KR102321944B1 - 저해상도 검사 이미지들로부터 고해상도 점 확산 함수들을 재구성하기 위한 시스템 및 방법 - Google Patents

저해상도 검사 이미지들로부터 고해상도 점 확산 함수들을 재구성하기 위한 시스템 및 방법 Download PDF

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KR102321944B1
KR102321944B1 KR1020197022208A KR20197022208A KR102321944B1 KR 102321944 B1 KR102321944 B1 KR 102321944B1 KR 1020197022208 A KR1020197022208 A KR 1020197022208A KR 20197022208 A KR20197022208 A KR 20197022208A KR 102321944 B1 KR102321944 B1 KR 102321944B1
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헬렌 리우
로힛 파트나크
스테판 오스본
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케이엘에이 코포레이션
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G06T3/4076—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution using the original low-resolution images to iteratively correct the high-resolution images
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G06T3/4069—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution by subpixel displacements
    • G06T5/003—
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/20—Image enhancement or restoration using local operators
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/70—Denoising; Smoothing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/73—Deblurring; Sharpening
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2211/00—Image generation
    • G06T2211/40—Computed tomography
    • G06T2211/416—Exact reconstruction

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
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KR1020197022208A 2016-12-27 2017-11-29 저해상도 검사 이미지들로부터 고해상도 점 확산 함수들을 재구성하기 위한 시스템 및 방법 Active KR102321944B1 (ko)

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US15/391,520 US10217190B2 (en) 2016-12-27 2016-12-27 System and method for reconstructing high-resolution point spread functions from low-resolution inspection images
US15/391,520 2016-12-27
PCT/US2017/063750 WO2018125495A1 (en) 2016-12-27 2017-11-29 System and method for reconstructing high-resolution point spread functions from low-resolution inspection images

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KR20190092605A KR20190092605A (ko) 2019-08-07
KR102321944B1 true KR102321944B1 (ko) 2021-11-03

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US (1) US10217190B2 (https=)
JP (1) JP6975799B2 (https=)
KR (1) KR102321944B1 (https=)
CN (1) CN110121732B (https=)
IL (1) IL267423B (https=)
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KR102888847B1 (ko) 2020-01-09 2025-11-19 주식회사 히타치하이테크 화상을 생성하는 시스템, 및 비일시적 컴퓨터 가독 매체
US11343440B1 (en) 2021-02-05 2022-05-24 Samsung Electronics Company, Ltd. High dynamic range point spread function generation for image reconstruction
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JP2020503633A (ja) 2020-01-30
JP6975799B2 (ja) 2021-12-01
CN110121732A (zh) 2019-08-13
IL267423B (en) 2021-06-30
US10217190B2 (en) 2019-02-26
KR20190092605A (ko) 2019-08-07
CN110121732B (zh) 2021-02-09
IL267423A (en) 2019-08-29
WO2018125495A1 (en) 2018-07-05
US20180182067A1 (en) 2018-06-28

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