JP6971646B2 - 共焦点変位計 - Google Patents

共焦点変位計 Download PDF

Info

Publication number
JP6971646B2
JP6971646B2 JP2017115555A JP2017115555A JP6971646B2 JP 6971646 B2 JP6971646 B2 JP 6971646B2 JP 2017115555 A JP2017115555 A JP 2017115555A JP 2017115555 A JP2017115555 A JP 2017115555A JP 6971646 B2 JP6971646 B2 JP 6971646B2
Authority
JP
Japan
Prior art keywords
light
optical fiber
emitted
displacement meter
fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017115555A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019002723A (ja
JP2019002723A5 (enExample
Inventor
英人 武井
富一 坂口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keyence Corp
Original Assignee
Keyence Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keyence Corp filed Critical Keyence Corp
Priority to JP2017115555A priority Critical patent/JP6971646B2/ja
Priority to US15/981,924 priority patent/US10161740B1/en
Priority to DE102018209322.9A priority patent/DE102018209322A1/de
Priority to CN201810607417.2A priority patent/CN109084684B/zh
Publication of JP2019002723A publication Critical patent/JP2019002723A/ja
Publication of JP2019002723A5 publication Critical patent/JP2019002723A5/ja
Application granted granted Critical
Publication of JP6971646B2 publication Critical patent/JP6971646B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP2017115555A 2017-06-13 2017-06-13 共焦点変位計 Active JP6971646B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017115555A JP6971646B2 (ja) 2017-06-13 2017-06-13 共焦点変位計
US15/981,924 US10161740B1 (en) 2017-06-13 2018-05-17 Confocal displacement sensor
DE102018209322.9A DE102018209322A1 (de) 2017-06-13 2018-06-12 Konfokaler Verschiebungssensor
CN201810607417.2A CN109084684B (zh) 2017-06-13 2018-06-13 共焦位移传感器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017115555A JP6971646B2 (ja) 2017-06-13 2017-06-13 共焦点変位計

Publications (3)

Publication Number Publication Date
JP2019002723A JP2019002723A (ja) 2019-01-10
JP2019002723A5 JP2019002723A5 (enExample) 2020-08-06
JP6971646B2 true JP6971646B2 (ja) 2021-11-24

Family

ID=64332735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017115555A Active JP6971646B2 (ja) 2017-06-13 2017-06-13 共焦点変位計

Country Status (4)

