JP6975799B2 - 低解像度検査画像から高分解能点拡がり関数を再構築するシステム及び方法 - Google Patents

低解像度検査画像から高分解能点拡がり関数を再構築するシステム及び方法 Download PDF

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JP6975799B2
JP6975799B2 JP2019555412A JP2019555412A JP6975799B2 JP 6975799 B2 JP6975799 B2 JP 6975799B2 JP 2019555412 A JP2019555412 A JP 2019555412A JP 2019555412 A JP2019555412 A JP 2019555412A JP 6975799 B2 JP6975799 B2 JP 6975799B2
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JP2020503633A (ja
JP2020503633A5 (https=
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ヘレン リウ
ロヒト パトナイク
スティーブン オズボーン
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KLA Corp
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G06T3/4076—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution using the original low-resolution images to iteratively correct the high-resolution images
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G06T3/4069—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution by subpixel displacements
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/20—Image enhancement or restoration using local operators
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/70—Denoising; Smoothing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/73—Deblurring; Sharpening
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2211/00—Image generation
    • G06T2211/40—Computed tomography
    • G06T2211/416—Exact reconstruction

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP2019555412A 2016-12-27 2017-11-29 低解像度検査画像から高分解能点拡がり関数を再構築するシステム及び方法 Active JP6975799B2 (ja)

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Application Number Priority Date Filing Date Title
US15/391,520 US10217190B2 (en) 2016-12-27 2016-12-27 System and method for reconstructing high-resolution point spread functions from low-resolution inspection images
US15/391,520 2016-12-27
PCT/US2017/063750 WO2018125495A1 (en) 2016-12-27 2017-11-29 System and method for reconstructing high-resolution point spread functions from low-resolution inspection images

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JP2020503633A JP2020503633A (ja) 2020-01-30
JP2020503633A5 JP2020503633A5 (https=) 2021-01-14
JP6975799B2 true JP6975799B2 (ja) 2021-12-01

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US (1) US10217190B2 (https=)
JP (1) JP6975799B2 (https=)
KR (1) KR102321944B1 (https=)
CN (1) CN110121732B (https=)
IL (1) IL267423B (https=)
WO (1) WO2018125495A1 (https=)

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Also Published As

Publication number Publication date
JP2020503633A (ja) 2020-01-30
CN110121732A (zh) 2019-08-13
IL267423B (en) 2021-06-30
US10217190B2 (en) 2019-02-26
KR20190092605A (ko) 2019-08-07
CN110121732B (zh) 2021-02-09
IL267423A (en) 2019-08-29
WO2018125495A1 (en) 2018-07-05
US20180182067A1 (en) 2018-06-28
KR102321944B1 (ko) 2021-11-03

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