JP2019002723A5 - - Google Patents
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- Publication number
- JP2019002723A5 JP2019002723A5 JP2017115555A JP2017115555A JP2019002723A5 JP 2019002723 A5 JP2019002723 A5 JP 2019002723A5 JP 2017115555 A JP2017115555 A JP 2017115555A JP 2017115555 A JP2017115555 A JP 2017115555A JP 2019002723 A5 JP2019002723 A5 JP 2019002723A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- displacement meter
- meter according
- optical fiber
- confocal displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims 10
- 238000005259 measurement Methods 0.000 claims 7
- 239000013307 optical fiber Substances 0.000 claims 6
- 238000001514 detection method Methods 0.000 claims 4
- 239000000835 fiber Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 230000004075 alteration Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017115555A JP6971646B2 (ja) | 2017-06-13 | 2017-06-13 | 共焦点変位計 |
| US15/981,924 US10161740B1 (en) | 2017-06-13 | 2018-05-17 | Confocal displacement sensor |
| DE102018209322.9A DE102018209322A1 (de) | 2017-06-13 | 2018-06-12 | Konfokaler Verschiebungssensor |
| CN201810607417.2A CN109084684B (zh) | 2017-06-13 | 2018-06-13 | 共焦位移传感器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017115555A JP6971646B2 (ja) | 2017-06-13 | 2017-06-13 | 共焦点変位計 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019002723A JP2019002723A (ja) | 2019-01-10 |
| JP2019002723A5 true JP2019002723A5 (enExample) | 2020-08-06 |
| JP6971646B2 JP6971646B2 (ja) | 2021-11-24 |
Family
ID=64332735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017115555A Active JP6971646B2 (ja) | 2017-06-13 | 2017-06-13 | 共焦点変位計 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10161740B1 (enExample) |
| JP (1) | JP6971646B2 (enExample) |
| CN (1) | CN109084684B (enExample) |
| DE (1) | DE102018209322A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015199054A1 (ja) * | 2014-06-27 | 2015-12-30 | 株式会社キーエンス | 多波長光電測定装置、共焦点測定装置、干渉測定装置及びカラー測定装置 |
| DE112016005953T5 (de) | 2015-12-25 | 2018-10-04 | Keyence Corporation | Konfokaler verschiebungssensor |
| CN108474646B (zh) | 2015-12-25 | 2021-07-23 | 株式会社基恩士 | 共焦位移计 |
| JP6939360B2 (ja) * | 2017-10-02 | 2021-09-22 | オムロン株式会社 | 共焦点計測装置 |
| JP7064167B2 (ja) * | 2018-01-18 | 2022-05-10 | オムロン株式会社 | 光学計測装置及び光学計測方法 |
| JP6969459B2 (ja) * | 2018-03-15 | 2021-11-24 | オムロン株式会社 | センサヘッド |
| JP7062518B2 (ja) * | 2018-05-25 | 2022-05-06 | 株式会社キーエンス | 共焦点変位計 |
| WO2020044860A1 (ja) * | 2018-08-28 | 2020-03-05 | ソニー株式会社 | 分光イメージング装置および蛍光観察装置 |
| CN110044286B (zh) * | 2019-04-15 | 2021-03-05 | 清华大学深圳研究生院 | 一种光谱共焦轴向距离检测方法、装置及设备 |
| CN113686439A (zh) * | 2021-08-24 | 2021-11-23 | 熵智科技(深圳)有限公司 | 一种线光谱共焦传感器 |
| KR102633654B1 (ko) | 2021-09-29 | 2024-02-06 | 한국과학기술연구원 | 광섬유 기반의 센서 모듈 및 이를 구비한 변형 센서 장치 |
| CN116295029B (zh) * | 2023-02-16 | 2024-11-05 | 哈尔滨工业大学 | 倾斜耦合式光纤光谱共焦位移测量方法及装置 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0588041A (ja) * | 1991-09-30 | 1993-04-09 | Nippon Telegr & Teleph Corp <Ntt> | 光フアイバの光学接続回路 |
| US5785661A (en) * | 1994-08-17 | 1998-07-28 | Decibel Instruments, Inc. | Highly configurable hearing aid |
| US5785651A (en) * | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
| US5737084A (en) * | 1995-09-29 | 1998-04-07 | Takaoka Electric Mtg. Co., Ltd. | Three-dimensional shape measuring apparatus |
| JP3350918B2 (ja) * | 1996-03-26 | 2002-11-25 | 株式会社高岳製作所 | 2次元配列型共焦点光学装置 |
| EP1139128A3 (en) * | 2000-03-24 | 2004-01-28 | Tyco Electronics Corporation | Shielded optical connector |
| US7477401B2 (en) * | 2004-11-24 | 2009-01-13 | Tamar Technology, Inc. | Trench measurement system employing a chromatic confocal height sensor and a microscope |
| JP2008032999A (ja) * | 2006-07-28 | 2008-02-14 | Shinka Jitsugyo Kk | 光ファイバデバイスと、その出射方向調整方法と、スイッチング方法およびスイッチング機構と、光学特性検査方法および光学特性検査システム |
| US8454512B2 (en) * | 2007-10-25 | 2013-06-04 | Washington University | Confocal photoacoustic microscopy with optical lateral resolution |
| US8096676B2 (en) * | 2008-10-21 | 2012-01-17 | Mitutoyo Corporation | High intensity pulsed light source configurations |
| TWI490444B (zh) * | 2009-01-23 | 2015-07-01 | Univ Nat Taipei Technology | 線型多波長共焦顯微方法與系統 |
| JP5520036B2 (ja) * | 2009-07-16 | 2014-06-11 | 株式会社ミツトヨ | 光学式変位計 |
| US20110104388A1 (en) * | 2009-11-02 | 2011-05-05 | Harris Corporation | Method for making an optical device including a curable index matching elastomeric solid layer |
| TWI414817B (zh) * | 2010-07-23 | 2013-11-11 | Univ Nat Taipei Technology | 線型彩色共焦顯微系統 |
| US8104974B1 (en) * | 2010-07-30 | 2012-01-31 | Tyco Electronics Corporation | Mating of optical fibers having angled end faces |
| JP5790178B2 (ja) * | 2011-03-14 | 2015-10-07 | オムロン株式会社 | 共焦点計測装置 |
| WO2013011778A1 (ja) * | 2011-07-15 | 2013-01-24 | オリンパスメディカルシステムズ株式会社 | プローブ |
| CA2850068A1 (en) * | 2011-09-27 | 2013-04-04 | British Columbia Cancer Agency Branch | Scanning optical systems |
| JP2013156163A (ja) * | 2012-01-30 | 2013-08-15 | Olympus Corp | 光学式センサ |
| US8928874B2 (en) * | 2012-02-24 | 2015-01-06 | Mitutoyo Corporation | Method for identifying abnormal spectral profiles measured by a chromatic confocal range sensor |
| DE102013015931B4 (de) * | 2013-09-19 | 2024-05-08 | Carl Zeiss Microscopy Gmbh | Mikroskop und Verfahren zur hochauflösenden Scanning-Mikroskope |
| US9541376B2 (en) * | 2015-03-02 | 2017-01-10 | Mitutoyo Corporation | Chromatic confocal sensor and measurement method |
-
2017
- 2017-06-13 JP JP2017115555A patent/JP6971646B2/ja active Active
-
2018
- 2018-05-17 US US15/981,924 patent/US10161740B1/en active Active
- 2018-06-12 DE DE102018209322.9A patent/DE102018209322A1/de not_active Withdrawn
- 2018-06-13 CN CN201810607417.2A patent/CN109084684B/zh active Active
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