Country Link
US (1) US10161740B1 (enExample)
JP (1) JP6971646B2 (enExample)
CN (1) CN109084684B (enExample)
DE (1) DE102018209322A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015199054A1 (ja) * 2014-06-27 2015-12-30 株式会社キーエンス 多波長光電測定装置、共焦点測定装置、干渉測定装置及びカラー測定装置
DE112016005953T5 (de) 2015-12-25 2018-10-04 Keyence Corporation Konfokaler verschiebungssensor
CN108474646B (zh) 2015-12-25 2021-07-23 株式会社基恩士 共焦位移计
JP6939360B2 (ja) * 2017-10-02 2021-09-22 オムロン株式会社 共焦点計測装置
JP7064167B2 (ja) * 2018-01-18 2022-05-10 オムロン株式会社 光学計測装置及び光学計測方法
JP6969459B2 (ja) * 2018-03-15 2021-11-24 オムロン株式会社 センサヘッド
JP7062518B2 (ja) * 2018-05-25 2022-05-06 株式会社キーエンス 共焦点変位計
WO2020044860A1 (ja) * 2018-08-28 2020-03-05 ソニー株式会社 分光イメージング装置および蛍光観察装置
CN110044286B (zh) * 2019-04-15 2021-03-05 清华大学深圳研究生院 一种光谱共焦轴向距离检测方法、装置及设备
CN113686439A (zh) * 2021-08-24 2021-11-23 熵智科技(深圳)有限公司 一种线光谱共焦传感器
KR102633654B1 (ko) 2021-09-29 2024-02-06 한국과학기술연구원 광섬유 기반의 센서 모듈 및 이를 구비한 변형 센서 장치
CN116295029B (zh) * 2023-02-16 2024-11-05 哈尔滨工业大学 倾斜耦合式光纤光谱共焦位移测量方法及装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0588041A (ja) * 1991-09-30 1993-04-09 Nippon Telegr & Teleph Corp <Ntt> 光フアイバの光学接続回路
US5785661A (en) * 1994-08-17 1998-07-28 Decibel Instruments, Inc. Highly configurable hearing aid
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
US5737084A (en) * 1995-09-29 1998-04-07 Takaoka Electric Mtg. Co., Ltd. Three-dimensional shape measuring apparatus
JP3350918B2 (ja) * 1996-03-26 2002-11-25 株式会社高岳製作所 ２次元配列型共焦点光学装置
EP1139128A3 (en) * 2000-03-24 2004-01-28 Tyco Electronics Corporation Shielded optical connector
US7477401B2 (en) * 2004-11-24 2009-01-13 Tamar Technology, Inc. Trench measurement system employing a chromatic confocal height sensor and a microscope
JP2008032999A (ja) * 2006-07-28 2008-02-14 Shinka Jitsugyo Kk 光ファイバデバイスと、その出射方向調整方法と、スイッチング方法およびスイッチング機構と、光学特性検査方法および光学特性検査システム
US8454512B2 (en) * 2007-10-25 2013-06-04 Washington University Confocal photoacoustic microscopy with optical lateral resolution
US8096676B2 (en) * 2008-10-21 2012-01-17 Mitutoyo Corporation High intensity pulsed light source configurations
TWI490444B (zh) * 2009-01-23 2015-07-01 Univ Nat Taipei Technology 線型多波長共焦顯微方法與系統
JP5520036B2 (ja) * 2009-07-16 2014-06-11 株式会社ミツトヨ 光学式変位計
US20110104388A1 (en) * 2009-11-02 2011-05-05 Harris Corporation Method for making an optical device including a curable index matching elastomeric solid layer
TWI414817B (zh) * 2010-07-23 2013-11-11 Univ Nat Taipei Technology 線型彩色共焦顯微系統
US8104974B1 (en) * 2010-07-30 2012-01-31 Tyco Electronics Corporation Mating of optical fibers having angled end faces
JP5790178B2 (ja) * 2011-03-14 2015-10-07 オムロン株式会社 共焦点計測装置
WO2013011778A1 (ja) * 2011-07-15 2013-01-24 オリンパスメディカルシステムズ株式会社 プローブ
CA2850068A1 (en) * 2011-09-27 2013-04-04 British Columbia Cancer Agency Branch Scanning optical systems
JP2013156163A (ja) * 2012-01-30 2013-08-15 Olympus Corp 光学式センサ
US8928874B2 (en) * 2012-02-24 2015-01-06 Mitutoyo Corporation Method for identifying abnormal spectral profiles measured by a chromatic confocal range sensor
DE102013015931B4 (de) * 2013-09-19 2024-05-08 Carl Zeiss Microscopy Gmbh Mikroskop und Verfahren zur hochauflösenden Scanning-Mikroskope
US9541376B2 (en) * 2015-03-02 2017-01-10 Mitutoyo Corporation Chromatic confocal sensor and measurement method

Also Published As

Publication number Publication date
US20180356207A1 (en) 2018-12-13
JP2019002723A (ja) 2019-01-10
US10161740B1 (en) 2018-12-25
CN109084684A (zh) 2018-12-25
DE102018209322A1 (de) 2018-12-13
CN109084684B (zh) 2022-01-11

Similar Documents

Publication Publication Date Title
JP6971646B2 (ja) 共焦点変位計
JP6971645B2 (ja) 共焦点変位計
US10267621B2 (en) Confocal displacement sensor
US10473455B2 (en) Confocal displacement sensor
KR101423338B1 (ko) 피측정물로부터의 반사광을 이용하는 광학 특성 측정 장치 및 광학 특성 측정 방법
US7791712B2 (en) Chromatic confocal sensor fiber interface
JP2020079807A (ja) 共焦点変位計
US20130321906A1 (en) Annulus to create distinct illumination and imaging apertures for an imaging system
US9810873B2 (en) Method and device for measuring alignment of an optical surface of a lens block
JP7076954B2 (ja) 共焦点変位計
JP6654893B2 (ja) 共焦点変位計
JP2000261836A (ja) 光学プローブアッセンブリを較正する方法及び装置
JP6875489B2 (ja) 共焦点変位計
JP2006202665A (ja) 光源装置
JP2000258829A (ja) カメラにおける第１の基準面と第２の基準面との間の物理的な間隔を測定するための方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200326

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200326

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200611

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210301

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210311

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210423

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20211013

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20211102

R150 Certificate of patent or registration of utility model

Ref document number: 6971646

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150