CN110121732B - 用于从低分辨率检验图像重建高分辨率点扩散函数的系统及方法 - Google Patents

用于从低分辨率检验图像重建高分辨率点扩散函数的系统及方法 Download PDF

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CN110121732B
CN110121732B CN201780081242.XA CN201780081242A CN110121732B CN 110121732 B CN110121732 B CN 110121732B CN 201780081242 A CN201780081242 A CN 201780081242A CN 110121732 B CN110121732 B CN 110121732B
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resolution
psf
inspection
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CN110121732A (zh
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海伦·刘
R·帕奈克
S·奥斯本
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KLA Corp
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KLA Tencor Corp
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G06T3/4076—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution using the original low-resolution images to iteratively correct the high-resolution images
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G06T3/4069—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution by subpixel displacements
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/20—Image enhancement or restoration using local operators
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/70—Denoising; Smoothing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/73—Deblurring; Sharpening
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2211/00—Image generation
    • G06T2211/40—Computed tomography
    • G06T2211/416—Exact reconstruction

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
CN201780081242.XA 2016-12-27 2017-11-29 用于从低分辨率检验图像重建高分辨率点扩散函数的系统及方法 Active CN110121732B (zh)

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Application Number Priority Date Filing Date Title
US15/391,520 US10217190B2 (en) 2016-12-27 2016-12-27 System and method for reconstructing high-resolution point spread functions from low-resolution inspection images
US15/391,520 2016-12-27
PCT/US2017/063750 WO2018125495A1 (en) 2016-12-27 2017-11-29 System and method for reconstructing high-resolution point spread functions from low-resolution inspection images

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CN110121732A CN110121732A (zh) 2019-08-13
CN110121732B true CN110121732B (zh) 2021-02-09

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US (1) US10217190B2 (https=)
JP (1) JP6975799B2 (https=)
KR (1) KR102321944B1 (https=)
CN (1) CN110121732B (https=)
IL (1) IL267423B (https=)
WO (1) WO2018125495A1 (https=)

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JP2020503633A (ja) 2020-01-30
JP6975799B2 (ja) 2021-12-01
CN110121732A (zh) 2019-08-13
IL267423B (en) 2021-06-30
US10217190B2 (en) 2019-02-26
KR20190092605A (ko) 2019-08-07
IL267423A (en) 2019-08-29
WO2018125495A1 (en) 2018-07-05
US20180182067A1 (en) 2018-06-28
KR102321944B1 (ko) 2021-11-03

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