CN109084684B - 共焦位移传感器 - Google Patents

共焦位移传感器 Download PDF

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Publication number
CN109084684B
CN109084684B CN201810607417.2A CN201810607417A CN109084684B CN 109084684 B CN109084684 B CN 109084684B CN 201810607417 A CN201810607417 A CN 201810607417A CN 109084684 B CN109084684 B CN 109084684B
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CN
China
Prior art keywords
optical fiber
light
displacement sensor
face
measurement object
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CN201810607417.2A
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English (en)
Chinese (zh)
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CN109084684A (zh
Inventor
武井英人
坂口富一
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Keyence Corp
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Keyence Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
CN201810607417.2A 2017-06-13 2018-06-13 共焦位移传感器 Active CN109084684B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017115555A JP6971646B2 (ja) 2017-06-13 2017-06-13 共焦点変位計
JP2017-115555 2017-06-13

Publications (2)

Publication Number Publication Date
CN109084684A CN109084684A (zh) 2018-12-25
CN109084684B true CN109084684B (zh) 2022-01-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810607417.2A Active CN109084684B (zh) 2017-06-13 2018-06-13 共焦位移传感器

Country Status (4)

Country Link
US (1) US10161740B1 (enExample)
JP (1) JP6971646B2 (enExample)
CN (1) CN109084684B (enExample)
DE (1) DE102018209322A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015199054A1 (ja) * 2014-06-27 2015-12-30 株式会社キーエンス 多波長光電測定装置、共焦点測定装置、干渉測定装置及びカラー測定装置
DE112016005953T5 (de) 2015-12-25 2018-10-04 Keyence Corporation Konfokaler verschiebungssensor
CN108474646B (zh) 2015-12-25 2021-07-23 株式会社基恩士 共焦位移计
JP6939360B2 (ja) * 2017-10-02 2021-09-22 オムロン株式会社 共焦点計測装置
JP7064167B2 (ja) * 2018-01-18 2022-05-10 オムロン株式会社 光学計測装置及び光学計測方法
JP6969459B2 (ja) * 2018-03-15 2021-11-24 オムロン株式会社 センサヘッド
JP7062518B2 (ja) * 2018-05-25 2022-05-06 株式会社キーエンス 共焦点変位計
WO2020044860A1 (ja) * 2018-08-28 2020-03-05 ソニー株式会社 分光イメージング装置および蛍光観察装置
CN110044286B (zh) * 2019-04-15 2021-03-05 清华大学深圳研究生院 一种光谱共焦轴向距离检测方法、装置及设备
CN113686439A (zh) * 2021-08-24 2021-11-23 熵智科技(深圳)有限公司 一种线光谱共焦传感器
KR102633654B1 (ko) 2021-09-29 2024-02-06 한국과학기술연구원 광섬유 기반의 센서 모듈 및 이를 구비한 변형 센서 장치
CN116295029B (zh) * 2023-02-16 2024-11-05 哈尔滨工业大学 倾斜耦合式光纤光谱共焦位移测量方法及装置

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US5785661A (en) * 1994-08-17 1998-07-28 Decibel Instruments, Inc. Highly configurable hearing aid
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US5737084A (en) * 1995-09-29 1998-04-07 Takaoka Electric Mtg. Co., Ltd. Three-dimensional shape measuring apparatus
JP3350918B2 (ja) * 1996-03-26 2002-11-25 株式会社高岳製作所 ２次元配列型共焦点光学装置
EP1139128A3 (en) * 2000-03-24 2004-01-28 Tyco Electronics Corporation Shielded optical connector
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US8096676B2 (en) * 2008-10-21 2012-01-17 Mitutoyo Corporation High intensity pulsed light source configurations
TWI490444B (zh) * 2009-01-23 2015-07-01 Univ Nat Taipei Technology 線型多波長共焦顯微方法與系統
JP5520036B2 (ja) * 2009-07-16 2014-06-11 株式会社ミツトヨ 光学式変位計
US20110104388A1 (en) * 2009-11-02 2011-05-05 Harris Corporation Method for making an optical device including a curable index matching elastomeric solid layer
TWI414817B (zh) * 2010-07-23 2013-11-11 Univ Nat Taipei Technology 線型彩色共焦顯微系統
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JP5790178B2 (ja) * 2011-03-14 2015-10-07 オムロン株式会社 共焦点計測装置
WO2013011778A1 (ja) * 2011-07-15 2013-01-24 オリンパスメディカルシステムズ株式会社 プローブ
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US9541376B2 (en) * 2015-03-02 2017-01-10 Mitutoyo Corporation Chromatic confocal sensor and measurement method

Also Published As

Publication number Publication date
US20180356207A1 (en) 2018-12-13
JP2019002723A (ja) 2019-01-10
US10161740B1 (en) 2018-12-25
CN109084684A (zh) 2018-12-25
JP6971646B2 (ja) 2021-11-24
DE102018209322A1 (de) 2018-12-13

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