts Institute Of Technology Hardware synthesis from multicycle rules
ITMI20090972A1 (it) * 2009-06-03 2010-12-04 Consiglio Naz Delle Ricerche Infm Istituto Dispositivo sensore magnetico triassiale integrato.
DE102010029668A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Kalibrierung eines dreiachsigen Magnetfeldsensors
JP5177197B2 (ja) * 2010-10-13 2013-04-03 Ｔｄｋ株式会社 回転磁界センサ
US9581466B2 (en) * 2011-11-11 2017-02-28 Qualcomm Incorporated Sensor auto-calibration
CN102853760B (zh) * 2012-09-13 2015-06-17 哈尔滨工业大学 一种三轴磁传感器磁轴垂直度的标定方法
JP2015075465A (ja) 2013-10-11 2015-04-20 旭化成エレクトロニクス株式会社 ３次元磁界測定装置及び３次元磁界測定方法
US9720051B2 (en) * 2014-05-29 2017-08-01 Nxp Usa, Inc. Sensor package including a magnetic field sensor and a continuous coil structure for enabling z-axis self-test capability
US20170090003A1 (en) * 2015-09-30 2017-03-30 Apple Inc. Efficient testing of magnetometer sensor assemblies
JP6288482B1 (ja) * 2016-09-28 2018-03-07 Tdk株式会社 角度センサおよび角度センサシステム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008123144A1 (ja) 2007-03-23 2008-10-16 Asahi Kasei Emd Corporation 磁気センサ及びその感度測定方法
JP2016017830A (ja) 2014-07-08 2016-02-01 旭化成エレクトロニクス株式会社 磁気センサ
US20180003777A1 (en) 2016-06-30 2018-01-04 The Charles Stark Draper Laboratory, Inc. Calibration and Monitoring for 3-Axis Magnetometer Arrays of Arbitrary Geometry

Also Published As

Publication number Publication date
CN111044942A (zh) 2020-04-21
DE102019126872A1 (de) 2020-04-16
US20200116801A1 (en) 2020-04-16
CN111044942B (zh) 2022-08-05
JP2020060457A (ja) 2020-04-16
US10976383B2 (en) 2021-04-13

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